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Document and Entity Information - shares	3 Months Ended
Document and Entity Information - shares	Mar. 31, 2014	Apr. 30, 2014
Document And Entity Information [Abstract]
Document Type	10-Q
Amendment Flag	false
Document Period End Date	Mar. 31, 2014
Document Fiscal Year Focus	2014
Document Fiscal Period Focus	Q1
Trading Symbol	MKSI
Entity Registrant Name	MKS INSTRUMENTS INC
Entity Central Index Key	0001049502
Current Fiscal Year End Date	--12-31
Entity Filer Category	Large Accelerated Filer
Entity Common Stock, Shares Outstanding		53,535,421

Consolidated Balance Sheets - USD ($) $ in Thousands	Mar. 31, 2014	Dec. 31, 2013
Current assets:
Cash and cash equivalents	$ 287,090	$ 288,902
Short-term investments	306,513	300,715
Trade accounts receivable, net	119,463	116,744
Inventories	147,511	142,727
Deferred income taxes	16,053	13,428
Other current assets	17,552	16,715
Assets classified as held for sale	1,427
Total current assets	895,609	879,231
Property, plant and equipment, net	75,517	77,536
Long-term investments	53,620	60,405
Goodwill	151,112	150,909
Intangible assets, net	12,519	13,090
Other assets	34,383	31,847
Total assets	1,222,760	1,213,018
Current liabilities:
Accounts payable	35,385	40,074
Accrued compensation	35,763	43,662
Income taxes payable	8,620	10,444
Other current liabilities	36,442	34,242
Total current liabilities	116,210	128,422
Other liabilities	60,782	63,073
Commitments and contingencies (Note 18)
Stockholders' equity:
Preferred Stock, $0.01 par value per share, 2,000,000 shares authorized; none issued and outstanding
Common Stock, no par value, 200,000,000 shares authorized; 53,456,493 and 53,363,450 shares issued and outstanding at March 31, 2014 and December 31, 2013, respectively	113	113
Additional paid-in capital	732,741	730,571
Retained earnings	301,147	278,966
Accumulated other comprehensive income	11,767	11,873
Total stockholders' equity	1,045,768	1,021,523
Total liabilities and stockholders' equity	$ 1,222,760	$ 1,213,018

Consolidated Balance Sheets (Parenthetical) - $ / shares	Mar. 31, 2014	Dec. 31, 2013
Statement Of Financial Position [Abstract]
Preferred Stock, par value	$ 0.01	$ 0.01
Preferred Stock, shares authorized	2,000,000	2,000,000
Preferred Stock, shares issued	0	0
Preferred Stock, shares outstanding	0	0
Common Stock, par value	$ 0	$ 0
Common Stock, shares authorized	200,000,000	200,000,000
Common Stock, shares issued	53,456,493	53,363,450
Common Stock, shares outstanding	53,456,493	53,363,450

Consolidated Statements of Operations and Comprehensive Income - USD ($)
shares in Thousands, $ in Thousands

3 Months Ended

Mar. 31, 2014

Mar. 31, 2013

Net revenues:

Products

$ 181,186

$ 116,611

Services

25,167

25,034

Total net revenues

206,353

141,645

Cost of revenues:

Cost of products

100,211

70,575

Cost of services

16,770

16,368

Total cost of revenues

116,981

86,943

Gross profit

89,372

54,702

Research and development

15,618

15,248

Selling, general and administrative

34,591

34,133

Acquisition costs

228

171

Restructuring

747

Amortization of intangible assets

410

434

Income from operations

37,778

4,676

Interest income

252

305

Interest expense

Income before income taxes

38,013

4,967

Provision (benefit) for income taxes

6,768

(794)

Net income

31,245

5,761

Other comprehensive income (loss):

Changes in value of financial instruments designated as cash flow hedges, net of tax (benefit) expense

^[1]

(163)

1,011

Foreign currency translation adjustments, net of tax of $0 for the three months ended March 31, 2014 and 2013

(8,340)

Unrealized gain (loss) on investments, net of tax expense (benefit)

^[2]

(16)

Total comprehensive income (loss)

$ 31,139

$ (1,584)

Net income per share:

Basic

$ 0.58

$ 0.11

Diluted

0.58

0.11

Cash dividends per common share

$ 0.16

Weighted average common shares outstanding:

Basic

53,411

52,773

Diluted

53,776

53,359

[1]	Tax (benefit) expense was $(108) and $605 for the three months ended March 31, 2014 and 2013, respectively.
[2]	Tax expense (benefit) was $24 and $(10) for the three months ended March 31, 2014 and 2013, respectively.

Consolidated Statements of Operations and Comprehensive Income (Parenthetical) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2014	Mar. 31, 2013
Income Statement [Abstract]
Tax (benefit) expense on changes in value of financial instruments designated as cash flow hedges	$ (108)	$ 605
Tax on foreign currency translation adjustments	0	0
Tax (benefit) expense on unrealized gain (loss) on investments	$ 24	$ (10)

Consolidated Statements of Cash Flows - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2014	Mar. 31, 2013
Cash flows from operating activities:
Net income	$ 31,245	$ 5,761
Adjustments to reconcile net income to net cash provided by operating activities:
Depreciation and amortization	4,150	4,092
Stock-based compensation	3,198	3,798
Provision for excess and obsolete inventory	2,613	3,161
Provision for bad debt	94	969
Deferred income taxes	(3,974)	1,228
Excess tax benefits from stock-based compensation	(189)	(199)
Other	(141)	(33)
Changes in operating assets and liabilities:
Trade accounts receivable	(2,784)	(10,348)
Inventories	(7,402)	(347)
Income taxes	(5,462)	(3,253)
Other current assets	(1,286)	(1,801)
Accrued compensation	(6,872)	(2,271)
Other current liabilities	2,512	(2,613)
Accounts payable	(4,656)	4,512
Other non-current assets	(1,143)	(193)
Net cash provided by operating activities	9,903	2,463
Cash flows from investing activities:
Acquisition of businesses, net of cash acquired		(1,963)
Purchases of investments	(128,524)	(88,525)
Maturities of investments	104,623	84,145
Sales of investments	24,948	2,371
Purchases of property, plant and equipment	(3,098)	(3,356)
Other	79	130
Net cash used in investing activities	(1,972)	(7,198)
Cash flows from financing activities:
Proceeds from short-term borrowings		6
Repurchase of common stock	(945)	(1,668)
Net payments related to employee stock awards	(762)	(1,251)
Dividend payments to common stockholders	(8,553)	(8,448)
Excess tax benefits from stock-based compensation	189	199
Net cash used in financing activities	(10,071)	(11,162)
Effect of exchange rate changes on cash and cash equivalents	328	(4,983)
Decrease in cash and cash equivalents	(1,812)	(20,880)
Cash and cash equivalents at beginning of period	288,902	287,588
Cash and cash equivalents at end of period	$ 287,090	$ 266,708

Basis of Presentation

3 Months Ended

Mar. 31, 2014

Accounting Policies [Abstract]

Basis of Presentation

The terms “MKS” and the “Company” refer to MKS Instruments, Inc. and its subsidiaries. The interim financial data as of March 31, 2014 and for the three months ended March 31, 2014 and 2013 are unaudited; however, in the opinion of MKS, the interim data includes all adjustments, consisting only of normal recurring adjustments, necessary for a fair statement of the results for the interim periods. The consolidated balance sheet presented as of December 31, 2013 has been derived from the audited consolidated financial statements as of that date. The unaudited consolidated financial statements presented herein have been prepared in accordance with the instructions to Form 10-Q and do not include all of the information and note disclosures required by United States generally accepted accounting principles (“U.S. GAAP”). The consolidated financial statements should be read in conjunction with the audited consolidated financial statements and notes thereto included in the MKS Annual Report on Form 10-K for the year ended December 31, 2013 filed with the Securities and Exchange Commission on February 26, 2014.

The preparation of these consolidated financial statements requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and the disclosure of contingent liabilities at the date of the consolidated financial statements and the reported amounts of revenues and expenses during the reporting period. On an on-going basis, management evaluates its estimates and judgments, including those related to revenue recognition, stock-based compensation, inventory, intangible assets, goodwill and other long-lived assets, acquisition expenses, income taxes and investments. Management bases its estimates and judgments on historical experience and on various other factors that are believed to be reasonable under the circumstances, the results of which form the basis for making judgments about the carrying values of assets and liabilities that are not readily apparent from other sources. Actual results may differ from these estimates under different assumptions or conditions.

- Definition

The entire disclosure for organization, consolidation and basis of presentation of financial statements disclosure.

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+ Details

Recently Issued Accounting Pronouncements

3 Months Ended

Mar. 31, 2014

Accounting Changes And Error Corrections [Abstract]

Recently Issued Accounting Pronouncements

On July 18, 2013, the Financial Accounting Standards Board issued Accounting Standards Update (“ASU”) 2013-11, “Income Taxes (Topic 740): Presentation of an Unrecognized Tax Benefit When a Net Operating Loss Carryforward, a Similar Tax Loss, or a Tax Credit Carryforward Exists.” Under the new standard, unrecognized tax benefits will be netted against all available same-jurisdiction loss or other tax carryforwards that would be utilized, rather than only against carryforwards that are created by unrecognized tax benefits. The provisions of this ASU are effective for interim and annual periods beginning on or after December 15, 2013. The adoption of ASU No. 2013-11 did not have a material effect on the Company’s consolidated financial statements.

- Definition

The entire disclosure of changes in accounting principles, including adoption of new accounting pronouncements, that describes the new methods, amount and effects on financial statement line items.

+ References

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-Subparagraph 6
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+ Details

Investments

3 Months Ended

Mar. 31, 2014

Investments Debt And Equity Securities [Abstract]

Investments

The fair value of short-term investments with maturities or estimated lives of less than one year consists of the following:


	March 31, 2014		December 31, 2013
Available-for-sale investments:
Bankers’ acceptance drafts	$	637	$	491
Time deposits		3,442		3,439
Commercial paper and certificates of deposit		127,524		114,984
Corporate obligations		16,826		18,351
U.S. agency obligations		158,084		162,450

		306,513		299,715
Trading investments:
Mutual funds		—		1,000

	$	306,513	$	300,715

The fair value of long-term investments with maturities of more than one year consists of the following:


	March 31, 2014		December 31, 2013
Available-for-sale investments:
Time deposits	$	54	$	54
U.S. agency obligations		53,566		60,351

	$	53,620	$	60,405

The following tables show the gross unrealized gains and (losses) aggregated by investment category for short-term and long-term available-for-sale investments:


As of March 31, 2014:	Cost		Gross Unrealized Gains		Gross Unrealized (Losses)			Estimated Fair Value
Short-term investments:
Bankers’ acceptance drafts	$	637	$	—	$	—		$	637
Time deposits		3,442		—		—			3,442
Commercial paper and certificates of deposit		127,514		14		(4	)		127,524
Corporate obligations		16,827		1		(2	)		16,826
U.S. agency obligations		158,044		48		(8	)		158,084

	$	306,464	$	63	$	(14	)	$	306,513

Long-term investments:
Time deposits	$	54	$	—	$	—		$	54
U.S. agency obligations		53,558		18		(10	)		53,566

	$	53,612	$	18	$	(10	)	$	53,620


As of December 31, 2013:	Cost		Gross Unrealized Gains		Gross Unrealized (Losses)			Estimated Fair Value
Short-term investments:
Available-for-sale investments:
Time deposits	$	3,439	$	—	$	—		$	3,439
Bankers’ acceptance drafts		491		—		—			491
Commercial paper and certificates of deposit		114,973		15		(4	)		114,984
Corporate obligations		18,360		—		(9	)		18,351
U.S. agency obligations		162,430		22		(2	)		162,450

	$	299,693	$	37	$	(15	)	$	299,715

Long-term investments:
Time Deposits	$	54	$	—	$	—		$	54
U.S. agency obligations		60,374		9		(32	)		60,351

	$	60,428	$	9	$	(32	)	$	60,405

Interest income is accrued as earned. Dividend income is recognized as income on the date the stock trades “ex-dividend.” The cost of marketable securities sold is determined by the specific identification method. Realized gains or (losses) are reflected in income and were not material for the three months ended March 31, 2014 and 2013, respectively.

The gains and losses for trading investments were immaterial for the three months ended March 31, 2014 and 2013.

- Definition

The entire disclosure for investments in certain debt and equity securities.

+ References + Details

Fair Value Measurements

3 Months Ended

Mar. 31, 2014

Fair Value Disclosures [Abstract]

Fair Value Measurements

In accordance with the provisions of fair value accounting, a fair value measurement assumes that the transaction to sell an asset or transfer a liability occurs in the principal market for the asset or liability or, in the absence of a principal market, the most advantageous market for the asset or liability and defines fair value based upon an exit price model.

The fair value measurement guidance establishes a fair value hierarchy which requires an entity to maximize the use of observable inputs and minimize the use of unobservable inputs when measuring fair value. The guidance describes three levels of inputs that may be used to measure fair value:


Level 1		Quoted prices in active markets for identical assets or liabilities assessed as of the reporting date. Active markets are those in which transactions for the asset or liability occur in sufficient frequency and volume to provide pricing information on an ongoing basis.

Level 2		Observable inputs other than Level 1 prices, such as quoted prices for similar assets or liabilities; quoted prices in markets that are not active; or other inputs that are observable or can be corroborated by observable market data for substantially the full term of the assets or liabilities. Level 2 assets and liabilities include debt securities with quoted prices that are traded less frequently than exchange-traded instruments or securities or derivative contracts that are valued using a pricing model with inputs that are observable in the market or can be derived principally from or corroborated by observable market data.

Level 3		Unobservable inputs that are supported by little or no market activity and that are significant to the fair value of the assets or liabilities. Level 3 assets and liabilities include financial instruments whose value is determined using pricing models, discounted cash flow methodologies, or similar techniques, as well as instruments for which the determination of fair value requires significant management judgment or estimation.

In certain cases, the inputs used to measure fair value may fall into different levels of the fair value hierarchy. In such cases, the Company categorizes such assets and liabilities based on the lowest level input that is significant to the fair value measurement in its entirety. The Company’s assessment of the significance of a particular input to the fair value measurement in its entirety requires judgment and considers factors specific to the asset or liability.

Assets and liabilities of the Company are measured at fair value on a recurring basis as of March 31, 2014 and are summarized as follows:


			Fair Value Measurements at Reporting Date Using
Description	Total March 31, 2014		Quoted Prices in Active Markets for Identical Assets (Level 1)		Significant Other Observable Inputs (Level 2)		Significant Unobservable Inputs (Level 3)
Assets:
Cash equivalents:
Money market funds	$	60,742	$	60,742	$	—	$	—
Bankers acceptance drafts		25		—		25		—
Commercial paper and certificates of deposit		3,568		—		3,568		—
Available-for-sale securities:
Bankers’ acceptance drafts		637		—		637		—
Time deposits		3,496		—		3,496		—
Commercial paper and certificates of deposit		127,524		—		127,524		—
Corporate obligations		16,826		—		16,826		—
U.S. agency obligations		211,650		—		211,650		—
Derivatives – currency forward contracts		401		—		401		—

Total assets	$	424,869	$	60,742	$	364,127	$	—

Liabilities:
Derivatives – currency forward contracts	$	408	$	—	$	408	$	—


Reported as follows:
Assets:
Cash and cash equivalents⁽¹⁾	$	64,335	$	60,742	$	3,593	$	—
Short-term investments		306,513		—		306,513		—
Other current assets		401		—		401		—

Total current assets	$	371,249	$	60,742	$	310,507	$	—

Long-term investments	$	53,620	$	—	$	53,620	$	—

Liabilities:
Other current liabilities	$	408	$	—	$	408	$	—

(1)	The cash and cash equivalent amounts presented in the table above do not include cash of $211,210 and non-negotiable time deposits of $11,545 as of March 31, 2014.

Assets and liabilities of the Company are measured at fair value on a recurring basis as of December 31, 2013 and are summarized as follows:


			Fair Value Measurements at Reporting Date Using
Description	Total December 31, 2013		Quoted Prices in Active Markets for Identical Assets (Level 1)		Significant Other Observable Inputs (Level 2)		Significant Unobservable Inputs (Level 3)
Assets:
Cash equivalents:
Money market funds	$	38,166	$	38,166	$	—	$	—
Bankers acceptance drafts		32		—		32		—
Commercial paper and certificates of deposit		10,400		—		10,400		—
Trading securities:
Mutual funds		1,000		1,000		—		—
Available-for-sale securities:
Time deposits		3,493		—		3,493		—
Bankers acceptance drafts		491		—		491		—
Commercial paper and certificates of deposit		114,984		—		114,984		—
Corporate obligations		18,351		—		18,351		—
U.S. agency obligations		222,801		—		222,801		—
Derivatives – currency forward contracts		920		—		920		—

Total assets	$	410,638	$	39,166	$	371,472	$	—


Liabilities:
Derivatives – currency forward contracts	$	656	$	—	$	656	$	—


Reported as follows:
Assets:
Cash and cash equivalents (1)	$	48,598	$	38,166	$	10,432	$	—
Short-term investments		300,715		1,000		299,715		—
Other current assets		920		—		920		—

Total current assets	$	350,233	$	39,166	$	311,067	$	—

Long-term investments	$	60,405	$	—	$	60,405	$	—

Liabilities:
Other current liabilities	$	656	$	—	$	656	$	—

(1)	The cash and cash equivalent amounts presented in the table above do not include cash of $234,675 and non-negotiable time deposits of $5,629 as of December 31, 2013.

Money Market Funds

Money market funds are cash and cash equivalents and are classified within Level 1 of the fair value hierarchy.

Trading Securities

As of December 31, 2013, trading securities consisted of certain U.S. and international equity mutual funds and government agency fixed income mutual funds.

Bankers’ Acceptance Drafts

Bankers’ acceptance drafts are short-term credit investments created by a non-financial firm and guaranteed by a bank. These drafts are often traded at a discount from face value and may be traded on a secondary market.

Available-For-Sale Investments

Available-for-sale investments consisted of time deposits and drafts denominated in the Euro currency, commercial paper, certificates of deposit, corporate obligations, U.S. treasury obligations and U.S. agency obligations. The Company measures its debt and equity investments at fair value.

Derivatives

As a result of the Company’s global operating activities, the Company is exposed to market risks from changes in foreign currency exchange rates, which may adversely affect its operating results and financial position. When deemed appropriate, the Company minimizes its risks from foreign currency exchange rate fluctuations through the use of derivative financial instruments. The principal market in which the Company executes its foreign currency contracts is the institutional market in an over-the-counter environment with a relatively high level of price transparency. The market participants usually are large commercial banks. The forward foreign currency exchange contracts are valued using broker quotations, or market transactions and are classified within Level 2 of the fair value hierarchy.

- Definition

The entire disclosure for the fair value of financial instruments (as defined), including financial assets and financial liabilities (collectively, as defined), and the measurements of those instruments as well as disclosures related to the fair value of non-financial assets and liabilities. Such disclosures about the financial instruments, assets, and liabilities would include: (1) the fair value of the required items together with their carrying amounts (as appropriate); (2) for items for which it is not practicable to estimate fair value, disclosure would include: (a) information pertinent to estimating fair value (including, carrying amount, effective interest rate, and maturity, and (b) the reasons why it is not practicable to estimate fair value; (3) significant concentrations of credit risk including: (a) information about the activity, region, or economic characteristics identifying a concentration, (b) the maximum amount of loss the entity is exposed to based on the gross fair value of the related item, (c) policy for requiring collateral or other security and information as to accessing such collateral or security, and (d) the nature and brief description of such collateral or security; (4) quantitative information about market risks and how such risks are managed; (5) for items measured on both a recurring and nonrecurring basis information regarding the inputs used to develop the fair value measurement; and (6) for items presented in the financial statement for which fair value measurement is elected: (a) information necessary to understand the reasons for the election, (b) discussion of the effect of fair value changes on earnings, (c) a description of [similar groups] items for which the election is made and the relation thereof to the balance sheet, the aggregate carrying value of items included in the balance sheet that are not eligible for the election; (7) all other required (as defined) and desired information.

+ References + Details

Derivatives

3 Months Ended

Mar. 31, 2014

Derivative Instruments And Hedging Activities Disclosure [Abstract]

Derivatives

The Company enters into derivative instruments for risk management purposes only, including derivatives designated as hedging instruments and those utilized as economic hedges. The Company operates internationally and, in the normal course of business, is exposed to fluctuations in interest rates and foreign exchange rates. These fluctuations can increase the costs of financing, investing and operating the business. The Company has used derivative instruments, such as forward contracts, to manage certain foreign currency exposure.

By nature, all financial instruments involve market and credit risks. The Company enters into derivative instruments with major investment grade financial institutions and no collateral is required. The Company has policies to monitor the credit risk of these counterparties. While there can be no assurance, the Company does not anticipate any material non-performance by any of these counterparties.

The Company hedges a portion of its forecasted foreign currency denominated intercompany sales of inventory, over a maximum period of eighteen months, using forward foreign exchange contracts accounted for as cash-flow hedges related to Japanese, South Korean, British and Euro currencies. To the extent these derivatives are effective in off-setting the variability of the hedged cash flows, and otherwise meet the hedge accounting criteria, changes in the derivatives’ fair value are not included in current earnings but are included in other comprehensive income (“OCI”) in stockholders’ equity. These changes in fair value will subsequently be reclassified into earnings, as applicable, when the forecasted transaction occurs. To the extent that a previously designated hedging transaction is no longer an effective hedge, any ineffectiveness measured in the hedging relationship is recorded currently in earnings in the period it occurs. The cash flows resulting from forward exchange contracts are classified in the consolidated statements of cash flows as part of cash flows from operating activities. The Company does not enter into derivative instruments for trading or speculative purposes.

To the extent the hedge accounting criteria is not met, the related foreign currency forward contracts are considered as economic hedges and changes in the fair value of these contracts are recorded immediately in earnings in the period in which they occur. These include hedges that are used to reduce exchange rate risks arising from the change in fair value of certain foreign currency denominated assets and liabilities (i.e., payables, receivables) and other economic hedges where the hedge accounting criteria were not met.

As of March 31, 2014 and December 31, 2013, the Company had outstanding forward foreign exchange contracts with gross notional values of $36,893 and $21,018, respectively. The following tables provide a summary of the primary net hedging positions and corresponding fair values held as of March 31, 2014 and December 31, 2013:


	March 31, 2014
Currency Hedged (Buy/Sell)	Gross Notional Value		Fair Value⁽¹⁾ Asset/(Liability)
U.S. Dollar/Japanese Yen	$	14,995	$	345
U.S. Dollar/South Korean Won		15,037		(258	)
U.S. Dollar/Euro		4,344		(51	)
U.S. Dollar/U.K. Pound Sterling		2,517		(43	)

Total	$	36,893	$	(7	)

(1)	Represents the fair value of the net asset / (liability) amount included in the consolidated balance sheets.


	December 31, 2013
Currency Hedged (Buy/Sell)	Gross Notional Value		Fair Value⁽¹⁾ Asset/(Liability)
U.S. Dollar/Japanese Yen	$	7,191	$	920
U.S. Dollar/South Korean Won		9,254		(521	)
U.S. Dollar/Euro		2,806		(85	)
U.S. Dollar/U.K. Pound Sterling		1,767		(50	)

Total	$	21,018	$	264

(1)	Represents the fair value of the net asset / (liability) amount included in the consolidated balance sheets.

The following table provides a summary of the fair value amounts of the Company’s derivative instruments:


Derivatives Designated as Hedging Instruments	March 31, 2014			December 31, 2013
Derivative assets:
Forward exchange contracts	$	401		$	920
Derivative liabilities:
Forward exchange contracts		(408	)		(656	)

Total net derivative asset (liability) designated as hedging instruments⁽¹⁾	$	(7	)	$	264

(1)

The derivative assets of $401 and derivative liabilities of $408 are classified in other current assets and other current liabilities, respectively, in the consolidated balance sheet as of March 31, 2014. The derivative asset of $920 and derivative liability of $656 are classified in other current assets and other current liabilities, respectively, in the consolidated balance sheet as of December 31, 2013. These foreign exchange contracts are subject to a master netting agreement with one financial institution. However, the Company has elected to record these contracts on a gross basis in the balance sheet.

The net amount of existing losses as of March 31, 2014 that is expected to be reclassified from accumulated OCI into earnings within the next twelve months is immaterial.

The following table provides a summary of the gains (losses) on derivatives designated as hedging instruments:


	Three Months Ended March 31,
Derivatives Designated as Cash Flow Hedging Relationships	2014			2013
Forward exchange contracts:
Net (loss) gain recognized in OCI⁽¹⁾	$	(334	)	$	1,779
Net (loss) gain reclassified from OCI into income⁽²⁾	$	(94	)		203

(1)	Net change in the fair value of the effective portion classified in OCI.

(2)	Effective portion classified in cost of products for the three months ended March 31, 2014 and 2013.

The following table provides a summary of gains on derivatives not designated as hedging instruments:


	Three Months Ended March 31,
Derivatives Not Designated as Hedging Instruments	2014		2013
Forward exchange contracts:
Net gain recognized in income⁽¹⁾	$	106	$	491

(1)	The Company has a forward foreign exchange contract that hedges an intercompany loan with its Korean subsidiary. This hedge does not qualify for hedge accounting and any gains (losses) are recorded immediately in selling, general and administrative expenses.

- Definition

The entire disclosure for derivative instruments and hedging activities including, but not limited to, risk management strategies, non-hedging derivative instruments, assets, liabilities, revenue and expenses, and methodologies and assumptions used in determining the amounts.

+ References

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+ Details

Inventories

3 Months Ended

Mar. 31, 2014

Inventory Disclosure [Abstract]

Inventories

Inventories consist of the following:


	March 31, 2014		December 31, 2013
Raw materials	$	76,520	$	75,687
Work-in-process		23,140		24,304
Finished goods		47,851		42,736

	$	147,511	$	142,727

Acquisitions

3 Months Ended

Mar. 31, 2014

Business Combinations [Abstract]

Acquisitions

Granville-Phillips

On March 18, 2014, the Company announced an agreement to purchase the assets of Granville-Phillips, a division of Brooks Automation, Inc., for $87,000 in cash. Granville-Phillips is a leading global provider of vacuum measurement and control instruments to the semiconductor, thin film and general industrial markets with sales of approximately $30,000 in 2013. The acquisition aligns with the Company’s current strategy to grow its semiconductor business, while diversifying into other high growth advanced markets. Presuming regulatory approvals and other customary closing conditions are met, the acquisition is expected to close in the second quarter of 2014.

- Definition

The entire disclosure for a business combination (or series of individually immaterial business combinations) completed during the period, including background, timing, and recognized assets and liabilities. The disclosure may include leverage buyout transactions (as applicable).

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
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+ Details

Goodwill and Intangible Assets

3 Months Ended

Mar. 31, 2014

Goodwill And Intangible Assets Disclosure [Abstract]

Goodwill and Intangible Assets

Goodwill

The Company’s methodology for allocating the purchase price relating to purchase acquisitions is determined through established and generally accepted valuation techniques. Goodwill is measured as the excess of the cost of the acquisition over the sum of the amounts assigned to tangible and identifiable intangible assets acquired less liabilities assumed. The Company assigns assets acquired (including goodwill) and liabilities assumed to one or more reporting units as of the date of acquisition. Typically acquisitions relate to a single reporting unit and thus do not require the allocation of goodwill to multiple reporting units. If the products obtained in an acquisition are assigned to multiple reporting units, the goodwill is distributed to the respective reporting units as part of the purchase price allocation process.

Goodwill and purchased intangible assets with indefinite useful lives are not amortized, but are reviewed for impairment annually during the fourth quarter of each fiscal year and whenever events or changes in circumstances indicate that the carrying value of an asset may not be recoverable. The process of evaluating the potential impairment of goodwill and intangible assets requires significant judgment. The Company regularly monitors current business conditions and other factors including, but not limited to, adverse industry or economic trends, restructuring actions and lower projections of profitability that may impact future operating results.

As of October 31, 2013, the Company performed its annual impairment assessment of goodwill and determined that there was no impairment.

The changes in the carrying amount of goodwill and accumulated impairment (loss) during the three months ended March 31, 2014 and twelve months ended December 31, 2013 were as follows:


	2014									2013
	Gross Carrying Amount			Accumulated Impairment (Loss)			Net			Gross Carrying Amount		Accumulated Impairment (Loss)			Net
Beginning balance at January 1	$	290,323		$	(139,414	)	$	150,909		$	290,147	$	(139,414	)	$	150,733
Acquired goodwill⁽¹⁾		381			—			381			—		—			—
Foreign currency translation		(178	)		—			(178	)		176		—			176

Ending balance at March 31, 2014 and December 31, 2013	$	290,526		$	(139,414	)	$	151,112		$	290,323	$	(139,414	)	$	150,909

(1)	During the three months ended March 31, 2014, the Company recorded a purchase accounting adjustment for $381 related to the March 12, 2013 purchase of Alter S.r.l.

Intangible Assets

Components of the Company’s intangible assets are comprised of the following:


As of March 31, 2014:	Gross		Accumulated Amortization			Foreign Currency Translation		Net
Completed technology	$	84,680	$	(78,277	)	$	445	$	6,848
Customer relationships		14,571		(9,983	)		372		4,960
Patents, trademarks, trade names and other		25,636		(25,004	)		79		711

	$	124,887	$	(113,264	)	$	896	$	12,519


As of December 31, 2013:	Gross		Accumulated Amortization			Foreign Currency Translation		Net
Completed technology	$	84,680	$	(78,072	)	$	519	$	7,127
Customer relationships		14,571		(9,831	)		454		5,194
Patents, trademarks, trade names and other		25,636		(24,951	)		84		769

	$	124,887	$	(112,854	)	$	1,057	$	13,090

Aggregate amortization expense related to acquired intangibles for the three months ended March 31, 2014 and 2013 were $410 and $434, respectively. Estimated amortization expense for each of the remaining fiscal years is as follows:


Year	Amount
2014 (remaining)	$	1,376
2015		1,769
2016		1,586
2017		1,555
2018		1,546
Thereafter		4,687

- Definition

The entire disclosure for the aggregate amount of goodwill and a description of intangible assets, which may include (a) for amortizable intangible assets (also referred to as finite-lived intangible assets), the carrying amount, the amount of any significant residual value, and the weighted-average amortization period, (b) for intangible assets not subject to amortization (also referred to as indefinite-lived intangible assets), the carrying amount, and (c) the amount of research and development assets acquired and written off in the period, including the line item in the income statement in which the amounts written off are aggregated, if not readily apparent from the income statement. Also discloses (a) for amortizable intangibles assets in total and by major class, the gross carrying amount and accumulated amortization, the total amortization expense for the period, and the estimated aggregate amortization expense for each of the five succeeding fiscal years, (b) for intangible assets not subject to amortization the carrying amount in total and by major class, and (c) for goodwill, in total and for each reportable segment, the changes in the carrying amount of goodwill during the period (including the aggregate amount of goodwill acquired, the aggregate amount of impairment losses recognized, and the amount of goodwill included in the gain (loss) on disposal of a reporting unit). If any part of goodwill has not been allocated to a reportable segment, discloses the unallocated amount and the reasons for not allocating. For each impairment loss recognized related to an intangible asset (excluding goodwill), discloses: (a) a description of the impaired intangible asset and the facts and circumstances leading to the impairment, (b) the amount of the impairment loss and the method for determining fair value, (c) the caption in the income statement or the statement of activities in which the impairment loss is aggregated, and (d) the segment in which the impaired intangible asset is reported. For each goodwill impairment loss recognized, discloses: (a) a description of the facts and circumstances leading to the impairment, (b) the amount of the impairment loss and the method of determining the fair value of the associated reporting unit, and (c) if a recognized impairment loss is an estimate not finalized and the reasons why the estimate is not final. May also disclose the nature and amount of any significant adjustments made to a previous estimate of an impairment loss.

+ References + Details

Other Assets

3 Months Ended

Mar. 31, 2014

Deferred Costs Capitalized Prepaid And Other Assets Disclosure [Abstract]

Other Assets


	March 31, 2014		December 31, 2013
Other Assets:
Deferred tax assets, net	$	10,969	$	9,208
Long-term income tax receivable		21,315		20,516
Other		2,099		2,123

Total other assets	$	34,383	$	31,847

Other Liabilities

3 Months Ended

Mar. 31, 2014

Other Liabilities Disclosure [Abstract]

Other Liabilities

10)

Other Liabilities


	March 31, 2014		December 31, 2013
Other Current Liabilities:
Product warranties	$	7,013	$	6,956
Deferred revenue		6,353		5,556
Other		23,076		21,730

Total other current liabilities	$	36,442	$	34,242


Other Liabilities:
Long-term income tax payable	$	43,713	$	46,745
Accrued compensation		10,690		9,646
Other		6,379		6,682

Total other liabilities	$	60,782	$	63,073

Debt

3 Months Ended

Mar. 31, 2014

Debt Disclosure [Abstract]

Debt

11)

Debt

The Company’s Japanese subsidiary has lines of credit and short-term borrowing arrangements with two financial institutions which generally expire and are renewed at three month intervals. The lines of credit provide for aggregate borrowings as of March 31, 2014 of up to an equivalent of $22,527 U.S. dollars. One of the borrowing arrangements has an interest rate based on the Tokyo Interbank Offer Rate at the time of borrowing and the other has an interest rate based on the Japanese Short-term Prime Lending Rate. There were no borrowings outstanding under these arrangements at March 31, 2014 and December 31, 2013.

Product Warranties

3 Months Ended

Mar. 31, 2014

Guarantees [Abstract]

Product Warranties

12)

Product Warranties

The Company provides for the estimated costs to fulfill customer warranty obligations upon the recognition of the related revenue. While the Company engages in extensive product quality programs and processes, including actively monitoring and evaluating the quality of its component suppliers, the Company’s warranty obligation is affected by shipment volume, product failure rates, utilization levels, material usage, and supplier warranties on parts delivered to the Company. Should actual product failure rates, utilization levels, material usage, or supplier warranties on parts differ from the Company’s estimates, revisions to the estimated warranty liability would be required. The product warranty liability is included in other current liabilities in the consolidated balance sheets.

Product warranty activities were as follows:


	Three Months Ended March 31,
	2014			2013
Balance at December 31	$	6,956		$	8,266
Provision for product warranties		704			630
Direct charges to warranty liability		(656	)		(1,250	)
Foreign currency translation		9			(113	)

Balance at March 31	$	7,013		$	7,533

Income Taxes

3 Months Ended

Mar. 31, 2014

Income Tax Disclosure [Abstract]

Income Taxes

13)

Income Taxes

The Company’s effective tax rate for the three months ended March 31, 2014 and 2013 was 17.8% and (16.0)%, respectively. The primary reason the effective tax rate for the three months ended March 31, 2014, and related income tax expense was lower than the U.S. statutory tax rate was due to the discrete release of income tax reserves related to the effective settlement of a foreign tax examination. The geographic mix of income and profits earned by the Company’s international subsidiaries being taxed at rates lower than the U.S. statutory rate also had a significant impact on the effective tax rate. The effective tax rate for the three months ended March 31, 2013, and related tax benefit were lower than the U.S. statutory tax rate due to certain tax incentives realized by the Company, and recognized as discrete events in the quarter. These incentives were reinstated under The American Taxpayer Relief Act of 2012 that was signed into law on January 2, 2013.

At March 31, 2014, the total amount of gross unrecognized tax benefits, which excludes interest and penalties, was approximately $42,794. At December 31, 2013, the total amount of gross unrecognized tax benefits, which excludes interest and penalties, was approximately $47,684. The net decrease from December 31, 2013 was primarily attributable to a release in reserves for uncertain tax positions due to the effective settlement of a foreign tax examination in the current quarter. As of March 31, 2014, if these benefits were recognized in a future period, the timing of which is not estimable, the net unrecognized tax benefit of $20,536, excluding interest and penalties, would impact the Company’s effective tax rate. The Company accrues interest expense and, if applicable penalties, for any uncertain tax positions. Interest and penalties are classified as a component of income tax expense. At March 31, 2014, and December 31, 2013, the Company had accrued interest on unrecognized tax benefits of approximately $1,863 and $2,159, respectively.

The Company and its subsidiaries are subject to examination by federal, state and foreign tax authorities. The Internal Revenue Service commenced an examination of the Company’s U.S. federal tax filings for tax years 2007 through 2009 during the quarter ended June 30, 2012. As a result, the U.S. statute of limitations remains open between tax years 2007 through present. However, carryforward amounts from prior years may still be adjusted upon examination by tax authorities if they are used in a future period. The statute of limitations for the Company’s tax filings in other jurisdictions varies between fiscal years 2007 through present.

While the Company believes it has adequately provided for all tax positions, amounts asserted by taxing authorities could materially differ from the Company’s accrued positions as a result of uncertain and complex application of tax regulations. Additionally, the recognition and measurement of certain tax benefits include estimates and judgment by management. Accordingly, the Company may record additional provisions or benefits due to U.S. federal, state, and foreign tax-related matters in the future as it obtains new information or settles or otherwise resolves the underlying matters.

Net Income Per Share

3 Months Ended

Mar. 31, 2014

Earnings Per Share [Abstract]

Net Income Per Share

14)

Net Income Per Share

The following table sets forth the computation of basic and diluted net income per share:


	Three Months Ended March 31,
	2014		2013
Numerator:
Net income	$	31,245	$	5,761

Denominator:
Shares used in net income per common share – basic		53,411,000		52,773,000
Effect of dilutive securities:
Stock options, restricted stock and employee stock purchase plan		365,000		586,000

Shares used in net income per common share – diluted		53,776,000		53,359,000

Net income per common share:
Basic	$	0.58	$	0.11
Diluted	$	0.58	$	0.11

Basic earnings per share (“EPS”) is computed by dividing income available to common stockholders by the weighted-average number of common shares outstanding during the period. The computation of diluted EPS is similar to the computation of basic EPS except that the denominator is increased to include the number of additional common shares that would have been outstanding (using the treasury stock method) if securities containing potentially dilutive common shares (stock options and restricted stock units) had been converted to such common shares, and if such assumed conversion is dilutive.

As of March 31, 2014, stock options and restricted stock units relating to an aggregate of approximately 1,034,000 shares were outstanding. For the three months ended March 31, 2014 and 2013, the potential dilutive effect of approximately 1,400 and 98,000 weighted-average shares, respectively, of restricted stock units and stock options were excluded from the computation of diluted weighted-average shares outstanding as the shares would have an anti-dilutive effect on EPS.

Stockholder's Equity

3 Months Ended

Mar. 31, 2014

Equity [Abstract]

Stockholder's Equity

15)

Stockholder’s Equity

Stock Repurchase Program

On July 25, 2011, the Company’s Board of Directors approved a share repurchase program for the repurchase of up to an aggregate of $200,000 of its outstanding common stock from time to time in open market purchases, privately negotiated transactions or through other appropriate means. The timing and quantity of any shares repurchased depends upon a variety of factors, including business conditions, stock market conditions and business development activities, including, but not limited to, merger and acquisition opportunities. These repurchases may be commenced, suspended or discontinued at any time without prior notice.

During the three months ended March 31, 2014, the Company repurchased approximately 32,000 shares of its common stock for $945, or an average price of $29.81 per share.

Cash Dividends

Holders of the Company’s common stock are entitled to receive dividends when they are declared by the Company’s Board of Directors. During the three months ended March 31, 2014, the Board of Directors authorized a cash dividend of $0.16 per share, which totaled $8,553. During the three months ended March 31, 2013, the Board of Directors authorized a cash dividend of $0.16 per share, which totaled $8,448.

On May 5, 2014, our Board of Directors declared a quarterly cash dividend of $0.165 per share to be paid on June 13, 2014 to shareholders of record as of June 2, 2014. Future dividend declarations, if any, as well as the record and payment dates for such dividends, are subject to the final determination of the Company’s Board of Directors.

- Definition

The entire disclosure for shareholders' equity comprised of portions attributable to the parent entity and noncontrolling interest, including other comprehensive income. Includes, but is not limited to, balances of common stock, preferred stock, additional paid-in capital, other capital and retained earnings, accumulated balance for each classification of other comprehensive income and amount of comprehensive income.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 235
-SubTopic 10
-Section S99
-Paragraph 1
-Subparagraph (SX 210.4-08.(d),(e))
-URI http://asc.fasb.org/extlink&oid=26873400&loc=d3e23780-122690

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Reference 3: http://www.xbrl.org/2003/role/presentationRef
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Reference 5: http://www.xbrl.org/2003/role/presentationRef
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Reference 7: http://www.xbrl.org/2003/role/presentationRef
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Reference 8: http://www.xbrl.org/2003/role/presentationRef
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Reference 9: http://www.xbrl.org/2003/role/presentationRef
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Reference 10: http://www.xbrl.org/2003/role/presentationRef
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Reference 11: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Glossary Preferred Stock
-URI http://asc.fasb.org/extlink&oid=6521494

Reference 12: http://www.xbrl.org/2003/role/presentationRef
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Reference 13: http://www.xbrl.org/2003/role/presentationRef
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Reference 14: http://www.xbrl.org/2003/role/presentationRef
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-Number 210
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-Paragraph d
-Article 4

Reference 15: http://www.xbrl.org/2003/role/presentationRef
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Reference 16: http://www.xbrl.org/2003/role/presentationRef
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-Section E

Reference 17: http://www.xbrl.org/2003/role/presentationRef
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Reference 18: http://www.xbrl.org/2003/role/presentationRef
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Reference 19: http://www.xbrl.org/2003/role/presentationRef
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-Number 210
-Section 04
-Article 3

+ Details

Business Segment, Geographic Area, Product and Significant Customer Information

3 Months Ended

Mar. 31, 2014

Segment Reporting [Abstract]

Business Segment, Geographic Area, Product and Significant Customer Information

16)

Business Segment, Geographic Area, Product and Significant Customer Information

The Company develops, manufactures, sells and services products that measure, control, power and monitor critical parameters of advanced manufacturing processes. The Company’s Chief Operating Decision Maker (“CODM”) utilizes consolidated financial information to make decisions about allocating resources and assessing performance for the entire Company. In addition, certain disaggregated financial information is also provided to the CODM. Based upon the information provided to the CODM, the Company has determined it has eight operating segments and four reportable segments.

The eight operating segments are PFMC Products, Controls Products, ASTeX Products, ENI Products, HPS Products (Vacuum Products), Analytical Solutions Group, Europe Region Sales & Service and Asia Region Sales & Service.

PFMC Products, Controls Products, ASTeX Products, ENI Products and HPS Products comprise a single reportable segment due to the similarities of the operating segments. This reportable segment, Advanced Manufacturing Capital Equipment, includes the development, manufacturing, sales and servicing of instruments and control products, power and reactive gas products, and vacuum products, all of which are utilized in semiconductor processing and other similar advanced manufacturing processes. Sales in this segment include both external sales and intercompany sales (which are stated at agreed upon transfer prices). External sales of these products made in Europe or Asia are reported as sales in the Europe Region Sales & Service or Asia Region Sales & Service segments.

Analytical Solutions Group, Asia Region Sales & Service and Europe Region Sales & Service are each separate reportable segments. The Company has reported corporate expenses and certain intercompany pricing transactions in a Corporate, Eliminations and Other reconciling column. The Analytical Solutions Group includes gas composition analysis and information technology products. The Europe and Asia region sales and service segments mainly resell and service the Advanced Manufacturing Capital Equipment and Analytical Solutions Group products sold in their respective regions.

MKS derives the segment results directly from the manner in which results are reported in its management reporting system. The accounting policies MKS uses to derive reportable segment results are substantially the same as those used for external reporting purposes except that a substantial portion of the sales of the Advanced Manufacturing Capital Equipment and Analytical Solutions Group segments are intercompany sales to the regions at tax-based transfer prices and certain significant costs, including stock-based compensation and management incentive compensation, are not allocated to the segments and are included in Corporate, Eliminations and Other. The CODM reviews several metrics of each operating segment, including net revenues and gross profit (loss).

The following is net revenues by reportable segment:


	Three Months Ended March 31,
	2014			2013
Advanced Manufacturing Capital Equipment	$	169,197		$	104,810
Analytical Solutions Group		14,170			14,396
Europe Region Sales & Service Operations⁽¹⁾		14,386			11,048
Asia Region Sales & Service Operations⁽¹⁾		66,683			47,143
Corporate, Eliminations and Other		(58,083	)		(35,752	)

	$	206,353		$	141,645

(1)

The Europe and Asia foreign sales and service operations do not represent total geographical Europe and Asia financial information. These sales and service operations mainly represent the sales from the resale and service of Advanced Manufacturing Capital Equipment and Analytical Solutions Group products in their respective regions. The Advanced Manufacturing Capital Equipment and Analytical Solutions Group segments both have sales in each region. Accordingly, total geographical sales include sales from multiple reportable segments.

The following is gross profit by reportable segment:


	Three Months Ended March 31,
	2014			2013
Advanced Manufacturing Capital Equipment	$	67,614		$	34,836
Analytical Solutions Group		6,547			7,448
Europe Region Sales & Service Operations⁽¹⁾		4,240			3,191
Asia Region Sales & Service Operations⁽¹⁾		13,024			8,831
Corporate, Eliminations and Other		(2,053	)		396

	$	89,372		$	54,702

(1)

The following is capital expenditures by reportable segment for the three months ended March 31, 2014 and 2013:


	Product Groups				Foreign Sales & Service Operations
	Advanced Manufacturing Capital Equipment		Analytical Solutions Group		Europe		Asia		Corporate, Eliminations and Other		Total
Three Months Ended March 31, 2014:
Capital expenditures	$	1,709	$	1,014	$	15	$	122	$	238	$	3,098


	Product Groups				Foreign Sales & Service Operations
	Advanced Manufacturing Capital Equipment		Analytical Solutions Group		Europe		Asia		Corporate, Eliminations and Other		Total
Three Months Ended March 31, 2013:
Capital expenditures	$	2,612	$	111	$	15	$	63	$	555	$	3,356

The following is depreciation and amortization by reportable segment for the three months ended March 31, 2014 and 2013:


	Product Groups				Foreign Sales & Service Operations
	Advanced Manufacturing Capital Equipment		Analytical Solutions Group		Europe		Asia		Corporate, Eliminations and Other		Total
Three Months Ended March 31, 2014:
Depreciation and amortization	$	2,911	$	214	$	90	$	289	$	646	$	4,150


	Product Groups				Foreign Sales & Service Operations
	Advanced Manufacturing Capital Equipment		Analytical Solutions Group		Europe		Asia		Corporate, Eliminations and Other		Total
Three Months Ended March 31, 2013:
Depreciation and amortization	$	2,941	$	243	$	74	$	294	$	540	$	4,092

The following is segment assets by reportable segment:


	Product Groups				Foreign Sales & Service Operations
	Advanced Manufacturing Capital Equipment		Analytical Solutions Group		Europe		Asia		Corporate, Eliminations and Other			Total
March 31, 2014:
Segment assets:
Accounts receivable⁽¹⁾	$	17,055	$	4,513	$	7,592	$	43,216	$	47,087		$	119,463
Inventory		121,897		4,342		4,305		26,475		(9,508	)		147,511

Total segment assets	$	138,952	$	8,855	$	11,897	$	69,691	$	37,579		$	266,974


	Product Groups				Foreign Sales & Service Operations
	Advanced Manufacturing Capital Equipment		Analytical Solutions Group		Europe		Asia		Corporate, Eliminations and Other			Total
December 31, 2013:
Segment assets:
Accounts receivable⁽¹⁾	$	20,767	$	5,603	$	6,538	$	44,207	$	39,629		$	116,744
Inventory		117,822		4,391		4,254		25,094		(8,834	)		142,727

Total segment assets	$	138,589	$	9,994	$	10,792	$	69,301	$	30,795		$	259,471

(1)	A significant portion of segment receivables are processed at the Company’s shared services center at the Corporate location.

A reconciliation of segment assets to consolidated total assets is as follows:


	March 31, 2014		December 31, 2013
Total segment assets	$	266,974	$	259,471
Cash and cash equivalents and investments		647,223		650,022
Other current assets		35,032		30,143
Property, plant and equipment, net		75,517		77,536
Goodwill and intangible assets, net		163,631		163,999
Other assets		34,383		31,847

Consolidated total assets	$	1,222,760	$	1,213,018

Worldwide Product Information

Because the reportable segment information above does not reflect worldwide sales of the Company’s products, the Company groups its products into three groups of similar products based upon the similarity of product function. Worldwide net revenue for each group of products is as follows:


	Three Months Ended March 31,
	2014		2013
Instruments, Control and Vacuum Products	$	101,657	$	75,186
Power and Reactive Gas Products		90,602		52,063
Analytical Solutions Group Products		14,094		14,396

	$	206,353	$	141,645

Sales of Instruments, Control and Vacuum Products and Power and Reactive Gas Products are included in the Company’s Advanced Manufacturing Capital Equipment Products segment as well as in the foreign sales and service operations because the products are sold through the foreign sales and service operations in their respective regions. Sales of the Analytical Solutions Group products are included in the Analytical Solutions Group segment as well as in the foreign sales and service operations because the products are sold through the foreign sales and service operations in their respective regions.

Geographic

Information about the Company’s operations in different geographic regions is presented in the tables below. Net revenues to unaffiliated customers are based on the location in which the sale originated. Transfers between geographic areas are at negotiated transfer prices and have been eliminated from consolidated net revenues.


	Three Months Ended March 31,
Net revenues:	2014		2013
United States	$	117,377	$	74,567
Korea		27,591		13,477
Japan		16,928		13,829
Europe		19,555		18,803
Asia (excluding Korea and Japan)		24,902		20,969

	$	206,353	$	141,645


Long-lived assets:⁽¹⁾	March 31, 2014		December 31, 2013
United States	$	58,176	$	60,700
Europe		6,222		5,484
Asia		12,775		13,475

	$	77,173	$	79,659

(1)	Long-lived assets include property, plant and equipment, net and certain other long-term assets, excluding long-term income tax receivable.

Major Customers

The Company had two customers with net revenues greater than 10% of total net revenues in the three months ended March 31, 2014 and 2013 as shown below:


	Three Months Ended March 31,
	2014			2013
Customer A		20.3	%		14.7	%
Customer B		13.1	%		9.6	%

- Definition

The entire disclosure for reporting segments including data and tables. Reportable segments include those that meet any of the following quantitative thresholds a) it's reported revenue, including sales to external customers and intersegment sales or transfers is 10 percent or more of the combined revenue, internal and external, of all operating segments b) the absolute amount of its reported profit or loss is 10 percent or more of the greater, in absolute amount of 1) the combined reported profit of all operating segments that did not report a loss or 2) the combined reported loss of all operating segments that did report a loss c) its assets are 10 percent or more of the combined assets of all operating segments.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 280
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+ Details

Restructuring

3 Months Ended

Mar. 31, 2014

Restructuring And Related Activities [Abstract]

Restructuring

17)

Restructuring

The Company recorded restructuring charges of $747 during the three months ended March 31, 2014. The restructuring charges were primarily for severance associated with the reduction in workforce of approximately 65 people throughout the Company.

The activity related to the Company’s restructuring accrual is shown below:


	Three Months Ended March 31,
	2014
Balance at December 31	$	—
Charged to expense		747
Payments		(217	)

Balance at March 31	$	530

During the three months ended March 31, 2014, the Company re-classified certain assets from property, plant and equipment to current assets classified as held for sale, as these assets met the criteria for classification as held for sale. These assets relate to the Company closing one of its facilities in Colorado, as part of restructuring activities announced during the third quarter of 2013.

The net book value of assets held for sale consists of the following:


	March 31, 2014
Land	$	474
Building and building improvements		953

	$	1,427

The estimated fair value approximates the net book value of the land and building at March 31, 2014.

Commitments and Contingencies

3 Months Ended

Mar. 31, 2014

Commitments And Contingencies Disclosure [Abstract]

Commitments and Contingencies

18)

Commitments and Contingencies

The Company is subject to various legal proceedings and claims, which have arisen in the ordinary course of business. In the opinion of management, the ultimate disposition of these matters will not have a material adverse effect on the Company’s results of operations, financial condition or cash flows.

Recently Issued Accounting Pronouncements (Policies)

3 Months Ended

Mar. 31, 2014

Accounting Changes And Error Corrections [Abstract]

Recently Issued Accounting Pronouncements

Investments (Tables)

3 Months Ended

Mar. 31, 2014

Investments Debt And Equity Securities [Abstract]

Fair Value of Short-Term Available-for-Sale and Trading Investments

The fair value of short-term investments with maturities or estimated lives of less than one year consists of the following:


	March 31, 2014		December 31, 2013
Available-for-sale investments:
Bankers’ acceptance drafts	$	637	$	491
Time deposits		3,442		3,439
Commercial paper and certificates of deposit		127,524		114,984
Corporate obligations		16,826		18,351
U.S. agency obligations		158,084		162,450

		306,513		299,715
Trading investments:
Mutual funds		—		1,000

	$	306,513	$	300,715

Fair Value of Long-Term Available-for-Sale Investments

The fair value of long-term investments with maturities of more than one year consists of the following:


	March 31, 2014		December 31, 2013
Available-for-sale investments:
Time deposits	$	54	$	54
U.S. agency obligations		53,566		60,351

	$	53,620	$	60,405

Gross Unrealized Gains and (Losses) Aggregated by Investment Category Short-Term and Long-Term Securities

The following tables show the gross unrealized gains and (losses) aggregated by investment category for short-term and long-term available-for-sale investments:


As of March 31, 2014:	Cost		Gross Unrealized Gains		Gross Unrealized (Losses)			Estimated Fair Value
Short-term investments:
Bankers’ acceptance drafts	$	637	$	—	$	—		$	637
Time deposits		3,442		—		—			3,442
Commercial paper and certificates of deposit		127,514		14		(4	)		127,524
Corporate obligations		16,827		1		(2	)		16,826
U.S. agency obligations		158,044		48		(8	)		158,084

	$	306,464	$	63	$	(14	)	$	306,513

Long-term investments:
Time deposits	$	54	$	—	$	—		$	54
U.S. agency obligations		53,558		18		(10	)		53,566

	$	53,612	$	18	$	(10	)	$	53,620


As of December 31, 2013:	Cost		Gross Unrealized Gains		Gross Unrealized (Losses)			Estimated Fair Value
Short-term investments:
Available-for-sale investments:
Time deposits	$	3,439	$	—	$	—		$	3,439
Bankers’ acceptance drafts		491		—		—			491
Commercial paper and certificates of deposit		114,973		15		(4	)		114,984
Corporate obligations		18,360		—		(9	)		18,351
U.S. agency obligations		162,430		22		(2	)		162,450

	$	299,693	$	37	$	(15	)	$	299,715

Long-term investments:
Time Deposits	$	54	$	—	$	—		$	54
U.S. agency obligations		60,374		9		(32	)		60,351

	$	60,428	$	9	$	(32	)	$	60,405

- Definition

Tabular disclosure of available-for-sale securities which includes, but is not limited to, changes in the cost basis and fair value, fair value and gross unrealized gain (loss), fair values by type of security, contractual maturity and classification, amortized cost basis, contracts to acquire securities to be accounted for as available-for-sale, debt maturities, transfers to trading, change in net unrealized holding gain (loss) net of tax, continuous unrealized loss position fair value, aggregate losses qualitative disclosures, other than temporary impairment (OTTI) losses or other disclosures related to available for sale securities.

+ References + Details

Fair Value Measurements (Tables)

3 Months Ended

Mar. 31, 2014

Fair Value Disclosures [Abstract]

Schedule of Fair Value of Assets and Liabilities Measured on Recurring Basis

Assets and liabilities of the Company are measured at fair value on a recurring basis as of March 31, 2014 and are summarized as follows:


			Fair Value Measurements at Reporting Date Using
Description	Total March 31, 2014		Quoted Prices in Active Markets for Identical Assets (Level 1)		Significant Other Observable Inputs (Level 2)		Significant Unobservable Inputs (Level 3)
Assets:
Cash equivalents:
Money market funds	$	60,742	$	60,742	$	—	$	—
Bankers acceptance drafts		25		—		25		—
Commercial paper and certificates of deposit		3,568		—		3,568		—
Available-for-sale securities:
Bankers’ acceptance drafts		637		—		637		—
Time deposits		3,496		—		3,496		—
Commercial paper and certificates of deposit		127,524		—		127,524		—
Corporate obligations		16,826		—		16,826		—
U.S. agency obligations		211,650		—		211,650		—
Derivatives – currency forward contracts		401		—		401		—

Total assets	$	424,869	$	60,742	$	364,127	$	—

Liabilities:
Derivatives – currency forward contracts	$	408	$	—	$	408	$	—


Reported as follows:
Assets:
Cash and cash equivalents⁽¹⁾	$	64,335	$	60,742	$	3,593	$	—
Short-term investments		306,513		—		306,513		—
Other current assets		401		—		401		—

Total current assets	$	371,249	$	60,742	$	310,507	$	—

Long-term investments	$	53,620	$	—	$	53,620	$	—

Liabilities:
Other current liabilities	$	408	$	—	$	408	$	—

(1)	The cash and cash equivalent amounts presented in the table above do not include cash of $211,210 and non-negotiable time deposits of $11,545 as of March 31, 2014.

Assets and liabilities of the Company are measured at fair value on a recurring basis as of December 31, 2013 and are summarized as follows:


			Fair Value Measurements at Reporting Date Using
Description	Total December 31, 2013		Quoted Prices in Active Markets for Identical Assets (Level 1)		Significant Other Observable Inputs (Level 2)		Significant Unobservable Inputs (Level 3)
Assets:
Cash equivalents:
Money market funds	$	38,166	$	38,166	$	—	$	—
Bankers acceptance drafts		32		—		32		—
Commercial paper and certificates of deposit		10,400		—		10,400		—
Trading securities:
Mutual funds		1,000		1,000		—		—
Available-for-sale securities:
Time deposits		3,493		—		3,493		—
Bankers acceptance drafts		491		—		491		—
Commercial paper and certificates of deposit		114,984		—		114,984		—
Corporate obligations		18,351		—		18,351		—
U.S. agency obligations		222,801		—		222,801		—
Derivatives – currency forward contracts		920		—		920		—

Total assets	$	410,638	$	39,166	$	371,472	$	—


Liabilities:
Derivatives – currency forward contracts	$	656	$	—	$	656	$	—


Reported as follows:
Assets:
Cash and cash equivalents (1)	$	48,598	$	38,166	$	10,432	$	—
Short-term investments		300,715		1,000		299,715		—
Other current assets		920		—		920		—

Total current assets	$	350,233	$	39,166	$	311,067	$	—

Long-term investments	$	60,405	$	—	$	60,405	$	—

Liabilities:
Other current liabilities	$	656	$	—	$	656	$	—

(1)	The cash and cash equivalent amounts presented in the table above do not include cash of $234,675 and non-negotiable time deposits of $5,629 as of December 31, 2013.

Derivatives (Tables)

3 Months Ended

Mar. 31, 2014

Derivative Instruments And Hedging Activities Disclosure [Abstract]

Summary of Primary Net Hedging Positions and Corresponding Fair Values

The following tables provide a summary of the primary net hedging positions and corresponding fair values held as of March 31, 2014 and December 31, 2013:


	March 31, 2014
Currency Hedged (Buy/Sell)	Gross Notional Value		Fair Value⁽¹⁾ Asset/(Liability)
U.S. Dollar/Japanese Yen	$	14,995	$	345
U.S. Dollar/South Korean Won		15,037		(258	)
U.S. Dollar/Euro		4,344		(51	)
U.S. Dollar/U.K. Pound Sterling		2,517		(43	)

Total	$	36,893	$	(7	)

(1)	Represents the fair value of the net asset / (liability) amount included in the consolidated balance sheets.


	December 31, 2013
Currency Hedged (Buy/Sell)	Gross Notional Value		Fair Value⁽¹⁾ Asset/(Liability)
U.S. Dollar/Japanese Yen	$	7,191	$	920
U.S. Dollar/South Korean Won		9,254		(521	)
U.S. Dollar/Euro		2,806		(85	)
U.S. Dollar/U.K. Pound Sterling		1,767		(50	)

Total	$	21,018	$	264

(1)	Represents the fair value of the net asset / (liability) amount included in the consolidated balance sheets.

Summary of Fair Value Amounts of Company's Derivative Instruments

The following table provides a summary of the fair value amounts of the Company’s derivative instruments:


Derivatives Designated as Hedging Instruments	March 31, 2014			December 31, 2013
Derivative assets:
Forward exchange contracts	$	401		$	920
Derivative liabilities:
Forward exchange contracts		(408	)		(656	)

Total net derivative asset (liability) designated as hedging instruments⁽¹⁾	$	(7	)	$	264

(1)

Summary of Gains (Losses) on Derivatives Designated as Hedging Instruments

The following table provides a summary of the gains (losses) on derivatives designated as hedging instruments:


	Three Months Ended March 31,
Derivatives Designated as Cash Flow Hedging Relationships	2014			2013
Forward exchange contracts:
Net (loss) gain recognized in OCI⁽¹⁾	$	(334	)	$	1,779
Net (loss) gain reclassified from OCI into income⁽²⁾	$	(94	)		203

(1)	Net change in the fair value of the effective portion classified in OCI.

(2)	Effective portion classified in cost of products for the three months ended March 31, 2014 and 2013.

Summary of Gains on Derivatives Not Designated as Hedging Instruments

The following table provides a summary of gains on derivatives not designated as hedging instruments:


	Three Months Ended March 31,
Derivatives Not Designated as Hedging Instruments	2014		2013
Forward exchange contracts:
Net gain recognized in income⁽¹⁾	$	106	$	491

(1)	The Company has a forward foreign exchange contract that hedges an intercompany loan with its Korean subsidiary. This hedge does not qualify for hedge accounting and any gains (losses) are recorded immediately in selling, general and administrative expenses.

- Definition

Tabular disclosure of pertinent information about a derivative or group of derivatives on a disaggregated basis, such as for individual instruments, or small groups of similar instruments. May include a combination of the type of instrument, risks being hedged, notional amount, hedge designation, related hedged item, inception date, maturity date, or other relevant item.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 815
-SubTopic 10
-Section 50
-Paragraph 5
-URI http://asc.fasb.org/extlink&oid=7476318&loc=d3e41641-113959

Reference 2: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 815
-SubTopic 10
-Section 50
-Paragraph 4B
-URI http://asc.fasb.org/extlink&oid=7476318&loc=SL5624163-113959

Reference 3: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 815
-SubTopic 10
-Section 50
-Paragraph 8
-URI http://asc.fasb.org/extlink&oid=7476318&loc=d3e41678-113959

Reference 4: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 815
-SubTopic 10
-Section 50
-Paragraph 4
-URI http://asc.fasb.org/extlink&oid=7476318&loc=d3e41638-113959

Reference 5: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 815
-SubTopic 10
-Section 50
-Paragraph 1B
-URI http://asc.fasb.org/extlink&oid=7476318&loc=SL5580258-113959

Reference 6: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 815
-SubTopic 10
-Section 50
-Paragraph 1A
-URI http://asc.fasb.org/extlink&oid=7476318&loc=SL5579245-113959

Reference 7: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 815
-SubTopic 10
-Section 50
-Paragraph 4C
-URI http://asc.fasb.org/extlink&oid=7476318&loc=SL5624171-113959

Reference 8: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 815
-SubTopic 25
-Section 50
-Paragraph 1
-URI http://asc.fasb.org/extlink&oid=6886632&loc=d3e76258-113986

Reference 9: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 815
-SubTopic 10
-Section 50
-Paragraph 1
-URI http://asc.fasb.org/extlink&oid=7476318&loc=SL5579240-113959

Reference 10: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 815
-SubTopic 10
-Section 50
-Paragraph 2
-URI http://asc.fasb.org/extlink&oid=7476318&loc=d3e41620-113959

Reference 11: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 235
-SubTopic 10
-Section S99
-Paragraph 1
-Subparagraph (SX 210.4-08.(n)(2))
-URI http://asc.fasb.org/extlink&oid=26873400&loc=d3e23780-122690

+ Details

Inventories (Tables)

3 Months Ended

Mar. 31, 2014

Inventory Disclosure [Abstract]

Summary of Inventories

Inventories consist of the following:


	March 31, 2014		December 31, 2013
Raw materials	$	76,520	$	75,687
Work-in-process		23,140		24,304
Finished goods		47,851		42,736

	$	147,511	$	142,727

Goodwill and Intangible Assets (Tables)

3 Months Ended

Mar. 31, 2014

Goodwill And Intangible Assets Disclosure [Abstract]

Goodwill

The changes in the carrying amount of goodwill and accumulated impairment (loss) during the three months ended March 31, 2014 and twelve months ended December 31, 2013 were as follows:


	2014									2013
	Gross Carrying Amount			Accumulated Impairment (Loss)			Net			Gross Carrying Amount		Accumulated Impairment (Loss)			Net
Beginning balance at January 1	$	290,323		$	(139,414	)	$	150,909		$	290,147	$	(139,414	)	$	150,733
Acquired goodwill⁽¹⁾		381			—			381			—		—			—
Foreign currency translation		(178	)		—			(178	)		176		—			176

Ending balance at March 31, 2014 and December 31, 2013	$	290,526		$	(139,414	)	$	151,112		$	290,323	$	(139,414	)	$	150,909

(1)	During the three months ended March 31, 2014, the Company recorded a purchase accounting adjustment for $381 related to the March 12, 2013 purchase of Alter S.r.l.

Intangible Assets

Components of the Company’s intangible assets are comprised of the following:


As of March 31, 2014:	Gross		Accumulated Amortization			Foreign Currency Translation		Net
Completed technology	$	84,680	$	(78,277	)	$	445	$	6,848
Customer relationships		14,571		(9,983	)		372		4,960
Patents, trademarks, trade names and other		25,636		(25,004	)		79		711

	$	124,887	$	(113,264	)	$	896	$	12,519


As of December 31, 2013:	Gross		Accumulated Amortization			Foreign Currency Translation		Net
Completed technology	$	84,680	$	(78,072	)	$	519	$	7,127
Customer relationships		14,571		(9,831	)		454		5,194
Patents, trademarks, trade names and other		25,636		(24,951	)		84		769

	$	124,887	$	(112,854	)	$	1,057	$	13,090

Estimated Amortization Expense


Year	Amount
2014 (remaining)	$	1,376
2015		1,769
2016		1,586
2017		1,555
2018		1,546
Thereafter		4,687

Other Assets (Tables)

3 Months Ended

Mar. 31, 2014

Deferred Costs Capitalized Prepaid And Other Assets Disclosure [Abstract]

Schedule of Other Assets


	March 31, 2014		December 31, 2013
Other Assets:
Deferred tax assets, net	$	10,969	$	9,208
Long-term income tax receivable		21,315		20,516
Other		2,099		2,123

Total other assets	$	34,383	$	31,847

Other Liabilities (Tables)

3 Months Ended

Mar. 31, 2014

Other Liabilities Disclosure [Abstract]

Schedule of Other Liabilities


	March 31, 2014		December 31, 2013
Other Current Liabilities:
Product warranties	$	7,013	$	6,956
Deferred revenue		6,353		5,556
Other		23,076		21,730

Total other current liabilities	$	36,442	$	34,242


Other Liabilities:
Long-term income tax payable	$	43,713	$	46,745
Accrued compensation		10,690		9,646
Other		6,379		6,682

Total other liabilities	$	60,782	$	63,073

Product Warranties (Tables)

3 Months Ended

Mar. 31, 2014

Guarantees [Abstract]

Product Warranty Activities

Product warranty activities were as follows:


	Three Months Ended March 31,
	2014			2013
Balance at December 31	$	6,956		$	8,266
Provision for product warranties		704			630
Direct charges to warranty liability		(656	)		(1,250	)
Foreign currency translation		9			(113	)

Balance at March 31	$	7,013		$	7,533

Net Income Per Share (Tables)

3 Months Ended

Mar. 31, 2014

Earnings Per Share [Abstract]

Computation of Basic and Diluted Net Income Per Share

The following table sets forth the computation of basic and diluted net income per share:


	Three Months Ended March 31,
	2014		2013
Numerator:
Net income	$	31,245	$	5,761

Denominator:
Shares used in net income per common share – basic		53,411,000		52,773,000
Effect of dilutive securities:
Stock options, restricted stock and employee stock purchase plan		365,000		586,000

Shares used in net income per common share – diluted		53,776,000		53,359,000

Net income per common share:
Basic	$	0.58	$	0.11
Diluted	$	0.58	$	0.11

Business Segment, Geographic Area, Product and Significant Customer Information (Tables)

3 Months Ended

Mar. 31, 2014

Segment Reporting [Abstract]

Net Revenues by Reportable Segment

The following is net revenues by reportable segment:


	Three Months Ended March 31,
	2014			2013
Advanced Manufacturing Capital Equipment	$	169,197		$	104,810
Analytical Solutions Group		14,170			14,396
Europe Region Sales & Service Operations⁽¹⁾		14,386			11,048
Asia Region Sales & Service Operations⁽¹⁾		66,683			47,143
Corporate, Eliminations and Other		(58,083	)		(35,752	)

	$	206,353		$	141,645

(1)

Schedule of Gross Profit (Loss) by Reportable Segment

The following is gross profit by reportable segment:


	Three Months Ended March 31,
	2014			2013
Advanced Manufacturing Capital Equipment	$	67,614		$	34,836
Analytical Solutions Group		6,547			7,448
Europe Region Sales & Service Operations⁽¹⁾		4,240			3,191
Asia Region Sales & Service Operations⁽¹⁾		13,024			8,831
Corporate, Eliminations and Other		(2,053	)		396

	$	89,372		$	54,702

(1)

Schedule of Capital Expenditures, Depreciation and Amortization Expense and Segment Assets by Reportable Segment

The following is capital expenditures by reportable segment for the three months ended March 31, 2014 and 2013:


	Product Groups				Foreign Sales & Service Operations
	Advanced Manufacturing Capital Equipment		Analytical Solutions Group		Europe		Asia		Corporate, Eliminations and Other		Total
Three Months Ended March 31, 2014:
Capital expenditures	$	1,709	$	1,014	$	15	$	122	$	238	$	3,098


	Product Groups				Foreign Sales & Service Operations
	Advanced Manufacturing Capital Equipment		Analytical Solutions Group		Europe		Asia		Corporate, Eliminations and Other		Total
Three Months Ended March 31, 2013:
Capital expenditures	$	2,612	$	111	$	15	$	63	$	555	$	3,356

The following is depreciation and amortization by reportable segment for the three months ended March 31, 2014 and 2013:


	Product Groups				Foreign Sales & Service Operations
	Advanced Manufacturing Capital Equipment		Analytical Solutions Group		Europe		Asia		Corporate, Eliminations and Other		Total
Three Months Ended March 31, 2014:
Depreciation and amortization	$	2,911	$	214	$	90	$	289	$	646	$	4,150


	Product Groups				Foreign Sales & Service Operations
	Advanced Manufacturing Capital Equipment		Analytical Solutions Group		Europe		Asia		Corporate, Eliminations and Other		Total
Three Months Ended March 31, 2013:
Depreciation and amortization	$	2,941	$	243	$	74	$	294	$	540	$	4,092

The following is segment assets by reportable segment:


	Product Groups				Foreign Sales & Service Operations
	Advanced Manufacturing Capital Equipment		Analytical Solutions Group		Europe		Asia		Corporate, Eliminations and Other			Total
March 31, 2014:
Segment assets:
Accounts receivable⁽¹⁾	$	17,055	$	4,513	$	7,592	$	43,216	$	47,087		$	119,463
Inventory		121,897		4,342		4,305		26,475		(9,508	)		147,511

Total segment assets	$	138,952	$	8,855	$	11,897	$	69,691	$	37,579		$	266,974


	Product Groups				Foreign Sales & Service Operations
	Advanced Manufacturing Capital Equipment		Analytical Solutions Group		Europe		Asia		Corporate, Eliminations and Other			Total
December 31, 2013:
Segment assets:
Accounts receivable⁽¹⁾	$	20,767	$	5,603	$	6,538	$	44,207	$	39,629		$	116,744
Inventory		117,822		4,391		4,254		25,094		(8,834	)		142,727

Total segment assets	$	138,589	$	9,994	$	10,792	$	69,301	$	30,795		$	259,471

(1)	A significant portion of segment receivables are processed at the Company’s shared services center at the Corporate location.

Reconciliation of Segment Assets to Consolidated Total Assets

A reconciliation of segment assets to consolidated total assets is as follows:


	March 31, 2014		December 31, 2013
Total segment assets	$	266,974	$	259,471
Cash and cash equivalents and investments		647,223		650,022
Other current assets		35,032		30,143
Property, plant and equipment, net		75,517		77,536
Goodwill and intangible assets, net		163,631		163,999
Other assets		34,383		31,847

Consolidated total assets	$	1,222,760	$	1,213,018

Worldwide Net Revenue for Each Group of Products

Worldwide net revenue for each group of products is as follows:


	Three Months Ended March 31,
	2014		2013
Instruments, Control and Vacuum Products	$	101,657	$	75,186
Power and Reactive Gas Products		90,602		52,063
Analytical Solutions Group Products		14,094		14,396

	$	206,353	$	141,645

Schedule of Net Revenue and Long-Lived Assets by Geographic Regions

Transfers between geographic areas are at negotiated transfer prices and have been eliminated from consolidated net revenues.


	Three Months Ended March 31,
Net revenues:	2014		2013
United States	$	117,377	$	74,567
Korea		27,591		13,477
Japan		16,928		13,829
Europe		19,555		18,803
Asia (excluding Korea and Japan)		24,902		20,969

	$	206,353	$	141,645


Long-lived assets:⁽¹⁾	March 31, 2014		December 31, 2013
United States	$	58,176	$	60,700
Europe		6,222		5,484
Asia		12,775		13,475

	$	77,173	$	79,659

(1)	Long-lived assets include property, plant and equipment, net and certain other long-term assets, excluding long-term income tax receivable.

Customers with Net Revenues Greater than 10% of Total Net Revenues

The Company had two customers with net revenues greater than 10% of total net revenues in the three months ended March 31, 2014 and 2013 as shown below:


	Three Months Ended March 31,
	2014			2013
Customer A		20.3	%		14.7	%
Customer B		13.1	%		9.6	%

Restructuring (Tables)

3 Months Ended

Mar. 31, 2014

Restructuring And Related Activities [Abstract]

Schedule of Company's Restructuring Activity

The activity related to the Company’s restructuring accrual is shown below:


	Three Months Ended March 31,
	2014
Balance at December 31	$	—
Charged to expense		747
Payments		(217	)

Balance at March 31	$	530

Net Book Value of Assets Held for Sale

The net book value of assets held for sale consists of the following:


	March 31, 2014
Land	$	474
Building and building improvements		953

	$	1,427

Investments - Fair Value of Short-Term Available-for-Sale and Trading Investments (Detail) - USD ($) $ in Thousands	Mar. 31, 2014	Dec. 31, 2013
Schedule of Investments [Line Items]
Fair value of short-term available-for-sale investments	$ 306,513	$ 299,715
Fair value of short-term investments	306,513	300,715
Bankers' Acceptance Drafts [Member]
Schedule of Investments [Line Items]
Fair value of short-term available-for-sale investments	637	491
Time Deposits [Member]
Schedule of Investments [Line Items]
Fair value of short-term available-for-sale investments	3,442	3,439
Commercial Paper and Certificates of Deposit [Member]
Schedule of Investments [Line Items]
Fair value of short-term available-for-sale investments	127,524	114,984
Corporate Obligations [Member]
Schedule of Investments [Line Items]
Fair value of short-term available-for-sale investments	16,826	18,351
U.S. Agency Obligations [Member]
Schedule of Investments [Line Items]
Fair value of short-term available-for-sale investments	$ 158,084	162,450
Mutual Funds [Member]
Schedule of Investments [Line Items]
Fair value of short-term investments, mutual funds		$ 1,000

Investments - Fair Value of Long-Term Available-for-Sale Investments (Detail) - USD ($) $ in Thousands	Mar. 31, 2014	Dec. 31, 2013
Schedule of Available-for-sale Securities [Line Items]
Fair value of long-term available-for-sale investments	$ 53,620	$ 60,405
Time Deposits [Member]
Schedule of Available-for-sale Securities [Line Items]
Fair value of long-term available-for-sale investments	54	54
U.S. Agency Obligations [Member]
Schedule of Available-for-sale Securities [Line Items]
Fair value of long-term available-for-sale investments	$ 53,566	$ 60,351

- Definition

Investments in debt and equity securities which are categorized neither as held-to-maturity nor trading and which are intended to be sold or mature more than one year from the balance sheet date or operating cycle, if longer. Such securities are reported at fair value; unrealized gains (losses) related to Available-for-sale Securities are excluded from earnings and reported in a separate component of shareholders' equity (other comprehensive income), unless the Available-for-sale security is designated as a hedge or is determined to have had an other than temporary decline in fair value below its amortized cost basis. All or a portion of the unrealized holding gain (loss) of an Available-for-sale security that is designated as being hedged in a fair value hedge is recognized in earnings during the period of the hedge, as are other than temporary declines in fair value below the cost basis for investments in equity securities and debt securities that an entity intends to sell or it is more likely than not that it will be required to sell before the recovery of its amortized cost basis. Other than temporary declines in fair value below the cost basis for debt securities categorized as Available-for-sale that an entity does not intend to sell and for which it is not more likely than not that the entity will be required to sell before the recovery of its amortized cost basis are bifurcated into credit losses and losses related to all other factors. Other than temporary declines in fair value below cost basis related to credit losses are recognized in earnings, and losses related to all other factors are recognized in other comprehensive income.

+ References + Details

Investments - Gross Unrealized Gains and (Losses) Aggregated by Investment Category Short-Term and Long-Term Securities (Detail) - USD ($) $ in Thousands	Mar. 31, 2014	Dec. 31, 2013
Schedule of Available-for-sale Securities [Line Items]
Short-term investments, Estimated Fair Value	$ 306,513	$ 299,715
Long-term investments, Estimated Fair Value	53,620	60,405
Bankers' Acceptance Drafts [Member]
Schedule of Available-for-sale Securities [Line Items]
Short-term investments, Estimated Fair Value	637	491
Time Deposits [Member]
Schedule of Available-for-sale Securities [Line Items]
Short-term investments, Estimated Fair Value	3,442	3,439
Long-term investments, Estimated Fair Value	54	54
Commercial Paper and Certificates of Deposit [Member]
Schedule of Available-for-sale Securities [Line Items]
Short-term investments, Estimated Fair Value	127,524	114,984
U.S. Agency Obligations [Member]
Schedule of Available-for-sale Securities [Line Items]
Short-term investments, Estimated Fair Value	158,084	162,450
Long-term investments, Estimated Fair Value	53,566	60,351
Short Term [Member]
Schedule of Available-for-sale Securities [Line Items]
Investments, Cost	306,464	299,693
Investments, Gross Unrealized Gains	63	37
Investments, Gross Unrealized (Losses)	(14)	(15)
Short-term investments, Estimated Fair Value	306,513	299,715
Short Term [Member] \| Bankers' Acceptance Drafts [Member]
Schedule of Available-for-sale Securities [Line Items]
Investments, Cost	637	491
Investments, Gross Unrealized Gains
Investments, Gross Unrealized (Losses)
Short-term investments, Estimated Fair Value	637	491
Short Term [Member] \| Time Deposits [Member]
Schedule of Available-for-sale Securities [Line Items]
Investments, Cost	3,442	3,439
Investments, Gross Unrealized Gains
Investments, Gross Unrealized (Losses)
Short-term investments, Estimated Fair Value	3,442	3,439
Short Term [Member] \| Commercial Paper and Certificates of Deposit [Member]
Schedule of Available-for-sale Securities [Line Items]
Investments, Cost	127,514	114,973
Investments, Gross Unrealized Gains	14	15
Investments, Gross Unrealized (Losses)	(4)	(4)
Short-term investments, Estimated Fair Value	127,524	114,984
Short Term [Member] \| U.S. Agency Obligations [Member]
Schedule of Available-for-sale Securities [Line Items]
Investments, Cost	158,044	162,430
Investments, Gross Unrealized Gains	48	22
Investments, Gross Unrealized (Losses)	(8)	(2)
Short-term investments, Estimated Fair Value	158,084	162,450
Short Term [Member] \| Corporate Obligations [Member]
Schedule of Available-for-sale Securities [Line Items]
Investments, Cost	16,827	18,360
Investments, Gross Unrealized Gains	1
Investments, Gross Unrealized (Losses)	(2)	(9)
Short-term investments, Estimated Fair Value	16,826	18,351
Long Term [Member]
Schedule of Available-for-sale Securities [Line Items]
Investments, Cost	53,612	60,428
Investments, Gross Unrealized Gains	18	9
Investments, Gross Unrealized (Losses)	(10)	(32)
Long-term investments, Estimated Fair Value	53,620	60,405
Long Term [Member] \| Time Deposits [Member]
Schedule of Available-for-sale Securities [Line Items]
Investments, Cost	54	54
Investments, Gross Unrealized Gains
Investments, Gross Unrealized (Losses)
Long-term investments, Estimated Fair Value	54	54
Long Term [Member] \| U.S. Agency Obligations [Member]
Schedule of Available-for-sale Securities [Line Items]
Investments, Cost	53,558	60,374
Investments, Gross Unrealized Gains	18	9
Investments, Gross Unrealized (Losses)	(10)	(32)
Long-term investments, Estimated Fair Value	$ 53,566	$ 60,351

Fair Value Measurements - Schedule of Fair Value of Assets and Liabilities Measured on Recurring Basis (Detail) - USD ($) $ in Thousands	Mar. 31, 2014	Dec. 31, 2013
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Derivatives - currency forward contracts	$ 401	$ 920
Derivatives - currency forward contracts	408	656
Long-term investments	53,620	60,405
Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Derivatives - currency forward contracts	401	920
Total assets	424,869	410,638
Derivatives - currency forward contracts	408	656
Cash and cash equivalents	64,335	48,598
Short-term investments	306,513	300,715
Total current assets	371,249	350,233
Long-term investments	53,620	60,405
Other current liabilities	408	656
Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Derivatives - currency forward contracts
Total assets	60,742	39,166
Derivatives - currency forward contracts
Cash and cash equivalents	60,742	38,166
Short-term investments		1,000
Total current assets	60,742	39,166
Long-term investments
Other current liabilities
Significant Other Observable Inputs (Level 2) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Derivatives - currency forward contracts	401	920
Total assets	364,127	371,472
Derivatives - currency forward contracts	408	656
Cash and cash equivalents	3,593	10,432
Short-term investments	306,513	299,715
Total current assets	310,507	311,067
Long-term investments	53,620	60,405
Other current liabilities	408	656
Significant Unobservable Inputs (Level 3) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Derivatives - currency forward contracts
Total assets
Derivatives - currency forward contracts
Cash and cash equivalents
Short-term investments
Total current assets
Long-term investments
Other current liabilities
Money Market Funds [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Cash and cash equivalents	60,742	38,166
Money Market Funds [Member] \| Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Cash and cash equivalents	60,742	38,166
Money Market Funds [Member] \| Significant Other Observable Inputs (Level 2) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Cash and cash equivalents
Money Market Funds [Member] \| Significant Unobservable Inputs (Level 3) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Cash and cash equivalents
Bankers' Acceptance Drafts [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Cash and cash equivalents	25	32
Available-for-sale securities	637	491
Bankers' Acceptance Drafts [Member] \| Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Cash and cash equivalents
Available-for-sale securities
Bankers' Acceptance Drafts [Member] \| Significant Other Observable Inputs (Level 2) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Cash and cash equivalents	25	32
Available-for-sale securities	637	491
Bankers' Acceptance Drafts [Member] \| Significant Unobservable Inputs (Level 3) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Cash and cash equivalents
Available-for-sale securities
Commercial Paper and Certificates of Deposit [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Cash and cash equivalents	3,568	10,400
Available-for-sale securities	127,524	114,984
Commercial Paper and Certificates of Deposit [Member] \| Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Cash and cash equivalents
Available-for-sale securities
Commercial Paper and Certificates of Deposit [Member] \| Significant Other Observable Inputs (Level 2) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Cash and cash equivalents	3,568	10,400
Available-for-sale securities	127,524	114,984
Commercial Paper and Certificates of Deposit [Member] \| Significant Unobservable Inputs (Level 3) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Cash and cash equivalents
Available-for-sale securities
Time Deposits [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Available-for-sale securities	3,496	3,493
Time Deposits [Member] \| Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Available-for-sale securities
Time Deposits [Member] \| Significant Other Observable Inputs (Level 2) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Available-for-sale securities	3,496	3,493
Time Deposits [Member] \| Significant Unobservable Inputs (Level 3) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Available-for-sale securities
Corporate Obligations [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Available-for-sale securities	16,826	18,351
Corporate Obligations [Member] \| Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Available-for-sale securities
Corporate Obligations [Member] \| Significant Other Observable Inputs (Level 2) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Available-for-sale securities	16,826	18,351
Corporate Obligations [Member] \| Significant Unobservable Inputs (Level 3) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Available-for-sale securities
U.S. Agency Obligations [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Available-for-sale securities	211,650	222,801
U.S. Agency Obligations [Member] \| Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Available-for-sale securities
U.S. Agency Obligations [Member] \| Significant Other Observable Inputs (Level 2) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Available-for-sale securities	211,650	222,801
U.S. Agency Obligations [Member] \| Significant Unobservable Inputs (Level 3) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Available-for-sale securities
Other Current Assets [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Derivatives - currency forward contracts	401	920
Other Current Assets [Member] \| Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Derivatives - currency forward contracts
Other Current Assets [Member] \| Significant Other Observable Inputs (Level 2) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Derivatives - currency forward contracts	401	920
Other Current Assets [Member] \| Significant Unobservable Inputs (Level 3) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Derivatives - currency forward contracts
Mutual Funds [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Mutual funds		1,000
Mutual Funds [Member] \| Quoted Prices in Active Markets for Identical Assets (Level 1) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Mutual funds		1,000
Mutual Funds [Member] \| Significant Other Observable Inputs (Level 2) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Mutual funds
Mutual Funds [Member] \| Significant Unobservable Inputs (Level 3) [Member] \| Fair Value Measurements, Recurring [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Mutual funds

Fair Value Measurements - Schedule of Fair Value of Assets and Liabilities Measured on Recurring Basis (Parenthetical) (Detail) - USD ($) $ in Thousands	Mar. 31, 2014	Dec. 31, 2013
Cash [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Not included in cash and cash equivalent amount	$ 211,210	$ 234,675
Non Negotiable Time Deposits [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Not included in cash and cash equivalent amount	$ 11,545	$ 5,629

Derivatives - Additional Information (Detail) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2014	Dec. 31, 2013
Derivative Instruments And Hedging Activities Disclosure [Abstract]
Maximum period for hedging a portion of forecasted foreign currency denominated intercompany sales of inventory	18 months
Gross notional values of outstanding forward foreign exchange contracts	$ 36,893	$ 21,018
Accumulated earnings period	12 months

Derivatives - Summary of Primary Net Hedging Positions and Corresponding Fair Values (Detail) - USD ($) $ in Thousands	Mar. 31, 2014	Dec. 31, 2013
Derivative [Line Items]
Currency Hedged (Buy/Sell), Gross Notional Value, Net	$ 36,893	$ 21,018
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	(7)	264
U.S. Dollar/Japanese Yen [Member]
Derivative [Line Items]
Currency Hedged (Buy/Sell), Gross Notional Value, Net	14,995	7,191
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	345	920
U.S. Dollar/South Korean Won [Member]
Derivative [Line Items]
Currency Hedged (Buy/Sell), Gross Notional Value, Net	15,037	9,254
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	(258)	(521)
U.S. Dollar/Euro [Member]
Derivative [Line Items]
Currency Hedged (Buy/Sell), Gross Notional Value, Net	4,344	2,806
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	(51)	(85)
U.S. Dollar/U.K. Pound Sterling [Member]
Derivative [Line Items]
Currency Hedged (Buy/Sell), Gross Notional Value, Net	2,517	1,767
Currency Hedged (Buy/Sell), Fair Value, Asset/(Liability), Net	$ (43)	$ (50)

Derivatives - Summary of Fair Value Amounts of Company's Derivative Instruments (Detail) - USD ($) $ in Thousands	Mar. 31, 2014	Dec. 31, 2013
Derivatives, Fair Value [Line Items]
Forward exchange contracts, Assets	$ 401	$ 920
Forward exchange contracts, Liabilities	(408)	(656)
Total net derivative asset (liability) designated as hedging instruments	(7)	264
Derivatives Designated as Hedging Instruments [Member]
Derivatives, Fair Value [Line Items]
Forward exchange contracts, Assets	401	920
Forward exchange contracts, Liabilities	(408)	(656)
Total net derivative asset (liability) designated as hedging instruments	$ (7)	$ 264

Derivatives - Summary of Fair Value Amounts of Company's Derivative Instruments (Parenthetical) (Detail) - USD ($) $ in Thousands	Mar. 31, 2014	Dec. 31, 2013
Derivative Instruments And Hedging Activities Disclosure [Abstract]
Derivative assets classified in other current assets	$ 401	$ 920
Derivative liabilities classified in other current liabilities	$ 408	$ 656

Derivatives - Summary of Gains (Losses) on Derivatives Designated as Hedging Instruments (Detail) - Forward Exchange Contracts [Member] - Cash Flow Hedging [Member] - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2014	Mar. 31, 2013
Derivative Instruments, Gain (Loss) [Line Items]
Net (loss) gain recognized in OCI	$ (334)	$ 1,779
Net (loss) gain reclassified from OCI into income	$ (94)	$ 203

Derivatives - Summary of Gains on Derivatives Not Designated as Hedging Instruments (Detail) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2014	Mar. 31, 2013
Derivatives Not Designated as Hedging Instruments [Member]
Derivative Instruments, Gain (Loss) [Line Items]
Net gain recognized in income	$ 106	$ 491

Inventories - Summary of Inventories (Detail) - USD ($) $ in Thousands	Mar. 31, 2014	Dec. 31, 2013
Inventory Disclosure [Abstract]
Raw materials	$ 76,520	$ 75,687
Work-in-process	23,140	24,304
Finished goods	47,851	42,736
Inventories	$ 147,511	$ 142,727

Acquisitions - Additional Information (Detail) - Granville-Phillips [Member] - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2013	Mar. 18, 2014
Business Acquisition [Line Items]
Pending acquisition purchase price		$ 87,000
Market sales of an acquiree	$ 30,000

Goodwill and Intangible Assets - Additional Information (Detail) - USD ($) $ in Thousands		3 Months Ended
	Oct. 31, 2013	Mar. 31, 2014	Mar. 31, 2013
Goodwill And Intangible Assets Disclosure [Abstract]
Impairment of goodwill	$ 0
Aggregate amortization expense related to acquired intangibles		$ 410	$ 434

Goodwill and Intangible Assets - Goodwill (Detail) - USD ($) $ in Thousands	3 Months Ended	12 Months Ended
	Mar. 31, 2014	Dec. 31, 2013
Goodwill And Intangible Assets Disclosure [Abstract]
Beginning balance, Goodwill Gross Carrying Amount	$ 290,323	$ 290,147
Acquired goodwill, Gross Carrying Amount	381
Foreign currency translation, Gross Carrying Amount	(178)	176
Ending balance, Goodwill Gross Carrying Amount	290,526	290,323
Beginning balance, Accumulated Impairment (Loss)	(139,414)	(139,414)
Acquired goodwill, Accumulated Impairment (Loss)
Foreign currency translation, Accumulated Impairment (Loss)
Ending balance, Accumulated Impairment (Loss)	(139,414)	(139,414)
Beginning balance, Goodwill Net	150,909	150,733
Acquired goodwill, Net	381
Foreign currency translation, Net	(178)	176
Ending balance, Goodwill Net	$ 151,112	$ 150,909

Goodwill and Intangible Assets - Goodwill (Parenthetical) (Detail) $ in Thousands	3 Months Ended
	Mar. 31, 2014 USD ($)
Alter S.r.l [Member]
Goodwill [Line Items]
Acquisition purchase price	$ 381

Goodwill and Intangible Assets - Intangible Assets (Detail) - USD ($) $ in Thousands	3 Months Ended	12 Months Ended
	Mar. 31, 2014	Dec. 31, 2013
Finite-Lived Intangible Assets [Line Items]
Intangible assets, Gross	$ 124,887	$ 124,887
Accumulated Amortization	(113,264)	(112,854)
Foreign Currency Translation	896	1,057
Intangible assets, net	12,519	13,090
Completed Technology [Member]
Finite-Lived Intangible Assets [Line Items]
Intangible assets, Gross	84,680	84,680
Accumulated Amortization	(78,277)	(78,072)
Foreign Currency Translation	445	519
Intangible assets, net	6,848	7,127
Customer Relationships [Member]
Finite-Lived Intangible Assets [Line Items]
Intangible assets, Gross	14,571	14,571
Accumulated Amortization	(9,983)	(9,831)
Foreign Currency Translation	372	454
Intangible assets, net	4,960	5,194
Patents, Trademarks, Trade Names and Other [Member]
Finite-Lived Intangible Assets [Line Items]
Intangible assets, Gross	25,636	25,636
Accumulated Amortization	(25,004)	(24,951)
Foreign Currency Translation	79	84
Intangible assets, net	$ 711	$ 769

Goodwill and Intangible Assets - Estimated Amortization Expense (Detail) $ in Thousands	Mar. 31, 2014 USD ($)
Goodwill And Intangible Assets Disclosure [Abstract]
2014 (remaining)	$ 1,376
2015	1,769
2016	1,586
2017	1,555
2018	1,546
Thereafter	$ 4,687

Other Assets - Schedule of Other Assets (Detail) - USD ($) $ in Thousands	Mar. 31, 2014	Dec. 31, 2013
Other Assets:
Deferred tax assets, net	$ 10,969	$ 9,208
Long-term income tax receivable	21,315	20,516
Other	2,099	2,123
Total other assets	$ 34,383	$ 31,847

Other Liabilities - Schedule of Other Liabilities (Detail) - USD ($) $ in Thousands	Mar. 31, 2014	Dec. 31, 2013
Other Current Liabilities:
Product warranties	$ 7,013	$ 6,956
Deferred revenue	6,353	5,556
Other	23,076	21,730
Total other current liabilities	36,442	34,242
Other Liabilities:
Long-term income tax payable	43,713	46,745
Accrued compensation	10,690	9,646
Other	6,379	6,682
Total other liabilities	$ 60,782	$ 63,073

Debt - Additional Information (Detail) - Japan Line of Credit [Member] $ in Thousands	3 Months Ended
	Mar. 31, 2014 USD ($) Institution	Dec. 31, 2013 USD ($)
Debt Instrument [Line Items]
Number of financial institutions for available lines of credit and borrowing arrangements \| Institution	2
Aggregate borrowings expire and renewed	3 month intervals
Total available line of credit	$ 22,527
Total borrowings outstanding	$ 0	$ 0

Product Warranties - Product Warranty Activities (Detail) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2014	Mar. 31, 2013
Guarantees [Abstract]
Beginning balance	$ 6,956	$ 8,266
Provision for product warranties	704	630
Direct charges to warranty liability	(656)	(1,250)
Foreign currency translation	9	(113)
Ending balance	$ 7,013	$ 7,533

Income Taxes - Additional Information (Detail) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2014	Mar. 31, 2013	Dec. 31, 2013
Income Tax Disclosure [Abstract]
Effective tax rate	17.80%	(16.00%)
Gross unrecognized tax benefits excluding interest and penalties	$ 42,794		$ 47,684
Net unrecognized tax benefit excluding interest and penalties that would impact effective tax rate	20,536
Accrued interest on unrecognized tax benefits	$ 1,863		$ 2,159

Net Income Per Share - Computation of Basic and Diluted Net Income Per Share (Detail) - USD ($) $ / shares in Units, $ in Thousands	3 Months Ended
	Mar. 31, 2014	Mar. 31, 2013
Numerator:
Net income	$ 31,245	$ 5,761
Denominator:
Shares used in net income per common share - basic	53,411,000	52,773,000
Effect of dilutive securities:
Stock options, restricted stock and employee stock purchase plan	365,000	586,000
Shares used in net income per common share - diluted	53,776,000	53,359,000
Net income per common share:
Basic	$ 0.58	$ 0.11
Diluted	$ 0.58	$ 0.11

Net Income Per Share - Additional Information (Detail) - shares	3 Months Ended
	Mar. 31, 2014	Mar. 31, 2013
Earnings Per Share [Abstract]
Stock options and restricted stock units outstanding	1,034,000
Number of shares excluded from computation of diluted earnings per share	1,400	98,000

Stockholder's Equity - Additional Information (Detail) - USD ($) $ / shares in Units, $ in Thousands		3 Months Ended
	Jul. 25, 2011	Mar. 31, 2014	Mar. 31, 2013
Equity [Abstract]
Common stock, value of shares authorized to repurchase	$ 200,000
Stock repurchase, shares		32,000
Value of shares repurchased		$ 945
Average price of repurchased shares		$ 29.81
Cash dividend paid		$ 0.16	$ 0.16
Dividend payment to common shareholders		$ 8,553	$ 8,448
Dividend declared date		May 05, 2014
Cash dividend to be paid		$ 0.165
Dividend to be paid date		Jun. 13, 2014
Dividend declared, shareholders of record date		Jun. 02, 2014

Business Segment, Geographic Area, Product and Significant Customer Information - Additional Information (Detail)	3 Months Ended
	Mar. 31, 2014 Segment Customer Product
Segment Reporting [Abstract]
Number of reportable segments	4
Number of operating segments	8
Number of product groups \| Product	3
Number of customers with net revenues greater than 10% of total net revenues \| Customer	2
Entity wide net revenue major customer percentage minimum	10.00%

Business Segment, Geographic Area, Product and Significant Customer Information - Net Revenues by Reportable Segment (Detail) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2014	Mar. 31, 2013
Segment Reporting Information [Line Items]
Total net revenues	$ 206,353	$ 141,645
Advanced Manufacturing Capital Equipment [Member]
Segment Reporting Information [Line Items]
Total net revenues	169,197	104,810
Analytical Solutions Group [Member]
Segment Reporting Information [Line Items]
Total net revenues	14,170	14,396
Europe Region Sales & Service Operations [Member]
Segment Reporting Information [Line Items]
Total net revenues	14,386	11,048
Asia Region Sales & Service Operations [Member]
Segment Reporting Information [Line Items]
Total net revenues	66,683	47,143
Corporate, Eliminations and Other [Member]
Segment Reporting Information [Line Items]
Total net revenues	$ (58,083)	$ (35,752)

Business Segment, Geographic Area, Product and Significant Customer Information - Schedule of Gross Profit (Loss) by Reportable Segment (Detail) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2014	Mar. 31, 2013
Segment Reporting Information [Line Items]
Gross profit	$ 89,372	$ 54,702
Advanced Manufacturing Capital Equipment [Member]
Segment Reporting Information [Line Items]
Gross profit	67,614	34,836
Analytical Solutions Group [Member]
Segment Reporting Information [Line Items]
Gross profit	6,547	7,448
Europe Region Sales & Service Operations [Member]
Segment Reporting Information [Line Items]
Gross profit	4,240	3,191
Asia Region Sales & Service Operations [Member]
Segment Reporting Information [Line Items]
Gross profit	13,024	8,831
Corporate, Eliminations and Other [Member]
Segment Reporting Information [Line Items]
Gross profit	$ (2,053)	$ 396

Business Segment, Geographic Area, Product and Significant Customer Information - Schedule of Capital Expenditures, Depreciation and Amortization Expense and Segment Assets by Reportable Segment (Detail) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2014	Mar. 31, 2013	Dec. 31, 2013
Segment Reporting Information [Line Items]
Capital expenditures	$ 3,098	$ 3,356
Depreciation and amortization	4,150	4,092
Accounts receivable	119,463		$ 116,744
Inventory	147,511		142,727
Total segment assets	266,974		259,471
Advanced Manufacturing Capital Equipment [Member]
Segment Reporting Information [Line Items]
Capital expenditures	1,709	2,612
Depreciation and amortization	2,911	2,941
Accounts receivable	17,055		20,767
Inventory	121,897		117,822
Total segment assets	138,952		138,589
Analytical Solutions Group [Member]
Segment Reporting Information [Line Items]
Capital expenditures	1,014	111
Depreciation and amortization	214	243
Accounts receivable	4,513		5,603
Inventory	4,342		4,391
Total segment assets	8,855		9,994
Europe Region Sales & Service Operations [Member]
Segment Reporting Information [Line Items]
Capital expenditures	15	15
Depreciation and amortization	90	74
Accounts receivable	7,592		6,538
Inventory	4,305		4,254
Total segment assets	11,897		10,792
Asia Region Sales & Service Operations [Member]
Segment Reporting Information [Line Items]
Capital expenditures	122	63
Depreciation and amortization	289	294
Accounts receivable	43,216		44,207
Inventory	26,475		25,094
Total segment assets	69,691		69,301
Corporate, Eliminations and Other [Member]
Segment Reporting Information [Line Items]
Capital expenditures	238	555
Depreciation and amortization	646	$ 540
Accounts receivable	47,087		39,629
Inventory	(9,508)		(8,834)
Total segment assets	$ 37,579		$ 30,795

Business Segment, Geographic Area, Product and Significant Customer Information - Reconciliation of Segment Assets to Consolidated Total Assets (Detail) - USD ($) $ in Thousands	Mar. 31, 2014	Dec. 31, 2013
Segment Reporting Information [Line Items]
Total assets	$ 1,222,760	$ 1,213,018
Other current assets	17,552	16,715
Property, plant and equipment, net	75,517	77,536
Other assets	34,383	31,847
Reconciliation of Segment Assets to Consolidated Assets [Member]
Segment Reporting Information [Line Items]
Total assets	266,974	259,471
Cash and cash equivalents and investments	647,223	650,022
Other current assets	35,032	30,143
Property, plant and equipment, net	75,517	77,536
Goodwill and intangible assets, net	163,631	163,999
Other assets	$ 34,383	$ 31,847

Business Segment, Geographic Area, Product and Significant Customer Information - Worldwide Net Revenue for Each Group of Products (Detail) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2014	Mar. 31, 2013
Revenue from External Customer [Line Items]
Net sales from product groups	$ 206,353	$ 141,645
Instruments Control and Vacuum Products [Member]
Revenue from External Customer [Line Items]
Net sales from product groups	101,657	75,186
Power and Reactive Gas Products [Member]
Revenue from External Customer [Line Items]
Net sales from product groups	90,602	52,063
Analytical Solutions Group Products [Member]
Revenue from External Customer [Line Items]
Net sales from product groups	$ 14,094	$ 14,396

Business Segment, Geographic Area, Product and Significant Customer Information - Schedule of Net Revenue and Long-Lived Assets by Geographic Regions (Detail) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2014	Mar. 31, 2013	Dec. 31, 2013
Revenues from External Customers and Long-Lived Assets [Line Items]
Net revenues	$ 206,353	$ 141,645
Long-lived assets	77,173		$ 79,659
United States [Member]
Revenues from External Customers and Long-Lived Assets [Line Items]
Net revenues	117,377	74,567
Long-lived assets	58,176		60,700
Korea [Member]
Revenues from External Customers and Long-Lived Assets [Line Items]
Net revenues	27,591	13,477
Japan [Member]
Revenues from External Customers and Long-Lived Assets [Line Items]
Net revenues	16,928	13,829
Europe [Member]
Revenues from External Customers and Long-Lived Assets [Line Items]
Net revenues	19,555	18,803
Long-lived assets	6,222		5,484
Asia (excluding Korea and Japan in 2013 and Japan in 2014) [Member]
Revenues from External Customers and Long-Lived Assets [Line Items]
Net revenues	24,902	$ 20,969
Long-lived assets	$ 12,775		$ 13,475

Business Segment, Geographic Area, Product and Significant Customer Information - Customers with Net Revenues Greater than 10% of Total Net Revenues (Detail)	3 Months Ended
	Mar. 31, 2014	Mar. 31, 2013
Customer A [Member]
Revenue, Major Customer [Line Items]
Percentage of total net revenues	20.30%	14.70%
Customer B [Member]
Revenue, Major Customer [Line Items]
Percentage of total net revenues	13.10%	9.60%

Restructuring - Additional Information (Detail) $ in Thousands	3 Months Ended
	Mar. 31, 2014 USD ($) People Facility	Mar. 31, 2013 USD ($)
Reorganizations [Abstract]
Restructuring charges \| $	$ 747	$ 40
Approximate number of workforce reduction from the company's headcount \| People	65
Number of facilities closing \| Facility	1

Restructuring - Schedule of Company's Restructuring Activity (Detail) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2014	Mar. 31, 2013
Restructuring And Related Activities [Abstract]
Balance at December 31
Charged to expense	747	$ 40
Payments	(217)
Balance at March 31	$ 530

Restructuring - Net Book Value of Assets Held for Sale (Detail) $ in Thousands	Mar. 31, 2014 USD ($)
Long Lived Assets Held-for-sale [Line Items]
Net book value of assets held for sale	$ 1,427
Land [Member]
Long Lived Assets Held-for-sale [Line Items]
Net book value of assets held for sale	474
Building and Building Improvements [Member]
Long Lived Assets Held-for-sale [Line Items]
Net book value of assets held for sale	$ 953