<?xml version="1.0" encoding="utf-8"?>
<xbrl
  xmlns="http://www.xbrl.org/2003/instance"
  xmlns:dei="http://xbrl.sec.gov/dei/2024"
  xmlns:link="http://www.xbrl.org/2003/linkbase"
  xmlns:xlink="http://www.w3.org/1999/xlink">
    <link:schemaRef xlink:href="mksi-20250212.xsd" xlink:type="simple"/>
    <context id="C_b775a23e-7fd6-446b-91c3-fc303385cd8f">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001049502</identifier>
        </entity>
        <period>
            <startDate>2025-02-12</startDate>
            <endDate>2025-02-12</endDate>
        </period>
    </context>
    <dei:EntityCentralIndexKey
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_3a15c493-0f66-473d-b23e-43d8e1bc12ac">0001049502</dei:EntityCentralIndexKey>
    <dei:AmendmentFlag
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_e8753d42-e092-46cc-95df-d2a01fedaa3a">false</dei:AmendmentFlag>
    <dei:DocumentType
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_8f00bbeb-5636-47c1-9e5c-02399a78396b">8-K</dei:DocumentType>
    <dei:DocumentPeriodEndDate
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_0dbc5788-34ea-4bdd-a120-ee096d9e8dde">2025-02-12</dei:DocumentPeriodEndDate>
    <dei:EntityRegistrantName
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_f58bd828-6ce7-45ff-934d-8463731ee023">MKS INSTRUMENTS, INC.</dei:EntityRegistrantName>
    <dei:EntityIncorporationStateCountryCode
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_cce79ca3-3004-42ca-8f68-41c49dff2995">MA</dei:EntityIncorporationStateCountryCode>
    <dei:EntityFileNumber
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_20f946d3-919f-42b4-bb57-a8f34125fb2b">000-23621</dei:EntityFileNumber>
    <dei:EntityTaxIdentificationNumber
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_1bede778-055e-4e69-8b11-9b3bafbd1a93">04-2277512</dei:EntityTaxIdentificationNumber>
    <dei:EntityAddressAddressLine1
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_590672e9-c502-40d1-8274-d2160d500709">2 Tech Drive</dei:EntityAddressAddressLine1>
    <dei:EntityAddressAddressLine2
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_c74d5f5d-34ab-43c6-a66f-d0ca3137bb9f">Suite 201</dei:EntityAddressAddressLine2>
    <dei:EntityAddressCityOrTown
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_185a95a1-51d9-4742-a753-7fde3e37c157">Andover</dei:EntityAddressCityOrTown>
    <dei:EntityAddressStateOrProvince
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_efddecc5-902c-4edc-9012-9be067e571ea">MA</dei:EntityAddressStateOrProvince>
    <dei:EntityAddressPostalZipCode
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_b5888b20-226b-4265-8409-8f8c87285a54">01810</dei:EntityAddressPostalZipCode>
    <dei:CityAreaCode
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_6fef256e-1c34-4eee-a2c4-415039610110">978</dei:CityAreaCode>
    <dei:LocalPhoneNumber
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_12a0cee6-31c2-48ae-a88a-1d25e213105c">645-5500</dei:LocalPhoneNumber>
    <dei:EntityInformationFormerLegalOrRegisteredName
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_4656f540-3803-406c-a8c5-89d408cd4d31">Not Applicable</dei:EntityInformationFormerLegalOrRegisteredName>
    <dei:WrittenCommunications
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_0091b9f7-77b1-401a-877a-323028440901">false</dei:WrittenCommunications>
    <dei:SolicitingMaterial
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_b556b881-ba6a-4adc-8521-1f7f6d2e18c0">false</dei:SolicitingMaterial>
    <dei:PreCommencementTenderOffer
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_03623366-dc34-4d8e-942d-e73c5a7fc406">false</dei:PreCommencementTenderOffer>
    <dei:PreCommencementIssuerTenderOffer
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_54199c53-7195-4968-bd85-4c2ddd8bbd72">false</dei:PreCommencementIssuerTenderOffer>
    <dei:Security12bTitle
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_7d6de631-4eb2-41b3-af74-5bbcd9c268df">Common Stock, no par value</dei:Security12bTitle>
    <dei:TradingSymbol
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_bf978c50-d611-4495-8474-2ff0672bce08">MKSI</dei:TradingSymbol>
    <dei:SecurityExchangeName
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_1e45c6bc-1479-4d8e-bf3f-ecc6625f2b35">NASDAQ</dei:SecurityExchangeName>
    <dei:EntityEmergingGrowthCompany
      contextRef="C_b775a23e-7fd6-446b-91c3-fc303385cd8f"
      id="F_49802a16-dcb0-41e0-b729-1b20d055f6f8">false</dei:EntityEmergingGrowthCompany>
</xbrl>
