<?xml version="1.0" encoding="US-ASCII"?>
<!-- DFIN New ActiveDisclosure (SM) XBRL Schema Document - http://www.dfinsolutions.com/ -->
<!-- Creation Date :2026-02-24T14:19:11.0732+00:00 -->
<!-- Copyright (c) 2026 Donnelley Financial Solutions, Inc. All Rights Reserved. -->
<xsd:schema targetNamespace="http://www.mksinst.com/20251231" attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:dtr-types="http://www.xbrl.org/dtr/type/2024-01-31" xmlns:country="http://xbrl.sec.gov/country/2025" xmlns:ecd-sub="http://xbrl.sec.gov/ecd-sub/2025" xmlns:ecd="http://xbrl.sec.gov/ecd/2025" xmlns:mksi="http://www.mksinst.com/20251231" xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:dei="http://xbrl.sec.gov/dei/2025" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:cyd="http://xbrl.sec.gov/cyd/2025" xmlns:enum2="http://xbrl.org/2020/extensible-enumerations-2.0" xmlns:srt="http://fasb.org/srt/2025" xmlns:exch="http://xbrl.sec.gov/exch/2025" xmlns:us-gaap="http://fasb.org/us-gaap/2025" xmlns:xlink="http://www.w3.org/1999/xlink">
  <xsd:import schemaLocation="http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd" namespace="http://www.xbrl.org/2003/instance"/>
  <xsd:import schemaLocation="http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" namespace="http://www.xbrl.org/2003/linkbase"/>
  <xsd:import schemaLocation="http://www.xbrl.org/2005/xbrldt-2005.xsd" namespace="http://xbrl.org/2005/xbrldt"/>
  <xsd:import schemaLocation="https://xbrl.sec.gov/ecd/2025/ecd-2025.xsd" namespace="http://xbrl.sec.gov/ecd/2025"/>
  <xsd:import schemaLocation="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd" namespace="http://fasb.org/us-gaap/2025"/>
  <xsd:import schemaLocation="https://xbrl.sec.gov/exch/2025/exch-2025.xsd" namespace="http://xbrl.sec.gov/exch/2025"/>
  <xsd:import schemaLocation="https://www.xbrl.org/2020/extensible-enumerations-2.0.xsd" namespace="http://xbrl.org/2020/extensible-enumerations-2.0"/>
  <xsd:import schemaLocation="https://www.xbrl.org/dtr/type/2024-01-31/types.xsd" namespace="http://www.xbrl.org/dtr/type/2024-01-31"/>
  <xsd:import schemaLocation="https://xbrl.sec.gov/country/2025/country-2025.xsd" namespace="http://xbrl.sec.gov/country/2025"/>
  <xsd:import schemaLocation="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd" namespace="http://fasb.org/srt/2025"/>
  <xsd:import schemaLocation="https://xbrl.sec.gov/ecd/2025/ecd-sub-2025.xsd" namespace="http://xbrl.sec.gov/ecd-sub/2025"/>
  <xsd:import schemaLocation="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd" namespace="http://xbrl.sec.gov/cyd/2025"/>
  <xsd:import schemaLocation="https://xbrl.sec.gov/dei/2025/dei-2025.xsd" namespace="http://xbrl.sec.gov/dei/2025"/>
  <xsd:import schemaLocation="https://www.xbrl.org/2023/calculation-1.1.xsd" namespace="https://xbrl.org/2023/calculation-1.1"/>
  <xsd:annotation>
    <xsd:appinfo>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DocumentCoverPage" id="Role_DocumentCoverPage">
        <link:definition>75000 - Document - Cover Page</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_StatementConsolidatedBalanceSheets" id="Role_StatementConsolidatedBalanceSheets">
        <link:definition>75010 - Statement - Consolidated Balance Sheets</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_StatementConsolidatedBalanceSheetsParenthetical" id="Role_StatementConsolidatedBalanceSheetsParenthetical">
        <link:definition>75020 - Statement - Consolidated Balance Sheets (Parenthetical)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/StatementConsolidatedStatementsOfOperationsAndComprehensiveIncomeLoss" id="StatementConsolidatedStatementsOfOperationsAndComprehensiveIncomeLoss">
        <link:definition>75030 - Statement - Consolidated Statements of Operations and Comprehensive Income (Loss)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_StatementConsolidatedStatementsOfStockholdersEquity" id="Role_StatementConsolidatedStatementsOfStockholdersEquity">
        <link:definition>75040 - Statement - Consolidated Statements of Stockholders' Equity</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_StatementConsolidatedStatementsOfStockholdersEquityParenthetical" id="Role_StatementConsolidatedStatementsOfStockholdersEquityParenthetical">
        <link:definition>75050 - Statement - Consolidated Statements of Stockholders' Equity (Parenthetical)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_StatementConsolidatedStatementsOfCashFlows" id="Role_StatementConsolidatedStatementsOfCashFlows">
        <link:definition>75060 - Statement - Consolidated Statements of Cash Flows</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureCybersecurityRiskManagementStrategyAndGovernance" id="DisclosureCybersecurityRiskManagementStrategyAndGovernance">
        <link:definition>995455 - Disclosure - Cybersecurity Risk Management, Strategy and Governance</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureBusinessDescription" id="Role_DisclosureBusinessDescription">
        <link:definition>995465 - Disclosure - Business Description</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureBasisOfPresentation" id="Role_DisclosureBasisOfPresentation">
        <link:definition>995475 - Disclosure - Basis of Presentation</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureSummaryOfSignificantAccountingPolicies" id="Role_DisclosureSummaryOfSignificantAccountingPolicies">
        <link:definition>995485 - Disclosure - Summary of Significant Accounting Policies</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRecentAccountingPronouncements" id="DisclosureRecentAccountingPronouncements">
        <link:definition>995495 - Disclosure - Recent Accounting Pronouncements</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureRevenueFromContractsWithCustomers" id="Role_DisclosureRevenueFromContractsWithCustomers">
        <link:definition>995505 - Disclosure - Revenue from Contracts with Customers</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureNetIncomeLossPerShare" id="DisclosureNetIncomeLossPerShare">
        <link:definition>995515 - Disclosure - Net Income (Loss) Per Share</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureFairValueMeasurements" id="Role_DisclosureFairValueMeasurements">
        <link:definition>995525 - Disclosure - Fair Value Measurements</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedge" id="DisclosureDerivativesAndNetInvestmentHedge">
        <link:definition>995535 - Disclosure - Derivatives and Net Investment Hedge</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureInventories" id="Role_DisclosureInventories">
        <link:definition>995545 - Disclosure - Inventories</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosurePropertyPlantAndEquipment" id="Role_DisclosurePropertyPlantAndEquipment">
        <link:definition>995555 - Disclosure - Property, Plant and Equipment</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureLeases" id="Role_DisclosureLeases">
        <link:definition>995565 - Disclosure - Leases</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureGoodwillAndIntangibleAssets" id="Role_DisclosureGoodwillAndIntangibleAssets">
        <link:definition>995575 - Disclosure - Goodwill and Intangible Assets</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureProductWarranties" id="Role_DisclosureProductWarranties">
        <link:definition>995585 - Disclosure - Product Warranties</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureDebt" id="Role_DisclosureDebt">
        <link:definition>995595 - Disclosure - Debt</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureOtherCurrentLiabilities" id="DisclosureOtherCurrentLiabilities">
        <link:definition>995605 - Disclosure - Other Current Liabilities</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureIncomeTaxes" id="Role_DisclosureIncomeTaxes">
        <link:definition>995615 - Disclosure - Income Taxes</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockBasedCompensation" id="Role_DisclosureStockBasedCompensation">
        <link:definition>995625 - Disclosure - Stock-Based Compensation</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockholdersEquity" id="Role_DisclosureStockholdersEquity">
        <link:definition>995635 - Disclosure - Stockholders' Equity</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlans" id="Role_DisclosureEmployeeBenefitPlans">
        <link:definition>995645 - Disclosure - Employee Benefit Plans</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformation" id="DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformation">
        <link:definition>995655 - Disclosure - Business Segment, Geographic Area, Product Information and Significant Customer Information</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRestructuring1" id="DisclosureRestructuring1">
        <link:definition>995665 - Disclosure - Restructuring</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureCommitmentsAndContingencies" id="Role_DisclosureCommitmentsAndContingencies">
        <link:definition>995675 - Disclosure - Commitments and Contingencies</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureSubsequentEvents" id="DisclosureSubsequentEvents">
        <link:definition>995685 - Disclosure - Subsequent Events</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureScheduleIIValuationAndQualifyingAccounts" id="Role_DisclosureScheduleIIValuationAndQualifyingAccounts">
        <link:definition>995695 - Disclosure - Schedule II - Valuation and Qualifying Accounts</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureSummaryOfSignificantAccountingPoliciesPolicies" id="Role_DisclosureSummaryOfSignificantAccountingPoliciesPolicies">
        <link:definition>995705 - Disclosure - Summary of Significant Accounting Policies (Policies)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureRevenueFromContractsWithCustomersTables" id="Role_DisclosureRevenueFromContractsWithCustomersTables">
        <link:definition>995715 - Disclosure - Revenue from Contracts with Customers (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureNetIncomeLossPerShareTables" id="DisclosureNetIncomeLossPerShareTables">
        <link:definition>995725 - Disclosure - Net Income (Loss) Per Share (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureFairValueMeasurementsTables" id="Role_DisclosureFairValueMeasurementsTables">
        <link:definition>995735 - Disclosure - Fair Value Measurements (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedgeTables" id="DisclosureDerivativesAndNetInvestmentHedgeTables">
        <link:definition>995745 - Disclosure - Derivatives and Net Investment Hedge (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureInventoriesTables" id="Role_DisclosureInventoriesTables">
        <link:definition>995755 - Disclosure - Inventories (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosurePropertyPlantAndEquipmentTables" id="Role_DisclosurePropertyPlantAndEquipmentTables">
        <link:definition>995765 - Disclosure - Property, Plant and Equipment (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureLeasesTables" id="Role_DisclosureLeasesTables">
        <link:definition>995775 - Disclosure - Leases (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureGoodwillAndIntangibleAssetsTables" id="Role_DisclosureGoodwillAndIntangibleAssetsTables">
        <link:definition>995785 - Disclosure - Goodwill and Intangible Assets (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureProductWarrantiesTables" id="Role_DisclosureProductWarrantiesTables">
        <link:definition>995795 - Disclosure - Product Warranties (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureDebtTables" id="Role_DisclosureDebtTables">
        <link:definition>995805 - Disclosure - Debt (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureOtherCurrentLiabilitiesTables" id="DisclosureOtherCurrentLiabilitiesTables">
        <link:definition>995815 - Disclosure - Other Current Liabilities (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureIncomeTaxesTables" id="Role_DisclosureIncomeTaxesTables">
        <link:definition>995825 - Disclosure - Income Taxes (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockBasedCompensationTables" id="Role_DisclosureStockBasedCompensationTables">
        <link:definition>995835 - Disclosure - Stock-Based Compensation (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureStockholdersEquityTables" id="DisclosureStockholdersEquityTables">
        <link:definition>995845 - Disclosure - Stockholders' Equity (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansTables" id="Role_DisclosureEmployeeBenefitPlansTables">
        <link:definition>995855 - Disclosure - Employee Benefit Plans (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationTables" id="DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationTables">
        <link:definition>995865 - Disclosure - Business Segment, Geographic Area, Product Information and Significant Customer Information (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRestructuringTables" id="DisclosureRestructuringTables">
        <link:definition>995875 - Disclosure - Restructuring (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBasisOfPresentationAdditionalInformationDetail" id="DisclosureBasisOfPresentationAdditionalInformationDetail">
        <link:definition>995885 - Disclosure - Basis of Presentation - Additional Information (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureSummaryOfSignificantAccountingPoliciesAdditionalInformationDetail" id="Role_DisclosureSummaryOfSignificantAccountingPoliciesAdditionalInformationDetail">
        <link:definition>995895 - Disclosure - Summary of Significant Accounting Policies - Additional Information (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRecentAccountingPronouncementsAdditionalInformationDetail" id="DisclosureRecentAccountingPronouncementsAdditionalInformationDetail">
        <link:definition>995905 - Disclosure - Recent Accounting Pronouncements - Additional Information (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureRevenueFromContractsWithCustomersAdditionalInformationDetail" id="Role_DisclosureRevenueFromContractsWithCustomersAdditionalInformationDetail">
        <link:definition>995915 - Disclosure - Revenue from Contracts with Customers - Additional Information (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureRevenueFromContractsWithCustomersScheduleOfDeferredRevenueAndCustomerAdvancesByArrangementDetail" id="Role_DisclosureRevenueFromContractsWithCustomersScheduleOfDeferredRevenueAndCustomerAdvancesByArrangementDetail">
        <link:definition>995925 - Disclosure - Revenue from Contracts with Customers - Schedule of Deferred Revenue and Customer Advances by Arrangement (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureRevenueFromContractsWithCustomersScheduleOfDeferredRevenueAndCustomerAdvancesByArrangementParentheticalDetail" id="Role_DisclosureRevenueFromContractsWithCustomersScheduleOfDeferredRevenueAndCustomerAdvancesByArrangementParentheticalDetail">
        <link:definition>995935 - Disclosure - Revenue from Contracts with Customers - Schedule of Deferred Revenue and Customer Advances by Arrangement (Parenthetical) (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRevenueFromContractsWithCustomersSummaryOfRevenueFromContractsWithCustomersDetails" id="DisclosureRevenueFromContractsWithCustomersSummaryOfRevenueFromContractsWithCustomersDetails">
        <link:definition>995945 - Disclosure - Revenue from Contracts with Customers - Summary of Revenue from Contracts with Customers (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureNetIncomeLossPerShareComputationOfBasicAndDilutedNetIncomeLossPerShareDetail" id="DisclosureNetIncomeLossPerShareComputationOfBasicAndDilutedNetIncomeLossPerShareDetail">
        <link:definition>995955 - Disclosure - Net Income (Loss) Per Share - Computation of Basic and Diluted Net Income (Loss) Per Share (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureFairValueMeasurementsScheduleOfFairValueOfAssetsAndLiabilitiesMeasuredOnRecurringBasisDetail" id="Role_DisclosureFairValueMeasurementsScheduleOfFairValueOfAssetsAndLiabilitiesMeasuredOnRecurringBasisDetail">
        <link:definition>995965 - Disclosure - Fair Value Measurements - Schedule of Fair Value of Assets and Liabilities Measured on Recurring Basis (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureFairValueMeasurementsScheduleOfFairValueOfAssetsAndLiabilitiesMeasuredOnRecurringBasisParentheticalDetail" id="DisclosureFairValueMeasurementsScheduleOfFairValueOfAssetsAndLiabilitiesMeasuredOnRecurringBasisParentheticalDetail">
        <link:definition>995975 - Disclosure - Fair Value Measurements - Schedule of Fair Value of Assets and Liabilities Measured on Recurring Basis (Parenthetical) (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureFairValueMeasurementsScheduleOfEstimatedFairValueAndCarryingValueOfCompanysDebtDetail" id="DisclosureFairValueMeasurementsScheduleOfEstimatedFairValueAndCarryingValueOfCompanysDebtDetail">
        <link:definition>995985 - Disclosure - Fair Value Measurements - Schedule of Estimated Fair Value and Carrying Value of Company's Debt (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedgeAdditionalInformationDetail" id="DisclosureDerivativesAndNetInvestmentHedgeAdditionalInformationDetail">
        <link:definition>995995 - Disclosure - Derivatives and Net Investment Hedge - Additional Information (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedgeSummaryOfNotionalValuesOfForeignExchangeForwardContractsOutstandingDetail" id="DisclosureDerivativesAndNetInvestmentHedgeSummaryOfNotionalValuesOfForeignExchangeForwardContractsOutstandingDetail">
        <link:definition>996005 - Disclosure - Derivatives and Net Investment Hedge -Summary of Notional Values of Foreign Exchange Forward Contracts Outstanding (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedgeSummaryOfNetGainsLossesOnDerivativesDesignatedAsCashFlowHedgingInstrumentsDetail" id="DisclosureDerivativesAndNetInvestmentHedgeSummaryOfNetGainsLossesOnDerivativesDesignatedAsCashFlowHedgingInstrumentsDetail">
        <link:definition>996015 - Disclosure - Derivatives and Net Investment Hedge - Summary of Net Gains (Losses) on Derivatives Designated as Cash Flow Hedging Instruments (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedgeSummaryOfNetLossesGainsOnDerivativesNotDesignatedAsHedgingInstrumentsDetail" id="DisclosureDerivativesAndNetInvestmentHedgeSummaryOfNetLossesGainsOnDerivativesNotDesignatedAsHedgingInstrumentsDetail">
        <link:definition>996025 - Disclosure - Derivatives and Net Investment Hedge - Summary of Net (Losses) Gains on Derivatives Not Designated as Hedging Instruments (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureInventoriesSummaryOfInventoriesDetail" id="Role_DisclosureInventoriesSummaryOfInventoriesDetail">
        <link:definition>996035 - Disclosure - Inventories - Summary of Inventories (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureInventoriesAdditionalInformationDetail" id="Role_DisclosureInventoriesAdditionalInformationDetail">
        <link:definition>996045 - Disclosure - Inventories - Additional Information (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosurePropertyPlantAndEquipmentSummaryOfPropertyPlantAndEquipmentDetail" id="Role_DisclosurePropertyPlantAndEquipmentSummaryOfPropertyPlantAndEquipmentDetail">
        <link:definition>996055 - Disclosure - Property, Plant and Equipment - Summary of Property, Plant and Equipment (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosurePropertyPlantAndEquipmentAdditionalInformationDetail" id="Role_DisclosurePropertyPlantAndEquipmentAdditionalInformationDetail">
        <link:definition>996065 - Disclosure - Property, Plant and Equipment - Additional Information (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureLeasesScheduleOfLeasesDetail" id="DisclosureLeasesScheduleOfLeasesDetail">
        <link:definition>996075 - Disclosure - Leases - Schedule of Leases (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureLeasesSummaryOfSupplementalCashFlowInformationRelatedToLeasesDetails" id="DisclosureLeasesSummaryOfSupplementalCashFlowInformationRelatedToLeasesDetails">
        <link:definition>996085 - Disclosure - Leases - Summary of Supplemental Cash Flow Information Related to Leases (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureLeasesSummaryOfWeightedAverageRemainingTermsForAllLeasesDetails" id="DisclosureLeasesSummaryOfWeightedAverageRemainingTermsForAllLeasesDetails">
        <link:definition>996095 - Disclosure - Leases - Summary of Weighted Average Remaining Terms for All Leases (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureLeasesScheduleOfFutureLeasePaymentsDetail" id="Role_DisclosureLeasesScheduleOfFutureLeasePaymentsDetail">
        <link:definition>996105 - Disclosure - Leases - Schedule of Future Lease Payments (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureLeasesScheduleOfFutureLeasePaymentsDetail3" id="DisclosureLeasesScheduleOfFutureLeasePaymentsDetail3">
        <link:definition>996115 - Disclosure - Leases - Schedule of Future Lease Payments (Detail) 3</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureLeasesScheduleOfFutureLeasePaymentsDetail4" id="DisclosureLeasesScheduleOfFutureLeasePaymentsDetail4">
        <link:definition>996125 - Disclosure - Leases - Schedule of Future Lease Payments (Detail) 4</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureLeasesScheduleOfFutureLeasePaymentsDetail2" id="Role_DisclosureLeasesScheduleOfFutureLeasePaymentsDetail2">
        <link:definition>996135 - Disclosure - Leases - Schedule of Future Lease Payments (Detail) 2</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureGoodwillAndIntangibleAssetsSummaryOfGoodwillAssociatedWithReportableSegmentsDetail" id="DisclosureGoodwillAndIntangibleAssetsSummaryOfGoodwillAssociatedWithReportableSegmentsDetail">
        <link:definition>996145 - Disclosure - Goodwill and Intangible Assets - Summary of Goodwill Associated with Reportable Segments (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureGoodwillAndIntangibleAssetsComponentsOfIntangibleAssetsDetail" id="DisclosureGoodwillAndIntangibleAssetsComponentsOfIntangibleAssetsDetail">
        <link:definition>996155 - Disclosure - Goodwill and Intangible Assets - Components of Intangible Assets (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureGoodwillAndIntangibleAssetsAdditionalInformationDetail" id="Role_DisclosureGoodwillAndIntangibleAssetsAdditionalInformationDetail">
        <link:definition>996165 - Disclosure - Goodwill and Intangible Assets - Additional Information (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureGoodwillAndIntangibleAssetsEstimatedAmortizationExpenseDetail" id="DisclosureGoodwillAndIntangibleAssetsEstimatedAmortizationExpenseDetail">
        <link:definition>996175 - Disclosure - Goodwill and Intangible Assets - Estimated Amortization Expense (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureProductWarrantiesProductWarrantyActivitiesDetail" id="Role_DisclosureProductWarrantiesProductWarrantyActivitiesDetail">
        <link:definition>996185 - Disclosure - Product Warranties - Product Warranty Activities (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureProductWarrantiesAdditionalInformationDetail" id="DisclosureProductWarrantiesAdditionalInformationDetail">
        <link:definition>996195 - Disclosure - Product Warranties - Additional Information (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureDebtScheduleOfShortTermDebtDetail" id="Role_DisclosureDebtScheduleOfShortTermDebtDetail">
        <link:definition>996205 - Disclosure - Debt - Schedule of Short-Term Debt (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureDebtScheduleOfLongTermDebtDetail" id="Role_DisclosureDebtScheduleOfLongTermDebtDetail">
        <link:definition>996215 - Disclosure - Debt - Schedule of Long-Term Debt (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDebtCreditFacilitiesAdditionalInformationDetail" id="DisclosureDebtCreditFacilitiesAdditionalInformationDetail">
        <link:definition>996225 - Disclosure - Debt - Credit Facilities - Additional Information (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDebtConvertibleSeniorNotesAdditionalInformationDetail" id="DisclosureDebtConvertibleSeniorNotesAdditionalInformationDetail">
        <link:definition>996235 - Disclosure - Debt - Convertible Senior Notes - Additional Information (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDebtScheduleOfInterestExpenseDetails" id="DisclosureDebtScheduleOfInterestExpenseDetails">
        <link:definition>996245 - Disclosure - Debt - Schedule of Interest Expense (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureDebtLinesOfCreditAndBorrowingArrangementsAdditionalInformationDetail" id="Role_DisclosureDebtLinesOfCreditAndBorrowingArrangementsAdditionalInformationDetail">
        <link:definition>996255 - Disclosure - Debt - Lines of Credit and Borrowing Arrangements - Additional Information (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureDebtScheduleOfContractualMaturitiesOfDebtObligationsDetail" id="Role_DisclosureDebtScheduleOfContractualMaturitiesOfDebtObligationsDetail">
        <link:definition>996265 - Disclosure - Debt - Schedule of Contractual Maturities of Debt Obligations (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureOtherCurrentLiabilitiesSummaryOfOtherCurrentLiabilitiesDetail" id="DisclosureOtherCurrentLiabilitiesSummaryOfOtherCurrentLiabilitiesDetail">
        <link:definition>996275 - Disclosure - Other Current Liabilities - Summary of Other current liabilities (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureIncomeTaxesComponentsOfIncomeLossBeforeIncomeTaxesAndRelatedProvisionBenefitForIncomeTaxesDetail" id="DisclosureIncomeTaxesComponentsOfIncomeLossBeforeIncomeTaxesAndRelatedProvisionBenefitForIncomeTaxesDetail">
        <link:definition>996285 - Disclosure - Income Taxes - Components of Income (Loss) Before Income Taxes and Related Provision (Benefit) for Income Taxes (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureIncomeTaxesReconciliationOfCompanySEffectiveTaxRateToUSFederalStatutoryRateDetail" id="Role_DisclosureIncomeTaxesReconciliationOfCompanySEffectiveTaxRateToUSFederalStatutoryRateDetail">
        <link:definition>996295 - Disclosure - Income Taxes - Reconciliation of Company's Effective Tax Rate to U.S. Federal Statutory Rate (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureIncomeTaxesSignificantComponentsOfDeferredTaxAssetsAndDeferredTaxLiabilitiesDetail" id="Role_DisclosureIncomeTaxesSignificantComponentsOfDeferredTaxAssetsAndDeferredTaxLiabilitiesDetail">
        <link:definition>996305 - Disclosure - Income Taxes - Significant Components of Deferred Tax Assets and Deferred Tax Liabilities (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureIncomeTaxesAdditionalInformationDetail" id="Role_DisclosureIncomeTaxesAdditionalInformationDetail">
        <link:definition>996315 - Disclosure - Income Taxes - Additional Information (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureIncomeTaxesReconciliationOfBeginningAndEndingAmountOfGrossUnrecognizedTaxBenefitsExcludingInterestAndPenaltiesDetail" id="DisclosureIncomeTaxesReconciliationOfBeginningAndEndingAmountOfGrossUnrecognizedTaxBenefitsExcludingInterestAndPenaltiesDetail">
        <link:definition>996325 - Disclosure - Income Taxes - Reconciliation of Beginning and Ending Amount of Gross Unrecognized Tax Benefits, Excluding Interest and Penalties (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureIncomeTaxesComponentsOfCashPaidNetOfRefundsReceivedForIncomeTaxesDetails" id="DisclosureIncomeTaxesComponentsOfCashPaidNetOfRefundsReceivedForIncomeTaxesDetails">
        <link:definition>996335 - Disclosure - Income Taxes - Components of Cash Paid (Net of Refunds Received) for Income Taxes (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockBasedCompensationAdditionalInformationDetail" id="Role_DisclosureStockBasedCompensationAdditionalInformationDetail">
        <link:definition>996345 - Disclosure - Stock-Based Compensation - Additional Information (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockBasedCompensationFairValueOfEmployeePurchaseRightsEstimatedUsingBlackScholesOptionPricingModelDetail" id="Role_DisclosureStockBasedCompensationFairValueOfEmployeePurchaseRightsEstimatedUsingBlackScholesOptionPricingModelDetail">
        <link:definition>996355 - Disclosure - Stock-Based Compensation - Fair Value of Employee Purchase Rights Estimated Using Black-Scholes Option-Pricing Model (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockBasedCompensationSummaryOfActivityForRsusDetail" id="Role_DisclosureStockBasedCompensationSummaryOfActivityForRsusDetail">
        <link:definition>996365 - Disclosure - Stock-Based Compensation - Summary of Activity for RSUs (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockBasedCompensationEffectOfRecordingStockBasedCompensationDetail" id="Role_DisclosureStockBasedCompensationEffectOfRecordingStockBasedCompensationDetail">
        <link:definition>996375 - Disclosure - Stock-Based Compensation - Effect of Recording Stock-Based Compensation (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureStockbasedCompensationScheduleOfStockbasedCompensationIncludedInCompanysConsolidatedStatementsOfOperationsAndComprehensiveIncomeLos" id="DisclosureStockbasedCompensationScheduleOfStockbasedCompensationIncludedInCompanysConsolidatedStatementsOfOperationsAndComprehensiveIncomeLos">
        <link:definition>996385 - Disclosure - Stock-Based Compensation - Schedule of Stock-based Compensation Included in Company's Consolidated Statements of Operations and Comprehensive Income (Loss) (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockholdersEquityAdditionalInformationDetail" id="Role_DisclosureStockholdersEquityAdditionalInformationDetail">
        <link:definition>996395 - Disclosure - Stockholders' Equity - Additional Information (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureStockholdersEquityScheduleOfChangeInAccumulatedOtherComprehensiveIncomeLossByComponentNetOfTaxDetails" id="DisclosureStockholdersEquityScheduleOfChangeInAccumulatedOtherComprehensiveIncomeLossByComponentNetOfTaxDetails">
        <link:definition>996405 - Disclosure - Stockholders' Equity - Schedule of Change in Accumulated Other Comprehensive Income (Loss) by Component, Net of Tax (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansAdditionalInformationDetail" id="Role_DisclosureEmployeeBenefitPlansAdditionalInformationDetail">
        <link:definition>996415 - Disclosure - Employee Benefit Plans - Additional Information (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansSummaryOfNetPeriodicBenefitCostsDetail" id="Role_DisclosureEmployeeBenefitPlansSummaryOfNetPeriodicBenefitCostsDetail">
        <link:definition>996425 - Disclosure - Employee Benefit Plans - Summary of Net Periodic Benefit Costs (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansSummaryOfChangesInProjectedBenefitObligationsAndPlanAssetsAndEndingBalancesOfDefinedBenefitPlansDetail" id="Role_DisclosureEmployeeBenefitPlansSummaryOfChangesInProjectedBenefitObligationsAndPlanAssetsAndEndingBalancesOfDefinedBenefitPlansDetail">
        <link:definition>996435 - Disclosure - Employee Benefit Plans - Summary of Changes in Projected Benefit Obligations and Plan Assets, and Ending Balances of Defined Benefit Plans (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansSummaryOfEstimatedBenefitPaymentsForDefinedBenefitPlansForNext10YearsDetail" id="Role_DisclosureEmployeeBenefitPlansSummaryOfEstimatedBenefitPaymentsForDefinedBenefitPlansForNext10YearsDetail">
        <link:definition>996445 - Disclosure - Employee Benefit Plans - Summary of Estimated Benefit Payments for Defined Benefit Plans for Next 10 Years (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansScheduleOfWeightedAverageRatesUsedToDetermineNetPeriodicBenefitCostsDetail" id="Role_DisclosureEmployeeBenefitPlansScheduleOfWeightedAverageRatesUsedToDetermineNetPeriodicBenefitCostsDetail">
        <link:definition>996455 - Disclosure - Employee Benefit Plans - Schedule of Weighted Average Rates Used to Determine Net Periodic Benefit Costs (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansScheduleOfDefinedBenefitPlanAssetsDetail" id="Role_DisclosureEmployeeBenefitPlansScheduleOfDefinedBenefitPlanAssetsDetail">
        <link:definition>996465 - Disclosure - Employee Benefit Plans - Schedule of Defined Benefit Plan Assets (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureNetIncomeLossPerShareAdditionalInformationDetail" id="DisclosureNetIncomeLossPerShareAdditionalInformationDetail">
        <link:definition>996475 - Disclosure - Net Income (Loss) Per Share - Additional Information (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationAdditionalInformationDetail" id="DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationAdditionalInformationDetail">
        <link:definition>996485 - Disclosure - Business Segment, Geographic Area, Product Information and Significant Customer Information - Additional Information (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationScheduleOfReconcilesGrossProfitByReportableSegment" id="DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationScheduleOfReconcilesGrossProfitByReportableSegment">
        <link:definition>996495 - Disclosure - Business Segment, Geographic Area, Product Information and Significant Customer Information - Schedule of Reconciles Gross Profit By Reportable Segment To Income (Loss) Before Income Taxes (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationScheduleOfCapitalExpendituresDepreciationAndAmortiz" id="DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationScheduleOfCapitalExpendituresDepreciationAndAmortiz">
        <link:definition>996505 - Disclosure - Business Segment, Geographic Area, Product Information and Significant Customer Information - Schedule of Capital Expenditures, Depreciation and Amortization Expense of Intangible Assets by Reportable Segment (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationSegmentAssetsByReportableSegmentDetail" id="DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationSegmentAssetsByReportableSegmentDetail">
        <link:definition>996515 - Disclosure - Business Segment, Geographic Area, Product Information and Significant Customer Information - Segment Assets by Reportable Segment (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationReconcilesTotalSegmentAssetsToTotalAssetsDetail" id="DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationReconcilesTotalSegmentAssetsToTotalAssetsDetail">
        <link:definition>996525 - Disclosure - Business Segment, Geographic Area, Product Information and Significant Customer Information - Reconciles Total Segment Assets to Total Assets (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationSummaryOfGoodwillAssociatedWithReportableSegmentsD" id="DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationSummaryOfGoodwillAssociatedWithReportableSegmentsD">
        <link:definition>996535 - Disclosure - Business Segment, Geographic Area, Product Information and Significant Customer Information - Summary of Goodwill Associated with Reportable Segments (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationScheduleOfNetRevenuesAndLonglivedAssetsByGeograph" id="DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationScheduleOfNetRevenuesAndLonglivedAssetsByGeograph">
        <link:definition>996545 - Disclosure - Business Segment, Geographic Area, Product Information and Significant Customer Information - Schedule of Net Revenues and Long-Lived Assets by Geographic Regions (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRestructuringAdditionalInformationDetail" id="DisclosureRestructuringAdditionalInformationDetail">
        <link:definition>996555 - Disclosure - Restructuring - Additional Information (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRestructuringScheduleOfCompanysRestructuringActivityDetail" id="DisclosureRestructuringScheduleOfCompanysRestructuringActivityDetail">
        <link:definition>996565 - Disclosure - Restructuring - Schedule of Company's Restructuring Activity (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureCommitmentsAndContingenciesAdditionalInformationDetail" id="Role_DisclosureCommitmentsAndContingenciesAdditionalInformationDetail">
        <link:definition>996575 - Disclosure - Commitments and Contingencies - Additional Information (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureScheduleIIValuationAndQualifyingAccountsDetail" id="Role_DisclosureScheduleIIValuationAndQualifyingAccountsDetail">
        <link:definition>996585 - Disclosure - Schedule II - Valuation and Qualifying Accounts (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureSubsequentEventsAdditionalInformationDetail" id="DisclosureSubsequentEventsAdditionalInformationDetail">
        <link:definition>996595 - Disclosure - Subsequent Events - Additional Information (Detail)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:linkbase id="lnk">
        <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/all" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#all" xlink:type="simple"/>
        <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#dimension-default" xlink:type="simple"/>
        <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#dimension-domain" xlink:type="simple"/>
        <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/domain-member" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#domain-member" xlink:type="simple"/>
        <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#hypercube-dimension" xlink:type="simple"/>
        <link:arcroleRef arcroleURI="http://www.esma.europa.eu/xbrl/esef/arcrole/wider-narrower" xlink:href="http://www.xbrl.org/lrr/arcrole/esma-arcrole-2018-11-21.xsd#wider-narrower" xlink:type="simple"/>
        <link:arcroleRef arcroleURI="https://xbrl.org/2023/arcrole/summation-item" xlink:href="https://www.xbrl.org/2023/calculation-1.1.xsd#summation-item" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_StatementConsolidatedBalanceSheets" xlink:href="mksi-20251231.xsd#Role_StatementConsolidatedBalanceSheets" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureLeasesScheduleOfFutureLeasePaymentsDetail3" xlink:href="mksi-20251231.xsd#DisclosureLeasesScheduleOfFutureLeasePaymentsDetail3" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/StatementConsolidatedStatementsOfOperationsAndComprehensiveIncomeLoss" xlink:href="mksi-20251231.xsd#StatementConsolidatedStatementsOfOperationsAndComprehensiveIncomeLoss" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureLeasesScheduleOfFutureLeasePaymentsDetail4" xlink:href="mksi-20251231.xsd#DisclosureLeasesScheduleOfFutureLeasePaymentsDetail4" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_StatementConsolidatedStatementsOfCashFlows" xlink:href="mksi-20251231.xsd#Role_StatementConsolidatedStatementsOfCashFlows" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureNetIncomeLossPerShareComputationOfBasicAndDilutedNetIncomeLossPerShareDetail" xlink:href="mksi-20251231.xsd#DisclosureNetIncomeLossPerShareComputationOfBasicAndDilutedNetIncomeLossPerShareDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureFairValueMeasurementsScheduleOfFairValueOfAssetsAndLiabilitiesMeasuredOnRecurringBasisDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureFairValueMeasurementsScheduleOfFairValueOfAssetsAndLiabilitiesMeasuredOnRecurringBasisDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureInventoriesSummaryOfInventoriesDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureInventoriesSummaryOfInventoriesDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosurePropertyPlantAndEquipmentSummaryOfPropertyPlantAndEquipmentDetail" xlink:href="mksi-20251231.xsd#Role_DisclosurePropertyPlantAndEquipmentSummaryOfPropertyPlantAndEquipmentDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureLeasesScheduleOfLeasesDetail" xlink:href="mksi-20251231.xsd#DisclosureLeasesScheduleOfLeasesDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureLeasesScheduleOfFutureLeasePaymentsDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureLeasesScheduleOfFutureLeasePaymentsDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureLeasesScheduleOfFutureLeasePaymentsDetail2" xlink:href="mksi-20251231.xsd#Role_DisclosureLeasesScheduleOfFutureLeasePaymentsDetail2" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureOtherCurrentLiabilitiesSummaryOfOtherCurrentLiabilitiesDetail" xlink:href="mksi-20251231.xsd#DisclosureOtherCurrentLiabilitiesSummaryOfOtherCurrentLiabilitiesDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureIncomeTaxesComponentsOfIncomeLossBeforeIncomeTaxesAndRelatedProvisionBenefitForIncomeTaxesDetail" xlink:href="mksi-20251231.xsd#DisclosureIncomeTaxesComponentsOfIncomeLossBeforeIncomeTaxesAndRelatedProvisionBenefitForIncomeTaxesDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureIncomeTaxesReconciliationOfCompanySEffectiveTaxRateToUSFederalStatutoryRateDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureIncomeTaxesReconciliationOfCompanySEffectiveTaxRateToUSFederalStatutoryRateDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureIncomeTaxesSignificantComponentsOfDeferredTaxAssetsAndDeferredTaxLiabilitiesDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureIncomeTaxesSignificantComponentsOfDeferredTaxAssetsAndDeferredTaxLiabilitiesDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansSummaryOfNetPeriodicBenefitCostsDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureEmployeeBenefitPlansSummaryOfNetPeriodicBenefitCostsDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansSummaryOfEstimatedBenefitPaymentsForDefinedBenefitPlansForNext10YearsDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureEmployeeBenefitPlansSummaryOfEstimatedBenefitPaymentsForDefinedBenefitPlansForNext10YearsDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationScheduleOfReconcilesGrossProfitByReportableSegment" xlink:href="mksi-20251231.xsd#DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationScheduleOfReconcilesGrossProfitByReportableSegment" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationSegmentAssetsByReportableSegmentDetail" xlink:href="mksi-20251231.xsd#DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationSegmentAssetsByReportableSegmentDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationReconcilesTotalSegmentAssetsToTotalAssetsDetail" xlink:href="mksi-20251231.xsd#DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationReconcilesTotalSegmentAssetsToTotalAssetsDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedLabel" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedTotalLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTotalLabel" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTerseLabel" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedPeriodEndLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedPeriodEndLabel" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedPeriodStartLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedPeriodStartLabel" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DocumentCoverPage" xlink:href="mksi-20251231.xsd#Role_DocumentCoverPage" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_StatementConsolidatedBalanceSheetsParenthetical" xlink:href="mksi-20251231.xsd#Role_StatementConsolidatedBalanceSheetsParenthetical" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_StatementConsolidatedStatementsOfStockholdersEquity" xlink:href="mksi-20251231.xsd#Role_StatementConsolidatedStatementsOfStockholdersEquity" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_StatementConsolidatedStatementsOfStockholdersEquityParenthetical" xlink:href="mksi-20251231.xsd#Role_StatementConsolidatedStatementsOfStockholdersEquityParenthetical" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureCybersecurityRiskManagementStrategyAndGovernance" xlink:href="mksi-20251231.xsd#DisclosureCybersecurityRiskManagementStrategyAndGovernance" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureBusinessDescription" xlink:href="mksi-20251231.xsd#Role_DisclosureBusinessDescription" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureBasisOfPresentation" xlink:href="mksi-20251231.xsd#Role_DisclosureBasisOfPresentation" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureSummaryOfSignificantAccountingPolicies" xlink:href="mksi-20251231.xsd#Role_DisclosureSummaryOfSignificantAccountingPolicies" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRecentAccountingPronouncements" xlink:href="mksi-20251231.xsd#DisclosureRecentAccountingPronouncements" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureRevenueFromContractsWithCustomers" xlink:href="mksi-20251231.xsd#Role_DisclosureRevenueFromContractsWithCustomers" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureNetIncomeLossPerShare" xlink:href="mksi-20251231.xsd#DisclosureNetIncomeLossPerShare" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureFairValueMeasurements" xlink:href="mksi-20251231.xsd#Role_DisclosureFairValueMeasurements" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedge" xlink:href="mksi-20251231.xsd#DisclosureDerivativesAndNetInvestmentHedge" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureInventories" xlink:href="mksi-20251231.xsd#Role_DisclosureInventories" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosurePropertyPlantAndEquipment" xlink:href="mksi-20251231.xsd#Role_DisclosurePropertyPlantAndEquipment" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureLeases" xlink:href="mksi-20251231.xsd#Role_DisclosureLeases" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureGoodwillAndIntangibleAssets" xlink:href="mksi-20251231.xsd#Role_DisclosureGoodwillAndIntangibleAssets" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureProductWarranties" xlink:href="mksi-20251231.xsd#Role_DisclosureProductWarranties" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureDebt" xlink:href="mksi-20251231.xsd#Role_DisclosureDebt" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureOtherCurrentLiabilities" xlink:href="mksi-20251231.xsd#DisclosureOtherCurrentLiabilities" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureIncomeTaxes" xlink:href="mksi-20251231.xsd#Role_DisclosureIncomeTaxes" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockBasedCompensation" xlink:href="mksi-20251231.xsd#Role_DisclosureStockBasedCompensation" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockholdersEquity" xlink:href="mksi-20251231.xsd#Role_DisclosureStockholdersEquity" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlans" xlink:href="mksi-20251231.xsd#Role_DisclosureEmployeeBenefitPlans" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformation" xlink:href="mksi-20251231.xsd#DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformation" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRestructuring1" xlink:href="mksi-20251231.xsd#DisclosureRestructuring1" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureCommitmentsAndContingencies" xlink:href="mksi-20251231.xsd#Role_DisclosureCommitmentsAndContingencies" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureSubsequentEvents" xlink:href="mksi-20251231.xsd#DisclosureSubsequentEvents" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureScheduleIIValuationAndQualifyingAccounts" xlink:href="mksi-20251231.xsd#Role_DisclosureScheduleIIValuationAndQualifyingAccounts" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureSummaryOfSignificantAccountingPoliciesPolicies" xlink:href="mksi-20251231.xsd#Role_DisclosureSummaryOfSignificantAccountingPoliciesPolicies" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureRevenueFromContractsWithCustomersTables" xlink:href="mksi-20251231.xsd#Role_DisclosureRevenueFromContractsWithCustomersTables" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureNetIncomeLossPerShareTables" xlink:href="mksi-20251231.xsd#DisclosureNetIncomeLossPerShareTables" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureFairValueMeasurementsTables" xlink:href="mksi-20251231.xsd#Role_DisclosureFairValueMeasurementsTables" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedgeTables" xlink:href="mksi-20251231.xsd#DisclosureDerivativesAndNetInvestmentHedgeTables" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureInventoriesTables" xlink:href="mksi-20251231.xsd#Role_DisclosureInventoriesTables" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosurePropertyPlantAndEquipmentTables" xlink:href="mksi-20251231.xsd#Role_DisclosurePropertyPlantAndEquipmentTables" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureLeasesTables" xlink:href="mksi-20251231.xsd#Role_DisclosureLeasesTables" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureGoodwillAndIntangibleAssetsTables" xlink:href="mksi-20251231.xsd#Role_DisclosureGoodwillAndIntangibleAssetsTables" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureProductWarrantiesTables" xlink:href="mksi-20251231.xsd#Role_DisclosureProductWarrantiesTables" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureDebtTables" xlink:href="mksi-20251231.xsd#Role_DisclosureDebtTables" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureOtherCurrentLiabilitiesTables" xlink:href="mksi-20251231.xsd#DisclosureOtherCurrentLiabilitiesTables" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureIncomeTaxesTables" xlink:href="mksi-20251231.xsd#Role_DisclosureIncomeTaxesTables" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockBasedCompensationTables" xlink:href="mksi-20251231.xsd#Role_DisclosureStockBasedCompensationTables" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureStockholdersEquityTables" xlink:href="mksi-20251231.xsd#DisclosureStockholdersEquityTables" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansTables" xlink:href="mksi-20251231.xsd#Role_DisclosureEmployeeBenefitPlansTables" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationTables" xlink:href="mksi-20251231.xsd#DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationTables" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRestructuringTables" xlink:href="mksi-20251231.xsd#DisclosureRestructuringTables" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBasisOfPresentationAdditionalInformationDetail" xlink:href="mksi-20251231.xsd#DisclosureBasisOfPresentationAdditionalInformationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureSummaryOfSignificantAccountingPoliciesAdditionalInformationDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureSummaryOfSignificantAccountingPoliciesAdditionalInformationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRecentAccountingPronouncementsAdditionalInformationDetail" xlink:href="mksi-20251231.xsd#DisclosureRecentAccountingPronouncementsAdditionalInformationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureRevenueFromContractsWithCustomersAdditionalInformationDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureRevenueFromContractsWithCustomersAdditionalInformationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureRevenueFromContractsWithCustomersScheduleOfDeferredRevenueAndCustomerAdvancesByArrangementDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureRevenueFromContractsWithCustomersScheduleOfDeferredRevenueAndCustomerAdvancesByArrangementDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureRevenueFromContractsWithCustomersScheduleOfDeferredRevenueAndCustomerAdvancesByArrangementParentheticalDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureRevenueFromContractsWithCustomersScheduleOfDeferredRevenueAndCustomerAdvancesByArrangementParentheticalDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRevenueFromContractsWithCustomersSummaryOfRevenueFromContractsWithCustomersDetails" xlink:href="mksi-20251231.xsd#DisclosureRevenueFromContractsWithCustomersSummaryOfRevenueFromContractsWithCustomersDetails" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureFairValueMeasurementsScheduleOfFairValueOfAssetsAndLiabilitiesMeasuredOnRecurringBasisParentheticalDetail" xlink:href="mksi-20251231.xsd#DisclosureFairValueMeasurementsScheduleOfFairValueOfAssetsAndLiabilitiesMeasuredOnRecurringBasisParentheticalDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureFairValueMeasurementsScheduleOfEstimatedFairValueAndCarryingValueOfCompanysDebtDetail" xlink:href="mksi-20251231.xsd#DisclosureFairValueMeasurementsScheduleOfEstimatedFairValueAndCarryingValueOfCompanysDebtDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedgeAdditionalInformationDetail" xlink:href="mksi-20251231.xsd#DisclosureDerivativesAndNetInvestmentHedgeAdditionalInformationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedgeSummaryOfNotionalValuesOfForeignExchangeForwardContractsOutstandingDetail" xlink:href="mksi-20251231.xsd#DisclosureDerivativesAndNetInvestmentHedgeSummaryOfNotionalValuesOfForeignExchangeForwardContractsOutstandingDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedgeSummaryOfNetGainsLossesOnDerivativesDesignatedAsCashFlowHedgingInstrumentsDetail" xlink:href="mksi-20251231.xsd#DisclosureDerivativesAndNetInvestmentHedgeSummaryOfNetGainsLossesOnDerivativesDesignatedAsCashFlowHedgingInstrumentsDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedgeSummaryOfNetLossesGainsOnDerivativesNotDesignatedAsHedgingInstrumentsDetail" xlink:href="mksi-20251231.xsd#DisclosureDerivativesAndNetInvestmentHedgeSummaryOfNetLossesGainsOnDerivativesNotDesignatedAsHedgingInstrumentsDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureInventoriesAdditionalInformationDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureInventoriesAdditionalInformationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosurePropertyPlantAndEquipmentAdditionalInformationDetail" xlink:href="mksi-20251231.xsd#Role_DisclosurePropertyPlantAndEquipmentAdditionalInformationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureLeasesSummaryOfSupplementalCashFlowInformationRelatedToLeasesDetails" xlink:href="mksi-20251231.xsd#DisclosureLeasesSummaryOfSupplementalCashFlowInformationRelatedToLeasesDetails" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureLeasesSummaryOfWeightedAverageRemainingTermsForAllLeasesDetails" xlink:href="mksi-20251231.xsd#DisclosureLeasesSummaryOfWeightedAverageRemainingTermsForAllLeasesDetails" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureGoodwillAndIntangibleAssetsSummaryOfGoodwillAssociatedWithReportableSegmentsDetail" xlink:href="mksi-20251231.xsd#DisclosureGoodwillAndIntangibleAssetsSummaryOfGoodwillAssociatedWithReportableSegmentsDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureGoodwillAndIntangibleAssetsComponentsOfIntangibleAssetsDetail" xlink:href="mksi-20251231.xsd#DisclosureGoodwillAndIntangibleAssetsComponentsOfIntangibleAssetsDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureGoodwillAndIntangibleAssetsAdditionalInformationDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureGoodwillAndIntangibleAssetsAdditionalInformationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureGoodwillAndIntangibleAssetsEstimatedAmortizationExpenseDetail" xlink:href="mksi-20251231.xsd#DisclosureGoodwillAndIntangibleAssetsEstimatedAmortizationExpenseDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureProductWarrantiesProductWarrantyActivitiesDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureProductWarrantiesProductWarrantyActivitiesDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureProductWarrantiesAdditionalInformationDetail" xlink:href="mksi-20251231.xsd#DisclosureProductWarrantiesAdditionalInformationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureDebtScheduleOfShortTermDebtDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureDebtScheduleOfShortTermDebtDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureDebtScheduleOfLongTermDebtDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureDebtScheduleOfLongTermDebtDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDebtCreditFacilitiesAdditionalInformationDetail" xlink:href="mksi-20251231.xsd#DisclosureDebtCreditFacilitiesAdditionalInformationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDebtConvertibleSeniorNotesAdditionalInformationDetail" xlink:href="mksi-20251231.xsd#DisclosureDebtConvertibleSeniorNotesAdditionalInformationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDebtScheduleOfInterestExpenseDetails" xlink:href="mksi-20251231.xsd#DisclosureDebtScheduleOfInterestExpenseDetails" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureDebtLinesOfCreditAndBorrowingArrangementsAdditionalInformationDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureDebtLinesOfCreditAndBorrowingArrangementsAdditionalInformationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureDebtScheduleOfContractualMaturitiesOfDebtObligationsDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureDebtScheduleOfContractualMaturitiesOfDebtObligationsDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureIncomeTaxesAdditionalInformationDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureIncomeTaxesAdditionalInformationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureIncomeTaxesReconciliationOfBeginningAndEndingAmountOfGrossUnrecognizedTaxBenefitsExcludingInterestAndPenaltiesDetail" xlink:href="mksi-20251231.xsd#DisclosureIncomeTaxesReconciliationOfBeginningAndEndingAmountOfGrossUnrecognizedTaxBenefitsExcludingInterestAndPenaltiesDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureIncomeTaxesComponentsOfCashPaidNetOfRefundsReceivedForIncomeTaxesDetails" xlink:href="mksi-20251231.xsd#DisclosureIncomeTaxesComponentsOfCashPaidNetOfRefundsReceivedForIncomeTaxesDetails" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockBasedCompensationAdditionalInformationDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureStockBasedCompensationAdditionalInformationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockBasedCompensationFairValueOfEmployeePurchaseRightsEstimatedUsingBlackScholesOptionPricingModelDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureStockBasedCompensationFairValueOfEmployeePurchaseRightsEstimatedUsingBlackScholesOptionPricingModelDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockBasedCompensationSummaryOfActivityForRsusDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureStockBasedCompensationSummaryOfActivityForRsusDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockBasedCompensationEffectOfRecordingStockBasedCompensationDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureStockBasedCompensationEffectOfRecordingStockBasedCompensationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureStockbasedCompensationScheduleOfStockbasedCompensationIncludedInCompanysConsolidatedStatementsOfOperationsAndComprehensiveIncomeLos" xlink:href="mksi-20251231.xsd#DisclosureStockbasedCompensationScheduleOfStockbasedCompensationIncludedInCompanysConsolidatedStatementsOfOperationsAndComprehensiveIncomeLos" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockholdersEquityAdditionalInformationDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureStockholdersEquityAdditionalInformationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureStockholdersEquityScheduleOfChangeInAccumulatedOtherComprehensiveIncomeLossByComponentNetOfTaxDetails" xlink:href="mksi-20251231.xsd#DisclosureStockholdersEquityScheduleOfChangeInAccumulatedOtherComprehensiveIncomeLossByComponentNetOfTaxDetails" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansAdditionalInformationDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureEmployeeBenefitPlansAdditionalInformationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansSummaryOfChangesInProjectedBenefitObligationsAndPlanAssetsAndEndingBalancesOfDefinedBenefitPlansDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureEmployeeBenefitPlansSummaryOfChangesInProjectedBenefitObligationsAndPlanAssetsAndEndingBalancesOfDefinedBenefitPlansDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansScheduleOfWeightedAverageRatesUsedToDetermineNetPeriodicBenefitCostsDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureEmployeeBenefitPlansScheduleOfWeightedAverageRatesUsedToDetermineNetPeriodicBenefitCostsDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansScheduleOfDefinedBenefitPlanAssetsDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureEmployeeBenefitPlansScheduleOfDefinedBenefitPlanAssetsDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureNetIncomeLossPerShareAdditionalInformationDetail" xlink:href="mksi-20251231.xsd#DisclosureNetIncomeLossPerShareAdditionalInformationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationAdditionalInformationDetail" xlink:href="mksi-20251231.xsd#DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationAdditionalInformationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationScheduleOfCapitalExpendituresDepreciationAndAmortiz" xlink:href="mksi-20251231.xsd#DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationScheduleOfCapitalExpendituresDepreciationAndAmortiz" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationSummaryOfGoodwillAssociatedWithReportableSegmentsD" xlink:href="mksi-20251231.xsd#DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationSummaryOfGoodwillAssociatedWithReportableSegmentsD" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationScheduleOfNetRevenuesAndLonglivedAssetsByGeograph" xlink:href="mksi-20251231.xsd#DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationScheduleOfNetRevenuesAndLonglivedAssetsByGeograph" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRestructuringAdditionalInformationDetail" xlink:href="mksi-20251231.xsd#DisclosureRestructuringAdditionalInformationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRestructuringScheduleOfCompanysRestructuringActivityDetail" xlink:href="mksi-20251231.xsd#DisclosureRestructuringScheduleOfCompanysRestructuringActivityDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureCommitmentsAndContingenciesAdditionalInformationDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureCommitmentsAndContingenciesAdditionalInformationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureScheduleIIValuationAndQualifyingAccountsDetail" xlink:href="mksi-20251231.xsd#Role_DisclosureScheduleIIValuationAndQualifyingAccountsDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://www.mksinst.com/20251231/taxonomy/role/DisclosureSubsequentEventsAdditionalInformationDetail" xlink:href="mksi-20251231.xsd#DisclosureSubsequentEventsAdditionalInformationDetail" xlink:type="simple"/>
        <link:roleRef roleURI="http://fasb.org/us-gaap/role/eedm/ExtensibleEnumerationLists" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-roles-2025.xsd#eedm" xlink:type="simple"/>
        <link:roleRef roleURI="http://fasb.org/srt/role/srt-eedm/ExtensibleEnumerationLists" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-roles-2025.xsd#eedm1" xlink:type="simple"/>
        <link:labelLink xlink:role="http://www.xbrl.org/2003/role/link" xlink:title="labelLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EquitySecuritiesFvNiCurrentAndNoncurrent" xlink:label="us-gaap_EquitySecuritiesFvNiCurrentAndNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfCashFlowSupplementalDisclosuresTableTextBlock" xlink:label="us-gaap_ScheduleOfCashFlowSupplementalDisclosuresTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessCombinationAcquisitionRelatedCosts" xlink:label="us-gaap_BusinessCombinationAcquisitionRelatedCosts"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment" xlink:label="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RetirementPlanTypeAxis" xlink:label="us-gaap_RetirementPlanTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentDomain" xlink:label="us-gaap_SegmentDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestructuringReserve" xlink:label="us-gaap_RestructuringReserve"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="us-gaap_ConcentrationRiskByTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiability" xlink:label="us-gaap_FinanceLeaseLiability"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityIncorporationStateCountryCode" xlink:label="dei_EntityIncorporationStateCountryCode"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PreferredStockSharesIssued" xlink:label="us-gaap_PreferredStockSharesIssued"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="us-gaap_BalanceSheetLocationDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_BaseRateBorrowingsMember" xlink:label="mksi_BaseRateBorrowingsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanContributionsByEmployer" xlink:label="us-gaap_DefinedBenefitPlanContributionsByEmployer"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanBusinessCombinationsAndAcquisitionsBenefitObligation" xlink:label="us-gaap_DefinedBenefitPlanBusinessCombinationsAndAcquisitionsBenefitObligation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashFlowNoncashInvestingAndFinancingActivitiesDisclosureAbstract" xlink:label="us-gaap_CashFlowNoncashInvestingAndFinancingActivitiesDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CurrentInterestRateFairValueHedgeAssetAtFairValue" xlink:label="mksi_CurrentInterestRateFairValueHedgeAssetAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebtNoncurrent" xlink:label="us-gaap_LongTermDebtNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxAssetsAccruedExpensesAndOtherReserves" xlink:label="mksi_DeferredTaxAssetsAccruedExpensesAndOtherReserves"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EquityAbstract" xlink:label="us-gaap_EquityAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityCurrentReportingStatus" xlink:label="dei_EntityCurrentReportingStatus"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DerivativeInstrumentsGainLossNotDesignatedAsHedgingInstrumentsLineItems" xlink:label="mksi_DerivativeInstrumentsGainLossNotDesignatedAsHedgingInstrumentsLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_JP" xlink:label="country_JP"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendsPayableAmountPerShare" xlink:label="us-gaap_DividendsPayableAmountPerShare"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillGross" xlink:label="us-gaap_GoodwillGross"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_USGovernmentAgenciesDebtSecuritiesMember" xlink:label="us-gaap_USGovernmentAgenciesDebtSecuritiesMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears" xlink:label="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueInputsLevel2Member" xlink:label="us-gaap_FairValueInputsLevel2Member"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxAssetsNet" xlink:label="us-gaap_DeferredTaxAssetsNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommitmentsAndContingenciesDisclosureTextBlock" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashFlowHedgingMember" xlink:label="us-gaap_CashFlowHedgingMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockSharesAuthorized" xlink:label="us-gaap_CommonStockSharesAuthorized"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerShareBasicAbstract" xlink:label="us-gaap_EarningsPerShareBasicAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AmortizationOfInventoryStepUpToFairValue" xlink:label="mksi_AmortizationOfInventoryStepUpToFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentFiscalPeriodFocus" xlink:label="dei_DocumentFiscalPeriodFocus"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostExpectedLongTermReturnOnAssets" xlink:label="us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostExpectedLongTermReturnOnAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherNoncurrentLiabilitiesMember" xlink:label="us-gaap_OtherNoncurrentLiabilitiesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentInterestRateStatedPercentage" xlink:label="us-gaap_DebtInstrumentInterestRateStatedPercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueFromContractWithCustomerAbstract" xlink:label="us-gaap_RevenueFromContractWithCustomerAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationForeignTaxCreditRelatedToWithholdingTaxes" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxCreditRelatedToWithholdingTaxes"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityShellCompany" xlink:label="dei_EntityShellCompany"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueRemainingPerformanceObligationOptionalExemptionRemainingDuration" xlink:label="us-gaap_RevenueRemainingPerformanceObligationOptionalExemptionRemainingDuration"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendsCommonStockCash" xlink:label="us-gaap_DividendsCommonStockCash"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:label="us-gaap_ValuationAllowancesAndReservesTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConvertibleDebtMember" xlink:label="us-gaap_ConvertibleDebtMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ServiceMember" xlink:label="us-gaap_ServiceMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeited" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeited"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfMaturitiesOfLongTermDebtTableTextBlock" xlink:label="us-gaap_ScheduleOfMaturitiesOfLongTermDebtTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanBenefitObligation" xlink:label="us-gaap_DefinedBenefitPlanBenefitObligation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NumberOfReportingUnits" xlink:label="us-gaap_NumberOfReportingUnits"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ElectronicsMember" xlink:label="mksi_ElectronicsMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SupplementalRetirementBenefitsCost" xlink:label="mksi_SupplementalRetirementBenefitsCost"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearTwo" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearTwo"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementStrategyAndGovernanceAbstract" xlink:label="cyd_CybersecurityRiskManagementStrategyAndGovernanceAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockSharesIssued" xlink:label="us-gaap_CommonStockSharesIssued"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleReportToBoardFlag" xlink:label="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleReportToBoardFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" xlink:label="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfShortTermDebtTable" xlink:label="us-gaap_ScheduleOfShortTermDebtTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InvestmentTaxCredit" xlink:label="us-gaap_InvestmentTaxCredit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_StockIncentivePlanTwoThousandTwentyTwoMember" xlink:label="mksi_StockIncentivePlanTwoThousandTwentyTwoMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLossCarryforwardsExpirationDate" xlink:label="us-gaap_OperatingLossCarryforwardsExpirationDate"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FederalFundsRateMember" xlink:label="mksi_FederalFundsRateMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PrepaymentPremiumPercentageOfAggregatePrincipalAmount" xlink:label="mksi_PrepaymentPremiumPercentageOfAggregatePrincipalAmount"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_O2025Q1DividendsMember" xlink:label="mksi_O2025Q1DividendsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossForeignCurrencyTranslationAdjustmentNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossForeignCurrencyTranslationAdjustmentNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_InitialCommitmentFeePercentage" xlink:label="mksi_InitialCommitmentFeePercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueFromContractWithCustomerPolicyTextBlock" xlink:label="us-gaap_RevenueFromContractWithCustomerPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherExpenseMember" xlink:label="us-gaap_OtherExpenseMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityFilerCategory" xlink:label="dei_EntityFilerCategory"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DebtInstrumentIssuedPrincipalOptionToPurchase" xlink:label="mksi_DebtInstrumentIssuedPrincipalOptionToPurchase"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ReclassificationFromAociCurrentPeriodNetOfTaxAttributableToParent" xlink:label="us-gaap_ReclassificationFromAociCurrentPeriodNetOfTaxAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignCurrencyContractAssetFairValueDisclosure" xlink:label="us-gaap_ForeignCurrencyContractAssetFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationTaxContingencies" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationTaxContingencies"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearThree" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearThree"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestructuringCostAndReserveAxis" xlink:label="us-gaap_RestructuringCostAndReserveAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentFrequencyOfPeriodicPayment" xlink:label="us-gaap_DebtInstrumentFrequencyOfPeriodicPayment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount" xlink:label="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DiscountRateFutureUndiscountedCashFlows" xlink:label="mksi_DiscountRateFutureUndiscountedCashFlows"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis" xlink:label="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskThirdPartyOversightAndIdentificationProcessesFlag" xlink:label="cyd_CybersecurityRiskThirdPartyOversightAndIdentificationProcessesFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfRestructuringAndRelatedCostsTextBlock" xlink:label="us-gaap_ScheduleOfRestructuringAndRelatedCostsTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProceedsFromIssuanceOfDebt" xlink:label="us-gaap_ProceedsFromIssuanceOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeLineItems" xlink:label="us-gaap_DerivativeLineItems"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EquipmentSolutionsBusinessMember" xlink:label="mksi_EquipmentSolutionsBusinessMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FinanceLeaseCosts" xlink:label="mksi_FinanceLeaseCosts"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashAndCashEquivalentsFairValueDisclosure" xlink:label="us-gaap_CashAndCashEquivalentsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IntangibleAssetsUsefulLifeFutureUndiscountedCashFlows" xlink:label="mksi_IntangibleAssetsUsefulLifeFutureUndiscountedCashFlows"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventLineItems" xlink:label="us-gaap_SubsequentEventLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementThirdPartyEngagedFlag" xlink:label="cyd_CybersecurityRiskManagementThirdPartyEngagedFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentsIncorporatedByReferenceTextBlock" xlink:label="dei_DocumentsIncorporatedByReferenceTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeAssetNotionalAmount" xlink:label="us-gaap_DerivativeAssetNotionalAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_Goodwill" xlink:label="us-gaap_Goodwill"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherNoncashIncomeExpense" xlink:label="us-gaap_OtherNoncashIncomeExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:label="us-gaap_EffectiveIncomeTaxRateContinuingOperations"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxesPaid" xlink:label="us-gaap_IncomeTaxesPaid"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCreditFacilityIncreaseDecreaseForPeriodNet" xlink:label="us-gaap_LineOfCreditFacilityIncreaseDecreaseForPeriodNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityAxis" xlink:label="us-gaap_IncomeTaxAuthorityAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InlandRevenueSingaporeIRASMember" xlink:label="us-gaap_InlandRevenueSingaporeIRASMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AvailableForSaleSecuritiesDebtSecuritiesNoncurrent" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AmortizationPeriodOfLeaseholdImprovements" xlink:label="mksi_AmortizationPeriodOfLeaseholdImprovements"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SeniorNotesDue2034Member" xlink:label="mksi_SeniorNotesDue2034Member"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ReconciliationOfOperatingProfitLossFromSegmentsToConsolidatedTextBlock" xlink:label="us-gaap_ReconciliationOfOperatingProfitLossFromSegmentsToConsolidatedTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock" xlink:label="srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentExpenditureAdditionToLongLivedAssets" xlink:label="us-gaap_SegmentExpenditureAdditionToLongLivedAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/exch/2025/exch-2025.xsd#exch_JPBX" xlink:label="exch_JPBX"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfInventoryCurrentTableTextBlock" xlink:label="us-gaap_ScheduleOfInventoryCurrentTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MaterialsSolutionsDivisionMember" xlink:label="mksi_MaterialsSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AdditionalPaidInCapitalCommonStock" xlink:label="us-gaap_AdditionalPaidInCapitalCommonStock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FirstLienNetLeverageRatioMember" xlink:label="mksi_FirstLienNetLeverageRatioMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanPlanAssetsBenefitsPaid" xlink:label="us-gaap_DefinedBenefitPlanPlanAssetsBenefitsPaid"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SignificantAccountingPoliciesTextBlock" xlink:label="us-gaap_SignificantAccountingPoliciesTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CappedCallTransactionsMember" xlink:label="mksi_CappedCallTransactionsMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForTenOrMorePercentOfAccountsReceivable" xlink:label="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfAccountsReceivable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetUsefulLife" xlink:label="us-gaap_FiniteLivedIntangibleAssetUsefulLife"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PhotonControlMember" xlink:label="mksi_PhotonControlMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingDomain" xlink:label="us-gaap_VestingDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_RevenueRecognitionPaymentTerms" xlink:label="mksi_RevenueRecognitionPaymentTerms"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent" xlink:label="us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DisaggregationOfRevenueTable" xlink:label="us-gaap_DisaggregationOfRevenueTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementStrategyAndGovernanceTable" xlink:label="cyd_CybersecurityRiskManagementStrategyAndGovernanceTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xlink:label="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetInvestmentHedgingMember" xlink:label="us-gaap_NetInvestmentHedgingMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense" xlink:label="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TrademarksAndTradeNamesMember" xlink:label="us-gaap_TrademarksAndTradeNamesMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardVestingPeriodDescription" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardVestingPeriodDescription"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerShareBasic" xlink:label="us-gaap_EarningsPerShareBasic"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DisaggregationOfRevenueTableTextBlock" xlink:label="us-gaap_DisaggregationOfRevenueTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" xlink:label="mksi_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevolvingCreditFacilityMember" xlink:label="us-gaap_RevolvingCreditFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RetirementPlanTypeDomain" xlink:label="us-gaap_RetirementPlanTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LiabilitiesCurrent" xlink:label="us-gaap_LiabilitiesCurrent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OfferTerminateMember" xlink:label="mksi_OfferTerminateMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:label="us-gaap_IncreaseDecreaseInAccountsReceivable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_HedgingDesignationDomain" xlink:label="us-gaap_HedgingDesignationDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:label="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherAmount" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendsPayableDateOfRecordDayMonthAndYear" xlink:label="us-gaap_DividendsPayableDateOfRecordDayMonthAndYear"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidFederalAfterRefundReceived" xlink:label="us-gaap_IncomeTaxPaidFederalAfterRefundReceived"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_GeneralMetalFinishingMember" xlink:label="mksi_GeneralMetalFinishingMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationRealizedForeignExchangeGainLoss" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationRealizedForeignExchangeGainLoss"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NewRevolvingFacilityMember" xlink:label="mksi_NewRevolvingFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesDeductions" xlink:label="us-gaap_ValuationAllowancesAndReservesDeductions"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NonCurrentAssetsFairValueDisclosure" xlink:label="mksi_NonCurrentAssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestExpenseDebtExcludingAmortization" xlink:label="us-gaap_InterestExpenseDebtExcludingAmortization"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostAbstract" xlink:label="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AdjustmentsForNewAccountingPronouncementsAxis" xlink:label="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherLiabilitiesCurrentAbstract" xlink:label="us-gaap_OtherLiabilitiesCurrentAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MaterialReconcilingItemsMember" xlink:label="us-gaap_MaterialReconcilingItemsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ConsolidationItemsDomain" xlink:label="srt_ConsolidationItemsDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ElectronicsAndPackagingMember" xlink:label="mksi_ElectronicsAndPackagingMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockholdersEquityAbstract" xlink:label="us-gaap_StockholdersEquityAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TimeDepositsAndCertificatesOfDepositMember" xlink:label="mksi_TimeDepositsAndCertificatesOfDepositMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntitySmallBusiness" xlink:label="dei_EntitySmallBusiness"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfNotionalAmountsOfOutstandingDerivativePositionsTableTextBlock" xlink:label="us-gaap_ScheduleOfNotionalAmountsOfOutstandingDerivativePositionsTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FederalHomeLoanBanksAbstract" xlink:label="us-gaap_FederalHomeLoanBanksAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_HedgingDesignationAxis" xlink:label="us-gaap_HedgingDesignationAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PensionAndDeferredCompensationPlanAssets" xlink:label="mksi_PensionAndDeferredCompensationPlanAssets"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SeparatelyPricedContractsTerm" xlink:label="mksi_SeparatelyPricedContractsTerm"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FederalInterestCarryForwards" xlink:label="mksi_FederalInterestCarryForwards"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanFundedStatusOfPlan" xlink:label="us-gaap_DefinedBenefitPlanFundedStatusOfPlan"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanVestedBenefitObligation" xlink:label="mksi_DefinedBenefitPlanVestedBenefitObligation"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_StockIncentivePlanTwoThousandFourteenMember" xlink:label="mksi_StockIncentivePlanTwoThousandFourteenMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NatureOfOperations" xlink:label="us-gaap_NatureOfOperations"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FeesAndExpensesRelatedToRepricingOfTermLoanFacility" xlink:label="mksi_FeesAndExpensesRelatedToRepricingOfTermLoanFacility"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityWellKnownSeasonedIssuer" xlink:label="dei_EntityWellKnownSeasonedIssuer"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SaleOfStockPricePerShare" xlink:label="us-gaap_SaleOfStockPricePerShare"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CurrentForeignTaxExpenseBenefit" xlink:label="us-gaap_CurrentForeignTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ReductionInInterestExpense" xlink:label="mksi_ReductionInInterestExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ContractWithCustomerLiability" xlink:label="us-gaap_ContractWithCustomerLiability"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForTenPercentOfNetRevenue" xlink:label="mksi_NumberOfCustomersAccountedForTenPercentOfNetRevenue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization" xlink:label="us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_AmendmentFlag" xlink:label="dei_AmendmentFlag"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForTenOrMorePercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MaturitiesOfLongTermDebtAbstract" xlink:label="us-gaap_MaturitiesOfLongTermDebtAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PhotonicsSolutionsDivisionMember" xlink:label="mksi_PhotonicsSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfTradingDays" xlink:label="mksi_NumberOfTradingDays"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" xlink:label="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EuroTrancheBMember" xlink:label="mksi_EuroTrancheBMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryDisclosureTextBlock" xlink:label="us-gaap_InventoryDisclosureTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerSharePolicyTextBlock" xlink:label="us-gaap_EarningsPerSharePolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:label="us-gaap_LiabilitiesAndStockholdersEquityAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressPostalZipCode" xlink:label="dei_EntityAddressPostalZipCode"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanAmortizationOfActuarialGainLoss" xlink:label="mksi_DefinedBenefitPlanAmortizationOfActuarialGainLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentRedemptionPricePercentage" xlink:label="us-gaap_DebtInstrumentRedemptionPricePercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ReportingUnitDomain" xlink:label="us-gaap_ReportingUnitDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingCodmProfitLossMeasureHowUsedDescription" xlink:label="us-gaap_SegmentReportingCodmProfitLossMeasureHowUsedDescription"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockMember" xlink:label="us-gaap_CommonStockMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable" xlink:label="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ImpairmentOfIntangibleAssetIndefiniteLivedExcludingGoodwillStatementOfIncomeOrComprehensiveIncomeExtensibleEnumeration" xlink:label="us-gaap_ImpairmentOfIntangibleAssetIndefiniteLivedExcludingGoodwillStatementOfIncomeOrComprehensiveIncomeExtensibleEnumeration"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationForeignTaxEffectsOtherJurisdictions" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxEffectsOtherJurisdictions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskRoleOfManagementTextBlock" xlink:label="cyd_CybersecurityRiskRoleOfManagementTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TaxCreditCarryforwardAmount" xlink:label="us-gaap_TaxCreditCarryforwardAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInNextTwelveMonths" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInNextTwelveMonths"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_HedgingRelationshipDomain" xlink:label="us-gaap_HedgingRelationshipDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent" xlink:label="us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidByIndividualJurisdictionLineItems" xlink:label="us-gaap_IncomeTaxPaidByIndividualJurisdictionLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignExchangeOptionMember" xlink:label="us-gaap_ForeignExchangeOptionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressAddressLine1" xlink:label="dei_EntityAddressAddressLine1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredIncomeTaxLiabilities" xlink:label="us-gaap_DeferredIncomeTaxLiabilities"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherInterestIncomeExpenseNet" xlink:label="mksi_OtherInterestIncomeExpenseNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:label="us-gaap_FairValueByFairValueHierarchyLevelAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="us-gaap_EarningsPerShareAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPolicyTextBlock" xlink:label="us-gaap_IncomeTaxPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MaximumRemainingMaturityOfForeignCurrencyDerivatives1" xlink:label="us-gaap_MaximumRemainingMaturityOfForeignCurrencyDerivatives1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantFlag" xlink:label="cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SupplementalCashFlowInformationAbstract" xlink:label="us-gaap_SupplementalCashFlowInformationAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" xlink:label="us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ForeignMember" xlink:label="mksi_ForeignMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UsdTrancheBMember" xlink:label="mksi_UsdTrancheBMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFour" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFour"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BalanceSheetLocationAxis" xlink:label="us-gaap_BalanceSheetLocationAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InvestmentTypeAxis" xlink:label="us-gaap_InvestmentTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ExpenseOfRestructuringActivitiesAndOtherAbstract" xlink:label="mksi_ExpenseOfRestructuringActivitiesAndOtherAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PlanAssetCategoriesDomain" xlink:label="us-gaap_PlanAssetCategoriesDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxAssetsGross" xlink:label="us-gaap_DeferredTaxAssetsGross"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock" xlink:label="cyd_CybersecurityRiskBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SupplementalRetirementBenefitsAccumulatedBenefitObligationNoncurrent" xlink:label="mksi_SupplementalRetirementBenefitsAccumulatedBenefitObligationNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfSharesReturnedForEachShareOfCommonStock" xlink:label="mksi_NumberOfSharesReturnedForEachShareOfCommonStock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationBeatPercent" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationBeatPercent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt" xlink:label="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="us-gaap_InventoryDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentRedemptionPeriodAxis" xlink:label="us-gaap_DebtInstrumentRedemptionPeriodAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentType" xlink:label="dei_DocumentType"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EuroTrancheMember" xlink:label="mksi_EuroTrancheMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxesPaidNet" xlink:label="us-gaap_IncomeTaxesPaidNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GrossProfit" xlink:label="us-gaap_GrossProfit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TypeOfArrangementAxis" xlink:label="us-gaap_TypeOfArrangementAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CostOfRevenueAbstract" xlink:label="us-gaap_CostOfRevenueAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ArrangementsAndNonarrangementTransactionsMember" xlink:label="us-gaap_ArrangementsAndNonarrangementTransactionsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityCentralIndexKey" xlink:label="dei_EntityCentralIndexKey"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherCurrentAssetsFairValueDisclosure" xlink:label="mksi_OtherCurrentAssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskProcessForInformingBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock" xlink:label="cyd_CybersecurityRiskProcessForInformingBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignCurrencyTransactionGainLossRealized" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossRealized"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TranslationAdjustmentForNetInvestmentHedgeNetOfTax" xlink:label="us-gaap_TranslationAdjustmentForNetInvestmentHedgeNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="us-gaap_SubsequentEventTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IntangibleAssetsNetIncludingGoodwill" xlink:label="us-gaap_IntangibleAssetsNetIncludingGoodwill"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockRepurchasedAndRetiredDuringPeriodShares" xlink:label="us-gaap_StockRepurchasedAndRetiredDuringPeriodShares"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OriginalIssueDiscountPercentageOfPrincipalAmount" xlink:label="mksi_OriginalIssueDiscountPercentageOfPrincipalAmount"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdictions" xlink:label="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdictions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TypeOfAdoptionMember" xlink:label="us-gaap_TypeOfAdoptionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditAmortizationOfPriorServiceCostCreditStatementOfIncomeOrComprehensiveIncomeExtensibleList" xlink:label="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditAmortizationOfPriorServiceCostCreditStatementOfIncomeOrComprehensiveIncomeExtensibleList"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationAwardTrancheOneMember" xlink:label="us-gaap_ShareBasedCompensationAwardTrancheOneMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BaseRateMember" xlink:label="us-gaap_BaseRateMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EstimatedAggregatePrincipalAmountPercentage" xlink:label="mksi_EstimatedAggregatePrincipalAmountPercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AociDerivativeQualifyingAsHedgeExcludedComponentAfterTax" xlink:label="us-gaap_AociDerivativeQualifyingAsHedgeExcludedComponentAfterTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncreaseDecreaseInOtherOperatingLiabilities" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingLiabilities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredCompensationArrangementWithIndividualSharesAuthorizedForIssuance" xlink:label="us-gaap_DeferredCompensationArrangementWithIndividualSharesAuthorizedForIssuance"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanForeignCurrencyExchangeRateChangesBenefitObligation" xlink:label="us-gaap_DefinedBenefitPlanForeignCurrencyExchangeRateChangesBenefitObligation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignTaxJurisdictionOtherMember" xlink:label="us-gaap_ForeignTaxJurisdictionOtherMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue" xlink:label="us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UnrecognizedTaxBenefitsIncreaseDecreaseResultingFromPriorPeriodTaxPositions" xlink:label="mksi_UnrecognizedTaxBenefitsIncreaseDecreaseResultingFromPriorPeriodTaxPositions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentFinStmtErrorCorrectionFlag" xlink:label="dei_DocumentFinStmtErrorCorrectionFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherRestructuringCosts" xlink:label="us-gaap_OtherRestructuringCosts"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="us-gaap_DebtDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_DE" xlink:label="country_DE"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_RestrictedStockUnitsGrantedToEmployeesMember" xlink:label="mksi_RestrictedStockUnitsGrantedToEmployeesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedTranslationAdjustmentMember" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeTable" xlink:label="us-gaap_DerivativeTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueMeasurementInputsDisclosureTextBlock" xlink:label="us-gaap_FairValueMeasurementInputsDisclosureTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeNotionalAmount" xlink:label="us-gaap_DerivativeNotionalAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccruedLiabilitiesCurrent" xlink:label="us-gaap_AccruedLiabilitiesCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsForLegalSettlements" xlink:label="us-gaap_PaymentsForLegalSettlements"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CostOfSalesMember" xlink:label="us-gaap_CostOfSalesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsLineItems" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_IL" xlink:label="country_IL"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_CurrentFiscalYearEndDate" xlink:label="dei_CurrentFiscalYearEndDate"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanActualReturnOnPlanAssets" xlink:label="us-gaap_DefinedBenefitPlanActualReturnOnPlanAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xlink:label="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxLiabilitiesLoanCosts" xlink:label="mksi_DeferredTaxLiabilitiesLoanCosts"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AnnualStepDownMember" xlink:label="mksi_AnnualStepDownMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MinimumPeriodOfCompanysResearchAndDevelopmentProjects" xlink:label="mksi_MinimumPeriodOfCompanysResearchAndDevelopmentProjects"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredFinancingCostsInLongTermDebt" xlink:label="mksi_DeferredFinancingCostsInLongTermDebt"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_LoanVoluntaryPrepaymentAmount" xlink:label="mksi_LoanVoluntaryPrepaymentAmount"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduleOfGoodwillAssociatedWithReportableSegmentsTableTextBlock" xlink:label="mksi_ScheduleOfGoodwillAssociatedWithReportableSegmentsTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AdvertisingCostsPolicyTextBlock" xlink:label="us-gaap_AdvertisingCostsPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CustomerRelationshipsMember" xlink:label="us-gaap_CustomerRelationshipsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressStateOrProvince" xlink:label="dei_EntityAddressStateOrProvince"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherCurrentLiabilitiesFairValueDisclosure" xlink:label="mksi_OtherCurrentLiabilitiesFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GuaranteesAndProductWarrantiesAbstract" xlink:label="us-gaap_GuaranteesAndProductWarrantiesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NonCurrentInterestRateFairValueHedgeAssetAtFairValue" xlink:label="mksi_NonCurrentInterestRateFairValueHedgeAssetAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TaxCreditCarryForwardExpirationYearEnd" xlink:label="mksi_TaxCreditCarryForwardExpirationYearEnd"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredFinanceCostsGross" xlink:label="us-gaap_DeferredFinanceCostsGross"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PreferredStockSharesOutstanding" xlink:label="us-gaap_PreferredStockSharesOutstanding"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CappedCallTransactionReductionOrOffsetPerShare" xlink:label="mksi_CappedCallTransactionReductionOrOffsetPerShare"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ResearchAndDevelopmentExpensePolicy" xlink:label="us-gaap_ResearchAndDevelopmentExpensePolicy"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockCapitalSharesReservedForFutureIssuance" xlink:label="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" xlink:label="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfAssumptionsUsedTableTextBlock" xlink:label="us-gaap_ScheduleOfAssumptionsUsedTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_VacuumSolutionsDivisionMember" xlink:label="mksi_VacuumSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationIntercompanyRoyalty" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationIntercompanyRoyalty"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCreditFacilityLenderDomain" xlink:label="us-gaap_LineOfCreditFacilityLenderDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduleOfCapitalExpenditureDepreciationAndAmortizationAndAssetsReportableSegmentsTableTextBlock" xlink:label="mksi_ScheduleOfCapitalExpenditureDepreciationAndAmortizationAndAssetsReportableSegmentsTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccountsReceivableMember" xlink:label="us-gaap_AccountsReceivableMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareDiluted" xlink:label="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareDiluted"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForGreaterThanOrEqualToTenPercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForGreaterThanOrEqualToTenPercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes" xlink:label="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock" xlink:label="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_FinanceLeaseLiabilityStatementOfFinancialPositionExtensibleList"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationNondeductibleExpenseOther" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseOther"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DebtInstrumentConversionRateShares" xlink:label="mksi_DebtInstrumentConversionRateShares"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ComprehensiveIncomePolicyPolicyTextBlock" xlink:label="us-gaap_ComprehensiveIncomePolicyPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xlink:label="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestAndOtherIncome" xlink:label="us-gaap_InterestAndOtherIncome"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SignificantSupplyCommitmentTimePeriod" xlink:label="mksi_SignificantSupplyCommitmentTimePeriod"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_StateMember" xlink:label="mksi_StateMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationChangeInIncomeTaxReserves" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationChangeInIncomeTaxReserves"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebtFairValue" xlink:label="us-gaap_LongTermDebtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventMember" xlink:label="us-gaap_SubsequentEventMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfFacilitiesYetToClose" xlink:label="mksi_NumberOfFacilitiesYetToClose"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PatentsTrademarksTradeNamesAndOtherMember" xlink:label="mksi_PatentsTrademarksTradeNamesAndOtherMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentAbstract" xlink:label="us-gaap_PropertyPlantAndEquipmentAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="us-gaap_OtherAssetsNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SegmentAssets" xlink:label="mksi_SegmentAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NonCurrentLeaseLiability" xlink:label="mksi_NonCurrentLeaseLiability"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy" xlink:label="us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidForeignAfterRefundReceived" xlink:label="us-gaap_IncomeTaxPaidForeignAfterRefundReceived"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoInterestExpense" xlink:label="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoInterestExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestExpenseDebt" xlink:label="us-gaap_InterestExpenseDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax" xlink:label="us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock" xlink:label="us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_NameOfMajorCustomerDomain" xlink:label="srt_NameOfMajorCustomerDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ChangesInValueOfFinancialInstrumentsDesignatedAsCashFlowHedgesMember" xlink:label="mksi_ChangesInValueOfFinancialInstrumentsDesignatedAsCashFlowHedgesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeLiabilities" xlink:label="us-gaap_DerivativeLiabilities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxAssetsCapitalizedResearchExpenditures" xlink:label="mksi_DeferredTaxAssetsCapitalizedResearchExpenditures"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillImpairmentLoss" xlink:label="us-gaap_GoodwillImpairmentLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CompletedTechnologyMember" xlink:label="mksi_CompletedTechnologyMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ContractWithCustomerAssumedDeferredRevenueAndCustomerAdvances" xlink:label="mksi_ContractWithCustomerAssumedDeferredRevenueAndCustomerAdvances"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoanFacilityMember" xlink:label="mksi_TermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PreferredStockValue" xlink:label="us-gaap_PreferredStockValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SellingGeneralAndAdministrativeExpense" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentMaturityDate" xlink:label="us-gaap_DebtInstrumentMaturityDate"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForTenPercentOrMoreOfNetRevenue" xlink:label="mksi_NumberOfCustomersAccountedForTenPercentOrMoreOfNetRevenue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanEquitySecuritiesMember" xlink:label="us-gaap_DefinedBenefitPlanEquitySecuritiesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashFlowHedgeGainLossToBeReclassifiedWithinTwelveMonths" xlink:label="us-gaap_CashFlowHedgeGainLossToBeReclassifiedWithinTwelveMonths"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DebtInstrumentConvertibleConversionPricePercentage" xlink:label="mksi_DebtInstrumentConvertibleConversionPricePercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AssetsCurrentAbstract" xlink:label="us-gaap_AssetsCurrentAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AmortizationOfIntangibleAssets" xlink:label="us-gaap_AmortizationOfIntangibleAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueInputsLevel3Member" xlink:label="us-gaap_FairValueInputsLevel3Member"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts" xlink:label="mksi_BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForElevenPercentOfNetRevenue" xlink:label="mksi_NumberOfCustomersAccountedForElevenPercentOfNetRevenue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanWeightedAverageAssumptionsUsedInCalculatingNetPeriodicBenefitCostAbstract" xlink:label="us-gaap_DefinedBenefitPlanWeightedAverageAssumptionsUsedInCalculatingNetPeriodicBenefitCostAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IntangibleAssetsFairValue" xlink:label="mksi_IntangibleAssetsFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingAbstract" xlink:label="us-gaap_SegmentReportingAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock" xlink:label="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessCombinationsPolicy" xlink:label="us-gaap_BusinessCombinationsPolicy"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedGainLossNetCashFlowHedgeParentMember" xlink:label="us-gaap_AccumulatedGainLossNetCashFlowHedgeParentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LiabilitiesCurrentAbstract" xlink:label="us-gaap_LiabilitiesCurrentAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductMember" xlink:label="us-gaap_ProductMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockRepurchasedAndRetiredDuringPeriodValue" xlink:label="us-gaap_StockRepurchasedAndRetiredDuringPeriodValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherCurrentLiabilitiesTableTextBlock" xlink:label="us-gaap_OtherCurrentLiabilitiesTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_WeightedAverageNumberOfDilutedShares" xlink:label="mksi_WeightedAverageNumberOfDilutedShares"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLossCarryforwards" xlink:label="us-gaap_OperatingLossCarryforwards"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="us-gaap_AccountsReceivableNetCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredFinanceCostsNoncurrentGross" xlink:label="us-gaap_DeferredFinanceCostsNoncurrentGross"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidByIndividualJurisdictionAbstract" xlink:label="us-gaap_IncomeTaxPaidByIndividualJurisdictionAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ReportingUnitAxis" xlink:label="us-gaap_ReportingUnitAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommitmentsAndContingencies" xlink:label="us-gaap_CommitmentsAndContingencies"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherCountriesMember" xlink:label="mksi_OtherCountriesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeLeasesPolicyTextBlock" xlink:label="us-gaap_LesseeLeasesPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesDomain" xlink:label="us-gaap_ValuationAllowancesAndReservesDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanServiceCost" xlink:label="us-gaap_DefinedBenefitPlanServiceCost"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation" xlink:label="us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseLiability" xlink:label="us-gaap_OperatingLeaseLiability"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_AuditorFirmId" xlink:label="dei_AuditorFirmId"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxReconciliationForeignTaxCreditRelatedToWithholdingTaxes" xlink:label="mksi_IncomeTaxReconciliationForeignTaxCreditRelatedToWithholdingTaxes"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentBasisSpreadOnVariableRate1" xlink:label="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ScenarioForecastMember" xlink:label="srt_ScenarioForecastMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermBorrowings" xlink:label="us-gaap_ShortTermBorrowings"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxReconciliationRealizedForeignExchangeGainLoss" xlink:label="mksi_IncomeTaxReconciliationRealizedForeignExchangeGainLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockNoParValue" xlink:label="us-gaap_CommonStockNoParValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingAssetReconcilingItemLineItems" xlink:label="us-gaap_SegmentReportingAssetReconcilingItemLineItems"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EuriborRateFloorMember" xlink:label="mksi_EuriborRateFloorMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncreaseDecreaseCurrentAndNonCurrentAccruedCompensation" xlink:label="mksi_IncreaseDecreaseCurrentAndNonCurrentAccruedCompensation"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationExecutiveCompensation" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationExecutiveCompensation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyLiabilityLineItems" xlink:label="us-gaap_ProductWarrantyLiabilityLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredFinanceCostsNoncurrentNet" xlink:label="us-gaap_DeferredFinanceCostsNoncurrentNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearTwo" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearTwo"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ExpenseOfRestructuringActivitiesAndOtherTextBlock" xlink:label="mksi_ExpenseOfRestructuringActivitiesAndOtherTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendPerShare" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendPerShare"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent" xlink:label="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationChangeInDeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInDeferredTaxAssetsValuationAllowance"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxLiabilitiesDepreciationAndAmortization" xlink:label="mksi_DeferredTaxLiabilitiesDepreciationAndAmortization"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BankTimeDepositsMember" xlink:label="us-gaap_BankTimeDepositsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProfitLoss" xlink:label="us-gaap_ProfitLoss"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdiction" xlink:label="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdiction"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTextBlock" xlink:label="us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleTextBlock" xlink:label="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanAssetCategoriesOtherAssetsMember" xlink:label="mksi_DefinedBenefitPlanAssetCategoriesOtherAssetsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForFortySevenPercentFortyFourPercentAndThirtyThreePercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForFortySevenPercentFortyFourPercentAndThirtyThreePercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CorporateReconcilingItemsAndEliminationsMember" xlink:label="mksi_CorporateReconcilingItemsAndEliminationsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_StatementScenarioAxis" xlink:label="srt_StatementScenarioAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IsraeliPensionAssetsMember" xlink:label="mksi_IsraeliPensionAssetsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanChangeInFairValueOfPlanAssetsRollForward" xlink:label="us-gaap_DefinedBenefitPlanChangeInFairValueOfPlanAssetsRollForward"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationOtherReconcilingItems" xlink:label="us-gaap_IncomeTaxReconciliationOtherReconcilingItems"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxReconciliationSubpartFNetOfForeignTaxCredits" xlink:label="mksi_IncomeTaxReconciliationSubpartFNetOfForeignTaxCredits"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xlink:label="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="us-gaap_StatementBusinessSegmentsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduleOfFutureLeasePaymentsUnderNonCancelableLeasesTableTextBlock" xlink:label="mksi_ScheduleOfFutureLeasePaymentsUnderNonCancelableLeasesTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduleOfEarningsPerShareTable" xlink:label="mksi_ScheduleOfEarningsPerShareTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyAccrualNoncurrent" xlink:label="us-gaap_ProductWarrantyAccrualNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskProcessForInformingManagementOrCommitteesResponsibleTextBlock" xlink:label="cyd_CybersecurityRiskProcessForInformingManagementOrCommitteesResponsibleTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfShortTermDebtTextBlock" xlink:label="us-gaap_ScheduleOfShortTermDebtTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventsTextBlock" xlink:label="us-gaap_SubsequentEventsTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryRawMaterialsNetOfReserves" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MutualFundsAndExchangeTradedFundsMember" xlink:label="mksi_MutualFundsAndExchangeTradedFundsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationTaxCredits" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCredits"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebt" xlink:label="us-gaap_LongTermDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxAssetInterestCarryforward" xlink:label="us-gaap_DeferredTaxAssetInterestCarryforward"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TotalIncomeTaxPaymentsNetOfRefunds" xlink:label="mksi_TotalIncomeTaxPaymentsNetOfRefunds"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentInterestRateTerms" xlink:label="us-gaap_DebtInstrumentInterestRateTerms"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxDisclosureLineItems" xlink:label="mksi_IncomeTaxDisclosureLineItems"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxLiabilityRightOfUseAsset" xlink:label="mksi_DeferredTaxLiabilityRightOfUseAsset"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VariableRateDomain" xlink:label="us-gaap_VariableRateDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanActuarialGainLoss" xlink:label="us-gaap_DefinedBenefitPlanActuarialGainLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PreferredStockParOrStatedValuePerShare" xlink:label="us-gaap_PreferredStockParOrStatedValuePerShare"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxAssetsLeaseLiability" xlink:label="mksi_DeferredTaxAssetsLeaseLiability"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfOtherDerivativesNotDesignatedAsHedgingInstrumentsStatementsOfFinancialPerformanceAndFinancialPositionLocationTableTextBlock" xlink:label="us-gaap_ScheduleOfOtherDerivativesNotDesignatedAsHedgingInstrumentsStatementsOfFinancialPerformanceAndFinancialPositionLocationTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock" xlink:label="us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementOfStockholdersEquityAbstract" xlink:label="us-gaap_StatementOfStockholdersEquityAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AtotechMember" xlink:label="mksi_AtotechMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TypeOfRestructuringDomain" xlink:label="us-gaap_TypeOfRestructuringDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_RestructuringExpense" xlink:label="mksi_RestructuringExpense"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_WarrantyPeriod" xlink:label="mksi_WarrantyPeriod"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationBaseErosionWaiverOfDeductions" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationBaseErosionWaiverOfDeductions"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermSofrRatePlusApplicableCreditSpreadAdjustmentMember" xlink:label="mksi_TermSofrRatePlusApplicableCreditSpreadAdjustmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFive" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFive"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:label="us-gaap_DefinedBenefitPlanDisclosureLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LeaseholdImprovementsMember" xlink:label="us-gaap_LeaseholdImprovementsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OciBeforeReclassificationsNetOfTaxAttributableToParent" xlink:label="us-gaap_OciBeforeReclassificationsNetOfTaxAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendsPayableDateDeclaredDayMonthAndYear" xlink:label="us-gaap_DividendsPayableDateDeclaredDayMonthAndYear"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NewTermLoanFacilityMember" xlink:label="mksi_NewTermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_NL" xlink:label="country_NL"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ForeignInterestCarryforwards" xlink:label="mksi_ForeignInterestCarryforwards"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_US" xlink:label="country_US"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember" xlink:label="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoCostOfRevenues" xlink:label="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoCostOfRevenues"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherAssetsCurrent" xlink:label="us-gaap_OtherAssetsCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFour" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFour"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionEffectiveDateOfAcquisition1" xlink:label="us-gaap_BusinessAcquisitionEffectiveDateOfAcquisition1"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduleOfRestructuringAndOtherCostTable" xlink:label="mksi_ScheduleOfRestructuringAndOtherCostTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidForeignAfterRefundReceivedAbstract" xlink:label="us-gaap_IncomeTaxPaidForeignAfterRefundReceivedAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock" xlink:label="us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentPeriodicPayment" xlink:label="us-gaap_DebtInstrumentPeriodicPayment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingCodmIndividualTitleAndPositionOrGroupOrCommitteeNameExtensibleEnumeration" xlink:label="us-gaap_SegmentReportingCodmIndividualTitleAndPositionOrGroupOrCommitteeNameExtensibleEnumeration"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InProcessResearchAndDevelopmentMember" xlink:label="us-gaap_InProcessResearchAndDevelopmentMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesNetOfForeignTaxCredits" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesNetOfForeignTaxCredits"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermDebtRefinancedAmount" xlink:label="us-gaap_ShortTermDebtRefinancedAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock" xlink:label="us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncreaseDecreaseInOtherOperatingAssets" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AdjustedEBITDAMember" xlink:label="mksi_AdjustedEBITDAMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BuildingMember" xlink:label="us-gaap_BuildingMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoansUnderNewTermLoanFacilityMember" xlink:label="mksi_TermLoansUnderNewTermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CreditFacilityAxis" xlink:label="us-gaap_CreditFacilityAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantTextBlock" xlink:label="cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SegmentGrossProfitLoss" xlink:label="mksi_SegmentGrossProfitLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CurrentStateAndLocalTaxExpenseBenefit" xlink:label="us-gaap_CurrentStateAndLocalTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfExpectedBenefitPaymentsTableTextBlock" xlink:label="us-gaap_ScheduleOfExpectedBenefitPaymentsTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementExpertiseOfManagementResponsibleTextBlock" xlink:label="cyd_CybersecurityRiskManagementExpertiseOfManagementResponsibleTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxReconciliationIntercompanyRoyalty" xlink:label="mksi_IncomeTaxReconciliationIntercompanyRoyalty"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable" xlink:label="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OriginalIssueDiscountMember" xlink:label="mksi_OriginalIssueDiscountMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesAmount" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesAmount"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduledQuarterlyPaymentsPercentageOfOriginalPrincipalAmount" xlink:label="mksi_ScheduledQuarterlyPaymentsPercentageOfOriginalPrincipalAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:label="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ProceedsFromPaymentsForEmployeeStockAwards" xlink:label="mksi_ProceedsFromPaymentsForEmployeeStockAwards"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MaximumPercentageOfPayrollForPurchaseOfStock" xlink:label="mksi_MaximumPercentageOfPayrollForPurchaseOfStock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MinimumAgeLimitForSpecifiedAdditionalAmount" xlink:label="mksi_MinimumAgeLimitForSpecifiedAdditionalAmount"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_USFederalMember" xlink:label="mksi_USFederalMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationOtherAdjustments" xlink:label="us-gaap_IncomeTaxReconciliationOtherAdjustments"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AMICIncreases" xlink:label="mksi_AMICIncreases"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentPolicyTextBlock" xlink:label="us-gaap_PropertyPlantAndEquipmentPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForFifteenPercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForFifteenPercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_GovernmentIncentivesPolicyTextBlock" xlink:label="mksi_GovernmentIncentivesPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncrementalUsdTrancheBMember" xlink:label="mksi_IncrementalUsdTrancheBMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressCityOrTown" xlink:label="dei_EntityAddressCityOrTown"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PriorTermLoanFacilityMember" xlink:label="mksi_PriorTermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_GoodwillAndIntangibleAssetsLineItems" xlink:label="mksi_GoodwillAndIntangibleAssetsLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockRepurchasedDuringPeriodShares" xlink:label="us-gaap_StockRepurchasedDuringPeriodShares"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesReservesOfBusinessesAcquired" xlink:label="us-gaap_ValuationAllowancesAndReservesReservesOfBusinessesAcquired"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NumberOfReportableSegments" xlink:label="us-gaap_NumberOfReportableSegments"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_SecurityExchangeName" xlink:label="dei_SecurityExchangeName"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NumberOfInterestRateDerivativesHeld" xlink:label="us-gaap_NumberOfInterestRateDerivativesHeld"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CreditFacilityDomain" xlink:label="us-gaap_CreditFacilityDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_EuropeMember" xlink:label="srt_EuropeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IndefiniteLivedIntangibleAssetsExcludingGoodwill" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsExcludingGoodwill"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionDateOfAcquisitionAgreement1" xlink:label="us-gaap_BusinessAcquisitionDateOfAcquisitionAgreement1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentCarryingAmount" xlink:label="us-gaap_DebtInstrumentCarryingAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationOtherAdjustments" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationOtherAdjustments"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="us-gaap_PropertyPlantAndEquipmentGross"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DebtIssuanceCostsAmortizationPeriod" xlink:label="mksi_DebtIssuanceCostsAmortizationPeriod"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtWeightedAverageInterestRate" xlink:label="us-gaap_DebtWeightedAverageInterestRate"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditInterestCostStatementOfIncomeOrComprehensiveIncomeExtensibleList" xlink:label="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditInterestCostStatementOfIncomeOrComprehensiveIncomeExtensibleList"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="us-gaap_ConcentrationRiskTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CompensationRelatedCostsAbstract" xlink:label="us-gaap_CompensationRelatedCostsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfCashFlowHedgesIncludedInAccumulatedOtherComprehensiveIncomeLossTableTextBlock" xlink:label="us-gaap_ScheduleOfCashFlowHedgesIncludedInAccumulatedOtherComprehensiveIncomeLossTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MeasurementInputTypeDomain" xlink:label="us-gaap_MeasurementInputTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AntidilutiveSecuritiesNameDomain" xlink:label="us-gaap_AntidilutiveSecuritiesNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncrementalTrancheBLoansFourthAmendmentMember" xlink:label="mksi_IncrementalTrancheBLoansFourthAmendmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationForeignIncomeTaxRateDifferential" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationForeignIncomeTaxRateDifferential"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockholdersEquityNoteAbstract" xlink:label="us-gaap_StockholdersEquityNoteAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestPaidNet" xlink:label="us-gaap_InterestPaidNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable" xlink:label="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeMember" xlink:label="srt_RangeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AssetsCurrent" xlink:label="us-gaap_AssetsCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentPeriodEndDate" xlink:label="dei_DocumentPeriodEndDate"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtSecuritiesAvailableForSaleAndHeldToMaturityAmortizedCostAfterAllowanceForCreditLoss" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleAndHeldToMaturityAmortizedCostAfterAllowanceForCreditLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_IcfrAuditorAttestationFlag" xlink:label="dei_IcfrAuditorAttestationFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ImpairmentOfIntangibleAssetsIndefinitelivedExcludingGoodwill" xlink:label="us-gaap_ImpairmentOfIntangibleAssetsIndefinitelivedExcludingGoodwill"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanBenefitObligationBenefitsPaid" xlink:label="us-gaap_DefinedBenefitPlanBenefitObligationBenefitsPaid"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AccountsReceivableAllowancesPolicyTextBlock" xlink:label="mksi_AccountsReceivableAllowancesPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainLossOnSaleOfPropertyPlantEquipment" xlink:label="us-gaap_GainLossOnSaleOfPropertyPlantEquipment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ReportingUnitPercentageOfFairValueInExcessOfCarryingAmount" xlink:label="us-gaap_ReportingUnitPercentageOfFairValueInExcessOfCarryingAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncrementalTrancheBLoansSecondAmendmentMember" xlink:label="mksi_IncrementalTrancheBLoansSecondAmendmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementOfFinancialPositionAbstract" xlink:label="us-gaap_StatementOfFinancialPositionAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingAxis" xlink:label="us-gaap_VestingAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IndentureAndTheNotesMember" xlink:label="mksi_IndentureAndTheNotesMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherComprehensiveIncomeLossNetInvestmentHedgeGainLossNetOfTax" xlink:label="mksi_OtherComprehensiveIncomeLossNetInvestmentHedgeGainLossNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_GroupInsuranceContractsMember" xlink:label="mksi_GroupInsuranceContractsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxLiabilities" xlink:label="us-gaap_DeferredTaxLiabilities"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_Year5Member" xlink:label="mksi_Year5Member"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CompensationAndEmployeeBenefitPlansTextBlock" xlink:label="us-gaap_CompensationAndEmployeeBenefitPlansTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CurrentIncomeTaxExpenseBenefit" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxesDisclosureAbstract" xlink:label="mksi_IncomeTaxesDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementStrategyAndGovernanceLineItems" xlink:label="cyd_CybersecurityRiskManagementStrategyAndGovernanceLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:label="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:label="srt_ValuationAndQualifyingAccountsDisclosureLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NondesignatedMember" xlink:label="us-gaap_NondesignatedMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationChangeInEnactedTaxRate" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInEnactedTaxRate"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncrementalBorrowings" xlink:label="mksi_IncrementalBorrowings"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_Liabilities" xlink:label="us-gaap_Liabilities"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherNonCurrentAssetsFairValueDisclosure" xlink:label="mksi_OtherNonCurrentAssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_KR" xlink:label="country_KR"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential" xlink:label="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeLiabilityStatementOfFinancialPositionExtensibleEnumeration" xlink:label="us-gaap_DerivativeLiabilityStatementOfFinancialPositionExtensibleEnumeration"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanExpectedReturnOnPlanAssets" xlink:label="us-gaap_DefinedBenefitPlanExpectedReturnOnPlanAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsGainLossLineItems" xlink:label="us-gaap_DerivativeInstrumentsGainLossLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignExchangeForwardMember" xlink:label="us-gaap_ForeignExchangeForwardMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VariableRateAxis" xlink:label="us-gaap_VariableRateAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesBalance" xlink:label="us-gaap_ValuationAllowancesAndReservesBalance"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsGross" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MaximumPeriodOfCompanysResearchAndDevelopmentProjects" xlink:label="mksi_MaximumPeriodOfCompanysResearchAndDevelopmentProjects"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityFileNumber" xlink:label="dei_EntityFileNumber"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ChangeInContractWithCustomerLiabilityLineItems" xlink:label="mksi_ChangeInContractWithCustomerLiabilityLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsOfDividendsCommonStock" xlink:label="us-gaap_PaymentsOfDividendsCommonStock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationOtherReconcilingItemsPercent" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationOtherReconcilingItemsPercent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_BalanceSheetHedgesMember" xlink:label="mksi_BalanceSheetHedgesMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsSharesFromAcquisition" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsSharesFromAcquisition"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_CoverAbstract" xlink:label="dei_CoverAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_LineOfCreditFacilityRenewalPeriod" xlink:label="mksi_LineOfCreditFacilityRenewalPeriod"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MeasurementInputTypeAxis" xlink:label="us-gaap_MeasurementInputTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanEstimatedFutureBenefitPaymentsAbstract" xlink:label="us-gaap_DefinedBenefitPlanEstimatedFutureBenefitPaymentsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_BorrowingsUnderRevolvingFacilityMember" xlink:label="mksi_BorrowingsUnderRevolvingFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfCarryingValuesAndEstimatedFairValuesOfDebtInstrumentsTableTextBlock" xlink:label="us-gaap_ScheduleOfCarryingValuesAndEstimatedFairValuesOfDebtInstrumentsTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForNinetyPercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForNinetyPercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxesLineItems" xlink:label="mksi_IncomeTaxesLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TaxesPayableCurrent" xlink:label="us-gaap_TaxesPayableCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InvestmentTypeCategorizationMember" xlink:label="us-gaap_InvestmentTypeCategorizationMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_SG" xlink:label="country_SG"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SalesRevenueNetMember" xlink:label="us-gaap_SalesRevenueNetMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ScenarioUnspecifiedDomain" xlink:label="srt_ScenarioUnspecifiedDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignCurrencyTransactionGainLossUnrealized" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossUnrealized"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_USTreasurySecuritiesMember" xlink:label="us-gaap_USTreasurySecuritiesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingDisclosureTextBlock" xlink:label="us-gaap_SegmentReportingDisclosureTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CommonStockExercisePrice" xlink:label="mksi_CommonStockExercisePrice"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MeasurementPeriodMember" xlink:label="mksi_MeasurementPeriodMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockIssuedDuringPeriodSharesAcquisitions" xlink:label="us-gaap_StockIssuedDuringPeriodSharesAcquisitions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ValuationAndQualifyingAccountsDisclosureTable" xlink:label="srt_ValuationAndQualifyingAccountsDisclosureTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments" xlink:label="us-gaap_GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventTable" xlink:label="us-gaap_SubsequentEventTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PurchaseCommitmentRemainingMinimumAmountCommitted" xlink:label="us-gaap_PurchaseCommitmentRemainingMinimumAmountCommitted"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxAssetsOther" xlink:label="us-gaap_DeferredTaxAssetsOther"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentConvertibleConversionPrice1" xlink:label="us-gaap_DebtInstrumentConvertibleConversionPrice1"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_StepUpMember" xlink:label="mksi_StepUpMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate" xlink:label="us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyDisclosureTextBlock" xlink:label="us-gaap_ProductWarrantyDisclosureTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentFinStmtRestatementRecoveryAnalysisFlag" xlink:label="dei_DocumentFinStmtRestatementRecoveryAnalysisFlag"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForThirtyPercentFortyTwoPercentAndFourtySixPercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForThirtyPercentFortyTwoPercentAndFourtySixPercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentInterestRateIncreaseDecrease" xlink:label="us-gaap_DebtInstrumentInterestRateIncreaseDecrease"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestructuringCharges" xlink:label="us-gaap_RestructuringCharges"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentUsefulLife" xlink:label="us-gaap_PropertyPlantAndEquipmentUsefulLife"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsNotDesignatedAsHedgingInstrumentsAbstract" xlink:label="us-gaap_DerivativeInstrumentsNotDesignatedAsHedgingInstrumentsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipByIncomeStatementLocationByDerivativeInstrumentRiskTable" xlink:label="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipByIncomeStatementLocationByDerivativeInstrumentRiskTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ContractWithCustomerLiabilityCurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseOther" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseOther"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeSeveranceMember" xlink:label="us-gaap_EmployeeSeveranceMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AtotechLimitedMember" xlink:label="mksi_AtotechLimitedMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AccumulatedOtherComprehensiveIncomeLossChangeInNetInvestmentHedgeMember" xlink:label="mksi_AccumulatedOtherComprehensiveIncomeLossChangeInNetInvestmentHedgeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_Depreciation" xlink:label="us-gaap_Depreciation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockSharesOutstanding" xlink:label="us-gaap_CommonStockSharesOutstanding"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendsDomain" xlink:label="us-gaap_DividendsDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementProcessesIntegratedFlag" xlink:label="cyd_CybersecurityRiskManagementProcessesIntegratedFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentTransitionReport" xlink:label="dei_DocumentTransitionReport"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermInvestments" xlink:label="us-gaap_ShortTermInvestments"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherNonCurrentLiabilitiesFairValueDisclosure" xlink:label="mksi_OtherNonCurrentLiabilitiesFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="us-gaap_ResearchAndDevelopmentExpense"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxDisclosureTable" xlink:label="mksi_IncomeTaxDisclosureTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeasesTextBlock" xlink:label="us-gaap_LesseeOperatingLeasesTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsForRepurchaseOfCommonStock" xlink:label="us-gaap_PaymentsForRepurchaseOfCommonStock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" xlink:label="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_UnrealizedGainLossOnDerivatives" xlink:label="us-gaap_UnrealizedGainLossOnDerivatives"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementOfCashFlowsAbstract" xlink:label="us-gaap_StatementOfCashFlowsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CompletedTechnologyRightsMember" xlink:label="mksi_CompletedTechnologyRightsMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxAssetsInventoryAndWarrantyReserves" xlink:label="mksi_DeferredTaxAssetsInventoryAndWarrantyReserves"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_HK" xlink:label="country_HK"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CurrentFederalTaxExpenseBenefit" xlink:label="us-gaap_CurrentFederalTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ChangeInContractWithCustomerLiabilityTable" xlink:label="mksi_ChangeInContractWithCustomerLiabilityTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseShareBasedCompensationCost" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseShareBasedCompensationCost"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired" xlink:label="us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTable" xlink:label="us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestRateSwapMember" xlink:label="us-gaap_InterestRateSwapMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockholdersEquityNoteDisclosureTextBlock" xlink:label="us-gaap_StockholdersEquityNoteDisclosureTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsLineItems" xlink:label="us-gaap_FiniteLivedIntangibleAssetsLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerShareTextBlock" xlink:label="us-gaap_EarningsPerShareTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SharesIssued" xlink:label="us-gaap_SharesIssued"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementProcessesIntegratedTextBlock" xlink:label="cyd_CybersecurityRiskManagementProcessesIntegratedTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CashAndCashEquivalentsAndInvestmentsPolicyTextBlock" xlink:label="mksi_CashAndCashEquivalentsAndInvestmentsPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DebtInstrumentConvertibleApplicableConversionPrice" xlink:label="mksi_DebtInstrumentConvertibleApplicableConversionPrice"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetIncomeLoss" xlink:label="us-gaap_NetIncomeLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryWriteDown" xlink:label="us-gaap_InventoryWriteDown"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="us-gaap_IncreaseDecreaseInInventories"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_InProcessResearchAndDevelopmentReclassifiedIntoCompletedTechnology" xlink:label="mksi_InProcessResearchAndDevelopmentReclassifiedIntoCompletedTechnology"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseCost" xlink:label="us-gaap_OperatingLeaseCost"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DerivativeAndHedgingTable" xlink:label="mksi_DerivativeAndHedgingTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PensionAndOtherPostretirementBenefitContributions" xlink:label="us-gaap_PensionAndOtherPostretirementBenefitContributions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue" xlink:label="us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProceedsFromPaymentsForOtherFinancingActivities" xlink:label="us-gaap_ProceedsFromPaymentsForOtherFinancingActivities"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ContractWithCustomerLiabilityAdditions" xlink:label="mksi_ContractWithCustomerLiabilityAdditions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeasePayments" xlink:label="us-gaap_OperatingLeasePayments"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationFdiiPercent" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiPercent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyAccrualWarrantiesIssued" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedContributionPlanMinimumAnnualContributionsPerEmployeePercent" xlink:label="mksi_DefinedContributionPlanMinimumAnnualContributionsPerEmployeePercent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AssetsAbstract" xlink:label="us-gaap_AssetsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityNameAxis" xlink:label="us-gaap_IncomeTaxAuthorityNameAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConstructionInProgressMember" xlink:label="us-gaap_ConstructionInProgressMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RepaymentsOfDebt" xlink:label="us-gaap_RepaymentsOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AmortizationOfFinancingCostsAndDiscounts" xlink:label="us-gaap_AmortizationOfFinancingCostsAndDiscounts"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeitedWeightedAverageGrantDateFairValue" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeitedWeightedAverageGrantDateFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestructuringAndRelatedActivitiesAbstract" xlink:label="us-gaap_RestructuringAndRelatedActivitiesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentFiscalYearFocus" xlink:label="dei_DocumentFiscalYearFocus"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" xlink:label="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_GoodwillAndIntangibleAssetsTable" xlink:label="mksi_GoodwillAndIntangibleAssetsTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:label="us-gaap_CompensationAndRetirementDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccountsPayableCurrent" xlink:label="us-gaap_AccountsPayableCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedInPeriodFairValue1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedInPeriodFairValue1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations" xlink:label="us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ComponentsOfCashPaidForTaxesTableTextBlock" xlink:label="mksi_ComponentsOfCashPaidForTaxesTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ResearchAndDevelopmentExpenseMember" xlink:label="us-gaap_ResearchAndDevelopmentExpenseMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfNetBenefitCostsTableTextBlock" xlink:label="us-gaap_ScheduleOfNetBenefitCostsTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:label="mksi_ScheduleOfSignificantAccountingPoliciesTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesAbstract" xlink:label="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeMaturityDates" xlink:label="us-gaap_DerivativeMaturityDates"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock" xlink:label="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredFederalIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredFederalIncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation" xlink:label="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_LineOfCreditFacilityMinimumAdditionalBorrowingCapacity" xlink:label="mksi_LineOfCreditFacilityMinimumAdditionalBorrowingCapacity"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AccountingStandardsUpdated201409Member" xlink:label="mksi_AccountingStandardsUpdated201409Member"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xlink:label="us-gaap_ComponentsOfDeferredTaxAssetsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_LevelOfPerformanceTargetAchievedPercentage" xlink:label="mksi_LevelOfPerformanceTargetAchievedPercentage"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PaymentsAndAdjustmentForRestructuring" xlink:label="mksi_PaymentsAndAdjustmentForRestructuring"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanDebtSecurityMember" xlink:label="us-gaap_DefinedBenefitPlanDebtSecurityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="us-gaap_FairValueDisclosuresAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_CA" xlink:label="country_CA"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockIssuedDuringPeriodValueAcquisitions" xlink:label="us-gaap_StockIssuedDuringPeriodValueAcquisitions"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxAssetsDepreciationAndAmortization" xlink:label="mksi_DeferredTaxAssetsDepreciationAndAmortization"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareBasic" xlink:label="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareBasic"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCredit" xlink:label="us-gaap_LineOfCredit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentRiskAxis" xlink:label="us-gaap_DerivativeInstrumentRiskAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanInterestCost" xlink:label="us-gaap_DefinedBenefitPlanInterestCost"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AssetsFairValueDisclosure" xlink:label="us-gaap_AssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets" xlink:label="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativesPolicyTextBlock" xlink:label="us-gaap_DerivativesPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="us-gaap_ConcentrationRiskPercentage1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsNextTwelveMonths" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsNextTwelveMonths"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfNonvestedRestrictedStockUnitsActivityTableTextBlock" xlink:label="us-gaap_ScheduleOfNonvestedRestrictedStockUnitsActivityTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermSofrBorrowingsMember" xlink:label="mksi_TermSofrBorrowingsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermDebtRefinancedDescription" xlink:label="us-gaap_ShortTermDebtRefinancedDescription"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1" xlink:label="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_Security12bTitle" xlink:label="dei_Security12bTitle"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrentAndNoncurrent" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrentAndNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureTextBlock" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidByIndividualJurisdictionTable" xlink:label="us-gaap_IncomeTaxPaidByIndividualJurisdictionTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MoneyMarketFundsMember" xlink:label="us-gaap_MoneyMarketFundsMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearSixToTen" xlink:label="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearSixToTen"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFive" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFive"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_InterestRateHegesMember" xlink:label="mksi_InterestRateHegesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxDisclosureTextBlock" xlink:label="us-gaap_IncomeTaxDisclosureTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditExpectedReturnLossStatementOfIncomeOrComprehensiveIncomeExtensibleList" xlink:label="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditExpectedReturnLossStatementOfIncomeOrComprehensiveIncomeExtensibleList"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UnrecognizedTaxBenefitsOffsetAgainstRestructuringReserves" xlink:label="mksi_UnrecognizedTaxBenefitsOffsetAgainstRestructuringReserves"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestExpenseMember" xlink:label="us-gaap_InterestExpenseMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember" xlink:label="mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OperatingLossCarryforwardsExpiringTwoThousandThirtyNineMember" xlink:label="mksi_OperatingLossCarryforwardsExpiringTwoThousandThirtyNineMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherLiabilitiesNoncurrent" xlink:label="us-gaap_OtherLiabilitiesNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentRedemptionPeriodDomain" xlink:label="us-gaap_DebtInstrumentRedemptionPeriodDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForFourteenPercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForFourteenPercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:label="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentTextBlock" xlink:label="us-gaap_PropertyPlantAndEquipmentTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanFairValueOfPlanAssets" xlink:label="us-gaap_DefinedBenefitPlanFairValueOfPlanAssets"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ComponentsOfCashPaidNetOfRefundsReceivedForIncomeTaxesTableTextBlock" xlink:label="mksi_ComponentsOfCashPaidNetOfRefundsReceivedForIncomeTaxesTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_UnrecognizedTaxBenefits" xlink:label="us-gaap_UnrecognizedTaxBenefits"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AdditionalPaidInCapitalMember" xlink:label="us-gaap_AdditionalPaidInCapitalMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ConvertibleSeniorNotesDue2030Member" xlink:label="mksi_ConvertibleSeniorNotesDue2030Member"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueMeasurementFrequencyDomain" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherOperatingIncomeExpenseMember" xlink:label="us-gaap_OtherOperatingIncomeExpenseMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_StockRepurchaseProgramAuthorizedAmount1" xlink:label="srt_StockRepurchaseProgramAuthorizedAmount1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems" xlink:label="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_TradingSymbol" xlink:label="dei_TradingSymbol"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_RestructuringCostAndOtherCostLineItems" xlink:label="mksi_RestructuringCostAndOtherCostLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable" xlink:label="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock" xlink:label="us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" xlink:label="mksi_NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventTypeAxis" xlink:label="us-gaap_SubsequentEventTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CustomerAdvancesMember" xlink:label="mksi_CustomerAdvancesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock" xlink:label="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_TW" xlink:label="country_TW"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TaxBenefitRelatedToHistoricalOutsideBasisDifferences" xlink:label="mksi_TaxBenefitRelatedToHistoricalOutsideBasisDifferences"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueMeasurementsRecurringMember" xlink:label="us-gaap_FairValueMeasurementsRecurringMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationTaxCreditsResearch" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCreditsResearch"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoanFacilityNetMember" xlink:label="mksi_TermLoanFacilityNetMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanAssetsForPlanBenefitsPercentage" xlink:label="mksi_DefinedBenefitPlanAssetsForPlanBenefitsPercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetImpairment" xlink:label="us-gaap_GoodwillAndIntangibleAssetImpairment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ContractWithCustomerAmountOfDeferredRevenueAndCustomerAdvancesRecognized" xlink:label="mksi_ContractWithCustomerAmountOfDeferredRevenueAndCustomerAdvancesRecognized"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_RepurchaseOfDebtPercentage" xlink:label="mksi_RepurchaseOfDebtPercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NonoperatingIncomeExpense" xlink:label="us-gaap_NonoperatingIncomeExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueByAssetClassAxis" xlink:label="us-gaap_FairValueByAssetClassAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StateAndLocalTaxJurisdictionOtherMember" xlink:label="us-gaap_StateAndLocalTaxJurisdictionOtherMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SpecialtyIndustrialMember" xlink:label="mksi_SpecialtyIndustrialMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="us-gaap_ProductWarrantyAccrual"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember" xlink:label="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CurrentAssetsFairValueDisclosure" xlink:label="mksi_CurrentAssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentAnnualReport" xlink:label="dei_DocumentAnnualReport"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:label="mksi_ScheduleOfSignificantAccountingPoliciesLineItems"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationSubpartFNetOfForeignTaxCredits" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationSubpartFNetOfForeignTaxCredits"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillTransfers" xlink:label="us-gaap_GoodwillTransfers"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="us-gaap_BusinessAcquisitionAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostRateOfCompensationIncrease" xlink:label="us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostRateOfCompensationIncrease"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="us-gaap_MachineryAndEquipmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PostemploymentBenefitsAbstract" xlink:label="us-gaap_PostemploymentBenefitsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MajorCustomersAxis" xlink:label="srt_MajorCustomersAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxReconciliationAuditSettlementRelatedToIntercompanyTransactions" xlink:label="mksi_IncomeTaxReconciliationAuditSettlementRelatedToIntercompanyTransactions"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxesTableTable" xlink:label="mksi_IncomeTaxesTableTable"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OneCustomerMember" xlink:label="mksi_OneCustomerMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NewportCorporationMember" xlink:label="mksi_NewportCorporationMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MinimumPercentageOfEarningsBeforeInterestTaxesDepreciationAndAmortization" xlink:label="mksi_MinimumPercentageOfEarningsBeforeInterestTaxesDepreciationAndAmortization"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DepreciationAndAmortization" xlink:label="us-gaap_DepreciationAndAmortization"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EmployeePerformanceAwardBonusExpense" xlink:label="mksi_EmployeePerformanceAwardBonusExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BuildingAndBuildingImprovementsMember" xlink:label="us-gaap_BuildingAndBuildingImprovementsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationTaxContingencies" xlink:label="us-gaap_IncomeTaxReconciliationTaxContingencies"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UsdTrancheBFirstAmmendmentMember" xlink:label="mksi_UsdTrancheBFirstAmmendmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendPayableDateToBePaidDayMonthAndYear" xlink:label="us-gaap_DividendPayableDateToBePaidDayMonthAndYear"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DesignatedAsHedgingInstrumentMember" xlink:label="us-gaap_DesignatedAsHedgingInstrumentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MinimumPercentageOfIncomeTaxPaymentNetOfRefundsReceived" xlink:label="mksi_MinimumPercentageOfIncomeTaxPaymentNetOfRefundsReceived"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ContractWithCustomerLiabilityNoncurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanPlanAssetsForeignCurrencyTranslationGainLoss" xlink:label="us-gaap_DefinedBenefitPlanPlanAssetsForeignCurrencyTranslationGainLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockValue" xlink:label="us-gaap_CommonStockValue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncrementalTrancheBLoansMember" xlink:label="mksi_IncrementalTrancheBLoansMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AMIC" xlink:label="mksi_AMIC"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeasePrincipalPayments" xlink:label="us-gaap_FinanceLeasePrincipalPayments"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_StockExercisePriceAsPercentageOfClosingMarketPrice" xlink:label="mksi_StockExercisePriceAsPercentageOfClosingMarketPrice"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendsAxis" xlink:label="us-gaap_DividendsAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredRevenueMember" xlink:label="mksi_DeferredRevenueMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SecuredOvernightFinancingRateSofrMember" xlink:label="us-gaap_SecuredOvernightFinancingRateSofrMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanPensionPlanChangeInBenefitObligationAbstract" xlink:label="mksi_DefinedBenefitPlanPensionPlanChangeInBenefitObligationAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ComprehensiveIncomeNetOfTaxAbstract" xlink:label="us-gaap_ComprehensiveIncomeNetOfTaxAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxAssetsOperatingLossCarryforwards" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock" xlink:label="cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TaxCreditCarryforwardAxis" xlink:label="us-gaap_TaxCreditCarryforwardAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock" xlink:label="us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationBeatAmount" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationBeatAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationStateAndLocalIncomeTaxes" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationStateAndLocalIncomeTaxes"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AmortizationOfFinancingCosts" xlink:label="us-gaap_AmortizationOfFinancingCosts"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForThirtyTwoPercentThirtyPercentAndFortyTwoPercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForThirtyTwoPercentThirtyPercentAndFortyTwoPercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncrementalRevolvingCommitmentsMember" xlink:label="mksi_IncrementalRevolvingCommitmentsMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SixthAmendmentMember" xlink:label="mksi_SixthAmendmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock" xlink:label="us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_BorrowingsUnderNewRevolvingFacilityMember" xlink:label="mksi_BorrowingsUnderNewRevolvingFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" xlink:label="mksi_CurrentInterestRateFairValueHedgeLiabilitiesAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityPublicFloat" xlink:label="dei_EntityPublicFloat"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ZeroCustomerMember" xlink:label="mksi_ZeroCustomerMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PreferredStockSharesAuthorized" xlink:label="us-gaap_PreferredStockSharesAuthorized"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanBusinessCombinationsAndAcquisitionsPlanAssets" xlink:label="us-gaap_DefinedBenefitPlanBusinessCombinationsAndAcquisitionsPlanAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfDebtTableTextBlock" xlink:label="us-gaap_ScheduleOfDebtTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentAnnualPrincipalPayment" xlink:label="us-gaap_DebtInstrumentAnnualPrincipalPayment"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ReductionToInterestExpense" xlink:label="mksi_ReductionToInterestExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCreditFacilityAxis" xlink:label="us-gaap_LineOfCreditFacilityAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RepaymentsOfConvertibleDebt" xlink:label="us-gaap_RepaymentsOfConvertibleDebt"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfConsecutiveTradingDays" xlink:label="mksi_NumberOfConsecutiveTradingDays"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueFromContractWithCustomerTextBlock" xlink:label="us-gaap_RevenueFromContractWithCustomerTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityRegistrantName" xlink:label="dei_EntityRegistrantName"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtDisclosureTextBlock" xlink:label="us-gaap_DebtDisclosureTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentPeriodicPaymentPrincipal" xlink:label="us-gaap_DebtInstrumentPeriodicPaymentPrincipal"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityVoluntaryFilers" xlink:label="dei_EntityVoluntaryFilers"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="us-gaap_CustomerConcentrationRiskMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PercentageOfPayrollDeductionToCompensation" xlink:label="mksi_PercentageOfPayrollDeductionToCompensation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="us-gaap_OtherNonoperatingIncomeExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventsAbstract" xlink:label="us-gaap_SubsequentEventsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ValuationAndQualifyingAccountsAbstract" xlink:label="srt_ValuationAndQualifyingAccountsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleFlag" xlink:label="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueByMeasurementFrequencyAxis" xlink:label="us-gaap_FairValueByMeasurementFrequencyAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockDividendsPerShareCashPaid" xlink:label="us-gaap_CommonStockDividendsPerShareCashPaid"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFive" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFive"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredCompensationPlanAssetsFairValueDisclosure" xlink:label="mksi_DeferredCompensationPlanAssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockRepurchasedDuringPeriodValue" xlink:label="us-gaap_StockRepurchasedDuringPeriodValue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherCurrentLiabilitiesTextBlock" xlink:label="mksi_OtherCurrentLiabilitiesTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PercentageOfAggregateAmountOfAllCommitments" xlink:label="mksi_PercentageOfAggregateAmountOfAllCommitments"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityCommonStockSharesOutstanding" xlink:label="dei_EntityCommonStockSharesOutstanding"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskCreditRisk" xlink:label="us-gaap_ConcentrationRiskCreditRisk"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentConvertibleTermsOfConversionFeature" xlink:label="us-gaap_DebtInstrumentConvertibleTermsOfConversionFeature"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CompensationRelatedCostsPolicyTextBlock" xlink:label="us-gaap_CompensationRelatedCostsPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestExpenseDebtAbstract" xlink:label="us-gaap_InterestExpenseDebtAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SegmentGrossProfitPercentage" xlink:label="mksi_SegmentGrossProfitPercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ConsolidationItemsAxis" xlink:label="srt_ConsolidationItemsAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EmployeeStockPurchasePlanMember" xlink:label="mksi_EmployeeStockPurchasePlanMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_Assets" xlink:label="us-gaap_Assets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryPolicyTextBlock" xlink:label="us-gaap_InventoryPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:label="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceived" xlink:label="us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceived"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeStatementAbstract" xlink:label="us-gaap_IncomeStatementAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RatioOfIndebtednessToNetCapital1" xlink:label="us-gaap_RatioOfIndebtednessToNetCapital1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesChargedToOtherAccounts" xlink:label="us-gaap_ValuationAllowancesAndReservesChargedToOtherAccounts"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherPercent" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherPercent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestRateCapMember" xlink:label="us-gaap_InterestRateCapMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseInterestPaymentOnLiability" xlink:label="us-gaap_FinanceLeaseInterestPaymentOnLiability"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy" xlink:label="us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoanMember" xlink:label="mksi_TermLoanMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SellingGeneralAndAdministrativeExpensesMember" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpensesMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_O2026Q1DividendsMember" xlink:label="mksi_O2026Q1DividendsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ChangeInContractWithCustomerLiabilityAbstract" xlink:label="us-gaap_ChangeInContractWithCustomerLiabilityAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationGiltiPercent" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationGiltiPercent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LeaseCostAbstract" xlink:label="us-gaap_LeaseCostAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CumulativeInflationRates" xlink:label="mksi_CumulativeInflationRates"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerShareDilutedAbstract" xlink:label="us-gaap_EarningsPerShareDilutedAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="us-gaap_EarningsPerShareDiluted"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingSegmentsMember" xlink:label="us-gaap_OperatingSegmentsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncreaseDecreaseInAccountsPayableTrade" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableTrade"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_CityAreaCode" xlink:label="dei_CityAreaCode"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebtAbstract" xlink:label="us-gaap_LongTermDebtAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentIssuedPrincipal" xlink:label="us-gaap_DebtInstrumentIssuedPrincipal"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanCashMember" xlink:label="us-gaap_DefinedBenefitPlanCashMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationAuditSettlementRelatedToIntercompanyTransactions" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationAuditSettlementRelatedToIntercompanyTransactions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_AuditorName" xlink:label="dei_AuditorName"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTextBlock" xlink:label="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MinimumPercentageOfRecognizedTaxBenefitsFromUncertainTaxPosition" xlink:label="mksi_MinimumPercentageOfRecognizedTaxBenefitsFromUncertainTaxPosition"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentFaceAmount" xlink:label="us-gaap_DebtInstrumentFaceAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" xlink:label="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxAssetsTaxCreditCarryforwards" xlink:label="us-gaap_DeferredTaxAssetsTaxCreditCarryforwards"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UsdTrancheAMember" xlink:label="mksi_UsdTrancheAMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationTaxCreditsResearch" xlink:label="us-gaap_IncomeTaxReconciliationTaxCreditsResearch"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseImpairmentLosses" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseImpairmentLosses"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestRateFloorMember" xlink:label="us-gaap_InterestRateFloorMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConvertibleDebtNoncurrent" xlink:label="us-gaap_ConvertibleDebtNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyLiabilityTable" xlink:label="us-gaap_ProductWarrantyLiabilityTable"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EarningsPerShareLineItems" xlink:label="mksi_EarningsPerShareLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ChangesInProjectedBenefitObligationsFairValueOfPlanAssetsAndFundedStatusOfPlanTableTextBlock" xlink:label="us-gaap_ChangesInProjectedBenefitObligationsFairValueOfPlanAssetsAndFundedStatusOfPlanTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_InsuranceReimbursementReceived" xlink:label="mksi_InsuranceReimbursementReceived"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="us-gaap_SegmentReportingInformationLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LeaseCost" xlink:label="us-gaap_LeaseCost"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SemiconductorProductsMember" xlink:label="mksi_SemiconductorProductsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GuaranteesAbstract" xlink:label="us-gaap_GuaranteesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CostToPurchaseCappedCallTransactions" xlink:label="mksi_CostToPurchaseCappedCallTransactions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RightOfUseAssetObtainedInExchangeForFinanceLeaseLiability" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForFinanceLeaseLiability"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy" xlink:label="us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearThree" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearThree"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoansUnderTermLoanFacilityMember" xlink:label="mksi_TermLoansUnderTermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FederalStateAndForeignMember" xlink:label="mksi_FederalStateAndForeignMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredForeignIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredForeignIncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CashPaidDuringPeriodForInterestAndIncomeTaxAbstract" xlink:label="mksi_CashPaidDuringPeriodForInterestAndIncomeTaxAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProceedsFromBankDebt" xlink:label="us-gaap_ProceedsFromBankDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AociIncludingPortionAttributableToNoncontrollingInterestPeriodIncreaseDecrease" xlink:label="us-gaap_AociIncludingPortionAttributableToNoncontrollingInterestPeriodIncreaseDecrease"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingIncomeLoss" xlink:label="us-gaap_OperatingIncomeLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillForeignCurrencyTranslationGainLoss" xlink:label="us-gaap_GoodwillForeignCurrencyTranslationGainLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostDiscountRate" xlink:label="us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostDiscountRate"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SemiconductorMember" xlink:label="mksi_SemiconductorMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RetainedEarningsMember" xlink:label="us-gaap_RetainedEarningsMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UnallocatedCorporateExpenses" xlink:label="mksi_UnallocatedCorporateExpenses"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensation" xlink:label="us-gaap_ShareBasedCompensation"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SummaryOfWeightedAverageRemainingTermsForAllLeasesTableTextBlock" xlink:label="mksi_SummaryOfWeightedAverageRemainingTermsForAllLeasesTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent" xlink:label="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueInputsLevel1Member" xlink:label="us-gaap_FairValueInputsLevel1Member"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ClassOfStockLineItems" xlink:label="us-gaap_ClassOfStockLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermDebtLineItems" xlink:label="us-gaap_ShortTermDebtLineItems"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodPercentageExercisePrice" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodPercentageExercisePrice"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsShareFromAcquisitionWeightedAverageGrantDateFairValue" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsShareFromAcquisitionWeightedAverageGrantDateFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LeaseCostTableTextBlock" xlink:label="us-gaap_LeaseCostTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_AuditorLocation" xlink:label="dei_AuditorLocation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredIncomeTaxLiabilitiesNet" xlink:label="us-gaap_DeferredIncomeTaxLiabilitiesNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FurnitureAndFixturesOfficeEquipmentAndSoftwareMember" xlink:label="mksi_FurnitureAndFixturesOfficeEquipmentAndSoftwareMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_Years3And4Member" xlink:label="mksi_Years3And4Member"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeContractTypeDomain" xlink:label="us-gaap_DerivativeContractTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsForeignCurrencyTranslationGainLoss" xlink:label="us-gaap_FiniteLivedIntangibleAssetsForeignCurrencyTranslationGainLoss"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_RestrictedStockUnitsGrantedToDirectorsMember" xlink:label="mksi_RestrictedStockUnitsGrantedToDirectorsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityDomain" xlink:label="us-gaap_IncomeTaxAuthorityDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityInteractiveDataCurrent" xlink:label="dei_EntityInteractiveDataCurrent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_Time-BasedRSUMember" xlink:label="mksi_Time-BasedRSUMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanByPlanAssetCategoriesAxis" xlink:label="us-gaap_DefinedBenefitPlanByPlanAssetCategoriesAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FurnitureAndFixturesMember" xlink:label="us-gaap_FurnitureAndFixturesMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherReportingUnitsMember" xlink:label="mksi_OtherReportingUnitsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock" xlink:label="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceivedAbstract" xlink:label="us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceivedAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyAccrualPeriodIncreaseDecrease" xlink:label="us-gaap_ProductWarrantyAccrualPeriodIncreaseDecrease"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ContractWithCustomerAssetNet" xlink:label="us-gaap_ContractWithCustomerAssetNet"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TopTenCustomersMember" xlink:label="mksi_TopTenCustomersMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract" xlink:label="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockDividendsPerShareDeclared" xlink:label="us-gaap_CommonStockDividendsPerShareDeclared"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_BorrowingsUnderEuroTrancheBMember" xlink:label="mksi_BorrowingsUnderEuroTrancheBMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityTaxIdentificationNumber" xlink:label="dei_EntityTaxIdentificationNumber"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenuesAbstract" xlink:label="us-gaap_RevenuesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LandMember" xlink:label="us-gaap_LandMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermBorrowingsAbstract" xlink:label="us-gaap_ShortTermBorrowingsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DebtInstrumentPremiumPercentage" xlink:label="mksi_DebtInstrumentPremiumPercentage"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PaymentsForCostOfCappedCallTransactions" xlink:label="mksi_PaymentsForCostOfCappedCallTransactions"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan" xlink:label="mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OperatingLossCarryforwardsExpiringTwoThousandSeventeenMember" xlink:label="mksi_OperatingLossCarryforwardsExpiringTwoThousandSeventeenMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities" xlink:label="us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_WeightedAverageRevenueGrowthRateFutureUndiscountedCashFlows" xlink:label="mksi_WeightedAverageRevenueGrowthRateFutureUndiscountedCashFlows"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityNameDomain" xlink:label="us-gaap_IncomeTaxAuthorityNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_LocalPhoneNumber" xlink:label="dei_LocalPhoneNumber"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanNetPeriodicBenefitCost" xlink:label="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCost"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherLiabilitiesCurrent" xlink:label="us-gaap_OtherLiabilitiesCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermLeaseCost" xlink:label="us-gaap_ShortTermLeaseCost"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_CN" xlink:label="country_CN"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_AuditorOpinionTextBlock" xlink:label="dei_AuditorOpinionTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsOfFinancingCosts" xlink:label="us-gaap_PaymentsOfFinancingCosts"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanAssetsForPlanBenefitsGuaranteedRateOfReturn" xlink:label="mksi_DefinedBenefitPlanAssetsForPlanBenefitsGuaranteedRateOfReturn"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NoncurrentAssets" xlink:label="us-gaap_NoncurrentAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccountingPoliciesAbstract" xlink:label="us-gaap_AccountingPoliciesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherCurrentLiabilitiesMember" xlink:label="us-gaap_OtherCurrentLiabilitiesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DisaggregationOfRevenueLineItems" xlink:label="us-gaap_DisaggregationOfRevenueLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherSundryLiabilitiesCurrent" xlink:label="us-gaap_OtherSundryLiabilitiesCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings" xlink:label="us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetIncomeLossAbstract" xlink:label="us-gaap_NetIncomeLossAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OfficeEquipmentMember" xlink:label="us-gaap_OfficeEquipmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent" xlink:label="us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidFederalAfterRefundReceivedAbstract" xlink:label="us-gaap_IncomeTaxPaidFederalAfterRefundReceivedAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ForeignSubpartFIncomeTaxedInUSNetOfForeignTaxCredits" xlink:label="mksi_ForeignSubpartFIncomeTaxedInUSNetOfForeignTaxCredits"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IndefiniteMember" xlink:label="mksi_IndefiniteMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfStockByClassTable" xlink:label="us-gaap_ScheduleOfStockByClassTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityEmergingGrowthCompany" xlink:label="dei_EntityEmergingGrowthCompany"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TaxCreditCarryforwardNameDomain" xlink:label="us-gaap_TaxCreditCarryforwardNameDomain"/>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EquitySecuritiesFvNiCurrentAndNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Equity Securities, FV-NI</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EquitySecuritiesFvNiCurrentAndNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Equity Securities, FV-NI, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EquitySecuritiesFvNiCurrentAndNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Equity securities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfCashFlowSupplementalDisclosuresTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Cash Flow, Supplemental Disclosures [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfCashFlowSupplementalDisclosuresTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Summary of Supplemental Cash Flow Information Related to Leases</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessCombinationAcquisitionRelatedCosts_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination, Acquisition-Related Cost, Expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessCombinationAcquisitionRelatedCosts_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Acquisition and integration costs</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Proceeds from Sale of Property, Plant, and Equipment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Proceeds from Sale of Property, Plant, and Equipment, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Proceeds from sale of long-lived assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RetirementPlanTypeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Retirement Plan Type [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RetirementPlanTypeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Retirement Plan Type</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SegmentDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Segments [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SegmentDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Segments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income (Loss) from Continuing Operations before Income Taxes, Foreign</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Foreign</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RestructuringReserve_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Restructuring Reserve</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RestructuringReserve_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Restructuring Reserve, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RestructuringReserve_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Beginning of period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RestructuringReserve_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">End of period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskByTypeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Concentration Risk Type [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskByTypeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Concentration Risk Type</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Revenues from External Customers and Long-Lived Assets [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule Of Revenues From External Customers And Long Lived Assets [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finance Lease, Liability</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total lease liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Total lease liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityIncorporationStateCountryCode_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Incorporation, State or Country Code</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityIncorporationStateCountryCode_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Incorporation, State or Country Code</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finance Lease, Liability, to be Paid, Year Four</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2029</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PreferredStockSharesIssued_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Preferred Stock, Shares Issued</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PreferredStockSharesIssued_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Preferred stock, shares issued</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BalanceSheetLocationDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Statement of Financial Position Location, Balance [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BalanceSheetLocationDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Balance Sheet Location</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_BaseRateBorrowingsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Base rate borrowings member.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_BaseRateBorrowingsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Base Rate Borrowings [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_BaseRateBorrowingsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Base Rate Borrowings [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanContributionsByEmployer_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Plan Assets, Contributions by Employer</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanContributionsByEmployer_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Company contributions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanBusinessCombinationsAndAcquisitionsBenefitObligation_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Benefit Obligation, Business Combination</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanBusinessCombinationsAndAcquisitionsBenefitObligation_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Liabilities assumed through Atotech Acquisition</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashFlowNoncashInvestingAndFinancingActivitiesDisclosureAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash Flow, Noncash Investing and Financing Activities Disclosure [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashFlowNoncashInvestingAndFinancingActivitiesDisclosureAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Supplemental noncash financing activities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CurrentInterestRateFairValueHedgeAssetAtFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Derivatives-interest rate hedge - current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CurrentInterestRateFairValueHedgeAssetAtFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Interest rate hedge - current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CurrentInterestRateFairValueHedgeAssetAtFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Current interest rate fair value hedge asset at fair value.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CurrentInterestRateFairValueHedgeAssetAtFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Current Interest Rate Fair Value Hedge Asset At Fair Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebtNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Long-Term Debt, Excluding Current Maturities, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebtNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Long-Term Debt, Excluding Current Maturities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebtNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Total debt, excluding deferred financing costs, carrying value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxAssetsAccruedExpensesAndOtherReserves_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Deferred tax assets accrued expenses and other reserves.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxAssetsAccruedExpensesAndOtherReserves_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Tax Assets Accrued Expenses And Other Reserves</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxAssetsAccruedExpensesAndOtherReserves_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accrued expenses and other reserves</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PlanNameAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Plan Name [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PlanNameAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Plan Name</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EquityAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Equity [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityCurrentReportingStatus_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Current Reporting Status</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityCurrentReportingStatus_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Current Reporting Status</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DerivativeInstrumentsGainLossNotDesignatedAsHedgingInstrumentsLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Derivative Instruments Gain Loss Not Designated As Hedging Instruments [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DerivativeInstrumentsGainLossNotDesignatedAsHedgingInstrumentsLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative Instruments Gain Loss Not Designated As Hedging Instruments [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DerivativeInstrumentsGainLossNotDesignatedAsHedgingInstrumentsLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivative Instruments Gain Loss Not Designated As Hedging Instruments [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_JP_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Japan [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_JP_lbl" xlink:role="http://www.xbrl.org/2003/role/label">JAPAN</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DividendsPayableAmountPerShare_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Dividends Payable, Amount Per Share</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DividendsPayableAmountPerShare_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cash dividend to be paid</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillGross_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Goodwill, Gross</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillGross_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Ending balance, Goodwill Gross Carrying Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillGross_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Beginning balance, Goodwill Gross Carrying Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_USGovernmentAgenciesDebtSecuritiesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">US Government Agencies Debt Securities [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_USGovernmentAgenciesDebtSecuritiesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">U.S. Agency Obligations [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Defined benefit plan expected future benefit payments for next ten years.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan Expected Future Benefit Payments For Next Ten Years</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Estimated benefit payments for next 10 years, total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueInputsLevel2Member_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value, Inputs, Level 2 [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueInputsLevel2Member_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Significant Other Observable Inputs (Level 2) [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxAssetsNet_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Net deferred tax assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxAssetsNet_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net deferred tax assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxAssetsNet_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Tax Assets, Net of Valuation Allowance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Commitments and Contingencies Disclosure [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Commitments and Contingencies</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashFlowHedgingMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash Flow Hedging [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashFlowHedgingMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cash Flow Hedging [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashFlowHedgingMember_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Cash Flow Hedges [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockSharesAuthorized_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Common Stock, Shares Authorized</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockSharesAuthorized_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Common stock, shares authorized</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Asset, Expected Amortization, Year Four</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2029</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareBasicAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Earnings Per Share, Basic [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareBasicAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net income (loss) per common share:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ProductOrServiceAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Product and Service [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ProductOrServiceAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Product and Service</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AmortizationOfInventoryStepUpToFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Amortization of inventory step-up to fair value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AmortizationOfInventoryStepUpToFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Amortization of Inventory Step Up To Fair Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AmortizationOfInventoryStepUpToFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Amortization of inventory step-up to fair value.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentFiscalPeriodFocus_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Document Fiscal Period Focus</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentFiscalPeriodFocus_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Document Fiscal Period Focus</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finance Lease, Liability, to be Paid</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDue_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total lease payments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostExpectedLongTermReturnOnAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Assumptions Used Calculating Net Periodic Benefit Cost, Expected Long-Term Rate of Return on Plan Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostExpectedLongTermReturnOnAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Expected long-term rate of return on assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherNoncurrentLiabilitiesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Noncurrent Liabilities [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherNoncurrentLiabilitiesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other Noncurrent Liabilities [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentInterestRateStatedPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument, Interest Rate, Stated Percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentInterestRateStatedPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Interest rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevenueFromContractWithCustomerAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Revenue from Contract with Customer [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxCreditRelatedToWithholdingTaxes_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Foreign tax credit related to withholding taxes, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxCreditRelatedToWithholdingTaxes_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation Foreign Tax Credit Related To Withholding Taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxCreditRelatedToWithholdingTaxes_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Effective income tax rate reconciliation foreign tax credit related to withholding taxes.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityShellCompany_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Shell Company</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityShellCompany_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Shell Company</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevenueRemainingPerformanceObligationOptionalExemptionRemainingDuration_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Revenue, Remaining Performance Obligation, Optional Exemption, Remaining Duration</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevenueRemainingPerformanceObligationOptionalExemptionRemainingDuration_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Remaining performance obligation period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DividendsCommonStockCash_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Dividends, Common Stock, Cash</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DividendsCommonStockCash_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Cash dividend</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ValuationAllowancesAndReservesTypeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">SEC Schedule, 12-09, Valuation Allowances and Reserves Type [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ValuationAllowancesAndReservesTypeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">SEC Schedule, 12-09, Valuation Allowances and Reserves Type</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConvertibleDebtMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Convertible Debt [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConvertibleDebtMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Convertible Notes [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ServiceMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Service [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ServiceMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Services [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash and Cash Equivalent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Cash and Cash Equivalents, at Carrying Value, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cash not subject to fair value disclosure requirements</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeited_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share Based Compensation Arrangement By Share Based Payment Award Equity Instruments Other Than Options Vested And Forfeited</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeited_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Share based compensation arrangement by share based payment award, equity instruments other than options, vested and forfeited.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeited_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Vested or forfeited</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfMaturitiesOfLongTermDebtTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Maturities of Long-Term Debt [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfMaturitiesOfLongTermDebtTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Contractual Maturities of Debt Obligations</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanBenefitObligation_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Benefit Obligation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanBenefitObligation_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Projected benefit obligations, end of year</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanBenefitObligation_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Projected benefit obligations, beginning of year</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NumberOfReportingUnits_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of reporting units</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NumberOfReportingUnits_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Number of Reporting Units</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ElectronicsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Electronics [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ElectronicsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Electronics [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ElectronicsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Electronics</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SupplementalRetirementBenefitsCost_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Supplemental retirement benefits cost.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SupplementalRetirementBenefitsCost_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Supplemental Retirement Benefits Cost</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SupplementalRetirementBenefitsCost_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Supplemental retirement benefits cost</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearTwo_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Expected Future Benefit Payment, Year Two</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearTwo_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2027</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="cyd_CybersecurityRiskManagementStrategyAndGovernanceAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cybersecurity Risk Management, Strategy, and Governance [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockSharesIssued_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Common Stock, Shares, Issued</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockSharesIssued_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Common stock, shares issued</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleReportToBoardFlag_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cybersecurity Risk Management Positions or Committees Responsible Report to Board [Flag]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cybersecurity Risk Board of Directors Oversight [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfShortTermDebtTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Short-Term Debt [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfShortTermDebtTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule Of Short Term Debt [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Asset Class [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Asset Class</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StatementTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Statement [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StatementTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Statement [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Comprehensive (Income) Loss, Defined Benefit Plan, after Tax and Reclassification Adjustment, Attributable to Parent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Other Comprehensive (Income) Loss, Defined Benefit Plan, after Tax and Reclassification Adjustment, Attributable to Parent, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Unrecognized pension gain (loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InvestmentTaxCredit_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Investment Tax Credit</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Unrecognized Tax Benefits, Increase Resulting from Current Period Tax Positions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Increases for tax positions taken during the current year</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Right-of-Use Asset Obtained in Exchange for Operating Lease Liability</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">ROU assets obtained in exchange for new lease liabilities, Operating leases</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_StockIncentivePlanTwoThousandTwentyTwoMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Stock incentive plan two thousand twenty two.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_StockIncentivePlanTwoThousandTwentyTwoMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Stock Incentive Plan Two Thousand Twenty two [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_StockIncentivePlanTwoThousandTwentyTwoMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Stock Incentive Plan 2022 [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLossCarryforwardsExpirationDate_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Operating Loss Carryforwards, Expiration Date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLossCarryforwardsExpirationDate_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Operating loss carryforwards expiration date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FederalFundsRateMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Federal funds rate.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FederalFundsRateMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Federal Funds Rate [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FederalFundsRateMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Federal Funds Rate [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PrepaymentPremiumPercentageOfAggregatePrincipalAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Prepayment premium percentage of aggregate principal amount.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PrepaymentPremiumPercentageOfAggregatePrincipalAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Prepayment Premium Percentage of Aggregate Principal Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PrepaymentPremiumPercentageOfAggregatePrincipalAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Prepayment premium percentage of aggregate principal amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PrepaymentPremiumPercentageOfAggregatePrincipalAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Percentage of prepayment premium</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_O2025Q1DividendsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">O 2025 Q1 Dividends [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_O2025Q1DividendsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">O 2025 Q1 Dividends.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossForeignCurrencyTranslationAdjustmentNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accumulated Other Comprehensive Income (Loss), Foreign Currency Translation Adjustment, Net of Tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossForeignCurrencyTranslationAdjustmentNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Accumulated Other Comprehensive Income (Loss), Foreign Currency Translation Adjustment, Net of Tax, Ending Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossForeignCurrencyTranslationAdjustmentNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Accumulated Other Comprehensive Income (Loss), Foreign Currency Translation Adjustment, Net of Tax, Beginning Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossForeignCurrencyTranslationAdjustmentNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Translation adjustments accumulated other comprehensive income (loss), losses net of taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossForeignCurrencyTranslationAdjustmentNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Translation adjustments losses included in accumulated OCI, net of taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_InitialCommitmentFeePercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Initial commitment fee percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_InitialCommitmentFeePercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Initial Commitment Fee Percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_InitialCommitmentFeePercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Initial commitment fee percentage.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StatementLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Statement [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StatementLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Statement [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Business Acquisition, Acquiree</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevenueFromContractWithCustomerPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Revenue from Contract with Customer [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevenueFromContractWithCustomerPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Revenue from Contracts with Customers</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherExpenseMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other Expense [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherExpenseMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Expense [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityFilerCategory_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Filer Category</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityFilerCategory_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Filer Category</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DebtInstrumentIssuedPrincipalOptionToPurchase_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument Issued Principal Option To Purchase</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DebtInstrumentIssuedPrincipalOptionToPurchase_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Debt Instrument Issued Principal Option To Purchase</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DebtInstrumentIssuedPrincipalOptionToPurchase_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt instrument issued principal option to purchase</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ReclassificationFromAociCurrentPeriodNetOfTaxAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Amounts reclassified out of AOCI</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ReclassificationFromAociCurrentPeriodNetOfTaxAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Reclassification from AOCI, Current Period, Net of Tax, Attributable to Parent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Liabilities and Equity</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total liabilities and stockholders' equity</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt Instrument [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignCurrencyContractAssetFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Foreign Currency Contract, Asset, Fair Value Disclosure</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignCurrencyContractAssetFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivatives-foreign currency options</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationTaxContingencies_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Tax Contingency, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationTaxContingencies_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Effective Income Tax Rate Reconciliation, Tax Contingency, Percent, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationTaxContingencies_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Changes in unrecognized tax benefits, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearThree_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Long-Term Debt, Maturity, Year Three</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearThree_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2028</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RestructuringCostAndReserveAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Restructuring Type [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Long-Lived Tangible Asset [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Long-Lived Tangible Asset</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finance Lease, Liability, to be Paid, Year Three</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2028</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Foreign currency translation adjustments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentFrequencyOfPeriodicPayment_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument, Frequency of Periodic Payment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentFrequencyOfPeriodicPayment_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt instrument frequency of periodic payment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Valuation Allowance, Deferred Tax Asset, Increase (Decrease), Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Change in valuation allowance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DiscountRateFutureUndiscountedCashFlows_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Discount rate future undiscounted cash flows</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DiscountRateFutureUndiscountedCashFlows_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Discount Rate Future Undiscounted Cash Flows</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DiscountRateFutureUndiscountedCashFlows_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Discount Rate Future Undiscounted Cash Flows</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Hedging Relationship [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Hedging Relationship</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="cyd_CybersecurityRiskThirdPartyOversightAndIdentificationProcessesFlag_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cybersecurity Risk Third Party Oversight and Identification Processes [Flag]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfRestructuringAndRelatedCostsTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Restructuring and Related Costs [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfRestructuringAndRelatedCostsTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Company's Restructuring Activity</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProceedsFromIssuanceOfDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Proceeds from Issuance of Debt</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProceedsFromIssuanceOfDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net proceeds from offering</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivative [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EquipmentSolutionsBusinessMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Equipment Solutions Business [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EquipmentSolutionsBusinessMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Equipment Solutions Business [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EquipmentSolutionsBusinessMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Equipment Solutions Business [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FinanceLeaseCosts_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finance lease costs</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FinanceLeaseCosts_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Finance lease costs.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FinanceLeaseCosts_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Finance lease cost</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashAndCashEquivalentsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash and Cash Equivalents, Fair Value Disclosure</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashAndCashEquivalentsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cash and cash equivalents</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Exercise Price Range [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Exercise Price Range</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Tax Assets, Valuation Allowance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Valuation allowance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">U.S. federal statutory income tax rate, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, at Federal Statutory Income Tax Rate, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IntangibleAssetsUsefulLifeFutureUndiscountedCashFlows_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Intangible assets useful life future undiscounted cash flows</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IntangibleAssetsUsefulLifeFutureUndiscountedCashFlows_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Intangible Assets Useful Life Future Undiscounted Cash Flows</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IntangibleAssetsUsefulLifeFutureUndiscountedCashFlows_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Intangible assets useful life future undiscounted cash flows</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SubsequentEventLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Subsequent Event [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="cyd_CybersecurityRiskManagementThirdPartyEngagedFlag_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cybersecurity Risk Management Third Party Engaged [Flag]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentsIncorporatedByReferenceTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Documents Incorporated by Reference [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentsIncorporatedByReferenceTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Documents Incorporated by Reference</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeAssetNotionalAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative Asset, Notional Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeAssetNotionalAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Gross notional values of outstanding forward foreign exchange contracts</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeAssetNotionalAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net notional value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Goodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Goodwill</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Goodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Ending balance, Goodwill Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Goodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Beginning balance, Goodwill Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Goodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Goodwill</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Goodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Goodwill, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Goodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Goodwill, net of accumulated impairment and foreign currency translation adjustments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherNoncashIncomeExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Noncash Income (Expense)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherNoncashIncomeExpense_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Other</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherNoncashIncomeExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Other Noncash Income (Expense), Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateContinuingOperations_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Effective tax rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateContinuingOperations_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateContinuingOperations_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Effective tax rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxesPaid_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Taxes Paid</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxesPaid_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Income taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LineOfCreditFacilityIncreaseDecreaseForPeriodNet_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Increased available borrowing capacity</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LineOfCreditFacilityIncreaseDecreaseForPeriodNet_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Line of Credit Facility, Increase (Decrease), Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LineOfCreditFacilityIncreaseDecreaseForPeriodNet_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Line of Credit Facility, Increase (Decrease), Net, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxAuthorityAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Jurisdiction [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxAuthorityAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Income Tax Authority</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InlandRevenueSingaporeIRASMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Inland Revenue, Singapore (IRAS) [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Securities, Available-for-Sale, Noncurrent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Long-term investments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_SegmentGeographicalDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Geographical [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_SegmentGeographicalDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Geographical</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AmortizationPeriodOfLeaseholdImprovements_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Amortization period of leasehold improvements.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AmortizationPeriodOfLeaseholdImprovements_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Amortization Period Of Leasehold Improvements</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AmortizationPeriodOfLeaseholdImprovements_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Amortization period of leasehold improvements</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SeniorNotesDue2034Member_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Senior notes due 2034 [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SeniorNotesDue2034Member_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Senior notes due 2034.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SeniorNotesDue2034Member_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Senior Notes Due 2034 [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ReconciliationOfOperatingProfitLossFromSegmentsToConsolidatedTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Reconciliation of Operating Profit (Loss) from Segments to Consolidated [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ReconciliationOfOperatingProfitLossFromSegmentsToConsolidatedTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Reconciliation of Segment Gross Profit to Net Income (Loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ReconciliationOfOperatingProfitLossFromSegmentsToConsolidatedTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Schedule of Reconciles Gross Profit By Reportable Segment To Income (Loss) Before Income Taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">SEC Schedule, 12-09, Schedule of Valuation and Qualifying Accounts Disclosure [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule II - Valuation and Qualifying Accounts</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SegmentExpenditureAdditionToLongLivedAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Capital expenditures</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SegmentExpenditureAdditionToLongLivedAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Segment, Expenditure, Addition to Long-Lived Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="exch_JPBX_lbl" xlink:role="http://www.xbrl.org/2003/role/label">JPBX [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="exch_JPBX_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Japan [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfInventoryCurrentTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Inventory, Current [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfInventoryCurrentTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Summary of Inventories</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MaterialsSolutionsDivisionMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Materials solutions division.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MaterialsSolutionsDivisionMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Materials Solutions Division [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MaterialsSolutionsDivisionMember_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Materials Solutions Division [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MaterialsSolutionsDivisionMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">MSD [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative Instruments and Hedging Activities Disclosures [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivative Instruments and Hedging Activities Disclosures [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdditionalPaidInCapitalCommonStock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Additional Paid in Capital, Common Stock</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdditionalPaidInCapitalCommonStock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Additional paid-in capital</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FirstLienNetLeverageRatioMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">First lien net leverage ratio member.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FirstLienNetLeverageRatioMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">First Lien Net Leverage Ratio [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FirstLienNetLeverageRatioMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">First Lien Net Leverage Ratio [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanPlanAssetsBenefitsPaid_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Plan Assets, Benefits Paid</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanPlanAssetsBenefitsPaid_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Benefits paid</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SignificantAccountingPoliciesTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Significant Accounting Policies [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SignificantAccountingPoliciesTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Summary of Significant Accounting Policies</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Property, Plant and Equipment [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Property, Plant and Equipment [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CappedCallTransactionsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Capped Call Transactions [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CappedCallTransactionsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Capped call transactions.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CappedCallTransactionsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Capped Call Transactions [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfAccountsReceivable_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Number of customers accounted for ten or more percent of accounts receivable.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfAccountsReceivable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Number Of Customers Accounted For Ten Or More Percent Of Accounts Receivable</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfAccountsReceivable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of customers</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetUsefulLife_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Asset, Useful Life</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetUsefulLife_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Intangible assets amortized period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetUsefulLife_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Acquired intangible assets, estimated useful lives</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PhotonControlMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Photon Control.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PhotonControlMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Photon Control [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PhotonControlMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Photon Control [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_VestingDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Vesting [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_VestingDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Vesting</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_RevenueRecognitionPaymentTerms_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Revenue recognition payment terms.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_RevenueRecognitionPaymentTerms_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Revenue Recognition Payment Terms</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_RevenueRecognitionPaymentTerms_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Company's normal payment terms</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Comprehensive Income (Loss), Cash Flow Hedge, Gain (Loss), after Reclassification and Tax, Parent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Changes in value of financial instruments designated as cash flow hedges</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Other Comprehensive Income (Loss), Cash Flow Hedge, Gain (Loss), after Reclassification and Tax, Parent, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Net (losses) gains recognized in OCI, net of tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DisaggregationOfRevenueTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Disaggregation of Revenue [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DisaggregationOfRevenueTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Disaggregation Of Revenue [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="cyd_CybersecurityRiskManagementStrategyAndGovernanceTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cybersecurity Risk Management, Strategy, and Governance [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Computation of Basic and Diluted Net Income (Loss) Per Share</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetInvestmentHedgingMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Net Investment Hedging [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/label">SEC Schedule, 12-09, Valuation Allowances and Reserves, Additions, Charge to Cost and Expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Additions Charged to Costs and Expenses</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TrademarksAndTradeNamesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Trademarks and Trade Names [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TrademarksAndTradeNamesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Trademarks and Trade Names [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TrademarksAndTradeNamesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Trademarks and Trade Names [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardVestingPeriodDescription_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Share based compensation arrangement by share based payment award vesting period description.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardVestingPeriodDescription_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share Based Compensation Arrangement By Share Based Payment Award Vesting Period Description</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardVestingPeriodDescription_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Share based compensation arrangement by share based payment award vesting period description</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareBasic_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Earnings Per Share, Basic</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareBasic_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Basic</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareBasic_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Earnings Per Share, Basic, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DisaggregationOfRevenueTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Summary of Revenue from Contracts with Customers</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DisaggregationOfRevenueTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Disaggregation of Revenue [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt instrument principal amount denomination for conversion into common stock</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Debt instrument principal amount denomination for conversion into common stock.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevolvingCreditFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Revolving Credit Facility [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevolvingCreditFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Revolving Credit Facility [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevolvingCreditFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Revolving Lines of Credit [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RetirementPlanTypeDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Retirement Plan Type [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RetirementPlanTypeDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Retirement Plan Type</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Liabilities, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total current liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OfferTerminateMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">OfferTerminate Member.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OfferTerminateMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Offer Terminate [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OfferTerminateMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Offer Terminate [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncreaseDecreaseInAccountsReceivable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Increase (Decrease) in Accounts Receivable</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncreaseDecreaseInAccountsReceivable_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Trade accounts receivable</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Adjustment to Reconcile Net Income to Cash Provided by (Used in) Operating Activity [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Adjustments to reconcile net income (loss) to net cash provided by operating activities:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Lessee, Operating Lease, Liability, to be Paid, Year Five</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2030</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_HedgingDesignationDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Hedging Designation [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_HedgingDesignationDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Hedging Designation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Revenues from External Customers and Long-Lived Assets [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Revenues from External Customers and Long-Lived Assets [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Cross-Border, Other, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DividendsPayableDateOfRecordDayMonthAndYear_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Dividends Payable, Date of Record</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DividendsPayableDateOfRecordDayMonthAndYear_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Dividend declared, shareholders of record date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxPaidFederalAfterRefundReceived_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Paid, Federal, after Refund Received</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxPaidFederalAfterRefundReceived_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Income Tax Paid, Federal, after Refund Received, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxPaidFederalAfterRefundReceived_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Federal taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Inventory, Finished Goods, Net of Reserves</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Finished goods</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_GeneralMetalFinishingMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">General Metal Finishing [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_GeneralMetalFinishingMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">General Metal Finishing [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_GeneralMetalFinishingMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">General Metal Finishing [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationRealizedForeignExchangeGainLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation Realized Foreign Exchange Gain Loss</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationRealizedForeignExchangeGainLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Effective income tax rate reconciliation realized foreign exchange gain loss</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationRealizedForeignExchangeGainLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Realized foreign exchange gain (loss), rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NewRevolvingFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">New revolving facility member.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NewRevolvingFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">New Revolving Facility [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NewRevolvingFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">New Revolving Facility [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ValuationAllowancesAndReservesDeductions_lbl" xlink:role="http://www.xbrl.org/2003/role/label">SEC Schedule, 12-09, Valuation Allowances and Reserves, Deduction</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ValuationAllowancesAndReservesDeductions_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Deductions &amp; Write-offs</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NonCurrentAssetsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Non current assets fair value disclosure.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NonCurrentAssetsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Non Current Assets Fair Value Disclosure</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NonCurrentAssetsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total long-term assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestExpenseDebtExcludingAmortization_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Interest Expense, Debt, Excluding Amortization</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestExpenseDebtExcludingAmortization_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Contractual interest expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Net Periodic Benefit Cost (Credit) [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Unrecognized Tax Benefits, Increase Resulting from Prior Period Tax Positions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net unrecognized tax benefits, excluding interest and penalties, related to foreign tax positions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accounting Standards Update [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accounting Standards Update</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherLiabilitiesCurrentAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Liabilities, Current [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_MaterialReconcilingItemsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Segment Reporting, Reconciling Item, Excluding Corporate Nonsegment [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_MaterialReconcilingItemsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Segment Reconciling Items [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ConsolidationItemsDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Consolidation Items [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ConsolidationItemsDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Consolidation Items</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ElectronicsAndPackagingMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Electronics and Packaging [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ElectronicsAndPackagingMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Electronics and packaging.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ElectronicsAndPackagingMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Electronics and Packaging [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockholdersEquityAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Equity, Attributable to Parent [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockholdersEquityAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Stockholders&#8217; equity:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TimeDepositsAndCertificatesOfDepositMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Time Deposits and Certificates of Deposit [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TimeDepositsAndCertificatesOfDepositMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Time Deposits And Certificates Of Deposit [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TimeDepositsAndCertificatesOfDepositMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Time Deposits and Certificates of Deposit [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntitySmallBusiness_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Small Business</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntitySmallBusiness_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Small Business</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfNotionalAmountsOfOutstandingDerivativePositionsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Notional Amounts of Outstanding Derivative Positions [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfNotionalAmountsOfOutstandingDerivativePositionsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Summary of Notional Values of Foreign Exchange Forward Contracts Outstanding</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FederalHomeLoanBanksAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Federal Home Loan Banks [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_HedgingDesignationAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Hedging Designation [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_HedgingDesignationAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Hedging Designation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PensionAndDeferredCompensationPlanAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Pension and deferred compensation plan assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PensionAndDeferredCompensationPlanAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Pension and deferred compensation plan assets.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PensionAndDeferredCompensationPlanAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Pension and Deferred Compensation Plan Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PensionAndDeferredCompensationPlanAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivatives-Pension and deferred compensation plan assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SeparatelyPricedContractsTerm_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Separately priced contracts term.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SeparatelyPricedContractsTerm_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Separately Priced Contracts Term</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SeparatelyPricedContractsTerm_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Term of separately priced contracts</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FederalInterestCarryForwards_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Federal Interest Carry Forwards</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FederalInterestCarryForwards_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Federal interest carry forwards.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FederalInterestCarryForwards_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Federal interest carry forwards</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Retained Earnings (Accumulated Deficit)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Retained earnings</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Retained Earnings (Accumulated Deficit), Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanFundedStatusOfPlan_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Funded (Unfunded) Status of Plan</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanFundedStatusOfPlan_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Net underfunded status</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanFundedStatusOfPlan_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Defined Benefit Plan, Funded (Unfunded) Status of Plan, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanVestedBenefitObligation_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Defined benefit plan vested benefit obligation.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanVestedBenefitObligation_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan Vested Benefit Obligation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanVestedBenefitObligation_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Defined benefit plan, vested benefit obligations</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_StockIncentivePlanTwoThousandFourteenMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Stock Incentive Plan Two Thousand Fourteen</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_StockIncentivePlanTwoThousandFourteenMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Stock Incentive Plan Two Thousand Fourteen [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_StockIncentivePlanTwoThousandFourteenMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Stock Incentive Plan 2014 [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NatureOfOperations_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Nature of Operations [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NatureOfOperations_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Business Description</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FeesAndExpensesRelatedToRepricingOfTermLoanFacility_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Fees and expenses related to repricing of term loan facility.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FeesAndExpensesRelatedToRepricingOfTermLoanFacility_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fees And Expenses Related To Repricing Of Term Loan Facility</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FeesAndExpensesRelatedToRepricingOfTermLoanFacility_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Fees and expenses related to repricing of Term Loan Facility</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityWellKnownSeasonedIssuer_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Well-known Seasoned Issuer</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityWellKnownSeasonedIssuer_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Well-known Seasoned Issuer</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SaleOfStockPricePerShare_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Sale of Stock, Price Per Share</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SaleOfStockPricePerShare_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Sale price per share</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CurrentForeignTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Current Foreign Tax Expense (Benefit)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CurrentForeignTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Foreign</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Stock-Based Compensation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ReductionInInterestExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Reduction in interest expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ReductionInInterestExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Reduction in interest expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ReductionInInterestExpense_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Reduction in interest expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Organization, Consolidation and Presentation of Financial Statements [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LeasesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Leases [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Contract with Customer, Liability</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Contract with Customer, Liability, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Beginning of period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">End of period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForTenPercentOfNetRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of customers accounted for 10% of net revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForTenPercentOfNetRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Number of customers accounted for ten percent of net revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForTenPercentOfNetRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Number of customers accounted for ten percent of net revenue.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cost of revenues</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Cost of Goods and Service, Excluding Depreciation, Depletion, and Amortization, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Total cost of revenues</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Total cost of revenues (exclusive of amortization shown separately below)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_AmendmentFlag_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Amendment Flag</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_AmendmentFlag_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Amendment Flag</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Number of customers accounted for ten or more percent of revenue.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Number Of Customers Accounted For Ten Or More Percent Of Revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of customers accounted for 10% or more of total revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_MaturitiesOfLongTermDebtAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Maturities of Long-Term Debt [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ProductsAndServicesDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Product and Service [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ProductsAndServicesDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Product and Service</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PhotonicsSolutionsDivisionMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Photonics solutions division.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PhotonicsSolutionsDivisionMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Photonics Solutions Division [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PhotonicsSolutionsDivisionMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">PSD [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PhotonicsSolutionsDivisionMember_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Photonics Solutions Division [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfTradingDays_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of trading days</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfTradingDays_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Number Of Trading Days</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfTradingDays_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Number of trading days.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">U.S. federal statutory income tax rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation at Federal Statutory Income Tax Rate, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EuroTrancheBMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Euro tranche B member.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EuroTrancheBMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Euro Tranche B [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EuroTrancheBMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Euro Tranche B [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Inventory Disclosure [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Inventories</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerSharePolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Earnings Per Share, Policy [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerSharePolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net Income (Loss) Per Share</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LiabilitiesAndStockholdersEquityAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Liabilities and Equity [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LiabilitiesAndStockholdersEquityAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">LIABILITIES AND STOCKHOLDERS&#8217; EQUITY</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressPostalZipCode_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address, Postal Zip Code</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressPostalZipCode_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Address, Postal Zip Code</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash Provided by (Used in) Operating Activity, Including Discontinued Operation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Net cash provided by operating activities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanAmortizationOfActuarialGainLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Defined benefit plan amortization of actuarial gain loss.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanAmortizationOfActuarialGainLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan Amortization Of Actuarial Gain Loss</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanAmortizationOfActuarialGainLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Amortization of actuarial net loss</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentRedemptionPricePercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument, Redemption Price, Percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentRedemptionPricePercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt instrument redemption percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ReportingUnitDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Reporting Unit [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SegmentReportingCodmProfitLossMeasureHowUsedDescription_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Segment reporting, CODM measure, description</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SegmentReportingCodmProfitLossMeasureHowUsedDescription_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Segment Reporting, CODM, Profit (Loss) Measure, How Used, Description</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Common Stock [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Common Stock [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accounting Standards Update and Change in Accounting Principle [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Product Warranty Accrual, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Short-term product warranties</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ImpairmentOfIntangibleAssetIndefiniteLivedExcludingGoodwillStatementOfIncomeOrComprehensiveIncomeExtensibleEnumeration_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Impairment, Intangible Asset, Indefinite-Lived (Excluding Goodwill), Statement of Income or Comprehensive Income [Extensible Enumeration]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxEffectsOtherJurisdictions_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other jurisdictions, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxEffectsOtherJurisdictions_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective income tax rate reconciliation foreign tax effects other jurisdictions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxEffectsOtherJurisdictions_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Effective income tax rate reconciliation foreign tax effects other jurisdictions.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="cyd_CybersecurityRiskRoleOfManagementTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cybersecurity Risk Role of Management [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TaxCreditCarryforwardAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Tax Credit Carryforward, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TaxCreditCarryforwardAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Gross tax research other tax credit carryforwards</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInNextTwelveMonths_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Long-Term Debt, Maturity, Year One</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInNextTwelveMonths_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2026</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_HedgingRelationshipDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Hedging Relationship [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_HedgingRelationshipDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Hedging Relationship</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Assets for Plan Benefits, Defined Benefit Plan</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Pension assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Lessee, Operating Lease, Liability, to be Paid, Year Three</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2028</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Less: accumulated depreciation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment, Beginning Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment, Ending Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxPaidByIndividualJurisdictionLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Paid, by Individual Jurisdiction [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignExchangeOptionMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Foreign Exchange Option [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignExchangeOptionMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivatives Foreign Currency Options [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressAddressLine1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address, Address Line One</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressAddressLine1_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Address, Address Line One</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredIncomeTaxLiabilities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Tax Liabilities, Gross</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredIncomeTaxLiabilities_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedTotalLabel">Total deferred tax liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredIncomeTaxLiabilities_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Deferred Tax Liabilities, Gross, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherInterestIncomeExpenseNet_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Interest Income Expense Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherInterestIncomeExpenseNet_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Other interest income expense net.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherInterestIncomeExpenseNet_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Other interest (income) expense, net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueByFairValueHierarchyLevelAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value Hierarchy and NAV [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueByFairValueHierarchyLevelAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Fair Value Hierarchy and NAV</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Earnings Per Share [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net income (loss) per share:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax, Policy [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Income Taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_MaximumRemainingMaturityOfForeignCurrencyDerivatives1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Maximum Remaining Maturity of Foreign Currency Derivatives</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_MaximumRemainingMaturityOfForeignCurrencyDerivatives1_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Maximum period for hedging a portion of forecasted foreign currency denominated intercompany sales of inventory and certain foreign entities' operating expenses</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantFlag_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cybersecurity Risk Materially Affected or Reasonably Likely to Materially Affect Registrant [Flag]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SupplementalCashFlowInformationAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Supplemental Cash Flow Information [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SupplementalCashFlowInformationAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Supplemental disclosure of cash flow information:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Foreign Currency Transactions and Translations Policy [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Foreign Exchange</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Goodwill and Intangible Assets Disclosure [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Goodwill and Intangible Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ForeignMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Foreign [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ForeignMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Foreign.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_UsdTrancheBMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">USD Tranche B member.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_UsdTrancheBMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">USD Tranche B [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_UsdTrancheBMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">USD Tranche B [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFour_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Expected Future Benefit Payment, Year Four</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFour_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2029</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BalanceSheetLocationAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Statement of Financial Position Location, Balance [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BalanceSheetLocationAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Balance Sheet Location</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InvestmentTypeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Investment Type [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InvestmentTypeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Investment Type</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ExpenseOfRestructuringActivitiesAndOtherAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Expense Of Restructuring Activities And Other [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ExpenseOfRestructuringActivitiesAndOtherAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Expense Of Restructuring Activities And Other [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Operating Lease, Right-of-Use Asset</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Right-of-use assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Right-of-use assets, net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finance Lease, Liability, Undiscounted Excess Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Less: imputed interest</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PlanAssetCategoriesDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Plan Assets, Category [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PlanAssetCategoriesDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Defined Benefit Plan, Plan Assets, Category</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxAssetsGross_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Tax Assets, Gross</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxAssetsGross_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total deferred tax assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="cyd_CybersecurityRiskBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cybersecurity Risk Board Committee or Subcommittee Responsible for Oversight [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SupplementalRetirementBenefitsAccumulatedBenefitObligationNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Supplemental retirement benefits accumulated benefit obligation noncurrent.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SupplementalRetirementBenefitsAccumulatedBenefitObligationNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Supplemental Retirement Benefits Accumulated Benefit Obligation Noncurrent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SupplementalRetirementBenefitsAccumulatedBenefitObligationNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accumulated benefit obligation noncurrent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfSharesReturnedForEachShareOfCommonStock_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Number Of Shares Returned For Each Share Of Common Stock</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfSharesReturnedForEachShareOfCommonStock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Number Of Shares Returned For Each Share Of Common Stock</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfSharesReturnedForEachShareOfCommonStock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of shares returned for each common stock</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationBeatPercent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, BEAT, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationBeatPercent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Base erosion and anti-abuse tax, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Payments to Acquire Debt Securities, Available-for-Sale</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Purchases of investments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryDisclosureAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Inventory Disclosure [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentRedemptionPeriodAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument, Redemption, Period [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentType_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Document Type</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentType_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Document Type</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EuroTrancheMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Euro tranche.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EuroTrancheMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Euro Tranche [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EuroTrancheMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Euro Tranche</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EuroTrancheMember_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Euro Tranche [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxesPaidNet_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Cash paid (net of refunds received) for taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxesPaidNet_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Taxes Paid, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxesPaidNet_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Income Taxes Paid, Net, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxesPaidNet_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Total cash taxes paid</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GrossProfit_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Gross Profit</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GrossProfit_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Gross profit</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GrossProfit_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Gross profit</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GrossProfit_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedTotalLabel">Gross profit</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TypeOfArrangementAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Collaborative Arrangement and Arrangement Other than Collaborative [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CostOfRevenueAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cost of Revenue [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CostOfRevenueAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cost of revenues:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ArrangementsAndNonarrangementTransactionsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Collaborative Arrangement and Arrangement Other than Collaborative [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityCentralIndexKey_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Central Index Key</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityCentralIndexKey_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Central Index Key</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accounts Receivable, Allowance for Credit Loss, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Allowance for doubtful accounts</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherCurrentAssetsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Other current assets fair value disclosure.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherCurrentAssetsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Current Assets Fair Value Disclosure</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherCurrentAssetsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other current assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="cyd_CybersecurityRiskProcessForInformingBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cybersecurity Risk Process for Informing Board Committee or Subcommittee Responsible for Oversight [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossRealized_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Realized Gain (Loss), Foreign Currency Transaction, before Tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossRealized_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net foreign exchange losses from re-measurement</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TranslationAdjustmentForNetInvestmentHedgeNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Aggregate principal amount of net investment hedge</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TranslationAdjustmentForNetInvestmentHedgeNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivatives used in Net Investment Hedge, Net of Tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TranslationAdjustmentForNetInvestmentHedgeNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Derivatives used in Net Investment Hedge, Net of Tax, Ending Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TranslationAdjustmentForNetInvestmentHedgeNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Derivatives used in Net Investment Hedge, Net of Tax, Beginning Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash, Cash Equivalent, Restricted Cash, and Restricted Cash Equivalent, Period Increase (Decrease), Including Exchange Rate Effect and Discontinued Operation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Decrease in cash and cash equivalents</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SubsequentEventTypeDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Subsequent Event Type [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IntangibleAssetsNetIncludingGoodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Intangible Assets, Net (Including Goodwill)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IntangibleAssetsNetIncludingGoodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Goodwill and intangible assets, net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IntangibleAssetsNetIncludingGoodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Intangible Assets, Net (Including Goodwill), Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of shares excluded from computation of diluted earnings per share</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockRepurchasedAndRetiredDuringPeriodShares_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Stock repurchase, shares</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockRepurchasedAndRetiredDuringPeriodShares_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Stock Repurchased and Retired During Period, Shares</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockRepurchasedAndRetiredDuringPeriodShares_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Stock repurchase, shares</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OriginalIssueDiscountPercentageOfPrincipalAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Original issue discount percentage of principal amount.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OriginalIssueDiscountPercentageOfPrincipalAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Original Issue Discount Percentage of Principal Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OriginalIssueDiscountPercentageOfPrincipalAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Original issue discount percentage of principal amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdictions_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income tax reconciliation foreign tax effects other jurisdictions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdictions_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Income tax reconciliation foreign tax effects other jurisdictions.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdictions_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other jurisdictions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TypeOfAdoptionMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accounting Standards Update [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TypeOfAdoptionMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accounting Standards Update</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other comprehensive income (loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Comprehensive Income (Loss), Net of Tax, Portion Attributable to Parent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Other Comprehensive Income (Loss), Net of Tax, Portion Attributable to Parent, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Net other comprehensive income (loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditAmortizationOfPriorServiceCostCreditStatementOfIncomeOrComprehensiveIncomeExtensibleList_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Net Periodic Benefit Cost (Credit), Amortization of Prior Service Cost (Credit), Statement of Income or Comprehensive Income [Extensible Enumeration]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationAwardTrancheOneMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement, Tranche One [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationAwardTrancheOneMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Share-based Compensation Award, Tranche One [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BaseRateMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Base Rate [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BaseRateMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Base Rate [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EstimatedAggregatePrincipalAmountPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Estimated Aggregate Principal Amount Percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EstimatedAggregatePrincipalAmountPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Estimated aggregate principal amount percentage.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EstimatedAggregatePrincipalAmountPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Estimated aggregate principal amount percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AociDerivativeQualifyingAsHedgeExcludedComponentAfterTax_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivative gains included in OCI, net of tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AociDerivativeQualifyingAsHedgeExcludedComponentAfterTax_lbl" xlink:role="http://www.xbrl.org/2003/role/label">AOCI, Derivative Qualifying as Hedge, Excluded Component, after Tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AociDerivativeQualifyingAsHedgeExcludedComponentAfterTax_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Derivative gains included in accumulated OCI, net of taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingLiabilities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Increase (Decrease) in Other Operating Liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingLiabilities_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other current and non-current liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingLiabilities_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Increase (Decrease) in Other Operating Liabilities, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredCompensationArrangementWithIndividualSharesAuthorizedForIssuance_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Compensation Arrangement with Individual, Shares Authorized for Issuance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredCompensationArrangementWithIndividualSharesAuthorizedForIssuance_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Shares authorized for issuance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanForeignCurrencyExchangeRateChangesBenefitObligation_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Benefit Obligation, Foreign Currency Translation Gain (Loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanForeignCurrencyExchangeRateChangesBenefitObligation_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Currency translation adjustments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignTaxJurisdictionOtherMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Foreign Tax Jurisdiction, Other [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignTaxJurisdictionOtherMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other foreign jurisdictions [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Foreign Currency Cash Flow Hedge Liability at Fair Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivatives- foreign exchange forward contracts-current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Noncontrolling Interest [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Income (loss) before income taxes:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_UnrecognizedTaxBenefitsIncreaseDecreaseResultingFromPriorPeriodTaxPositions_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Unrecognized tax benefits increase decrease resulting from prior period tax positions.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_UnrecognizedTaxBenefitsIncreaseDecreaseResultingFromPriorPeriodTaxPositions_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Unrecognized Tax Benefits Increase Decrease Resulting From Prior Period Tax Positions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_UnrecognizedTaxBenefitsIncreaseDecreaseResultingFromPriorPeriodTaxPositions_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">(Decreases) increases for tax positions taken during prior years</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentFinStmtErrorCorrectionFlag_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Document Financial Statement Error Correction [Flag]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherRestructuringCosts_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Restructuring Costs</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherRestructuringCosts_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other restructuring charges, facility cost</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtDisclosureAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Disclosure [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_DE_lbl" xlink:role="http://www.xbrl.org/2003/role/label">GERMANY</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_DE_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Germany [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_RestrictedStockUnitsGrantedToEmployeesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Restricted Stock Units Granted To Employees [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_RestrictedStockUnitsGrantedToEmployeesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Restricted Stock Units Granted To Employees [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_RestrictedStockUnitsGrantedToEmployeesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">RSUs Granted to Employees [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accumulated Foreign Currency Adjustment Attributable to Parent [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Foreign Currency Translation Adjustments [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivative [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueMeasurementInputsDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value Measurement and Measurement Inputs, Recurring and Nonrecurring [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueMeasurementInputsDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Fair Value Measurements</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeNotionalAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative, Notional Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeNotionalAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Notional amount in EUR/USD</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeNotionalAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Notional amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccruedLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accrued Liabilities, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccruedLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Accrued Liabilities, Current, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccruedLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accrued expenses</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsForLegalSettlements_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Payments for Legal Settlements</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsForLegalSettlements_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Legal settlement charge</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CostOfSalesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cost of Sales [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CostOfSalesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cost of Revenues [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement, Expensed and Capitalized, Amount [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Employee Service Share Based Compensation Allocation Of Recognized Period Costs [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_IL_lbl" xlink:role="http://www.xbrl.org/2003/role/label">ISRAEL</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_IL_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Israel [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_CurrentFiscalYearEndDate_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Current Fiscal Year End Date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_CurrentFiscalYearEndDate_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Current Fiscal Year End Date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanActualReturnOnPlanAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Gain (loss) on plan assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanActualReturnOnPlanAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Plan Assets, Increase (Decrease) for Actual Return (Loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Long-Term Debt Instruments [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt Instrument [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Product Warranty Liability [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Product Warranty Activities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxLiabilitiesLoanCosts_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Deferred tax liabilities loan costs.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxLiabilitiesLoanCosts_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Tax Liabilities Loan Costs</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxLiabilitiesLoanCosts_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Loan costs</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AnnualStepDownMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Annual step-down member.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AnnualStepDownMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Annual Step-Down [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AnnualStepDownMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Annual Step-Down [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MinimumPeriodOfCompanysResearchAndDevelopmentProjects_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Minimum period of company's research and development projects.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MinimumPeriodOfCompanysResearchAndDevelopmentProjects_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Minimum Period Of Companys Research And Development Projects</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MinimumPeriodOfCompanysResearchAndDevelopmentProjects_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Minimum period of company's research and development projects</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredFinancingCostsInLongTermDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Deferred financing costs in long-term debt</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredFinancingCostsInLongTermDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred financing costs in Long Term Debt</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredFinancingCostsInLongTermDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Deferred financing costs in long term debt.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_LoanVoluntaryPrepaymentAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Loan voluntary prepayment amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_LoanVoluntaryPrepaymentAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Loan Voluntary Prepayment Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_LoanVoluntaryPrepaymentAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Loan voluntary prepayment amount.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduleOfGoodwillAssociatedWithReportableSegmentsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Schedule of goodwill associated with reportable segments.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduleOfGoodwillAssociatedWithReportableSegmentsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Goodwill Associated with Reportable Segments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduleOfGoodwillAssociatedWithReportableSegmentsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Goodwill Associated with Reportable Segments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdvertisingCostsPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Advertising Cost [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdvertisingCostsPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Advertising Costs</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CustomerRelationshipsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Customer Relationships [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CustomerRelationshipsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Customer Relationships [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressStateOrProvince_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address, State or Province</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressStateOrProvince_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Address, State or Province</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Nonvested, Number</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">SARs outstanding</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">RSUs, Beginning of period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">RSU, End of period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherCurrentLiabilitiesFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other current liabilities fair value disclosure</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherCurrentLiabilitiesFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Other current liabilities fair value disclosure.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherCurrentLiabilitiesFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other current liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GuaranteesAndProductWarrantiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Guarantees and Product Warranties [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NonCurrentInterestRateFairValueHedgeAssetAtFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Derivatives-interest rate hedge - non-current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NonCurrentInterestRateFairValueHedgeAssetAtFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Non current interest rate fair value hedge asset at fair value.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NonCurrentInterestRateFairValueHedgeAssetAtFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Non Current Interest Rate Fair Value Hedge Asset At Fair Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NonCurrentInterestRateFairValueHedgeAssetAtFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivatives assets interest rate hedge-non-current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TaxCreditCarryForwardExpirationYearEnd_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Tax credit carry forward expiration year end.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TaxCreditCarryForwardExpirationYearEnd_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Tax Credit Carry Forward Expiration Year End</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TaxCreditCarryForwardExpirationYearEnd_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Tax credit expiration period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredFinanceCostsGross_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Issuance Costs, Gross</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredFinanceCostsGross_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Deferred financing fees and original issue discount fees</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PreferredStockSharesOutstanding_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Preferred Stock, Shares Outstanding, Beginning Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PreferredStockSharesOutstanding_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Preferred Stock, Shares Outstanding</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PreferredStockSharesOutstanding_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Preferred stock, shares outstanding</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PreferredStockSharesOutstanding_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Preferred Stock, Shares Outstanding, Ending Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Comprehensive Income (Loss), Net of Tax, Attributable to Parent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total comprehensive income (loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CappedCallTransactionReductionOrOffsetPerShare_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Capped Call Transaction Reduction or Offset Per Share</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CappedCallTransactionReductionOrOffsetPerShare_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Capped call transaction reduction or offset per share.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CappedCallTransactionReductionOrOffsetPerShare_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Capped call transaction reduction or offset per share</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ResearchAndDevelopmentExpensePolicy_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Research and Development Expense, Policy [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ResearchAndDevelopmentExpensePolicy_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Research and Development</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Common Stock, Capital Shares Reserved for Future Issuance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Common stock reserved for issuance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Incremental Common Shares Attributable to Dilutive Effect of Share-Based Payment Arrangements</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Effect of dilutive securities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfAssumptionsUsedTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Assumptions [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfAssumptionsUsedTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Weighted Average Rates Used to Determine Net Periodic Benefit Costs</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_StatementGeographicalAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Geographical [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_StatementGeographicalAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Geographical</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_VacuumSolutionsDivisionMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Vacuum solutions division.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_VacuumSolutionsDivisionMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Vacuum Solutions Division Member</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_VacuumSolutionsDivisionMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">VSD [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_VacuumSolutionsDivisionMember_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Vacuum Solutions Division [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationIntercompanyRoyalty_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation Intercompany Royalty</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationIntercompanyRoyalty_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Effective income tax rate reconciliation intercompany royalty.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationIntercompanyRoyalty_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Intercompany royalty, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LineOfCreditFacilityLenderDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Line of Credit Facility, Lender [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduleOfCapitalExpenditureDepreciationAndAmortizationAndAssetsReportableSegmentsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Schedule of capital expenditure depreciation and amortization and assets reportable segments.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduleOfCapitalExpenditureDepreciationAndAmortizationAndAssetsReportableSegmentsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule Of Capital Expenditure Depreciation And Amortization And Assets Reportable Segments Table [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduleOfCapitalExpenditureDepreciationAndAmortizationAndAssetsReportableSegmentsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Capital Expenditures, Depreciation and Amortization Expense of Intangible Assets by Reportable Segment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccountsReceivableMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accounts Receivable [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccountsReceivableMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accounts Receivable [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareDiluted_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Allocated share based compensation effect on earning per share diluted.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareDiluted_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Allocated Share Based Compensation Effect On Earning Per Share Diluted</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareDiluted_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Diluted</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForGreaterThanOrEqualToTenPercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of customers accounted for greater than or equal to 10% or more of total revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForGreaterThanOrEqualToTenPercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Number Of Customers Accounted For Greater than or Equal to Ten Percent Of Revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForGreaterThanOrEqualToTenPercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Number of customers accounted for greater than or equal to ten percent of revenue.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">State and local income taxes, net of federal income tax effect</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, State and Local Income Taxes, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement, Expensed and Capitalized, Amount [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Pre-tax Effect of Stock-Based Compensation Expense Included in Company's Condensed Consolidated Statements of Operations and Comprehensive Income (Loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiabilityStatementOfFinancialPositionExtensibleList_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finance Lease, Liability, Statement of Financial Position [Extensible Enumeration]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseOther_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Nondeductible Expense, Other, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseOther_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finance Lease, Liability, to be Paid, after Year Five</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Thereafter</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DebtInstrumentConversionRateShares_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument Conversion Rate Shares</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DebtInstrumentConversionRateShares_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Debt instrument conversion rate shares.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DebtInstrumentConversionRateShares_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt instrument conversion rate shares</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ComprehensiveIncomePolicyPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Comprehensive Income, Policy [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ComprehensiveIncomePolicyPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accumulated Other Comprehensive Income (Loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Deferred Tax Assets and Liabilities [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Significant Components of Deferred Tax Assets and Deferred Tax Liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestAndOtherIncome_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Interest income</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestAndOtherIncome_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Interest and Other Income</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestAndOtherIncome_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Interest income</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SignificantSupplyCommitmentTimePeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Purchase commitments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SignificantSupplyCommitmentTimePeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Significant Supply Commitment Time Period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SignificantSupplyCommitmentTimePeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Majority of MKS purchase commitment arrangement time period/term.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_StateMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">State [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_StateMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">State.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationChangeInIncomeTaxReserves_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Effective income tax rate reconciliation change in income tax reserves.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationChangeInIncomeTaxReserves_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation Change In Income Tax Reserves</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationChangeInIncomeTaxReserves_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Change in income tax reserves (including interest)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebtFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Long-Term Debt, Fair Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebtFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Total debt, excluding deferred financing costs, fair value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebtFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt Fair Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SubsequentEventMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Subsequent Event [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SubsequentEventMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Subsequent Event [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfFacilitiesYetToClose_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Number of facilities yet to close.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfFacilitiesYetToClose_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Number Of Facilities Yet To Close</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfFacilitiesYetToClose_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of facilities yet to close</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PatentsTrademarksTradeNamesAndOtherMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Patents trademarks trade names and other.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PatentsTrademarksTradeNamesAndOtherMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Patents Trademarks Trade Names And Other [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PatentsTrademarksTradeNamesAndOtherMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Patents, Trademarks, Trade Names and Other [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Property, Plant and Equipment [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherAssetsNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Assets, Noncurrent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherAssetsNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherAssetsNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Other assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SegmentAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Segment assets.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SegmentAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Segment Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SegmentAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Total segment assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SegmentAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Antidilutive Securities [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Antidilutive Securities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NonCurrentLeaseLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Present value of lessee's discounted obligation for lease payments from operating and financing lease, classified as noncurrent.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NonCurrentLeaseLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Non-current Lease Liability</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NonCurrentLeaseLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Non-current lease liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Compensation Arrangement by Share-Based Payment Award, Award Vesting Rights, Percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Vesting percentage per year of RSUs from date of grant</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Goodwill and Intangible Assets, Intangible Assets, Policy [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Intangible Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxPaidForeignAfterRefundReceived_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Foreign taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxPaidForeignAfterRefundReceived_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Paid, Foreign, after Refund Received</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxPaidForeignAfterRefundReceived_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Income Tax Paid, Foreign, after Refund Received, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoInterestExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative Instruments Gain Loss Reclassified From Accumulated Oci Into Interest Expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoInterestExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Derivative instruments gain loss reclassified from accumulated Oci into interest expense.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoInterestExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net gains (losses) reclassified from accumulated OCI into interest expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestExpenseDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Interest Expense, Debt</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestExpenseDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Interest Expense, Debt, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestExpenseDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Total interest expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement, Expense, after Tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net effect on net income</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Net effect on net income (loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement, Cost by Plan [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Effect of Recording Stock-Based Compensation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accumulated Other Comprehensive Income (Loss) [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">AOCI Attributable to Parent [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Accumulated Other Comprehensive (Loss) Income [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_NameOfMajorCustomerDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Customer [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_NameOfMajorCustomerDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Customer</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ChangesInValueOfFinancialInstrumentsDesignatedAsCashFlowHedgesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Changes in Value of Financial Instruments Designated as Cash Flow Hedges [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ChangesInValueOfFinancialInstrumentsDesignatedAsCashFlowHedgesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Changes in Value of Financial Instruments Designated as Cash Flow Hedges [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ChangesInValueOfFinancialInstrumentsDesignatedAsCashFlowHedgesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Changes in value of financial instruments designated as cash flow hedges.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeLiabilities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative Liability</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeLiabilities_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Assets, Major Class Name [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Finite-Lived Intangible Assets, Major Class Name</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxAssetsCapitalizedResearchExpenditures_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Deferred tax assets capitalized research expenditures.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxAssetsCapitalizedResearchExpenditures_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Tax Assets Capitalized Research Expenditures</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxAssetsCapitalizedResearchExpenditures_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Capitalized research expenditures</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillImpairmentLoss_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Impairment of goodwill, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillImpairmentLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Impairment of goodwill, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillImpairmentLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Goodwill Impairment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillImpairmentLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Impairment charge</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Asset, Expected Amortization, after Year Five</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Thereafter</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CompletedTechnologyMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Completed Technology [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CompletedTechnologyMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Completed Technology [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CompletedTechnologyMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Completed technology.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ContractWithCustomerAssumedDeferredRevenueAndCustomerAdvances_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Contract with customer assumed deferred revenue and customer advances.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ContractWithCustomerAssumedDeferredRevenueAndCustomerAdvances_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Contract With Customer Assumed Deferred Revenue And Customer Advances</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ContractWithCustomerAssumedDeferredRevenueAndCustomerAdvances_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Assumed deferred revenue and customer advances from Atotech Acquisition</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TermLoanFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Term Loan Facility [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TermLoanFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Term Loan Facility [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TermLoanFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Term Loan Facility [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PreferredStockValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Preferred Stock, Value, Issued</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PreferredStockValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Preferred stock, $0.01 par value, 2 shares authorized; no shares issued and outstanding</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Income Tax Expense (Benefit), Continuing Operations [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Deferred provision (benefit) for income taxes:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Selling, General and Administrative Expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Selling, general and administrative</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Selling, General and Administrative Expense, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentMaturityDate_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Maturity date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentMaturityDate_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument, Maturity Date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForTenPercentOrMoreOfNetRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of customers accounted for 10% or more of net revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForTenPercentOrMoreOfNetRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Number of customers accounted for ten percent or more of net revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForTenPercentOrMoreOfNetRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Number of customers accounted for ten percent or more of net revenue.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanEquitySecuritiesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Equity Securities [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanEquitySecuritiesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Equity Securities [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashFlowHedgeGainLossToBeReclassifiedWithinTwelveMonths_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash Flow Hedge Gain (Loss) to be Reclassified within 12 Months</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashFlowHedgeGainLossToBeReclassifiedWithinTwelveMonths_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cash flow hedge to be reclassified in 12 months</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DebtInstrumentConvertibleConversionPricePercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument Convertible Conversion Price Percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DebtInstrumentConvertibleConversionPricePercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Debt instrument convertible conversion price percentage.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DebtInstrumentConvertibleConversionPricePercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt instrument conversion price percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_MinimumMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Minimum [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_MinimumMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Minimum [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Grants in Period, Weighted Average Grant Date Fair Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Weighted Average Grant Date Fair Value, Granted</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AssetsCurrentAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Assets, Current [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AssetsCurrentAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Current assets:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AmortizationOfIntangibleAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Amortization of Intangible Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AmortizationOfIntangibleAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Amortization of intangible assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueInputsLevel3Member_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value, Inputs, Level 3 [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueInputsLevel3Member_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Significant Unobservable Inputs (Level 3) [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Business combination integration reversal of acquisition and integration costs.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination Integration Reversal Of Acquisition And Integration Costs</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Acquisition and integrated costs</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForElevenPercentOfNetRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of customers accounted for 11% of net revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForElevenPercentOfNetRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Number of customers accounted for eleven percent of net revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForElevenPercentOfNetRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Number of customers accounted for eleven percent of net revenue.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanWeightedAverageAssumptionsUsedInCalculatingNetPeriodicBenefitCostAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Weighted Average Assumptions Used in Calculating Net Periodic Benefit Cost [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IntangibleAssetsFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Intangible assets fair value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IntangibleAssetsFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Intangible Assets Fair Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IntangibleAssetsFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Intangible assets fair value.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SegmentReportingAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Segment Reporting [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Fair Value, Assets and Liabilities Measured on Recurring Basis [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Fair Value of Assets and Liabilities Measured on Recurring Basis</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessCombinationsPolicy_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessCombinationsPolicy_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Acquisition Accounting</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedGainLossNetCashFlowHedgeParentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accumulated Gain (Loss), Net, Cash Flow Hedge, Parent [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedGainLossNetCashFlowHedgeParentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Unrealized (Loss) Gain on Investments [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LiabilitiesCurrentAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Liabilities, Current [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LiabilitiesCurrentAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Current liabilities:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Product [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Products [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockRepurchasedAndRetiredDuringPeriodValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Stock Repurchased and Retired During Period, Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockRepurchasedAndRetiredDuringPeriodValue_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Stock repurchase</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockRepurchasedAndRetiredDuringPeriodValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Stock repurchase</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherCurrentLiabilitiesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Summary of Other Current Liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherCurrentLiabilitiesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Current Liabilities [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_WeightedAverageNumberOfDilutedShares_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Weighted average number of diluted shares.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_WeightedAverageNumberOfDilutedShares_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Weighted Average Number Of Diluted Shares</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_WeightedAverageNumberOfDilutedShares_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Shares used in net income (loss) per common share - diluted</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLossCarryforwards_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Operating Loss Carryforwards</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLossCarryforwards_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Operating loss carryforwards</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccountsReceivableNetCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Accounts receivable, net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccountsReceivableNetCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accounts Receivable, after Allowance for Credit Loss, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccountsReceivableNetCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Accounts Receivable, after Allowance for Credit Loss, Current, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccountsReceivableNetCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Trade accounts receivable, net of allowance for doubtful accounts of $5 at both December 31, 2025 and 2024</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredFinanceCostsNoncurrentGross_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Issuance Cost, Gross, Noncurrent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredFinanceCostsNoncurrentGross_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt issuance costs</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredFinanceCostsNoncurrentGross_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Debt issuance costs</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxPaidByIndividualJurisdictionAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Paid, by Individual Jurisdiction [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ReportingUnitAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Reporting Unit [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommitmentsAndContingencies_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Commitments and Contingencies</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommitmentsAndContingencies_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Commitments and contingencies (Note 22)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherCountriesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Other countries.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherCountriesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other countries [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherCountriesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Other [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeLeasesPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Lessee, Leases [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeLeasesPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Leases</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ValuationAllowancesAndReservesDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">SEC Schedule, 12-09, Valuation Allowances and Reserves [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ValuationAllowancesAndReservesDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">SEC Schedule, 12-09, Valuation Allowances and Reserves</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanServiceCost_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Service Cost</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanServiceCost_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Service cost</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">RSUs, Weighted Average Grant Date Fair Value, Beginning of period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">RSUs, Weighted Average Grant Date Fair Value, End of period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Shares Issued, Shares, Share-Based Payment Arrangement, after Forfeiture</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Shares Issued, Shares, Share-Based Payment Arrangement, after Forfeiture, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net issuance under stock-based plans, Shares</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Operating Lease, Liability</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Total lease liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Operating Lease, Liability, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Inventory, Work in Process, Net of Reserves</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Work-in-process</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_AuditorFirmId_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Auditor Firm ID</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_AuditorFirmId_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Auditor Firm ID</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxReconciliationForeignTaxCreditRelatedToWithholdingTaxes_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Foreign tax credit related to withholding taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxReconciliationForeignTaxCreditRelatedToWithholdingTaxes_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Reconciliation Foreign Tax Credit Related To Withholding Taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxReconciliationForeignTaxCreditRelatedToWithholdingTaxes_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Income tax reconciliation foreign tax credit related to withholding taxes.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument, Basis Spread on Variable Rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt instrument, interest rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ScenarioForecastMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Forecast [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ScenarioForecastMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Forecast [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShortTermBorrowings_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Short-Term Debt</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShortTermBorrowings_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Short-term debt</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShortTermBorrowings_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Short term debt</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShortTermBorrowings_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Short-Term Debt, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxReconciliationRealizedForeignExchangeGainLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Reconciliation Realized Foreign Exchange Gain Loss</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxReconciliationRealizedForeignExchangeGainLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Income tax reconciliation realized foreign exchange gain loss.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxReconciliationRealizedForeignExchangeGainLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Realized foreign exchange gain (loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockNoParValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Common Stock, No Par Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockNoParValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Common stock, par value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SegmentReportingAssetReconcilingItemLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Segment Reporting, Asset Reconciling Item [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SegmentReportingAssetReconcilingItemLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Segment Reporting, Asset Reconciling Item [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EuriborRateFloorMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">EURIBOR rate floor member.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EuriborRateFloorMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">EURIBOR Rate Floor [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EuriborRateFloorMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">EURIBOR Rate Floor [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncreaseDecreaseCurrentAndNonCurrentAccruedCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Increase decrease current and non current accrued compensation.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncreaseDecreaseCurrentAndNonCurrentAccruedCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Increase Decrease Current And Non Current Accrued Compensation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncreaseDecreaseCurrentAndNonCurrentAccruedCompensation_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Current and non-current accrued compensation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationExecutiveCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Effective income tax rate reconciliation executive compensation.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationExecutiveCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation Executive Compensation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationExecutiveCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Executive compensation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Concentration Risk Benchmark [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Concentration Risk Benchmark</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyLiabilityLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Product Warranty Liability [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyLiabilityLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Product Warranty Liability [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredFinanceCostsNoncurrentNet_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Issuance Costs, Noncurrent, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredFinanceCostsNoncurrentNet_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Debt Issuance Costs, Noncurrent, Net, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredFinanceCostsNoncurrentNet_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Debt issuance costs</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredFinanceCostsNoncurrentNet_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Deferred financing fees, original issuance discount and re-pricing fee</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearTwo_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Long-Term Debt, Maturity, Year Two</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearTwo_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2027</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ExpenseOfRestructuringActivitiesAndOtherTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Expense of restructuring activities and other.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ExpenseOfRestructuringActivitiesAndOtherTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Expense Of Restructuring Activities And Other [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ExpenseOfRestructuringActivitiesAndOtherTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Restructuring</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendPerShare_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Share based compensation arrangement by share based payment award fair value assumptions expected dividend per share.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendPerShare_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share Based Compensation Arrangement By Share Based Payment Award Fair Value Assumptions Expected Dividend Per Share</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendPerShare_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Expected annual dividends per share</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finance Lease, Weighted Average Discount Rate, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Weighted-average discount rate-finance leases</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInDeferredTaxAssetsValuationAllowance_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Change in Deferred Tax Assets Valuation Allowance, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInDeferredTaxAssetsValuationAllowance_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Change in valuation allowance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInDeferredTaxAssetsValuationAllowance_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Changes in valuation allowances, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effect of Exchange Rate on Cash, Cash Equivalent, Restricted Cash, and Restricted Cash Equivalent, Including Discontinued Operation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Effect of exchange rate changes on cash and cash equivalents</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Effect of Exchange Rate on Cash, Cash Equivalents, Restricted Cash, and Restricted Cash Equivalents, Including Disposal Group and Discontinued Operations, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxLiabilitiesDepreciationAndAmortization_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Deferred tax liabilities depreciation and amortization.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxLiabilitiesDepreciationAndAmortization_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Tax Liabilities Depreciation And Amortization</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxLiabilitiesDepreciationAndAmortization_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Depreciation and amortization</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BankTimeDepositsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Time Deposits [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BankTimeDepositsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Bank Time Deposits [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProfitLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Net Income (Loss), Including Portion Attributable to Noncontrolling Interest</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProfitLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Net Income (Loss), Including Portion Attributable to Noncontrolling Interest, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProfitLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net income (loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdiction_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other jurisdiction</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdiction_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Reconciliation Foreign Tax Effects Other Jurisdiction</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdiction_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Income tax reconciliation foreign tax effects other jurisdiction.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Reconciliation of Assets from Segment to Consolidated [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Reconciliation of Segment Assets to Consolidated Total Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Reconciles Total Segment Assets to Total Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cybersecurity Risk Management Positions or Committees Responsible [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanAssetCategoriesOtherAssetsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Defined benefit plan asset categories other assets.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanAssetCategoriesOtherAssetsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan Asset Categories Other Assets [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanAssetCategoriesOtherAssetsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Weighted Average Number of Shares Outstanding, Basic</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Basic</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Weighted Average Number of Shares Outstanding, Basic, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Shares used in net income (loss) per common share - basic</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForFortySevenPercentFortyFourPercentAndThirtyThreePercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Number of customers accounted for forty seven percent forty four percent and thirty three percent of revenue.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForFortySevenPercentFortyFourPercentAndThirtyThreePercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Number Of Customers Accounted For Forty Seven Percent Forty Four Percent And Thirty Three Percent Of Revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForFortySevenPercentFortyFourPercentAndThirtyThreePercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of customers accounted for 42%, 46% and 44% of net revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CorporateReconcilingItemsAndEliminationsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Corporate reconciling items and eliminations.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CorporateReconcilingItemsAndEliminationsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Corporate Reconciling Items And Eliminations [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CorporateReconcilingItemsAndEliminationsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Corporate, Eliminations &amp; Other [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_StatementScenarioAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Scenario [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_StatementScenarioAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Scenario</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IsraeliPensionAssetsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Israeli Pension Assets [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IsraeliPensionAssetsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Israeli Pension Assets [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IsraeliPensionAssetsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Israeli Pension Assets [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanChangeInFairValueOfPlanAssetsRollForward_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Change in Fair Value of Plan Assets [Roll Forward]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanChangeInFairValueOfPlanAssetsRollForward_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Change in plan assets:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationOtherReconcilingItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationOtherReconcilingItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Other Reconciling Items, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxReconciliationSubpartFNetOfForeignTaxCredits_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Subpart F, net of foreign tax credits</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxReconciliationSubpartFNetOfForeignTaxCredits_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Reconciliation Subpart F, Net Of Foreign Tax Credits</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxReconciliationSubpartFNetOfForeignTaxCredits_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Income tax reconciliation subpart f, net of foreign tax credits.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Effective Income Tax Rate Reconciliation [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Reconciliation of Company's Effective Tax Rate to U.S. Federal Statutory Rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Share-Based Compensation Arrangements by Share-Based Payment Award [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule Of Share Based Compensation Arrangements By Share Based Payment Award [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StatementBusinessSegmentsAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Segments [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StatementBusinessSegmentsAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Segments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Long-Lived Tangible Asset [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Long-Lived Tangible Asset</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduleOfFutureLeasePaymentsUnderNonCancelableLeasesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Schedule of future lease payments under non cancelable leases.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduleOfFutureLeasePaymentsUnderNonCancelableLeasesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule Of Future Lease Payments Under Non Cancelable Leases [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduleOfFutureLeasePaymentsUnderNonCancelableLeasesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Future Lease Payment Under Non-Cancelable Lease</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduleOfEarningsPerShareTable_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Schedule Of Earnings Per Share [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduleOfEarningsPerShareTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule Of Earnings Per Share [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduleOfEarningsPerShareTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule Of Earnings Per Share [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyAccrualNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Product Warranty Accrual, Noncurrent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyAccrualNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Long-term product warranties</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="cyd_CybersecurityRiskProcessForInformingManagementOrCommitteesResponsibleTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cybersecurity Risk Process for Informing Management or Committees Responsible [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfShortTermDebtTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Short-Term Debt</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfShortTermDebtTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Short-Term Debt [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SubsequentEventsTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Subsequent Events [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SubsequentEventsTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Subsequent Events</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Inventory, Raw Materials, Net of Reserves</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Raw materials</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MutualFundsAndExchangeTradedFundsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Mutual funds and exchange traded funds member.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MutualFundsAndExchangeTradedFundsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Mutual Funds And Exchange Traded Funds [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MutualFundsAndExchangeTradedFundsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Mutual Funds and Exchange Traded Funds [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCredits_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Tax Credit, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCredits_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Federal tax credits</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCredits_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Effective Income Tax Rate Reconciliation, Tax Credit, Percent, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Long-term debt</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Long-Term Debt</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Long-term debt, net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Long-Term Debt, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxAssetInterestCarryforward_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Interest expense carryforwards</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxAssetInterestCarryforward_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Tax Asset, Interest Carryforward</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">APIC, Share-Based Payment Arrangement, Increase for Cost Recognition</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Stock-based compensation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">APIC, Share-Based Payment Arrangement, Increase for Cost Recognition, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TotalIncomeTaxPaymentsNetOfRefunds_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Total income tax payments, net of refunds</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TotalIncomeTaxPaymentsNetOfRefunds_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Total income tax payments, net of refunds</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentInterestRateTerms_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument, Interest Rate Terms</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentInterestRateTerms_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt instrument, interest rate terms</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxDisclosureLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Disclosure [LineItems]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxDisclosureLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Income Tax Disclosure.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxLiabilityRightOfUseAsset_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Deferred tax liability right of use asset.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxLiabilityRightOfUseAsset_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Tax Liability Right Of Use Asset</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxLiabilityRightOfUseAsset_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Right-of-use asset</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_VariableRateDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Variable Rate [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_VariableRateDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Variable Rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanActuarialGainLoss_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Actuarial loss</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanActuarialGainLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Benefit Obligation, Actuarial Gain (Loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanActuarialGainLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Actuarial (gain) loss</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Change in Deferred Tax Assets Valuation Allowance, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Changes in valuation allowances</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockholdersEquity_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Equity, Attributable to Parent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockholdersEquity_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total stockholders&#8217; equity</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockholdersEquity_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Beginning balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockholdersEquity_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Ending balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PreferredStockParOrStatedValuePerShare_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Preferred Stock, Par or Stated Value Per Share</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PreferredStockParOrStatedValuePerShare_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Preferred stock, par value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxAssetsLeaseLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Deferred tax assets lease liability.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxAssetsLeaseLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Tax Assets Lease Liability</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxAssetsLeaseLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Lease liability</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfOtherDerivativesNotDesignatedAsHedgingInstrumentsStatementsOfFinancialPerformanceAndFinancialPositionLocationTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivatives Not Designated as Hedging Instruments [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfOtherDerivativesNotDesignatedAsHedgingInstrumentsStatementsOfFinancialPerformanceAndFinancialPositionLocationTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Summary of Net (Losses) Gains on Derivatives Not Designated as Hedging Instruments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Interest Income and Interest Expense Disclosure [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Interest Expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StatementOfStockholdersEquityAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Statement of Stockholders' Equity [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AtotechMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Atotech member.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AtotechMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Atotech [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AtotechMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Atotech [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TypeOfRestructuringDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Type of Restructuring [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_RestructuringExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Restructuring expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_RestructuringExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Restructuring expense.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_RestructuringExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Charged to expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_WarrantyPeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Warranty period.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_WarrantyPeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Warranty Period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_WarrantyPeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Warranty period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationBaseErosionWaiverOfDeductions_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Base erosion waiver of deductions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationBaseErosionWaiverOfDeductions_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Effective income tax rate reconciliation, base erosion waiver of deductions.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationBaseErosionWaiverOfDeductions_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Base erosion waiver of deductions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TermSofrRatePlusApplicableCreditSpreadAdjustmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Term SOFR rate (plus applicable credit spread adjustment) member.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TermSofrRatePlusApplicableCreditSpreadAdjustmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Term SOFR Rate (Plus Applicable Credit Spread Adjustment) [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TermSofrRatePlusApplicableCreditSpreadAdjustmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Term SOFR Rate (Plus Applicable Credit Spread Adjustment) [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Long-Term Debt, Maturity, Year Five</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2030</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanDisclosureLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan Disclosure [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanDisclosureLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Defined Benefit Plan Disclosure [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LeaseholdImprovementsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Leasehold Improvements [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LeaseholdImprovementsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Leasehold Improvements [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OciBeforeReclassificationsNetOfTaxAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other comprehensive income (loss) before reclassifications</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OciBeforeReclassificationsNetOfTaxAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">OCI, before Reclassifications, Net of Tax, Attributable to Parent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DividendsPayableDateDeclaredDayMonthAndYear_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Dividends Payable, Date Declared</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DividendsPayableDateDeclaredDayMonthAndYear_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Dividend declared date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NewTermLoanFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Term Loan Facility [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NewTermLoanFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">New Term Loan Facility [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NewTermLoanFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">New term loan facility.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NewTermLoanFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">New Term Loan Facility [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_NL_lbl" xlink:role="http://www.xbrl.org/2003/role/label">NETHERLANDS</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_NL_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Netherlands [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ForeignInterestCarryforwards_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Foreign interest carryforwards.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ForeignInterestCarryforwards_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Foreign Interest Carryforwards</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ForeignInterestCarryforwards_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Foreign interest carryforwards</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_US_lbl" xlink:role="http://www.xbrl.org/2003/role/label">UNITED STATES</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_US_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">United States [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accumulated Defined Benefit Plans Adjustment Attributable to Parent [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Unrecognized Pension Gain (Loss) [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoCostOfRevenues_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative Instruments, Gain (Loss) Reclassified from Accumulated OCI into Cost of Revenues</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoCostOfRevenues_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Derivative instruments, gain loss reclassified from accumulated ocIi into cost of revenues.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoCostOfRevenues_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net gains (losses) reclassified from accumulated OCI into cost of revenues</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentNameDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument, Name [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentNameDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt Instrument, Name</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherAssetsCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Assets, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherAssetsCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other current assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFour_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Long-Term Debt, Maturity, Year Four</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFour_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2029</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessAcquisitionEffectiveDateOfAcquisition1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination, Effective Date of Acquisition</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessAcquisitionEffectiveDateOfAcquisition1_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Business acquisition date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduleOfRestructuringAndOtherCostTable_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Schedule of restructuring and other cost.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduleOfRestructuringAndOtherCostTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule Of Restructuring And Other Cost [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduleOfRestructuringAndOtherCostTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule Of Restructuring And Other Cost [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxPaidForeignAfterRefundReceivedAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Paid, Foreign, after Refund Received [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxPaidForeignAfterRefundReceivedAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Foreign taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Unrecognized Tax Benefits Roll Forward [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Reconciliation of Beginning and Ending Amount of Gross Unrecognized Tax Benefits, Excluding Interest and Penalties</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative Instruments and Hedging Activities Disclosure [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentPeriodicPayment_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Scheduled principal payments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentPeriodicPayment_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument, Periodic Payment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentPeriodicPayment_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Debt Instrument, Periodic Payment, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SegmentReportingCodmIndividualTitleAndPositionOrGroupOrCommitteeNameExtensibleEnumeration_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Segment Reporting, CODM, Individual Title and Position or Group Name [Extensible Enumeration]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InProcessResearchAndDevelopmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">IPR&amp;D [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InProcessResearchAndDevelopmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">In Process Research and Development [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesNetOfForeignTaxCredits_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Withholding taxes, net of foreign tax credits</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesNetOfForeignTaxCredits_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Effective income tax rate reconciliation, withholding taxes, net of foreign tax credits.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesNetOfForeignTaxCredits_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Withholding taxes, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesNetOfForeignTaxCredits_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Withholding taxes, net of foreign tax credits, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PlanNameDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Plan Name [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PlanNameDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Plan Name</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShortTermDebtRefinancedAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Short-Term Debt, Refinanced, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShortTermDebtRefinancedAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt refinanced amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShortTermDebtRefinancedAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Debt refinanced amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Share-Based Payment Award, Employee Stock Purchase Plan, Valuation Assumptions [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Fair Value of Employee Purchase Rights Estimated using Black-Scholes Option-Pricing Model</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Increase (Decrease) in Other Operating Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingAssets_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Other current and non-current assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Increase (Decrease) in Other Operating Assets, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Interest Expense, Operating and Nonoperating</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Interest expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total interest expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AdjustedEBITDAMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Adjusted EBITDA [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AdjustedEBITDAMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Adjusted EBITDA</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BuildingMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Building [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BuildingMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Building [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TermLoansUnderNewTermLoanFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Term loans under new term loan facility member.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TermLoansUnderNewTermLoanFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Term Loans under New Term Loan Facility [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TermLoansUnderNewTermLoanFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Term Loans under New Term Loan Facility [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CreditFacilityAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Credit Facility [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CreditFacilityAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Credit Facility</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cybersecurity Risk Materially Affected or Reasonably Likely to Materially Affect Registrant [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SegmentGrossProfitLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Segment gross profit</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SegmentGrossProfitLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Segment Gross Profit (Loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SegmentGrossProfitLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Segment gross profit (loss).</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SegmentGrossProfitLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Segment gross profit</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CurrentStateAndLocalTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Current State and Local Tax Expense (Benefit)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CurrentStateAndLocalTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">State</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfExpectedBenefitPaymentsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Expected Benefit Payments [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfExpectedBenefitPaymentsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Summary of Estimated Benefit Payments for Defined Benefit Plans for Next 10 Years</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="cyd_CybersecurityRiskManagementExpertiseOfManagementResponsibleTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cybersecurity Risk Management Expertise of Management Responsible [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finance Lease, Liability, to be Paid, Year One</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2026</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxReconciliationIntercompanyRoyalty_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Reconciliation Intercompany Royalty</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxReconciliationIntercompanyRoyalty_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Income tax reconciliation intercompany royalty.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxReconciliationIntercompanyRoyalty_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Intercompany royalty</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Increase (Decrease) in Income Taxes Payable, Net of Income Taxes Receivable</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Income taxes payable</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OriginalIssueDiscountMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Original issue discount.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OriginalIssueDiscountMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Original Issue Discount [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OriginalIssueDiscountMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Original Issue Discount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OriginalIssueDiscountMember_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Original Issue Discount [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation Withholding Taxes Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Effective Income Tax Rate Reconciliation Withholding Taxes Amount.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Withholding taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduledQuarterlyPaymentsPercentageOfOriginalPrincipalAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Scheduled quarterly payments percentage of original principal amount.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduledQuarterlyPaymentsPercentageOfOriginalPrincipalAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Scheduled Quarterly Payments Percentage of Original Principal Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduledQuarterlyPaymentsPercentageOfOriginalPrincipalAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Scheduled quarterly payments percentage of original principal amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Lessee, Operating Lease, Liability, to be Paid, Fiscal Year Maturity [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Operating Lease [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ProceedsFromPaymentsForEmployeeStockAwards_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Proceeds from payments for employee stock awards.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ProceedsFromPaymentsForEmployeeStockAwards_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Proceeds From Payments For Employee Stock Awards</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ProceedsFromPaymentsForEmployeeStockAwards_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net payments related to employee stock awards</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MaximumPercentageOfPayrollForPurchaseOfStock_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Maximum percentage of payroll for purchase of stock</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MaximumPercentageOfPayrollForPurchaseOfStock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Maximum Percentage Of Payroll For Purchase Of Stock</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MaximumPercentageOfPayrollForPurchaseOfStock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Percentage of Common Stock through payroll deductions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MinimumAgeLimitForSpecifiedAdditionalAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Minimum age limit for specified additional amount.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MinimumAgeLimitForSpecifiedAdditionalAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Minimum Age Limit For Specified Additional Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MinimumAgeLimitForSpecifiedAdditionalAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Minimum age limit for specified additional amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_USFederalMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">US Federal [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_USFederalMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">U.S. federal.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationOtherAdjustments_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Other Adjustments, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationOtherAdjustments_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AMICIncreases_lbl" xlink:role="http://www.xbrl.org/2003/role/label">AMIC increases</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AMICIncreases_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">AMIC increases</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Property, Plant and Equipment, Policy [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Property, Plant and Equipment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForFifteenPercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of customers accounted for 15% of net revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForFifteenPercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Number of customers accounted for fifteen percent of revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForFifteenPercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Number of customers accounted for fifteen percent of revenue.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_GovernmentIncentivesPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Government Incentives [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_GovernmentIncentivesPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Government Incentives [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_GovernmentIncentivesPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Government Incentives</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncrementalUsdTrancheBMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Incremental USD Tranche B.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncrementalUsdTrancheBMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Incremental USD Tranche B Loans [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncrementalUsdTrancheBMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Incremental USD Tranche B [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressCityOrTown_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address, City or Town</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressCityOrTown_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Address, City or Town</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PriorTermLoanFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Prior term loan facility.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PriorTermLoanFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Prior Term Loan Facility [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PriorTermLoanFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Prior Term Loan Facility [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_GoodwillAndIntangibleAssetsLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Goodwill and intangible assets.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_GoodwillAndIntangibleAssetsLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Goodwill And Intangible Assets [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_GoodwillAndIntangibleAssetsLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Goodwill And Intangible Assets [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockRepurchasedDuringPeriodShares_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Stock Repurchased During Period, Shares</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockRepurchasedDuringPeriodShares_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Stock repurchase, shares</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ValuationAllowancesAndReservesReservesOfBusinessesAcquired_lbl" xlink:role="http://www.xbrl.org/2003/role/label">SEC Schedule, 12-09, Valuation Allowances and Reserves, Business Acquired</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ValuationAllowancesAndReservesReservesOfBusinessesAcquired_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Additions Acquisition Beginning Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NumberOfReportableSegments_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Number of Reportable Segments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NumberOfReportableSegments_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of reportable segments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_SecurityExchangeName_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Security Exchange Name</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_SecurityExchangeName_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Security Exchange Name</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NumberOfInterestRateDerivativesHeld_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Number of Interest Rate Derivatives Held</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NumberOfInterestRateDerivativesHeld_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number Of USD LIBOR based swaps</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CreditFacilityDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Credit Facility [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CreditFacilityDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Credit Facility</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_EuropeMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Europe [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_EuropeMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Europe [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsExcludingGoodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Indefinite-Lived Intangible Assets (Excluding Goodwill)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsExcludingGoodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Indefinite-Lived Intangible Assets (Excluding Goodwill), Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsExcludingGoodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Indefinite-Lived Intangible Assets (Excluding Goodwill), Beginning Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsExcludingGoodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Indefinite-Lived Intangible Assets (Excluding Goodwill), Ending Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsExcludingGoodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Un-amortized intangible assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessAcquisitionDateOfAcquisitionAgreement1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination, Date of Acquisition Agreement</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessAcquisitionDateOfAcquisitionAgreement1_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Credit agreement date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentCarryingAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Long-Term Debt, Gross</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentCarryingAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Term Loan Facility, net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationOtherAdjustments_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Other Adjustments, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationOtherAdjustments_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationOtherAdjustments_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Other, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentGross_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Property, Plant and Equipment, Gross</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentGross_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Property, plant and equipment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentGross_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Property, Plant and Equipment, Gross, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentGross_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Property, Plant and Equipment, Gross, Beginning Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentGross_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Property, Plant and Equipment, Gross, Ending Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Current Income Tax Expense (Benefit), Continuing Operations [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Current provision (benefit) for income taxes:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DebtIssuanceCostsAmortizationPeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Debt issuance costs, amortization period.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DebtIssuanceCostsAmortizationPeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt issuance costs, amortization period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DebtIssuanceCostsAmortizationPeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt issuance costs, amortization period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtWeightedAverageInterestRate_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt, Weighted Average Interest Rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtWeightedAverageInterestRate_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Weighted average interest rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditInterestCostStatementOfIncomeOrComprehensiveIncomeExtensibleList_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Net Periodic Benefit Cost (Credit), Interest Cost, Statement of Income or Comprehensive Income [Extensible Enumeration]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income (Loss) from Continuing Operations before Income Taxes, Noncontrolling Interest</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Income (loss) before income taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskTypeDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Concentration Risk Type [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskTypeDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Concentration Risk Type</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finance Lease, Liability, to be Paid, Year Five</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2030</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CompensationRelatedCostsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Compensation Related Costs [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfCashFlowHedgesIncludedInAccumulatedOtherComprehensiveIncomeLossTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Cash Flow Hedges Included in Accumulated Other Comprehensive Income (Loss) [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfCashFlowHedgesIncludedInAccumulatedOtherComprehensiveIncomeLossTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Summary of Net Gains (Losses) on Derivatives Designated as Cash Flow Hedging Instruments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_MeasurementInputTypeDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Measurement Input Type [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AntidilutiveSecuritiesNameDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Antidilutive Securities, Name [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AntidilutiveSecuritiesNameDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Antidilutive Securities, Name</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncrementalTrancheBLoansFourthAmendmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Incremental Tranche B Loans Fourth Amendment [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncrementalTrancheBLoansFourthAmendmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Incremental Tranche B Loans Fourth Amendment [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncrementalTrancheBLoansFourthAmendmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Incremental tranche B loans fourth amendment.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationForeignIncomeTaxRateDifferential_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Foreign Income Tax Rate Differential, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationForeignIncomeTaxRateDifferential_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Statutory tax rate difference between Israel and United States, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationForeignIncomeTaxRateDifferential_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Effect of foreign operations taxed at various rates, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockholdersEquityNoteAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Stockholders' Equity Note [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryNet_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryNet_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Inventory, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryNet_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Inventories</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryNet_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Inventory</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash, Cash Equivalent, Restricted Cash, and Restricted Cash Equivalent, Continuing Operation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cash and cash equivalents</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Cash, Cash Equivalents, Restricted Cash, and Restricted Cash Equivalents, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Cash, Cash Equivalents, Restricted Cash, and Restricted Cash Equivalents, Beginning Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Cash, Cash Equivalents, Restricted Cash, and Restricted Cash Equivalents, Ending Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestPaidNet_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Interest Paid, Excluding Capitalized Interest, Operating Activity</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestPaidNet_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Interest</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement, Expensed and Capitalized, Amount [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_RangeMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Statistical Measurement [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_RangeMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Statistical Measurement</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AssetsCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Assets, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AssetsCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total current assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement, Expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Stock-based compensation expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total stock-based compensation expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Total stock-based compensation expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentPeriodEndDate_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Document Period End Date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentPeriodEndDate_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Document Period End Date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleAndHeldToMaturityAmortizedCostAfterAllowanceForCreditLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Securities, Available-for-Sale and Held-to-Maturity, Amortized Cost, after Allowance for Credit Loss</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleAndHeldToMaturityAmortizedCostAfterAllowanceForCreditLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Investments, Cost</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleAndHeldToMaturityAmortizedCostAfterAllowanceForCreditLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Available-for-sale securities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value Hierarchy and NAV [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Fair Value Hierarchy and NAV</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_IcfrAuditorAttestationFlag_lbl" xlink:role="http://www.xbrl.org/2003/role/label">ICFR Auditor Attestation Flag</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_IcfrAuditorAttestationFlag_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">ICFR Auditor Attestation Flag</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ImpairmentOfIntangibleAssetsIndefinitelivedExcludingGoodwill_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Impairment of Intangible Assets, Indefinite-Lived (Excluding Goodwill)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ImpairmentOfIntangibleAssetsIndefinitelivedExcludingGoodwill_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Accumulated Impairment Charges</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanBenefitObligationBenefitsPaid_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Benefit Obligation, Benefits Paid</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanBenefitObligationBenefitsPaid_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Benefits paid</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AccountsReceivableAllowancesPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Accounts receivable allowances.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AccountsReceivableAllowancesPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accounts Receivable Allowances Policy [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AccountsReceivableAllowancesPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accounts Receivable Allowances</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GainLossOnSaleOfPropertyPlantEquipment_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Gain (Loss) on Disposition of Property Plant Equipment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GainLossOnSaleOfPropertyPlantEquipment_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Gain on sale of long-lived assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GainLossOnSaleOfPropertyPlantEquipment_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Gain (Loss) on Disposition of Property Plant Equipment, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ReportingUnitPercentageOfFairValueInExcessOfCarryingAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Reporting Unit, Percentage of Fair Value in Excess of Carrying Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ReportingUnitPercentageOfFairValueInExcessOfCarryingAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Reporting unit, percentage of fair value in excess of carrying amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Operating Lease, Liability, Current, Statement of Financial Position [Extensible Enumeration]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncrementalTrancheBLoansSecondAmendmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Incremental Tranche B Loans Second Amendment [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncrementalTrancheBLoansSecondAmendmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Incremental tranche B loans second amendment.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncrementalTrancheBLoansSecondAmendmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Incremental Tranche B Loans Second Amendment [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StatementOfFinancialPositionAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Statement of Financial Position [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RestrictedStockUnitsRSUMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Restricted Stock Units (RSUs) [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RestrictedStockUnitsRSUMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Restricted Stock Units (RSUs) [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_VestingAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Vesting [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_VestingAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Vesting</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Comprehensive Income (Loss), Net of Tax, Portion Attributable to Parent [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other comprehensive income (loss), net of tax:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IndentureAndTheNotesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Indenture and the Notes [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IndentureAndTheNotesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Indenture and the Notes [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IndentureAndTheNotesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Indenture and the Notes [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherComprehensiveIncomeLossNetInvestmentHedgeGainLossNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Change in net investment hedge</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherComprehensiveIncomeLossNetInvestmentHedgeGainLossNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other comprehensive income (loss), net investment hedge, gain (loss), net of tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherComprehensiveIncomeLossNetInvestmentHedgeGainLossNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Other comprehensive income (loss) net investment hedge gain (loss) net of tax.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_GroupInsuranceContractsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Group insurance contracts.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_GroupInsuranceContractsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Group Insurance Contracts [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_GroupInsuranceContractsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Group Insurance Contracts [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_GroupInsuranceContractsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Group Insurance Contracts [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxLiabilities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Tax Liabilities, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxLiabilities_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedTotalLabel">Net deferred tax (liabilities) assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxLiabilities_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Deferred Tax Liabilities, Net, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_Year5Member_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Year 5 member.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_Year5Member_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Year 5 [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_Year5Member_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Year 5 [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CompensationAndEmployeeBenefitPlansTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Compensation and Employee Benefit Plans [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CompensationAndEmployeeBenefitPlansTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Employee Benefit Plans</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Current Income Tax Expense (Benefit)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Current taxes, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxesDisclosureAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Income Taxes Disclosure Abstract.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxesDisclosureAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Taxes Disclosure [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="cyd_CybersecurityRiskManagementStrategyAndGovernanceLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cybersecurity Risk Management, Strategy, and Governance [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finance Lease, Liability, to be Paid, Fiscal Year Maturity [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Finance Lease [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ValuationAndQualifyingAccountsDisclosureLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">SEC Schedule, 12-09, Valuation and Qualifying Accounts Disclosure [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ValuationAndQualifyingAccountsDisclosureLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Valuation and Qualifying Accounts Disclosure [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NondesignatedMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Not Designated as Hedging Instrument [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NondesignatedMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivatives not Designated as Hedging Instruments [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInEnactedTaxRate_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Change in Enacted Tax Rate, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInEnactedTaxRate_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Effect of changes in tax laws or rates enacted in the current period, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncrementalBorrowings_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Incremental Borrowings</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncrementalBorrowings_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Incremental borrowings.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncrementalBorrowings_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Incremental borrowings</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Liabilities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Liabilities_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherNonCurrentAssetsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Other non current assets fair value disclosure.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherNonCurrentAssetsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Non Current Assets Fair Value Disclosure</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherNonCurrentAssetsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_KR_lbl" xlink:role="http://www.xbrl.org/2003/role/label">KOREA, REPUBLIC OF</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_KR_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">South Korea [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Foreign Income Tax Rate Differential, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Statutory tax rate difference between Israel and United States</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeLiabilityStatementOfFinancialPositionExtensibleEnumeration_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative Liability, Statement of Financial Position [Extensible Enumeration]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanExpectedReturnOnPlanAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Expected Return (Loss) on Plan Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanExpectedReturnOnPlanAssets_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Expected return on plan assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Lessee, Operating Lease, Liability, to be Paid, Year Two</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2027</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeInstrumentsGainLossLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative Instruments, Gain (Loss) [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeInstrumentsGainLossLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivative Instruments, Gain (Loss) [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignExchangeForwardMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Foreign Exchange Forward [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignExchangeForwardMember_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Foreign Exchange Contracts [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignExchangeForwardMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Foreign Exchange Forward Contracts [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_VariableRateAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Variable Rate [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_VariableRateAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Variable Rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Indefinite-Lived Intangible Assets, Major Class Name [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Indefinite-lived Intangible Assets, Major Class Name</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ValuationAllowancesAndReservesBalance_lbl" xlink:role="http://www.xbrl.org/2003/role/label">SEC Schedule, 12-09, Valuation Allowances and Reserves, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ValuationAllowancesAndReservesBalance_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Balance at End of Year</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ValuationAllowancesAndReservesBalance_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Balance at Beginning of Year</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Un-amortized finite-lived intangible assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Intangible assets, Gross</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Finite-Lived Intangible Assets, Gross, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Intangible assets, not subject to amortization</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MaximumPeriodOfCompanysResearchAndDevelopmentProjects_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Maximum period of company's research and development projects.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MaximumPeriodOfCompanysResearchAndDevelopmentProjects_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Maximum Period Of Companys Research And Development Projects</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MaximumPeriodOfCompanysResearchAndDevelopmentProjects_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Maximum period of company's research and development projects</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Weighted Average Number of Shares Outstanding, Diluted</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Diluted</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Weighted Average Number of Shares Outstanding, Diluted, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityFileNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Securities Act File Number</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityFileNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity File Number</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ChangeInContractWithCustomerLiabilityLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Change in Contract with Customer, Liability [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ChangeInContractWithCustomerLiabilityLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Change In Contract With Customer Liability [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ChangeInContractWithCustomerLiabilityLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Change in Contract with Customer, Liability [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsOfDividendsCommonStock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Payments of Ordinary Dividends, Common Stock</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsOfDividendsCommonStock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Dividend payment to common shareholders</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsOfDividendsCommonStock_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Dividend payments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationOtherReconcilingItemsPercent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Other Reconciling Items, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationOtherReconcilingItemsPercent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_BalanceSheetHedgesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Balance Sheet Hedges [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_BalanceSheetHedgesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Balance sheet hedges.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_BalanceSheetHedgesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Balance Sheet Hedges [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsSharesFromAcquisition_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Share based compensation arrangement by share based payment award equity instruments other than options shares from acquisition.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsSharesFromAcquisition_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share Based Compensation Arrangement By Share Based Payment Award Equity Instruments Other Than Options Shares From Acquisition</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsSharesFromAcquisition_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">RSUs issued in Atotech Acquisition</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_CoverAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cover [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_LineOfCreditFacilityRenewalPeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Line Of Credit Facility Renewal Period.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_LineOfCreditFacilityRenewalPeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Line Of Credit Facility Renewal Period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_LineOfCreditFacilityRenewalPeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Aggregate borrowings expire and renewal period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_MeasurementInputTypeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Measurement Input Type [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanEstimatedFutureBenefitPaymentsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Expected Future Benefit Payment [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_BorrowingsUnderRevolvingFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Borrowings Under Revolving Facility [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_BorrowingsUnderRevolvingFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Borrowings Under Revolving Facility [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_BorrowingsUnderRevolvingFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Borrowings Under Revolving Facility [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfCarryingValuesAndEstimatedFairValuesOfDebtInstrumentsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Carrying Values and Estimated Fair Values of Debt Instruments [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfCarryingValuesAndEstimatedFairValuesOfDebtInstrumentsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Schedule of Estimated Carrying Value and Fair Value of Company's Debt</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForNinetyPercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Number of customers accounted for ninety percent of revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForNinetyPercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Number Of Customers Accounted For Ninety Percent Of Revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForNinetyPercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of customers accounted for greater than 90 % of net revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxesLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Income Taxes [Line Items].</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxesLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Taxes [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxesLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Income Taxes [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TaxesPayableCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Income taxes payable</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TaxesPayableCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Taxes Payable, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TaxesPayableCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Taxes Payable, Current, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InvestmentTypeCategorizationMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Investments [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InvestmentTypeCategorizationMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Investments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative Instruments and Hedging Activities Disclosures [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivative Instruments And Hedging Activities Disclosures [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_SG_lbl" xlink:role="http://www.xbrl.org/2003/role/label">SINGAPORE</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_SG_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Singapore [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SalesRevenueNetMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Revenue Benchmark [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SalesRevenueNetMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Sales Revenue, Net [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ScenarioUnspecifiedDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Scenario [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ScenarioUnspecifiedDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Scenario</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossUnrealized_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Unrealized Gain (Loss), Foreign Currency Transaction, before Tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossUnrealized_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Unrealized gain net of premium</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_USTreasurySecuritiesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">US Treasury Securities [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_USTreasurySecuritiesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">U.S. Treasury Obligations [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SegmentReportingDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Segment Reporting Disclosure [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SegmentReportingDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Business Segment, Geographic Area, Product Information and Significant Customer Information</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CommonStockExercisePrice_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Common stock exercise price.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CommonStockExercisePrice_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Common Stock Exercise Price</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CommonStockExercisePrice_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Common stock, exercise price</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MeasurementPeriodMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Measurement Period [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MeasurementPeriodMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Measurement period [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MeasurementPeriodMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Measurement period.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockIssuedDuringPeriodSharesAcquisitions_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Stock Issued During Period, Shares, Acquisitions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockIssuedDuringPeriodSharesAcquisitions_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Shares issued for Atotech Acquisition, Shares</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ValuationAndQualifyingAccountsDisclosureTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">SEC Schedule, 12-09, Valuation and Qualifying Accounts Disclosure [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ValuationAndQualifyingAccountsDisclosureTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Valuation And Qualifying Accounts Disclosure [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Gain (Loss) on Foreign Currency Derivative Instruments Not Designated as Hedging Instruments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Reduction to interest expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Reduction to interest expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Net (losses) gains recognized in other expense (income), net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SubsequentEventTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Subsequent Event [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PurchaseCommitmentRemainingMinimumAmountCommitted_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Purchase Commitment, Remaining Minimum Amount Committed</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PurchaseCommitmentRemainingMinimumAmountCommitted_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Purchase commitments covered by aggregate value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxAssetsOther_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Tax Assets, Other</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxAssetsOther_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Assets, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Intangible assets, net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Finite-Lived Intangible Assets, Net, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Finite-Lived Intangible Assets, Net, Beginning Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Finite-Lived Intangible Assets, Net, Ending Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentConvertibleConversionPrice1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument, Convertible, Conversion Price</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentConvertibleConversionPrice1_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt instrument conversion rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_StepUpMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Step-up member.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_StepUpMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Step-Up [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_StepUpMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Step-Up [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Change in Enacted Tax Rate, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Effect of changes in tax laws or rates enacted in the current period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Product Warranty Disclosure [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Product Warranties</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Loss on extinguishment of debt</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Gain (Loss) on Extinguishment of Debt</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Gain (Loss) on Extinguishment of Debt, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Loss on extinguishment of debt</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentFinStmtRestatementRecoveryAnalysisFlag_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Document Financial Statement Restatement Recovery Analysis [Flag]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForThirtyPercentFortyTwoPercentAndFourtySixPercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of customers accounted for 30%, 42%, and 46% of net revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForThirtyPercentFortyTwoPercentAndFourtySixPercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Number Of Customers Accounted For Thirty Percent Forty Two Percent And Fourty Six Percent Of Revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForThirtyPercentFortyTwoPercentAndFourtySixPercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Number of customers accounted for thirty percent forty two percent and fourty six percent of revenue.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentInterestRateIncreaseDecrease_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument, Interest Rate, Increase (Decrease)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentInterestRateIncreaseDecrease_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt Instrument, decrease in interest rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RestructuringCharges_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Restructuring Charges, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RestructuringCharges_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Restructuring and other</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RestructuringCharges_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Restructuring and other</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RestructuringCharges_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Restructuring charges</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentUsefulLife_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Property, Plant and Equipment, Useful Life</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentUsefulLife_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Estimated useful lives</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeInstrumentsNotDesignatedAsHedgingInstrumentsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative Instruments Not Designated as Hedging Instruments [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Lessee, Operating Lease, Liability, to be Paid, Maturity [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Future Lease Payment Under Non-Cancelable Lease</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipByIncomeStatementLocationByDerivativeInstrumentRiskTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative Instruments, Gain (Loss) [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipByIncomeStatementLocationByDerivativeInstrumentRiskTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivative Instruments Gain Loss By Hedging Relationship By Income Statement Location By Derivative Instrument Risk [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Contract with Customer, Liability, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Deferred revenue and customer advances</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseOther_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Nondeductible Expense, Other, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseOther_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Compensation Arrangement by Share-Based Payment Award, Award Vesting Period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Vesting period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeSeveranceMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Severance Costs [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeSeveranceMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Employee Severance [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AtotechLimitedMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Atotech Limited.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AtotechLimitedMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Atotech Limited [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AtotechLimitedMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Atotech [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AccumulatedOtherComprehensiveIncomeLossChangeInNetInvestmentHedgeMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accumulated Other Comprehensive Income Loss Change in Net Investment Hedge [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AccumulatedOtherComprehensiveIncomeLossChangeInNetInvestmentHedgeMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Accumulated other comprehensive income loss change in net investment hedge.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AccumulatedOtherComprehensiveIncomeLossChangeInNetInvestmentHedgeMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Change in Net Investment Hedge [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">United States</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income (Loss) from Continuing Operations before Income Taxes, Domestic</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Depreciation_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Depreciation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Depreciation_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Depreciation of property, plant and equipment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Depreciation_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Depreciation, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockSharesOutstanding_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Common Stock, Shares, Outstanding</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockSharesOutstanding_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Common stock, shares outstanding</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockSharesOutstanding_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Common Stock, Shares, Outstanding, Beginning Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockSharesOutstanding_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Common Stock, Shares, Outstanding, Ending Balance</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DividendsDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Dividends [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="cyd_CybersecurityRiskManagementProcessesIntegratedFlag_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cybersecurity Risk Management Processes Integrated [Flag]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentTransitionReport_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Document Transition Report</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentTransitionReport_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Document Transition Report</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShortTermInvestments_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Short-Term Investments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShortTermInvestments_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Short-term investments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShortTermInvestments_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Short-Term Investments, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherNonCurrentLiabilitiesFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Other non current liabilities fair value disclosure.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherNonCurrentLiabilitiesFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other non current liabilities fair value disclosure</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherNonCurrentLiabilitiesFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ResearchAndDevelopmentExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Research and Development Expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ResearchAndDevelopmentExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Research and development</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ResearchAndDevelopmentExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Research and Development Expense, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxDisclosureTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Disclosure [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxDisclosureTable_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Income Tax Disclosure.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeOperatingLeasesTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Lessee, Operating Leases [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeOperatingLeasesTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Leases</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsForRepurchaseOfCommonStock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Payments for Repurchase of Common Stock</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsForRepurchaseOfCommonStock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Repurchase of common stock</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsForRepurchaseOfCommonStock_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Repurchase of common stock</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Components of Income Tax Expense (Benefit) [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Components of Income (Loss) Before Income Taxes and Related Provision (Benefit) for Income Taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_UnrealizedGainLossOnDerivatives_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Unrealized Gain (Loss) on Derivatives</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_UnrealizedGainLossOnDerivatives_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Unrealized (gain) loss on foreign currency and derivative instruments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StatementOfCashFlowsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Statement of Cash Flows [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CompletedTechnologyRightsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Completed Technology Rights [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CompletedTechnologyRightsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Completed Technology Rights [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CompletedTechnologyRightsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Completed Technology [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxAssetsInventoryAndWarrantyReserves_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Deferred tax assets inventory and warranty reserves.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxAssetsInventoryAndWarrantyReserves_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Tax Assets Inventory And Warranty Reserves</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxAssetsInventoryAndWarrantyReserves_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Inventory and warranty reserves</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_HK_lbl" xlink:role="http://www.xbrl.org/2003/role/label">HONG KONG</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_HK_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Hong Kong [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CurrentFederalTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Current Federal Tax Expense (Benefit)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CurrentFederalTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Federal</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ChangeInContractWithCustomerLiabilityTable_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Change in Contract with Customer, Liability [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ChangeInContractWithCustomerLiabilityTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Change In Contract With Customer Liability [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ChangeInContractWithCustomerLiabilityTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Change In Contract With Customer Liability [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseShareBasedCompensationCost_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Nondeductible Expense, Share-Based Payment Arrangement, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseShareBasedCompensationCost_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Stock based compensation, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Payments to Acquire Businesses, Net of Cash Acquired</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Total purchase price, net of cash and cash equivalents acquired</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total purchase price, net of cash and cash equivalents acquired</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Acquisitions of businesses, net of cash acquired</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Total purchase price, net of cash and cash equivalents acquired</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Reconciliation of Assets from Segment to Consolidated [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Reconciliation Of Assets From Segment To Consolidated [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestRateSwapMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Interest Rate Swap [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestRateSwapMember_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Interest Rate Swaps [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestRateSwapMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Interest Rate Swap [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockholdersEquityNoteDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Equity [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockholdersEquityNoteDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Stockholders' Equity</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Assets [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Finite-Lived Intangible Assets [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Earnings Per Share [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net Income (Loss) Per Share</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SharesIssued_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Shares, Issued</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SharesIssued_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Ending Balance, Shares</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SharesIssued_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Beginning Balance, Shares</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="cyd_CybersecurityRiskManagementProcessesIntegratedTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cybersecurity Risk Management Processes Integrated [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CashAndCashEquivalentsAndInvestmentsPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Cash and cash equivalents and investments.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CashAndCashEquivalentsAndInvestmentsPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash And Cash Equivalents And Investments Policy [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CashAndCashEquivalentsAndInvestmentsPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cash and Cash Equivalents and Investments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DebtInstrumentConvertibleApplicableConversionPrice_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument, Convertible, Applicable Conversion Price</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DebtInstrumentConvertibleApplicableConversionPrice_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Debt instrument, convertible, applicable conversion price.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DebtInstrumentConvertibleApplicableConversionPrice_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt instrument convertible applicable conversion price</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DebtInstrumentConvertibleApplicableConversionPrice_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Debt instrument applicable conversion price</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetIncomeLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Net income (loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetIncomeLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Net income (loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryWriteDown_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Inventory Write-down</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryWriteDown_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Provision for excess and obsolete inventory</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryWriteDown_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Inventory related excess and obsolete charges</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncreaseDecreaseInInventories_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Increase (Decrease) in Inventories</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncreaseDecreaseInInventories_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Inventories</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncreaseDecreaseInInventories_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Increase (Decrease) in Inventories, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_InProcessResearchAndDevelopmentReclassifiedIntoCompletedTechnology_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">In-process research and development reclassified into completed technology</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_InProcessResearchAndDevelopmentReclassifiedIntoCompletedTechnology_lbl" xlink:role="http://www.xbrl.org/2003/role/label">In-process research and development reclassified into completed technology</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_InProcessResearchAndDevelopmentReclassifiedIntoCompletedTechnology_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">In-process research and development reclassified into completed technology.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseCost_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Operating Lease, Cost</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseCost_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Operating lease</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseCost_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Operating lease cost</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DerivativeAndHedgingTable_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Derivative And Hedging [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DerivativeAndHedgingTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative And Hedging [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DerivativeAndHedgingTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivative And Hedging [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PensionAndOtherPostretirementBenefitContributions_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Payment for Pension and Other Postretirement Benefits</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PensionAndOtherPostretirementBenefitContributions_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Company's contributions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PensionAndOtherPostretirementBenefitContributions_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Payment for Pension and Other Postretirement Benefits, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Foreign Currency Cash Flow Hedge Asset at Fair Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivatives-foreign exchange forward contracts</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProceedsFromPaymentsForOtherFinancingActivities_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other financing activities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProceedsFromPaymentsForOtherFinancingActivities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Proceeds from (Payment for) Other Financing Activity</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ContractWithCustomerLiabilityAdditions_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Contract with customer liability additions.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ContractWithCustomerLiabilityAdditions_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Contract With Customer Liability Additions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ContractWithCustomerLiabilityAdditions_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Additions to deferred revenue and customer advances</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeasePayments_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Operating Lease, Payments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeasePayments_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Operating cash flows used for operating leases</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiPercent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, FDII, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiPercent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">FDII, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiPercent_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Foreign-derived intangible income, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Standard and Extended Product Warranty Accrual, Increase for Warranties Issued</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Provision for product warranties</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedContributionPlanMinimumAnnualContributionsPerEmployeePercent_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Defined Contribution Plan Minimum Annual Contributions Per Employee Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedContributionPlanMinimumAnnualContributionsPerEmployeePercent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Contribution Plan Minimum Annual Contributions Per Employee Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedContributionPlanMinimumAnnualContributionsPerEmployeePercent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Employee contribution to Company's profit sharing plan percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AssetsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Assets [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AssetsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">ASSETS</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxAuthorityNameAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Authority, Name [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxAuthorityNameAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Income Tax Authority, Name</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Compensation Arrangement by Share-Based Payment Award, Fair Value Assumptions, Risk Free Interest Rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Risk-free interest rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConstructionInProgressMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Construction in Progress [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConstructionInProgressMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Construction in Progress [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RepaymentsOfDebt_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Payments of borrowings</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RepaymentsOfDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Repayment of Atotech senior secured term loans</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RepaymentsOfDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Repayments of notes from proceeds from offering</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RepaymentsOfDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Repayment of borrowings outstanding</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AmortizationOfFinancingCostsAndDiscounts_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Amortization of Debt Issuance Costs and Discounts</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AmortizationOfFinancingCostsAndDiscounts_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Amortization of debt issuance costs and original issue discount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AmortizationOfFinancingCostsAndDiscounts_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Amortization of Debt Issuance Costs and Discounts, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeitedWeightedAverageGrantDateFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share Based Compensation Arrangement By Share Based Payment Award Equity Instruments Other Than Options Vested And Forfeited Weighted Average Grant Date Fair Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeitedWeightedAverageGrantDateFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Share based compensation arrangement by share based payment award, equity instruments other than options, vested and forfeited weighted average grant date fair value.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeitedWeightedAverageGrantDateFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Weighted Average Grant Date Fair Value, Vested and Forfeited</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RestructuringAndRelatedActivitiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Restructuring and Related Activities [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentFiscalYearFocus_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Document Fiscal Year Focus</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentFiscalYearFocus_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Document Fiscal Year Focus</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Purchase of capped calls related to Convertible Notes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Adjustments to Additional Paid in Capital, Equity Component of Convertible Debt</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Exercise Price Range [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Exercise Price Range</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Accumulated Other Comprehensive Income (Loss) [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Change in Accumulated Other Comprehensive Income (Loss) by Component, Net of Tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Concentration Risk Benchmark [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Concentration Risk Benchmark</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_GoodwillAndIntangibleAssetsTable_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Goodwill and intangible assets.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_GoodwillAndIntangibleAssetsTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Goodwill And Intangible Assets [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_GoodwillAndIntangibleAssetsTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Goodwill And Intangible Assets [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash Provided by (Used in) Investing Activity, Including Discontinued Operation [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cash flows from investing activities:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CompensationAndRetirementDisclosureAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Retirement Benefits [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccountsPayableCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accounts Payable, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccountsPayableCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accounts payable</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccountsPayableCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Accounts Payable, Current, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedInPeriodFairValue1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Compensation Arrangement by Share-Based Payment Award, Options, Vested in Period, Fair Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedInPeriodFairValue1_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Total fair value of RSUs vested</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Unrecognized Tax Benefits, Reduction Resulting from Lapse of Applicable Statute of Limitations</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Reductions related to expiration of statutes of limitations and audit settlements</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ComponentsOfCashPaidForTaxesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Components of Cash Paid for Taxes [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ComponentsOfCashPaidForTaxesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Tabular disclosure of components of cashpPaid for taxes.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ComponentsOfCashPaidForTaxesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Components of Cash Paid for Taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ResearchAndDevelopmentExpenseMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Research and Development Expense [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ResearchAndDevelopmentExpenseMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Research and Development Expense [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfNetBenefitCostsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Net Benefit Costs [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfNetBenefitCostsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Summary of Net Periodic Benefit Costs</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduleOfSignificantAccountingPoliciesTable_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Schedule of significant accounting policies [Table].</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduleOfSignificantAccountingPoliciesTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule Of Significant Accounting Policies [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduleOfSignificantAccountingPoliciesTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule Of Significant Accounting Policies [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accounting Standards Update and Change in Accounting Principle [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeMaturityDates_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative, Contract End Date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeMaturityDates_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Maturity</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeMaturityDates_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Expired date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Contract with Customer, Contract Asset, Contract Liability, and Receivable [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Deferred Revenue and Customer Advances by Arrangement</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredFederalIncomeTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Federal Income Tax Expense (Benefit)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredFederalIncomeTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Federal</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Shares Issued, Value, Share-Based Payment Arrangement, after Forfeiture</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net issuance under stock-based plans</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Shares Issued, Value, Share-Based Payment Arrangement, after Forfeiture, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_LineOfCreditFacilityMinimumAdditionalBorrowingCapacity_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Line of credit facility minimum additional borrowing capacity.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_LineOfCreditFacilityMinimumAdditionalBorrowingCapacity_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Line Of Credit Facility Minimum Additional Borrowing Capacity</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_LineOfCreditFacilityMinimumAdditionalBorrowingCapacity_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Line of credit facility minimum additional borrowing capacity</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Asset, Expected Amortization, Year One</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2026</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AccountingStandardsUpdated201409Member_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accounting Standards Updated 2014-09 [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AccountingStandardsUpdated201409Member_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Accounting standards updated 2014-09.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AccountingStandardsUpdated201409Member_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accounting Standards Update 2014-09 [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Components of Deferred Tax Assets [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Deferred tax assets:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_LevelOfPerformanceTargetAchievedPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Level of performance target achieved percentage.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_LevelOfPerformanceTargetAchievedPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Level Of Performance Target Achieved Percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_LevelOfPerformanceTargetAchievedPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Level of performance target achieved</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PaymentsAndAdjustmentForRestructuring_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Payments And Adjustment For Restructuring</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PaymentsAndAdjustmentForRestructuring_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Payments and adjustment for restructuring.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PaymentsAndAdjustmentForRestructuring_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Payments and adjustments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanDebtSecurityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Debt Security [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanDebtSecurityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt Securities [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueDisclosuresAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value Disclosures [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Commitments and Contingencies Disclosure [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_CA_lbl" xlink:role="http://www.xbrl.org/2003/role/label">CANADA</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_CA_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Canada [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockIssuedDuringPeriodValueAcquisitions_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Stock Issued During Period, Value, Acquisitions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockIssuedDuringPeriodValueAcquisitions_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Shares issued for Atotech Acquisition</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxAssetsDepreciationAndAmortization_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Tax Assets Depreciation and Amortization</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxAssetsDepreciationAndAmortization_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Deferred tax assets depreciation and amortization.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredTaxAssetsDepreciationAndAmortization_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Depreciation and amortization</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Lessee, Operating Lease, Liability, to be Paid, Year One</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">2021 lease payment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2026</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareBasic_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Allocated share based compensation effect on earning per share basic.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareBasic_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Allocated Share Based Compensation Effect On Earning Per Share Basic</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareBasic_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Basic</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LineOfCredit_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Long-Term Line of Credit</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LineOfCredit_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Total borrowings outstanding</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LineOfCredit_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Long-Term Line of Credit, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LineOfCredit_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Borrowings outstanding</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt Instrument</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeInstrumentRiskAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative Instrument [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeInstrumentRiskAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivative Instrument</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Lessee, Operating Lease, Liability, to be Paid, after Year Five</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Thereafter</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanInterestCost_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Interest Cost</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanInterestCost_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Interest cost on projected benefit obligations</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanInterestCost_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Interest cost</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement, Nonvested Award, Cost Not yet Recognized, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Share-Based Payment Arrangement, Nonvested Award, Cost Not yet Recognized, Amount, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Total compensation expense related to restricted stock unites</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AssetsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Assets, Fair Value Disclosure</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AssetsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Tax Liabilities, Intangible Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Acquired intangible assets and goodwill</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativesPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivatives, Policy [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativesPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivatives</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskPercentage1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Concentration Risk, Percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskPercentage1_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Concentration risk, percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsNextTwelveMonths_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Expected Future Benefit Payment, Year One</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsNextTwelveMonths_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2026</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfNonvestedRestrictedStockUnitsActivityTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Nonvested Restricted Stock Units Activity [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfNonvestedRestrictedStockUnitsActivityTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Summary of Activity for RSUs</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TermSofrBorrowingsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Term SOFR borrowings member.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TermSofrBorrowingsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Term SOFR Borrowings [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TermSofrBorrowingsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Term SOFR Borrowings [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash Provided by (Used in) Investing Activity, Including Discontinued Operation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Net cash used in investing activities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShortTermDebtRefinancedDescription_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Short-Term Debt, Refinanced, Description</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShortTermDebtRefinancedDescription_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt refinanced description</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finance Lease, Weighted Average Remaining Lease Term</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Weighted-average remaining lease term-finance leases</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Weighted-average remaining lease term years-finance leases</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_Security12bTitle_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Title of 12(b) Security</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_Security12bTitle_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Title of 12(b) Security</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Segment Reporting Information, by Segment [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule Of Segment Reporting Information By Segment [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrentAndNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Employee-related Liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrentAndNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Non-current accrued compensation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrentAndNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Employee-related Liabilities, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Nondeductible Expense, Share-Based Payment Arrangement, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Stock based compensation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivatives and Net Investment Hedge</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative Instruments and Hedging Activities Disclosure [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxPaidByIndividualJurisdictionTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Paid, by Individual Jurisdiction [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_MoneyMarketFundsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Money Market Funds [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_MoneyMarketFundsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Money Market Funds [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearSixToTen_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Defined benefit plan expected future benefit payments year six to ten.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearSixToTen_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan Expected Future Benefit Payments Year Six To Ten</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearSixToTen_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2031-2035</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Long-Term Debt, Maturity, after Year Five</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Thereafter</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_InterestRateHegesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Interest rate heges.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_InterestRateHegesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Interest Rate Heges [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_InterestRateHegesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Interest Rate Hedges [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Disclosure [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Income Taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditExpectedReturnLossStatementOfIncomeOrComprehensiveIncomeExtensibleList_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Net Periodic Benefit (Cost) Credit, Expected Return (Loss), Statement of Income or Comprehensive Income [Extensible Enumeration]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_UnrecognizedTaxBenefitsOffsetAgainstRestructuringReserves_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Unrecognized Tax Benefits Offset Against Restructuring Reserves</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_UnrecognizedTaxBenefitsOffsetAgainstRestructuringReserves_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Unrecognized tax benefits offset against restructuring reserves.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_UnrecognizedTaxBenefitsOffsetAgainstRestructuringReserves_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Unrecognized tax benefits offset against restructuring reserves</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestExpenseMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Interest Expense [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Two thousand fourteen employee stock purchase plan</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Two Thousand Fourteen Employee Stock Purchase Plan [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2014 ESPP [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OperatingLossCarryforwardsExpiringTwoThousandThirtyNineMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Operating loss carryforwards expiring two thousand thirty nine.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OperatingLossCarryforwardsExpiringTwoThousandThirtyNineMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Operating Loss Carryforwards Expiring Two Thousand Thirty Nine [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OperatingLossCarryforwardsExpiringTwoThousandThirtyNineMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2039 [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherLiabilitiesNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Liabilities, Noncurrent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherLiabilitiesNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other non-current liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentRedemptionPeriodDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument, Redemption, Period [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForFourteenPercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of customers accounted for 14% of net revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForFourteenPercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Number of customers accounted for fourteen percent of revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForFourteenPercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Number of customers accounted for fourteen percent of revenue.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Adjustment to Reconcile Net Income to Cash Provided by (Used in) Operating Activity, Increase (Decrease) in Operating Capital [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Changes in operating assets and liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Property, Plant and Equipment [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Summary of Property, Plant and Equipment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanFairValueOfPlanAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Plan Assets, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanFairValueOfPlanAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Fair value of plan assets, end of year</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanFairValueOfPlanAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Fair value of plan assets, beginning of year</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanFairValueOfPlanAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Defined benefit plan assets, amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ComponentsOfCashPaidNetOfRefundsReceivedForIncomeTaxesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Components Of Cash Paid Net Of Refunds Received For Income Taxes [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ComponentsOfCashPaidNetOfRefundsReceivedForIncomeTaxesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Components of cash paid net of refunds received for income taxes.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ComponentsOfCashPaidNetOfRefundsReceivedForIncomeTaxesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Components of Cash Paid (Net of Refunds Received) for Income Taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxDisclosureAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Disclosure [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value, Recurring and Nonrecurring [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Fair Value Assets And Liabilities Measured On Recurring And Nonrecurring Basis [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_UnrecognizedTaxBenefits_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Unrecognized Tax Benefits</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_UnrecognizedTaxBenefits_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Balance at end of year</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_UnrecognizedTaxBenefits_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Balance at beginning of year</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdditionalPaidInCapitalMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Additional Paid-in Capital [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AdditionalPaidInCapitalMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Additional Paid-In Capital [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ConvertibleSeniorNotesDue2030Member_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Convertible Senior Notes Due 2030 [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ConvertibleSeniorNotesDue2030Member_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Convertible senior notes due 2030.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ConvertibleSeniorNotesDue2030Member_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Convertible Senior Notes Due 2030 [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ConvertibleSeniorNotesDue2030Member_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Convertible Notes [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Measurement Frequency [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Measurement Frequency</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherOperatingIncomeExpenseMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Operating Income (Expense) [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherOperatingIncomeExpenseMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other Expense, Net [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_StockRepurchaseProgramAuthorizedAmount1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share Repurchase Program, Authorized, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_StockRepurchaseProgramAuthorizedAmount1_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Common stock, value of shares authorized to repurchase</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeStatementLocationAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Statement of Income Location, Balance [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeStatementLocationAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Income Statement Location</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">New Accounting Pronouncements or Change in Accounting Principle [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_TradingSymbol_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Trading Symbol</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_TradingSymbol_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Trading Symbol</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_RestructuringCostAndOtherCostLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Restructuring cost and other cost.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_RestructuringCostAndOtherCostLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Restructuring Cost And Other Cost [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_RestructuringCostAndOtherCostLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Restructuring Cost and Other Cost [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Intangible Asset, Finite-Lived [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule Of Finite Lived Intangible Assets [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Property, Plant and Equipment Disclosure [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Property, Plant and Equipment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Non- current interest rate fair value hedge liabilities at fair value.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Non Current Interest Rate Fair Value Hedge Liabilities At Fair Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivatives - interest rate hedge - non-current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SubsequentEventTypeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Subsequent Event Type [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CustomerAdvancesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Customer Advances [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CustomerAdvancesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Customer Advances [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CustomerAdvancesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Customer Advances [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Intangible Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Finite-Lived Intangible Assets [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Accrued compensation and other employee-related obligations</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Employee-related Liabilities, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accrued compensation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Employee-related Liabilities, Current, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_TW_lbl" xlink:role="http://www.xbrl.org/2003/role/label">TAIWAN</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_TW_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Taiwan, Province of China [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_TW_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Taiwan [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash Provided by (Used in) Financing Activity, Including Discontinued Operation [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cash flows from financing activities:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Compensation Arrangement by Share-Based Payment Award, Fair Value Assumptions, Expected Term</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Expected life (years)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TaxBenefitRelatedToHistoricalOutsideBasisDifferences_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Tax benefit related to historical outside basis differences</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TaxBenefitRelatedToHistoricalOutsideBasisDifferences_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Tax benefit related to historical outside basis differences</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TaxBenefitRelatedToHistoricalOutsideBasisDifferences_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Tax benefit related to historical outside basis differences.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueMeasurementsRecurringMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value, Recurring [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueMeasurementsRecurringMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Fair Value Measurements, Recurring [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Lessee, Operating Lease, Liability, to be Paid</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total lease payments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Lessee, Operating Lease, Liability, Undiscounted Excess Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Less: imputed interest</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCreditsResearch_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Tax Credit, Research, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCreditsResearch_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">R&amp;D credits, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCreditsResearch_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Research and development tax credits, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TermLoanFacilityNetMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Term loan facility, net.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TermLoanFacilityNetMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Term Loan Facility Net [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TermLoanFacilityNetMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Term Loan Facility, Net [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanAssetsForPlanBenefitsPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Defined Benefit Plan Assets For Plan Benefits Percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanAssetsForPlanBenefitsPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan Assets For Plan Benefits Percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanAssetsForPlanBenefitsPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Defined benefit plan assets, percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillAndIntangibleAssetImpairment_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Goodwill and intangible asset impairment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillAndIntangibleAssetImpairment_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Goodwill and intangible asset impairments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillAndIntangibleAssetImpairment_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Goodwill and Intangible Asset Impairment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillAndIntangibleAssetImpairment_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Goodwill and Intangible Asset Impairment, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StatementEquityComponentsAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Equity Components [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StatementEquityComponentsAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Equity Components</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ContractWithCustomerAmountOfDeferredRevenueAndCustomerAdvancesRecognized_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Contract with customer amount of deferred revenue and customer advances recognized</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ContractWithCustomerAmountOfDeferredRevenueAndCustomerAdvancesRecognized_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Contract With Customer Amount Of Deferred Revenue And Customer Advances Recognized</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ContractWithCustomerAmountOfDeferredRevenueAndCustomerAdvancesRecognized_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Amount of deferred revenue and customer advances recognized in income</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_RepurchaseOfDebtPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Repurchase Of Debt Percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_RepurchaseOfDebtPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Repurchase of debt percentage.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_RepurchaseOfDebtPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Repurchase of principal amount percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NonoperatingIncomeExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Nonoperating Income (Expense)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NonoperatingIncomeExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Nonoperating Income (Expense), Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NonoperatingIncomeExpense_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Other expense (income), net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EquityComponentDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Equity Component [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EquityComponentDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Equity Component</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueByAssetClassAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Asset Class [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueByAssetClassAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Asset Class</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Goodwill and Intangible Assets Disclosure [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StateAndLocalTaxJurisdictionOtherMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other state jurisdictions [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StateAndLocalTaxJurisdictionOtherMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">State and Local Tax Jurisdiction, Other [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SpecialtyIndustrialMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Specialty Industrial [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SpecialtyIndustrialMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Specialty industrial.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SpecialtyIndustrialMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Specialty Industrial [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyAccrual_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Standard and Extended Product Warranty Accrual</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyAccrual_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Standard and Extended Product Warranty Accrual, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyAccrual_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Beginning of period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyAccrual_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">End of period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">SEC Schedule, 12-09, Valuation Allowance, Deferred Tax Asset [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Valuation Allowance on Deferred Tax Asset [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CurrentAssetsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total current assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CurrentAssetsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Current assets fair value disclosure.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CurrentAssetsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Current Assets Fair Value Disclosure</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentAnnualReport_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Document Annual Report</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentAnnualReport_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Document Annual Report</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduleOfSignificantAccountingPoliciesLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Schedule of significant accounting policies [Line Items].</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduleOfSignificantAccountingPoliciesLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule Of Significant Accounting Policies [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ScheduleOfSignificantAccountingPoliciesLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule Of Significant Accounting Policies [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationSubpartFNetOfForeignTaxCredits_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Subpart F, net of foreign tax credits, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationSubpartFNetOfForeignTaxCredits_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation Subpart F, Net Of Foreign Tax Credits</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationSubpartFNetOfForeignTaxCredits_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Effective income tax rate reconciliation subpart f, net of foreign tax credits.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillTransfers_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Goodwill, Transfers</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillTransfers_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Movement of OSP product line</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessAcquisitionAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Business Combination [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BusinessAcquisitionAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Business Acquisition</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Operating Lease, Liability, Statement of Financial Position [Extensible Enumeration]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostRateOfCompensationIncrease_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Assumptions Used Calculating Net Periodic Benefit Cost, Rate of Compensation Increase</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostRateOfCompensationIncrease_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Rate of increase in salary levels</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_MachineryAndEquipmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Machinery and Equipment [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_MachineryAndEquipmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Machinery and Equipment [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PostemploymentBenefitsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Postemployment Benefits [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_MajorCustomersAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Customer [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_MajorCustomersAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Customer</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxReconciliationAuditSettlementRelatedToIntercompanyTransactions_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Reconciliation Audit Settlement Related To Intercompany Transactions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxReconciliationAuditSettlementRelatedToIntercompanyTransactions_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Income tax reconciliation audit settlement related to intercompany transactions.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxReconciliationAuditSettlementRelatedToIntercompanyTransactions_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Audit settlement related to intercompany transactions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxesTableTable_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Income Taxes [Table].</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxesTableTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Taxes Table [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncomeTaxesTableTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Income Taxes Table [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OneCustomerMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">One customer.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OneCustomerMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">One Customer [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OneCustomerMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">One Customer [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NewportCorporationMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Newport Corporation.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NewportCorporationMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Newport Corporation [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NewportCorporationMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Newport Corporation [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NewportCorporationMember_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Newport Corporation [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MinimumPercentageOfEarningsBeforeInterestTaxesDepreciationAndAmortization_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Minimum percentage of earnings before interest taxes depreciation and amortization.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MinimumPercentageOfEarningsBeforeInterestTaxesDepreciationAndAmortization_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Minimum Percentage Of Earnings Before Interest Taxes Depreciation And Amortization</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MinimumPercentageOfEarningsBeforeInterestTaxesDepreciationAndAmortization_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Minimum percentage of consolidated EBITDA</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DepreciationAndAmortization_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Depreciation, Depletion and Amortization, Nonproduction</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DepreciationAndAmortization_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Depreciation and amortization</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DepreciationAndAmortization_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Depreciation, Depletion and Amortization, Nonproduction, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EmployeePerformanceAwardBonusExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Employee bonus expense (includes bonus expense and performance awards).</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EmployeePerformanceAwardBonusExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Employee Performance Award Bonus Expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EmployeePerformanceAwardBonusExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Bonus expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BuildingAndBuildingImprovementsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Building and Building Improvements [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_BuildingAndBuildingImprovementsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Building and Building Improvements [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationTaxContingencies_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Tax Contingency, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationTaxContingencies_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Effective Income Tax Rate Reconciliation, Tax Contingency, Amount, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationTaxContingencies_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Changes in unrecognized tax benefits</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_UsdTrancheBFirstAmmendmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">USD Tranche B First Ammendment [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_UsdTrancheBFirstAmmendmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">USD Tranche B First Ammendment [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_UsdTrancheBFirstAmmendmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">USD Tranche B First Ammendment.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_MaximumMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Maximum [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_MaximumMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Maximum [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DividendPayableDateToBePaidDayMonthAndYear_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Dividends Payable, Date to be Paid</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DividendPayableDateToBePaidDayMonthAndYear_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Dividend to be paid date</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DesignatedAsHedgingInstrumentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Designated as Hedging Instrument [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DesignatedAsHedgingInstrumentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivatives Designated as Hedging Instruments [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_RangeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Statistical Measurement [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_RangeAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Statistical Measurement</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MinimumPercentageOfIncomeTaxPaymentNetOfRefundsReceived_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Minimum percentage of income tax payment net of refunds received</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MinimumPercentageOfIncomeTaxPaymentNetOfRefundsReceived_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Minimum percentage of income tax payment net of refunds received.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Contract with Customer, Liability, Noncurrent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Non-current deferred revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Finite-lived intangible assets, accumulated amortization</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Assets, Accumulated Amortization</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Accumulated Amortization</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanPlanAssetsForeignCurrencyTranslationGainLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Currency translation adjustments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanPlanAssetsForeignCurrencyTranslationGainLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Plan Assets, Foreign Currency Translation Gain (Loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Common Stock, Value, Issued</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Common stock, no par value, 200 shares authorized; 67.2 and 67.4 shares issued and outstanding at December 31, 2025 and 2024, respectively</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncrementalTrancheBLoansMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Incremental Tranche B Loans [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncrementalTrancheBLoansMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Incremental Tranche B Loans [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncrementalTrancheBLoansMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Incremental Tranche B Loans.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AMIC_lbl" xlink:role="http://www.xbrl.org/2003/role/label">AMIC</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_AMIC_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">AMIC.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeasePrincipalPayments_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finance Lease, Principal Payments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeasePrincipalPayments_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Financing cash flows used for finance leases</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_StockExercisePriceAsPercentageOfClosingMarketPrice_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Stock exercise price as percentage of closing market price.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_StockExercisePriceAsPercentageOfClosingMarketPrice_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Stock Exercise Price As Percentage Of Closing Market Price</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_StockExercisePriceAsPercentageOfClosingMarketPrice_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Percentage of closing price of the Common Stock</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DividendsAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Dividends [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredRevenueMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Deferred Revenue [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredRevenueMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Revenue [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredRevenueMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Deferred Revenue [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SecuredOvernightFinancingRateSofrMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Secured Overnight Financing Rate (SOFR) [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SecuredOvernightFinancingRateSofrMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">SOFR Borrowings [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanPensionPlanChangeInBenefitObligationAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Defined Benefit Plan Pension Plan Change In Benefit Obligation [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanPensionPlanChangeInBenefitObligationAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan Pension Plan Change In Benefit Obligation [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanPensionPlanChangeInBenefitObligationAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Change in projected benefit obligations:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ComprehensiveIncomeNetOfTaxAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Comprehensive income (loss) (net of tax):</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ComprehensiveIncomeNetOfTaxAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Comprehensive Income (Loss), Net of Tax, Attributable to Parent [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Tax Assets, Operating Loss Carryforwards</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Deferred Tax Assets, Operating Loss Carryforwards, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net operating loss carryforwards</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cybersecurity Risk Management Processes for Assessing, Identifying, and Managing Threats [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TaxCreditCarryforwardAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Tax Credit Carryforward [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TaxCreditCarryforwardAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Tax Credit Carryforward</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Impairment or Disposal of Long-Lived Assets, Policy [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Long-Lived Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationBeatAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, BEAT, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationBeatAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Base erosion and anti-abuse tax related waiver of deductions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Comprehensive Income (Loss), Available-for-Sale Securities Adjustment, Net of Tax, Portion Attributable to Parent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Other Comprehensive Income (Loss), Available-for-Sale Securities Adjustment, Net of Tax, Portion Attributable to Parent, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Unrealized gain (loss) on investments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationStateAndLocalIncomeTaxes_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">State and local income taxes, net of federal income tax effect, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationStateAndLocalIncomeTaxes_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">State income taxes, net of federal benefit</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationStateAndLocalIncomeTaxes_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, State and Local Income Taxes, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AmortizationOfFinancingCosts_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Amortization of debt issuance costs as interest expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AmortizationOfFinancingCosts_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Amortization of Debt Issuance Costs</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForThirtyTwoPercentThirtyPercentAndFortyTwoPercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Number Of Customers Accounted For Thirty Two Percent, Thirty Percent and Forty Two Percent Of Revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForThirtyTwoPercentThirtyPercentAndFortyTwoPercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Number of customers accounted for thirty two percent, thirty percent and forty two percent of revenue.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfCustomersAccountedForThirtyTwoPercentThirtyPercentAndFortyTwoPercentOfRevenue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of customers accounted for 35%, 32%, and 30% of net revenue</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncrementalRevolvingCommitmentsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Incremental Revolving Commitments [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncrementalRevolvingCommitmentsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Incremental Revolving Commitments.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IncrementalRevolvingCommitmentsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Incremental Revolving Commitments [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SixthAmendmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Sixth Amendment [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SixthAmendmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Sixth Amendment.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Finite-Lived Intangible Assets, Future Amortization Expense [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Estimated Amortization Expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_BorrowingsUnderNewRevolvingFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Borrowings under new revolving facility member.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_BorrowingsUnderNewRevolvingFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Borrowings under New Revolving Facility [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_BorrowingsUnderNewRevolvingFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Borrowings under New Revolving Facility [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CurrentInterestRateFairValueHedgeLiabilitiesAtFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivatives - interest rate hedge - current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CurrentInterestRateFairValueHedgeLiabilitiesAtFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Current interest rate fair value hedge liabilities at fair value.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CurrentInterestRateFairValueHedgeLiabilitiesAtFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Current Interest Rate Fair Value Hedge Liabilities At Fair Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityPublicFloat_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Public Float</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityPublicFloat_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Public Float</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ZeroCustomerMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Zero customer.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ZeroCustomerMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Zero Customer [member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ZeroCustomerMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Zero Customer [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Compensation Arrangement by Share-Based Payment Award, Fair Value Assumptions, Expected Volatility Rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Expected volatility</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PreferredStockSharesAuthorized_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Preferred Stock, Shares Authorized</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PreferredStockSharesAuthorized_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Preferred stock, shares authorized</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Assets by Major Class [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Finite-Lived Intangible Assets by Major Class</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanBusinessCombinationsAndAcquisitionsPlanAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Plan Assets, Business Combination</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanBusinessCombinationsAndAcquisitionsPlanAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Assets assumed through Atotech Acquisition</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfDebtTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Debt [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfDebtTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Outstanding Debt</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentAnnualPrincipalPayment_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Total principal prepayments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentAnnualPrincipalPayment_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument, Annual Principal Payment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ReductionToInterestExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Reduction to interest expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ReductionToInterestExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Reduction to interest expense.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ReductionToInterestExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Reduction to interest expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ReductionToInterestExpense_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Reduction to interest expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LineOfCreditFacilityAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Lender Name [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RepaymentsOfConvertibleDebt_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Purchase of capped calls related to Convertible Notes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RepaymentsOfConvertibleDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Repayments of Convertible Debt</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfConsecutiveTradingDays_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Number Of Consecutive Trading Days</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfConsecutiveTradingDays_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Number of consecutive trading days.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_NumberOfConsecutiveTradingDays_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Number of consecutive trading days</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevenueFromContractWithCustomerTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Revenue from Contract with Customer [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevenueFromContractWithCustomerTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Revenue from Contracts with Customers</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityRegistrantName_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Registrant Name</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityRegistrantName_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Registrant Name</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Unrecognized Tax Benefits, Income Tax Penalties and Interest Accrued</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accrued interest on unrecognized tax benefits</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Unrecognized Tax Benefits, Income Tax Penalties and Interest Accrued, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Disclosure [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentPeriodicPaymentPrincipal_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument, Periodic Payment, Principal</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentPeriodicPaymentPrincipal_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Scheduled quarterly payments amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityVoluntaryFilers_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Voluntary Filers</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityVoluntaryFilers_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Voluntary Filers</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CustomerConcentrationRiskMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Customer Concentration Risk [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CustomerConcentrationRiskMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Customer Concentration Risk [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Asset, Expected Amortization, Year Two</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2027</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PercentageOfPayrollDeductionToCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Percentage of payroll deduction to compensation.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PercentageOfPayrollDeductionToCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Percentage Of Payroll Deduction To Compensation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PercentageOfPayrollDeductionToCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Percentage of payroll deduction to compensation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherNonoperatingIncomeExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Nonoperating Income (Expense)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherNonoperatingIncomeExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Other Nonoperating Income (Expense), Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherNonoperatingIncomeExpense_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Other expense (income), net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accumulated Other Comprehensive Income (Loss) [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">State</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred State and Local Income Tax Expense (Benefit)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SubsequentEventsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Subsequent Events [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ValuationAndQualifyingAccountsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">SEC Schedule, 12-09, Valuation and Qualifying Accounts [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleFlag_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cybersecurity Risk Management Positions or Committees Responsible [Flag]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Asset, Expected Amortization, Year Three</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2028</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Expense (Benefit)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Provision for income taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Effective tax rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">(Benefit) provision for income taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueByMeasurementFrequencyAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Measurement Frequency [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueByMeasurementFrequencyAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Measurement Frequency</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockDividendsPerShareCashPaid_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Common Stock, Dividends, Per Share, Cash Paid</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockDividendsPerShareCashPaid_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cash dividends per common share</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Expected Future Benefit Payment, Year Five</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2030</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredCompensationPlanAssetsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Deferred Compensation Plan Assets Fair Value Disclosure</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredCompensationPlanAssetsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Compensation Plan Assets Fair Value Disclosure</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DeferredCompensationPlanAssetsFairValueDisclosure_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Deferred compensation plan assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockRepurchasedDuringPeriodValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Stock Repurchased During Period, Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_StockRepurchasedDuringPeriodValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Value of shares repurchased</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherCurrentLiabilitiesTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other Current Liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherCurrentLiabilitiesTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Current Liabilities Text Block</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherCurrentLiabilitiesTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Other current liabilities.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PercentageOfAggregateAmountOfAllCommitments_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Percentage of aggregate amount of all commitments.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PercentageOfAggregateAmountOfAllCommitments_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Percentage of Aggregate Amount of all Commitments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PercentageOfAggregateAmountOfAllCommitments_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Percentage of aggregate amount of all commitments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Compensation Arrangement by Share-Based Payment Award [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Share Based Compensation Arrangement By Share Based Payment Award [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityCommonStockSharesOutstanding_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Common Stock, Shares Outstanding</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityCommonStockSharesOutstanding_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Common Stock, Shares Outstanding</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskCreditRisk_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Concentration Risk, Credit Risk, Policy [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConcentrationRiskCreditRisk_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Concentrations of Credit Risk</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentConvertibleTermsOfConversionFeature_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument, Convertible, Terms of Conversion Feature</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentConvertibleTermsOfConversionFeature_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt instrument conversion terms</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CompensationRelatedCostsPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Compensation Related Costs, Policy [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CompensationRelatedCostsPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Employee Benefit Plans</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestExpenseDebtAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Interest Expense, Debt [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SegmentGrossProfitPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Segment gross profit percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SegmentGrossProfitPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Segment gross profit percentage.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SegmentGrossProfitPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Segment gross profit percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accumulated Other Comprehensive Income (Loss), Net of Tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Accumulated Other Comprehensive Income (Loss), Net of Tax, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accumulated other comprehensive loss</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Accumulated other comprehensive income (loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ConsolidationItemsAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Consolidation Items [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="srt_ConsolidationItemsAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Consolidation Items</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EmployeeStockPurchasePlanMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Employee stock purchase plan [member].</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EmployeeStockPurchasePlanMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Employee Stock Purchase Plan [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EmployeeStockPurchasePlanMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Employee Stock Purchase Plan [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Payments to Acquire Property, Plant, and Equipment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Capital expenditures</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Purchases of property, plant and equipment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Payments to Acquire Property, Plant, and Equipment, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Compensation Arrangement by Share-Based Payment Award, Equity Instruments Other than Options, Grants in Period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Granted</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Assets_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Assets_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Consolidated total assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_Assets_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Inventory, Policy [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InventoryPolicyTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Inventories</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Property, Plant and Equipment [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule Of Property Plant And Equipment [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceived_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Paid, State and Local, after Refund Received</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceived_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Income Tax Paid, State and Local, after Refund Received, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceived_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">State taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeStatementAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Statement [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RatioOfIndebtednessToNetCapital1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Ratio of Indebtedness to Net Capital</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RatioOfIndebtednessToNetCapital1_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Leverage ratio</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ValuationAllowancesAndReservesChargedToOtherAccounts_lbl" xlink:role="http://www.xbrl.org/2003/role/label">SEC Schedule, 12-09, Valuation Allowances and Reserves, Additions, Charge to Other Account</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ValuationAllowancesAndReservesChargedToOtherAccounts_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Additions Charged to Other Accounts</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherPercent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Cross-Border, Other, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherPercent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestRateCapMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Interest Rate Cap [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestRateCapMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Interest Rate Cap [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseInterestPaymentOnLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Operating cash flows used for finance leases</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseInterestPaymentOnLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finance Lease, Interest Payment on Liability</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Stock-Based Compensation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TermLoanMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Term loan.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TermLoanMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Term Loan [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TermLoanMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Term Loan [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Income Tax Expense (Benefit)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Deferred income taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Deferred taxes, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpensesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Selling, General and Administrative Expenses [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpensesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Selling, General and Administrative Expense [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_O2026Q1DividendsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">O 2026 Q1 Dividends [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_O2026Q1DividendsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">O 2026 Q1 Dividends.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ChangeInContractWithCustomerLiabilityAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Change in Contract with Customer, Liability [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationGiltiPercent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, GILTI, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationGiltiPercent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Global intangible low taxed income, net of foreign tax credits</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LeaseCostAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Lease, Cost [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LeaseCostAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Lease cost:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CumulativeInflationRates_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cumulative Inflation Rates</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CumulativeInflationRates_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Cumulative Inflation Rates</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareDilutedAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Earnings Per Share, Diluted [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareDilutedAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net income (loss) per common share:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareDiluted_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Earnings Per Share, Diluted</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareDiluted_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Diluted</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EarningsPerShareDiluted_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Earnings Per Share, Diluted, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Segment Reporting Information, by Segment [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Segment Assets by Reportable Segment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingSegmentsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Operating Segments [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingSegmentsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Operating Segments [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Asset, Expected Amortization, Year Five</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2030</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableTrade_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Increase (Decrease) in Accounts Payable, Trade</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableTrade_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Accounts payable</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_CityAreaCode_lbl" xlink:role="http://www.xbrl.org/2003/role/label">City Area Code</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_CityAreaCode_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">City Area Code</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LongTermDebtAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Long-Term Debt, Unclassified [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentIssuedPrincipal_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument, Issued, Principal</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentIssuedPrincipal_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Aggregate principal amount notes sold</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanCashMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Cash [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanCashMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cash [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationAuditSettlementRelatedToIntercompanyTransactions_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Audit settlement related to intercompany transactions, rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationAuditSettlementRelatedToIntercompanyTransactions_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation Audit Settlement Related To Intercompany Transactions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationAuditSettlementRelatedToIntercompanyTransactions_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Effective income tax rate reconciliation audit settlement related to intercompany transactions.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_AuditorName_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Auditor Name</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_AuditorName_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Auditor Name</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Defined Benefit Plans Disclosures [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Defined Benefit Plan Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MinimumPercentageOfRecognizedTaxBenefitsFromUncertainTaxPosition_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Minimum percentage of recognized tax benefits from uncertain tax position.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MinimumPercentageOfRecognizedTaxBenefitsFromUncertainTaxPosition_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Minimum Percentage Of Recognized Tax Benefits From Uncertain Tax Position</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_MinimumPercentageOfRecognizedTaxBenefitsFromUncertainTaxPosition_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Minimum percentage of recognition of tax benefits from uncertain tax positions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentFaceAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Aggregate principal amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentFaceAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Outstanding principal amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DebtInstrumentFaceAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt Carrying Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Borrowing capacity</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Line of Credit Facility, Maximum Borrowing Capacity</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Borrowing capacity in the form of letters of credit</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule Of Defined Benefit Plans Disclosures [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxAssetsTaxCreditCarryforwards_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Tax credit carryforwards</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxAssetsTaxCreditCarryforwards_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Tax Assets, Tax Credit Carryforwards</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxAssetsTaxCreditCarryforwards_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Deferred Tax Assets, Tax Credit Carryforwards, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_UsdTrancheAMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">USD Tranche A [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_UsdTrancheAMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">USD Tranche A [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_UsdTrancheAMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">USD tranche A member.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationTaxCreditsResearch_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">R&amp;D credits</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationTaxCreditsResearch_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Tax Credit, Research, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxReconciliationTaxCreditsResearch_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Research and development tax credits</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseImpairmentLosses_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Goodwill impairment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseImpairmentLosses_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, Nondeductible Expense, Impairment Losses, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestRateFloorMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Interest Rate Floor [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_InterestRateFloorMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Floor Rate [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConvertibleDebtNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Convertible Debt, Noncurrent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ConvertibleDebtNoncurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Convertible Notes, net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyLiabilityTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Product Warranty Liability [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyLiabilityTable_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Product Warranty Liability [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EarningsPerShareLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Earnings Per Share [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EarningsPerShareLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Earnings Per Share [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_EarningsPerShareLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Earnings Per Share [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Operating Lease, Weighted Average Remaining Lease Term</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Weighted-average remaining lease term-operating leases</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Weighted-average remaining lease term years-operating leases</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ChangesInProjectedBenefitObligationsFairValueOfPlanAssetsAndFundedStatusOfPlanTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Changes in Projected Benefit Obligations, Fair Value of Plan Assets, and Funded Status of Plan [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ChangesInProjectedBenefitObligationsFairValueOfPlanAssetsAndFundedStatusOfPlanTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Summary of Changes in Projected Benefit Obligations and Plan Assets, and Ending Balances of Defined Benefit Plans</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_InsuranceReimbursementReceived_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Insurance reimbursement received.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_InsuranceReimbursementReceived_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Insurance Reimbursement Received</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_InsuranceReimbursementReceived_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Insurance reimbursement received</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SegmentReportingInformationLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Segment Reporting Information [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_SegmentReportingInformationLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Segment Reporting Information [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LeaseCost_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total lease cost</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LeaseCost_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Lease, Cost</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SemiconductorProductsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Semiconductor products [Member].</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SemiconductorProductsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Semiconductor Products [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SemiconductorProductsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Semiconductor Products [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GuaranteesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Guarantees [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CostToPurchaseCappedCallTransactions_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cost to purchase capped call transactions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CostToPurchaseCappedCallTransactions_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cost To Purchase Capped Call Transactions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CostToPurchaseCappedCallTransactions_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Cost to purchase capped call transactions.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Property, Plant and Equipment, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Property, plant and equipment, net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Property, plant and equipment, net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForFinanceLeaseLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Right-of-Use Asset Obtained in Exchange for Finance Lease Liability</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForFinanceLeaseLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">ROU assets obtained in exchange for new lease liabilities, Finance leases</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForFinanceLeaseLiability_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Right of use assets obtained in exchange for new finance lease liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Goodwill and Intangible Assets, Goodwill, Policy [Policy Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Goodwill</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearThree_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Expected Future Benefit Payment, Year Three</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearThree_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2028</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TermLoansUnderTermLoanFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Term Loans Under Term Loan Facility [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TermLoansUnderTermLoanFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Term Loans Under Term Loan Facility [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TermLoansUnderTermLoanFacilityMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Term loans under term loan facility.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FederalStateAndForeignMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Federal state and foreign.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FederalStateAndForeignMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Federal State And Foreign [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FederalStateAndForeignMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">U.S. Federal, State and Foreign [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredForeignIncomeTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Foreign</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredForeignIncomeTaxExpenseBenefit_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Foreign Income Tax Expense (Benefit)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CashPaidDuringPeriodForInterestAndIncomeTaxAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Cash Paid During Period For Interest And Income Tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CashPaidDuringPeriodForInterestAndIncomeTaxAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash Paid During Period For Interest And Income Tax [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_CashPaidDuringPeriodForInterestAndIncomeTaxAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cash paid during the period for:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProceedsFromBankDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Proceeds from borrowing</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProceedsFromBankDebt_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Proceeds from Bank Debt</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash, Cash Equivalent, Restricted Cash, and Restricted Cash Equivalent, Including Discontinued Operation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_lbl" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel">Cash and cash equivalents at end of period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_lbl" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel">Cash and cash equivalents at beginning of period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Cash, Cash Equivalents, Restricted Cash, and Restricted Cash Equivalents, Including Disposal Group and Discontinued Operations, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AociIncludingPortionAttributableToNoncontrollingInterestPeriodIncreaseDecrease_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Changes in accumulated other comprehensive income (loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AociIncludingPortionAttributableToNoncontrollingInterestPeriodIncreaseDecrease_lbl" xlink:role="http://www.xbrl.org/2003/role/label">AOCI Including Portion Attributable to Noncontrolling Interest, Period Increase (Decrease)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AociIncludingPortionAttributableToNoncontrollingInterestPeriodIncreaseDecrease_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">AOCI Including Portion Attributable to Noncontrolling Interest, Period Increase (Decrease), Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingIncomeLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Operating Income (Loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingIncomeLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Income (loss) from operations</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillForeignCurrencyTranslationGainLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Foreign currency translation and measurement period adjustments, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillForeignCurrencyTranslationGainLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Foreign currency translation and measurement period adjustments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillForeignCurrencyTranslationGainLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Foreign currency translation adjustments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostDiscountRate_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Assumptions Used Calculating Net Periodic Benefit Cost, Discount Rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostDiscountRate_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Discount rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SemiconductorMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Semiconductor [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SemiconductorMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Semiconductor.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SemiconductorMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Semiconductor [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Schedule of Revenue from External Customers and Long-Lived Assets, by Geographical Areas [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Net Revenues and Long-Lived Assets by Geographic Regions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RetainedEarningsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Retained Earnings [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RetainedEarningsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Retained Earnings [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_UnallocatedCorporateExpenses_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Unallocated corporate expenses</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_UnallocatedCorporateExpenses_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Unallocated corporate expenses.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_UnallocatedCorporateExpenses_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Unallocated corporate expenses</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement, Noncash Expense</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Stock-based compensation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensation_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Share-Based Payment Arrangement, Noncash Expense, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SummaryOfWeightedAverageRemainingTermsForAllLeasesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Summary of weighted average remaining terms for all leases.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SummaryOfWeightedAverageRemainingTermsForAllLeasesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Summary Of Weighted Average Remaining Terms For All Leases [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_SummaryOfWeightedAverageRemainingTermsForAllLeasesTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Summary of Weighted Average Remaining Terms for All Leases</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Operating Lease, Weighted Average Discount Rate, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Weighted average discount rate</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Weighted-average discount rate-operating leases</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueInputsLevel1Member_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fair Value, Inputs, Level 1 [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FairValueInputsLevel1Member_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Quoted Prices in Active Markets for Identical Assets (Level 1) [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ClassOfStockLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Class of Stock [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash Provided by (Used in) Financing Activity, Including Discontinued Operation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Net cash used in financing activities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShortTermDebtLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Short-Term Debt [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShortTermDebtLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Short Term Debt [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodPercentageExercisePrice_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Percentage of the balance sheet date at which grantees can acquire the shares reserved for issuance on stock options awarded under the plan during the reporting period.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodPercentageExercisePrice_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share Based Compensation Arrangement By Share Based Payment Award Options Grants In Period Percentage Exercise Price</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodPercentageExercisePrice_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Percentage of exercise price fair value option grant in period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsShareFromAcquisitionWeightedAverageGrantDateFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Share based compensation arrangement by share based payment award equity instruments other than options share from acquisition weighted average grant date fair value.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsShareFromAcquisitionWeightedAverageGrantDateFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share Based Compensation Arrangement By Share Based Payment Award Equity Instruments Other Than Options Share From Acquisition Weighted Average Grant Date Fair Value</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsShareFromAcquisitionWeightedAverageGrantDateFairValue_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Weighted Average Grant Date Fair Value, Shares from Atotech Acquisition</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LeaseCostTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Lease, Cost [Table Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LeaseCostTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Schedule of Elements of Lease Payments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LeaseCostTableTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Schedule of Leases</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_AuditorLocation_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Auditor Location</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_AuditorLocation_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Auditor Location</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredIncomeTaxLiabilitiesNet_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Income Tax Liabilities, Net</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredIncomeTaxLiabilitiesNet_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Non-current deferred taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Effective Income Tax Rate Reconciliation, FDII, Amount</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">FDII</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Foreign-derived intangible income</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FurnitureAndFixturesOfficeEquipmentAndSoftwareMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Furniture and fixtures office equipment and software [Member].</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FurnitureAndFixturesOfficeEquipmentAndSoftwareMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Furniture And Fixtures Office Equipment And Software [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FurnitureAndFixturesOfficeEquipmentAndSoftwareMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Furniture and Fixtures, Office Equipment and Software [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_Years3And4Member_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Years 3 and 4 member.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_Years3And4Member_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Years 3 and 4 [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_Years3And4Member_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Years 3 and 4 [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeContractTypeDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Derivative Contract [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DerivativeContractTypeDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Derivative Contract</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsForeignCurrencyTranslationGainLoss_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Foreign Currency Translation and Measurement Period Adjustments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FiniteLivedIntangibleAssetsForeignCurrencyTranslationGainLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finite-Lived Intangible Assets, Foreign Currency Translation Gain (Loss)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_RestrictedStockUnitsGrantedToDirectorsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">RSU granted to directors.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_RestrictedStockUnitsGrantedToDirectorsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Restricted Stock Units Granted To Directors [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_RestrictedStockUnitsGrantedToDirectorsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">RSUs Granted To Directors [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxAuthorityDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Jurisdiction [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxAuthorityDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Income Tax Authority</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityInteractiveDataCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Interactive Data Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityInteractiveDataCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Interactive Data Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_Time-BasedRSUMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Time based RSU</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_Time-BasedRSUMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Time-based RSU [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_Time-BasedRSUMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Time-based RSUs [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanByPlanAssetCategoriesAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Plan Assets, Category [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanByPlanAssetCategoriesAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Defined Benefit Plan, Plan Assets, Category</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeStatementLocationDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Statement of Income Location, Balance [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeStatementLocationDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Income Statement Location</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cash Provided by (Used in) Operating Activity, Including Discontinued Operation [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cash flows from operating activities:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FurnitureAndFixturesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Furniture and Fixtures [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FurnitureAndFixturesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Furniture and Fixtures [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherReportingUnitsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other Reporting Units [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherReportingUnitsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Reporting Units [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OtherReportingUnitsMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Other reporting units.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Recent Accounting Pronouncements</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accounting Standards Update and Change in Accounting Principle [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceivedAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">State taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceivedAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Paid, State and Local, after Refund Received [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyAccrualPeriodIncreaseDecrease_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Standard and Extended Product Warranty Accrual, Period Increase (Decrease)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyAccrualPeriodIncreaseDecrease_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Standard and Extended Product Warranty Accrual, Period Increase (Decrease), Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProductWarrantyAccrualPeriodIncreaseDecrease_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Charges to warranty liability</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerAssetNet_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Contract with Customer, Asset, after Allowance for Credit Loss</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerAssetNet_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Contract assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ContractWithCustomerAssetNet_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Contract with Customer, Asset, after Allowance for Credit Loss, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TopTenCustomersMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Top ten customers.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TopTenCustomersMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Top Ten Customers [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_TopTenCustomersMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Top Ten Customers [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Components of Deferred Tax Liabilities [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Deferred tax liabilities:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockDividendsPerShareDeclared_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Common Stock, Dividends, Per Share, Declared</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_CommonStockDividendsPerShareDeclared_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Cash dividend, per common share</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_BorrowingsUnderEuroTrancheBMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Borrowings under Euro Tranche B member.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_BorrowingsUnderEuroTrancheBMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Borrowings under Euro Tranche B [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_BorrowingsUnderEuroTrancheBMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Borrowings under Euro Tranche B [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement, Expense, Tax Benefit</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Shortfall/(excess tax benefit) from stock-based compensation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityTaxIdentificationNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Tax Identification Number</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityTaxIdentificationNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Tax Identification Number</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevenuesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Revenues [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevenuesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net revenues:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LandMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Land [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LandMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Land [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShortTermBorrowingsAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Short-Term Debt [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DebtInstrumentPremiumPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Debt Instrument Premium Percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DebtInstrumentPremiumPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Debt instrument premium percentage.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DebtInstrumentPremiumPercentage_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Debt instrument premium percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PaymentsForCostOfCappedCallTransactions_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Payments for Cost Of Capped Call Transactions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PaymentsForCostOfCappedCallTransactions_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Payments for cost of capped call transactions.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_PaymentsForCostOfCappedCallTransactions_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Payments for cost of capped call transactions</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Fees And Expenses Related To Amendments To Term Loan</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Fees and expenses related to amendments to term loan.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Fees and expenses related to amendments to the Term Loan Facility</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OperatingLossCarryforwardsExpiringTwoThousandSeventeenMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Operating loss carryforwards expiring two thousand seventeen.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OperatingLossCarryforwardsExpiringTwoThousandSeventeenMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Operating Loss Carryforwards Expiring Two Thousand Seventeen [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_OperatingLossCarryforwardsExpiringTwoThousandSeventeenMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2017 [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Proceeds from Maturities, Prepayments and Calls of Debt Securities, Available-for-Sale</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Maturities of investments</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Organization, Consolidation and Presentation of Financial Statements Disclosure [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Basis of Presentation</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_WeightedAverageRevenueGrowthRateFutureUndiscountedCashFlows_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Weighted-average revenue growth rate future undiscounted cash flows</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_WeightedAverageRevenueGrowthRateFutureUndiscountedCashFlows_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Weighted Average Revenue Growth Rate Future Undiscounted Cash Flows</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_WeightedAverageRevenueGrowthRateFutureUndiscountedCashFlows_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Weighted average revenue growth rate future undiscounted cash flows.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxAuthorityNameDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Authority, Name [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_LocalPhoneNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Local Phone Number</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_LocalPhoneNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Local Phone Number</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accumulated Other Comprehensive Income (Loss) [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCost_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan, Net Periodic Benefit Cost (Credit)</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCost_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Net periodic benefit costs</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total other current liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Liabilities, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other current liabilities</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShortTermLeaseCost_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Short-Term Lease, Cost</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShortTermLeaseCost_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Short-term lease</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_CN_lbl" xlink:role="http://www.xbrl.org/2003/role/label">CHINA</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="country_CN_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">China [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Weighted Average Number of Shares Outstanding, Diluted [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Weighted average common shares outstanding:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Denominator:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_AuditorOpinionTextBlock_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Auditor Opinion [Text Block]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Finance Lease, Liability, to be Paid, Year Two</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2027</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsOfFinancingCosts_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel">Payments of deferred financing fees</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsOfFinancingCosts_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Payments of deferred financing fees</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsOfFinancingCosts_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Payments of deferred financing fees</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsOfFinancingCosts_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Payments of Financing Costs</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_PaymentsOfFinancingCosts_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Payments of Financing Costs, Total</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanAssetsForPlanBenefitsGuaranteedRateOfReturn_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Defined benefit plan assets for plan benefits guaranteed rate of return.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanAssetsForPlanBenefitsGuaranteedRateOfReturn_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Benefit Plan Assets For Plan Benefits Guaranteed Rate Of Return</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_DefinedBenefitPlanAssetsForPlanBenefitsGuaranteedRateOfReturn_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Defined benefit plan assets guaranteed rate of return</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NoncurrentAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Long-Lived Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NoncurrentAssets_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Long-lived assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_AccountingPoliciesAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Accounting Policies [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherCurrentLiabilitiesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Current Liabilities [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherCurrentLiabilitiesMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other Current Liabilities [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DisaggregationOfRevenueLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Disaggregation of Revenue [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DisaggregationOfRevenueLineItems_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Disaggregation of Revenue [Line Items]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherSundryLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Other</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OtherSundryLiabilitiesCurrent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Other Sundry Liabilities, Current</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Deferred Tax Liabilities, Undistributed Foreign Earnings</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedLabel">Foreign withholding taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Revenue from Contract with Customer, Excluding Assessed Tax</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Net revenues</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax_lbl" xlink:role="http://www.xbrl.org/2003/role/totalLabel">Total net revenues</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax_lbl" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Revenues by segment</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetIncomeLossAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Net Income (Loss) Attributable to Parent [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_NetIncomeLossAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Numerator:</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Lessee, Operating Lease, Liability, to be Paid, Year Four</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">2029</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Compensation Arrangement by Share-Based Payment Award, Number of Shares Available for Grant</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Shares available for future grant</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Share-Based Payment Arrangement, Nonvested Award, Cost Not yet Recognized, Period for Recognition</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Perfomance period</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OfficeEquipmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Office Equipment [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_OfficeEquipmentMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Office Equipment [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Defined Contribution Plan, Maximum Annual Contributions Per Employee, Percent</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Employee contribution to Company's profit sharing plan percentage</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxPaidFederalAfterRefundReceivedAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Federal taxes</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IncomeTaxPaidFederalAfterRefundReceivedAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Income Tax Paid, Federal, after Refund Received [Abstract]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ForeignSubpartFIncomeTaxedInUSNetOfForeignTaxCredits_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Foreign Subpart F Income Taxed in US Net of Foreign Tax Credits</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ForeignSubpartFIncomeTaxedInUSNetOfForeignTaxCredits_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Foreign subpart F income taxed in U.S., net of foreign tax credits.</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_ForeignSubpartFIncomeTaxedInUSNetOfForeignTaxCredits_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Foreign subpart F income taxed in the U.S., net of foreign tax credits</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IndefiniteMember_lbl" xlink:role="http://www.xbrl.org/2003/role/documentation">Indefinite [Member].</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IndefiniteMember_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Indefinite [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="mksi_IndefiniteMember_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Indefinite [Member]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_ScheduleOfStockByClassTable_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Stock, Class of Stock [Table]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Goodwill, Impaired, Accumulated Impairment Loss</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedPeriodEndLabel">Ending balance, Accumulated Impairment Loss</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_lbl" xlink:role="http://www.xbrl.org/2009/role/negatedPeriodStartLabel">Beginning balance, Accumulated Impairment Loss</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityEmergingGrowthCompany_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Emerging Growth Company</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityEmergingGrowthCompany_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Emerging Growth Company</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Indefinite-Lived Intangible Assets [Axis]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Indefinite-lived Intangible Assets</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TaxCreditCarryforwardNameDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Tax Credit Carryforward, Name [Domain]</link:label>
          <link:label xml:lang="en-US" xlink:type="resource" xlink:label="us-gaap_TaxCreditCarryforwardNameDomain_lbl" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Tax Credit Carryforward, Name</link:label>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EquitySecuritiesFvNiCurrentAndNoncurrent" xlink:to="us-gaap_EquitySecuritiesFvNiCurrentAndNoncurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfCashFlowSupplementalDisclosuresTableTextBlock" xlink:to="us-gaap_ScheduleOfCashFlowSupplementalDisclosuresTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BusinessCombinationAcquisitionRelatedCosts" xlink:to="us-gaap_BusinessCombinationAcquisitionRelatedCosts_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment" xlink:to="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RetirementPlanTypeAxis" xlink:to="us-gaap_RetirementPlanTypeAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SegmentDomain" xlink:to="us-gaap_SegmentDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RestructuringReserve" xlink:to="us-gaap_RestructuringReserve_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskByTypeAxis" xlink:to="us-gaap_ConcentrationRiskByTypeAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xlink:to="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiability" xlink:to="us-gaap_FinanceLeaseLiability_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityIncorporationStateCountryCode" xlink:to="dei_EntityIncorporationStateCountryCode_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PreferredStockSharesIssued" xlink:to="us-gaap_PreferredStockSharesIssued_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BalanceSheetLocationDomain" xlink:to="us-gaap_BalanceSheetLocationDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_BaseRateBorrowingsMember" xlink:to="mksi_BaseRateBorrowingsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanContributionsByEmployer" xlink:to="us-gaap_DefinedBenefitPlanContributionsByEmployer_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanBusinessCombinationsAndAcquisitionsBenefitObligation" xlink:to="us-gaap_DefinedBenefitPlanBusinessCombinationsAndAcquisitionsBenefitObligation_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashFlowNoncashInvestingAndFinancingActivitiesDisclosureAbstract" xlink:to="us-gaap_CashFlowNoncashInvestingAndFinancingActivitiesDisclosureAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_CurrentInterestRateFairValueHedgeAssetAtFairValue" xlink:to="mksi_CurrentInterestRateFairValueHedgeAssetAtFairValue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongTermDebtNoncurrent" xlink:to="us-gaap_LongTermDebtNoncurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DeferredTaxAssetsAccruedExpensesAndOtherReserves" xlink:to="mksi_DeferredTaxAssetsAccruedExpensesAndOtherReserves_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PlanNameAxis" xlink:to="us-gaap_PlanNameAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EquityAbstract" xlink:to="us-gaap_EquityAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityCurrentReportingStatus" xlink:to="dei_EntityCurrentReportingStatus_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DerivativeInstrumentsGainLossNotDesignatedAsHedgingInstrumentsLineItems" xlink:to="mksi_DerivativeInstrumentsGainLossNotDesignatedAsHedgingInstrumentsLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="country_JP" xlink:to="country_JP_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DividendsPayableAmountPerShare" xlink:to="us-gaap_DividendsPayableAmountPerShare_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillGross" xlink:to="us-gaap_GoodwillGross_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_USGovernmentAgenciesDebtSecuritiesMember" xlink:to="us-gaap_USGovernmentAgenciesDebtSecuritiesMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears" xlink:to="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueInputsLevel2Member" xlink:to="us-gaap_FairValueInputsLevel2Member_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsNet" xlink:to="us-gaap_DeferredTaxAssetsNet_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock" xlink:to="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashFlowHedgingMember" xlink:to="us-gaap_CashFlowHedgingMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockSharesAuthorized" xlink:to="us-gaap_CommonStockSharesAuthorized_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerShareBasicAbstract" xlink:to="us-gaap_EarningsPerShareBasicAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ProductOrServiceAxis" xlink:to="srt_ProductOrServiceAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_AmortizationOfInventoryStepUpToFairValue" xlink:to="mksi_AmortizationOfInventoryStepUpToFairValue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentFiscalPeriodFocus" xlink:to="dei_DocumentFiscalPeriodFocus_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostExpectedLongTermReturnOnAssets" xlink:to="us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostExpectedLongTermReturnOnAssets_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherNoncurrentLiabilitiesMember" xlink:to="us-gaap_OtherNoncurrentLiabilitiesMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentInterestRateStatedPercentage" xlink:to="us-gaap_DebtInstrumentInterestRateStatedPercentage_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_RevenueFromContractWithCustomerAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxCreditRelatedToWithholdingTaxes" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxCreditRelatedToWithholdingTaxes_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityShellCompany" xlink:to="dei_EntityShellCompany_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueRemainingPerformanceObligationOptionalExemptionRemainingDuration" xlink:to="us-gaap_RevenueRemainingPerformanceObligationOptionalExemptionRemainingDuration_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DividendsCommonStockCash" xlink:to="us-gaap_DividendsCommonStockCash_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:to="us-gaap_ValuationAllowancesAndReservesTypeAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConvertibleDebtMember" xlink:to="us-gaap_ConvertibleDebtMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ServiceMember" xlink:to="us-gaap_ServiceMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:to="us-gaap_CashAndCashEquivalentsAtCarryingValue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeited" xlink:to="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeited_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfMaturitiesOfLongTermDebtTableTextBlock" xlink:to="us-gaap_ScheduleOfMaturitiesOfLongTermDebtTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanBenefitObligation" xlink:to="us-gaap_DefinedBenefitPlanBenefitObligation_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NumberOfReportingUnits" xlink:to="us-gaap_NumberOfReportingUnits_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ElectronicsMember" xlink:to="mksi_ElectronicsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_SupplementalRetirementBenefitsCost" xlink:to="mksi_SupplementalRetirementBenefitsCost_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearTwo" xlink:to="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearTwo_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="cyd_CybersecurityRiskManagementStrategyAndGovernanceAbstract" xlink:to="cyd_CybersecurityRiskManagementStrategyAndGovernanceAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockSharesIssued" xlink:to="us-gaap_CommonStockSharesIssued_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleReportToBoardFlag" xlink:to="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleReportToBoardFlag_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" xlink:to="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfShortTermDebtTable" xlink:to="us-gaap_ScheduleOfShortTermDebtTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:to="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementTable" xlink:to="us-gaap_StatementTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" xlink:to="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InvestmentTaxCredit" xlink:to="us-gaap_InvestmentTaxCredit_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions" xlink:to="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" xlink:to="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_StockIncentivePlanTwoThousandTwentyTwoMember" xlink:to="mksi_StockIncentivePlanTwoThousandTwentyTwoMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLossCarryforwardsExpirationDate" xlink:to="us-gaap_OperatingLossCarryforwardsExpirationDate_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_FederalFundsRateMember" xlink:to="mksi_FederalFundsRateMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_PrepaymentPremiumPercentageOfAggregatePrincipalAmount" xlink:to="mksi_PrepaymentPremiumPercentageOfAggregatePrincipalAmount_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_O2025Q1DividendsMember" xlink:to="mksi_O2025Q1DividendsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossForeignCurrencyTranslationAdjustmentNetOfTax" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossForeignCurrencyTranslationAdjustmentNetOfTax_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_InitialCommitmentFeePercentage" xlink:to="mksi_InitialCommitmentFeePercentage_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StatementLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BusinessAcquisitionAcquireeDomain" xlink:to="us-gaap_BusinessAcquisitionAcquireeDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueFromContractWithCustomerPolicyTextBlock" xlink:to="us-gaap_RevenueFromContractWithCustomerPolicyTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherExpenseMember" xlink:to="us-gaap_OtherExpenseMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityFilerCategory" xlink:to="dei_EntityFilerCategory_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DebtInstrumentIssuedPrincipalOptionToPurchase" xlink:to="mksi_DebtInstrumentIssuedPrincipalOptionToPurchase_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ReclassificationFromAociCurrentPeriodNetOfTaxAttributableToParent" xlink:to="us-gaap_ReclassificationFromAociCurrentPeriodNetOfTaxAttributableToParent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LiabilitiesAndStockholdersEquity" xlink:to="us-gaap_LiabilitiesAndStockholdersEquity_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ForeignCurrencyContractAssetFairValueDisclosure" xlink:to="us-gaap_ForeignCurrencyContractAssetFairValueDisclosure_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationTaxContingencies" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationTaxContingencies_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearThree" xlink:to="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearThree_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RestructuringCostAndReserveAxis" xlink:to="us-gaap_RestructuringCostAndReserveAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:to="us-gaap_PropertyPlantAndEquipmentByTypeAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentFrequencyOfPeriodicPayment" xlink:to="us-gaap_DebtInstrumentFrequencyOfPeriodicPayment_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount" xlink:to="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DiscountRateFutureUndiscountedCashFlows" xlink:to="mksi_DiscountRateFutureUndiscountedCashFlows_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis" xlink:to="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="cyd_CybersecurityRiskThirdPartyOversightAndIdentificationProcessesFlag" xlink:to="cyd_CybersecurityRiskThirdPartyOversightAndIdentificationProcessesFlag_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfRestructuringAndRelatedCostsTextBlock" xlink:to="us-gaap_ScheduleOfRestructuringAndRelatedCostsTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromIssuanceOfDebt" xlink:to="us-gaap_ProceedsFromIssuanceOfDebt_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativeLineItems" xlink:to="us-gaap_DerivativeLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_EquipmentSolutionsBusinessMember" xlink:to="mksi_EquipmentSolutionsBusinessMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_FinanceLeaseCosts" xlink:to="mksi_FinanceLeaseCosts_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashAndCashEquivalentsFairValueDisclosure" xlink:to="us-gaap_CashAndCashEquivalentsFairValueDisclosure_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsValuationAllowance" xlink:to="us-gaap_DeferredTaxAssetsValuationAllowance_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IntangibleAssetsUsefulLifeFutureUndiscountedCashFlows" xlink:to="mksi_IntangibleAssetsUsefulLifeFutureUndiscountedCashFlows_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_SubsequentEventLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="cyd_CybersecurityRiskManagementThirdPartyEngagedFlag" xlink:to="cyd_CybersecurityRiskManagementThirdPartyEngagedFlag_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentsIncorporatedByReferenceTextBlock" xlink:to="dei_DocumentsIncorporatedByReferenceTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativeAssetNotionalAmount" xlink:to="us-gaap_DerivativeAssetNotionalAmount_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_Goodwill" xlink:to="us-gaap_Goodwill_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherNoncashIncomeExpense" xlink:to="us-gaap_OtherNoncashIncomeExpense_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:to="us-gaap_EffectiveIncomeTaxRateContinuingOperations_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxesPaid" xlink:to="us-gaap_IncomeTaxesPaid_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LineOfCreditFacilityIncreaseDecreaseForPeriodNet" xlink:to="us-gaap_LineOfCreditFacilityIncreaseDecreaseForPeriodNet_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxAuthorityAxis" xlink:to="us-gaap_IncomeTaxAuthorityAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InlandRevenueSingaporeIRASMember" xlink:to="us-gaap_InlandRevenueSingaporeIRASMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesNoncurrent" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesNoncurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_SegmentGeographicalDomain" xlink:to="srt_SegmentGeographicalDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_AmortizationPeriodOfLeaseholdImprovements" xlink:to="mksi_AmortizationPeriodOfLeaseholdImprovements_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_SeniorNotesDue2034Member" xlink:to="mksi_SeniorNotesDue2034Member_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ReconciliationOfOperatingProfitLossFromSegmentsToConsolidatedTextBlock" xlink:to="us-gaap_ReconciliationOfOperatingProfitLossFromSegmentsToConsolidatedTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock" xlink:to="srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SegmentExpenditureAdditionToLongLivedAssets" xlink:to="us-gaap_SegmentExpenditureAdditionToLongLivedAssets_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="exch_JPBX" xlink:to="exch_JPBX_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfInventoryCurrentTableTextBlock" xlink:to="us-gaap_ScheduleOfInventoryCurrentTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_MaterialsSolutionsDivisionMember" xlink:to="mksi_MaterialsSolutionsDivisionMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdditionalPaidInCapitalCommonStock" xlink:to="us-gaap_AdditionalPaidInCapitalCommonStock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_FirstLienNetLeverageRatioMember" xlink:to="mksi_FirstLienNetLeverageRatioMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanPlanAssetsBenefitsPaid" xlink:to="us-gaap_DefinedBenefitPlanPlanAssetsBenefitsPaid_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SignificantAccountingPoliciesTextBlock" xlink:to="us-gaap_SignificantAccountingPoliciesTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_CappedCallTransactionsMember" xlink:to="mksi_CappedCallTransactionsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfAccountsReceivable" xlink:to="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfAccountsReceivable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetUsefulLife" xlink:to="us-gaap_FiniteLivedIntangibleAssetUsefulLife_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_PhotonControlMember" xlink:to="mksi_PhotonControlMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_VestingDomain" xlink:to="us-gaap_VestingDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_RevenueRecognitionPaymentTerms" xlink:to="mksi_RevenueRecognitionPaymentTerms_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent" xlink:to="us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisaggregationOfRevenueTable" xlink:to="us-gaap_DisaggregationOfRevenueTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="cyd_CybersecurityRiskManagementStrategyAndGovernanceTable" xlink:to="cyd_CybersecurityRiskManagementStrategyAndGovernanceTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xlink:to="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetInvestmentHedgingMember" xlink:to="us-gaap_NetInvestmentHedgingMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense" xlink:to="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TrademarksAndTradeNamesMember" xlink:to="us-gaap_TrademarksAndTradeNamesMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardVestingPeriodDescription" xlink:to="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardVestingPeriodDescription_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerShareBasic" xlink:to="us-gaap_EarningsPerShareBasic_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisaggregationOfRevenueTableTextBlock" xlink:to="us-gaap_DisaggregationOfRevenueTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" xlink:to="mksi_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevolvingCreditFacilityMember" xlink:to="us-gaap_RevolvingCreditFacilityMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RetirementPlanTypeDomain" xlink:to="us-gaap_RetirementPlanTypeDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LiabilitiesCurrent" xlink:to="us-gaap_LiabilitiesCurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_OfferTerminateMember" xlink:to="mksi_OfferTerminateMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:to="us-gaap_IncreaseDecreaseInAccountsReceivable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_HedgingDesignationDomain" xlink:to="us-gaap_HedgingDesignationDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:to="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherAmount" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherAmount_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DividendsPayableDateOfRecordDayMonthAndYear" xlink:to="us-gaap_DividendsPayableDateOfRecordDayMonthAndYear_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxPaidFederalAfterRefundReceived" xlink:to="us-gaap_IncomeTaxPaidFederalAfterRefundReceived_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:to="us-gaap_InventoryFinishedGoodsNetOfReserves_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_GeneralMetalFinishingMember" xlink:to="mksi_GeneralMetalFinishingMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_EffectiveIncomeTaxRateReconciliationRealizedForeignExchangeGainLoss" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationRealizedForeignExchangeGainLoss_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NewRevolvingFacilityMember" xlink:to="mksi_NewRevolvingFacilityMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowancesAndReservesDeductions" xlink:to="us-gaap_ValuationAllowancesAndReservesDeductions_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NonCurrentAssetsFairValueDisclosure" xlink:to="mksi_NonCurrentAssetsFairValueDisclosure_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestExpenseDebtExcludingAmortization" xlink:to="us-gaap_InterestExpenseDebtExcludingAmortization_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostAbstract" xlink:to="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions" xlink:to="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis" xlink:to="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherLiabilitiesCurrentAbstract" xlink:to="us-gaap_OtherLiabilitiesCurrentAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_MaterialReconcilingItemsMember" xlink:to="us-gaap_MaterialReconcilingItemsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ConsolidationItemsDomain" xlink:to="srt_ConsolidationItemsDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ElectronicsAndPackagingMember" xlink:to="mksi_ElectronicsAndPackagingMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockholdersEquityAbstract" xlink:to="us-gaap_StockholdersEquityAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_TimeDepositsAndCertificatesOfDepositMember" xlink:to="mksi_TimeDepositsAndCertificatesOfDepositMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntitySmallBusiness" xlink:to="dei_EntitySmallBusiness_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfNotionalAmountsOfOutstandingDerivativePositionsTableTextBlock" xlink:to="us-gaap_ScheduleOfNotionalAmountsOfOutstandingDerivativePositionsTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FederalHomeLoanBanksAbstract" xlink:to="us-gaap_FederalHomeLoanBanksAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_HedgingDesignationAxis" xlink:to="us-gaap_HedgingDesignationAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_PensionAndDeferredCompensationPlanAssets" xlink:to="mksi_PensionAndDeferredCompensationPlanAssets_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_SeparatelyPricedContractsTerm" xlink:to="mksi_SeparatelyPricedContractsTerm_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_FederalInterestCarryForwards" xlink:to="mksi_FederalInterestCarryForwards_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RetainedEarningsAccumulatedDeficit" xlink:to="us-gaap_RetainedEarningsAccumulatedDeficit_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanFundedStatusOfPlan" xlink:to="us-gaap_DefinedBenefitPlanFundedStatusOfPlan_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DefinedBenefitPlanVestedBenefitObligation" xlink:to="mksi_DefinedBenefitPlanVestedBenefitObligation_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_StockIncentivePlanTwoThousandFourteenMember" xlink:to="mksi_StockIncentivePlanTwoThousandFourteenMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NatureOfOperations" xlink:to="us-gaap_NatureOfOperations_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_FeesAndExpensesRelatedToRepricingOfTermLoanFacility" xlink:to="mksi_FeesAndExpensesRelatedToRepricingOfTermLoanFacility_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityWellKnownSeasonedIssuer" xlink:to="dei_EntityWellKnownSeasonedIssuer_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SaleOfStockPricePerShare" xlink:to="us-gaap_SaleOfStockPricePerShare_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CurrentForeignTaxExpenseBenefit" xlink:to="us-gaap_CurrentForeignTaxExpenseBenefit_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock" xlink:to="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ReductionInInterestExpense" xlink:to="mksi_ReductionInInterestExpense_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_LeasesAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerLiability" xlink:to="us-gaap_ContractWithCustomerLiability_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NumberOfCustomersAccountedForTenPercentOfNetRevenue" xlink:to="mksi_NumberOfCustomersAccountedForTenPercentOfNetRevenue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization" xlink:to="us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AmendmentFlag" xlink:to="dei_AmendmentFlag_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfRevenue" xlink:to="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfRevenue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_MaturitiesOfLongTermDebtAbstract" xlink:to="us-gaap_MaturitiesOfLongTermDebtAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ProductsAndServicesDomain" xlink:to="srt_ProductsAndServicesDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_PhotonicsSolutionsDivisionMember" xlink:to="mksi_PhotonicsSolutionsDivisionMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NumberOfTradingDays" xlink:to="mksi_NumberOfTradingDays_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" xlink:to="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_EuroTrancheBMember" xlink:to="mksi_EuroTrancheBMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryDisclosureTextBlock" xlink:to="us-gaap_InventoryDisclosureTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerSharePolicyTextBlock" xlink:to="us-gaap_EarningsPerSharePolicyTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:to="us-gaap_LiabilitiesAndStockholdersEquityAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressPostalZipCode" xlink:to="dei_EntityAddressPostalZipCode_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivities_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DefinedBenefitPlanAmortizationOfActuarialGainLoss" xlink:to="mksi_DefinedBenefitPlanAmortizationOfActuarialGainLoss_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentRedemptionPricePercentage" xlink:to="us-gaap_DebtInstrumentRedemptionPricePercentage_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ReportingUnitDomain" xlink:to="us-gaap_ReportingUnitDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SegmentReportingCodmProfitLossMeasureHowUsedDescription" xlink:to="us-gaap_SegmentReportingCodmProfitLossMeasureHowUsedDescription_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockMember" xlink:to="us-gaap_CommonStockMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable" xlink:to="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:to="us-gaap_ProductWarrantyAccrualClassifiedCurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ImpairmentOfIntangibleAssetIndefiniteLivedExcludingGoodwillStatementOfIncomeOrComprehensiveIncomeExtensibleEnumeration" xlink:to="us-gaap_ImpairmentOfIntangibleAssetIndefiniteLivedExcludingGoodwillStatementOfIncomeOrComprehensiveIncomeExtensibleEnumeration_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxEffectsOtherJurisdictions" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxEffectsOtherJurisdictions_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="cyd_CybersecurityRiskRoleOfManagementTextBlock" xlink:to="cyd_CybersecurityRiskRoleOfManagementTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TaxCreditCarryforwardAmount" xlink:to="us-gaap_TaxCreditCarryforwardAmount_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInNextTwelveMonths" xlink:to="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInNextTwelveMonths_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_HedgingRelationshipDomain" xlink:to="us-gaap_HedgingRelationshipDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent" xlink:to="us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:to="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxPaidByIndividualJurisdictionLineItems" xlink:to="us-gaap_IncomeTaxPaidByIndividualJurisdictionLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ForeignExchangeOptionMember" xlink:to="us-gaap_ForeignExchangeOptionMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressAddressLine1" xlink:to="dei_EntityAddressAddressLine1_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredIncomeTaxLiabilities" xlink:to="us-gaap_DeferredIncomeTaxLiabilities_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_OtherInterestIncomeExpenseNet" xlink:to="mksi_OtherInterestIncomeExpenseNet_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:to="us-gaap_FairValueByFairValueHierarchyLevelAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_EarningsPerShareAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxPolicyTextBlock" xlink:to="us-gaap_IncomeTaxPolicyTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_MaximumRemainingMaturityOfForeignCurrencyDerivatives1" xlink:to="us-gaap_MaximumRemainingMaturityOfForeignCurrencyDerivatives1_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantFlag" xlink:to="cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantFlag_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SupplementalCashFlowInformationAbstract" xlink:to="us-gaap_SupplementalCashFlowInformationAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" xlink:to="us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock" xlink:to="us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ForeignMember" xlink:to="mksi_ForeignMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_UsdTrancheBMember" xlink:to="mksi_UsdTrancheBMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFour" xlink:to="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFour_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BalanceSheetLocationAxis" xlink:to="us-gaap_BalanceSheetLocationAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InvestmentTypeAxis" xlink:to="us-gaap_InvestmentTypeAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ExpenseOfRestructuringActivitiesAndOtherAbstract" xlink:to="mksi_ExpenseOfRestructuringActivitiesAndOtherAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseRightOfUseAsset" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" xlink:to="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PlanAssetCategoriesDomain" xlink:to="us-gaap_PlanAssetCategoriesDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsGross" xlink:to="us-gaap_DeferredTaxAssetsGross_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="cyd_CybersecurityRiskBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock" xlink:to="cyd_CybersecurityRiskBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_SupplementalRetirementBenefitsAccumulatedBenefitObligationNoncurrent" xlink:to="mksi_SupplementalRetirementBenefitsAccumulatedBenefitObligationNoncurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NumberOfSharesReturnedForEachShareOfCommonStock" xlink:to="mksi_NumberOfSharesReturnedForEachShareOfCommonStock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationBeatPercent" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationBeatPercent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt" xlink:to="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryDisclosureAbstract" xlink:to="us-gaap_InventoryDisclosureAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentRedemptionPeriodAxis" xlink:to="us-gaap_DebtInstrumentRedemptionPeriodAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentType" xlink:to="dei_DocumentType_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_EuroTrancheMember" xlink:to="mksi_EuroTrancheMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxesPaidNet" xlink:to="us-gaap_IncomeTaxesPaidNet_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GrossProfit" xlink:to="us-gaap_GrossProfit_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TypeOfArrangementAxis" xlink:to="us-gaap_TypeOfArrangementAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_CostOfRevenueAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ArrangementsAndNonarrangementTransactionsMember" xlink:to="us-gaap_ArrangementsAndNonarrangementTransactionsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityCentralIndexKey" xlink:to="dei_EntityCentralIndexKey_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:to="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_OtherCurrentAssetsFairValueDisclosure" xlink:to="mksi_OtherCurrentAssetsFairValueDisclosure_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="cyd_CybersecurityRiskProcessForInformingBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock" xlink:to="cyd_CybersecurityRiskProcessForInformingBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ForeignCurrencyTransactionGainLossRealized" xlink:to="us-gaap_ForeignCurrencyTransactionGainLossRealized_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TranslationAdjustmentForNetInvestmentHedgeNetOfTax" xlink:to="us-gaap_TranslationAdjustmentForNetInvestmentHedgeNetOfTax_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SubsequentEventTypeDomain" xlink:to="us-gaap_SubsequentEventTypeDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IntangibleAssetsNetIncludingGoodwill" xlink:to="us-gaap_IntangibleAssetsNetIncludingGoodwill_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:to="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockRepurchasedAndRetiredDuringPeriodShares" xlink:to="us-gaap_StockRepurchasedAndRetiredDuringPeriodShares_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_OriginalIssueDiscountPercentageOfPrincipalAmount" xlink:to="mksi_OriginalIssueDiscountPercentageOfPrincipalAmount_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdictions" xlink:to="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdictions_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TypeOfAdoptionMember" xlink:to="us-gaap_TypeOfAdoptionMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditAmortizationOfPriorServiceCostCreditStatementOfIncomeOrComprehensiveIncomeExtensibleList" xlink:to="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditAmortizationOfPriorServiceCostCreditStatementOfIncomeOrComprehensiveIncomeExtensibleList_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationAwardTrancheOneMember" xlink:to="us-gaap_ShareBasedCompensationAwardTrancheOneMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BaseRateMember" xlink:to="us-gaap_BaseRateMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_EstimatedAggregatePrincipalAmountPercentage" xlink:to="mksi_EstimatedAggregatePrincipalAmountPercentage_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AociDerivativeQualifyingAsHedgeExcludedComponentAfterTax" xlink:to="us-gaap_AociDerivativeQualifyingAsHedgeExcludedComponentAfterTax_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInOtherOperatingLiabilities" xlink:to="us-gaap_IncreaseDecreaseInOtherOperatingLiabilities_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredCompensationArrangementWithIndividualSharesAuthorizedForIssuance" xlink:to="us-gaap_DeferredCompensationArrangementWithIndividualSharesAuthorizedForIssuance_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanForeignCurrencyExchangeRateChangesBenefitObligation" xlink:to="us-gaap_DefinedBenefitPlanForeignCurrencyExchangeRateChangesBenefitObligation_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ForeignTaxJurisdictionOtherMember" xlink:to="us-gaap_ForeignTaxJurisdictionOtherMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue" xlink:to="us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_UnrecognizedTaxBenefitsIncreaseDecreaseResultingFromPriorPeriodTaxPositions" xlink:to="mksi_UnrecognizedTaxBenefitsIncreaseDecreaseResultingFromPriorPeriodTaxPositions_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentFinStmtErrorCorrectionFlag" xlink:to="dei_DocumentFinStmtErrorCorrectionFlag_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherRestructuringCosts" xlink:to="us-gaap_OtherRestructuringCosts_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtDisclosureAbstract" xlink:to="us-gaap_DebtDisclosureAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="country_DE" xlink:to="country_DE_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_RestrictedStockUnitsGrantedToEmployeesMember" xlink:to="mksi_RestrictedStockUnitsGrantedToEmployeesMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedTranslationAdjustmentMember" xlink:to="us-gaap_AccumulatedTranslationAdjustmentMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativeTable" xlink:to="us-gaap_DerivativeTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueMeasurementInputsDisclosureTextBlock" xlink:to="us-gaap_FairValueMeasurementInputsDisclosureTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativeNotionalAmount" xlink:to="us-gaap_DerivativeNotionalAmount_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccruedLiabilitiesCurrent" xlink:to="us-gaap_AccruedLiabilitiesCurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PaymentsForLegalSettlements" xlink:to="us-gaap_PaymentsForLegalSettlements_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CostOfSalesMember" xlink:to="us-gaap_CostOfSalesMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsLineItems" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="country_IL" xlink:to="country_IL_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CurrentFiscalYearEndDate" xlink:to="dei_CurrentFiscalYearEndDate_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanActualReturnOnPlanAssets" xlink:to="us-gaap_DefinedBenefitPlanActualReturnOnPlanAssets_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xlink:to="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DeferredTaxLiabilitiesLoanCosts" xlink:to="mksi_DeferredTaxLiabilitiesLoanCosts_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_AnnualStepDownMember" xlink:to="mksi_AnnualStepDownMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_MinimumPeriodOfCompanysResearchAndDevelopmentProjects" xlink:to="mksi_MinimumPeriodOfCompanysResearchAndDevelopmentProjects_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DeferredFinancingCostsInLongTermDebt" xlink:to="mksi_DeferredFinancingCostsInLongTermDebt_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_LoanVoluntaryPrepaymentAmount" xlink:to="mksi_LoanVoluntaryPrepaymentAmount_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ScheduleOfGoodwillAssociatedWithReportableSegmentsTableTextBlock" xlink:to="mksi_ScheduleOfGoodwillAssociatedWithReportableSegmentsTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdvertisingCostsPolicyTextBlock" xlink:to="us-gaap_AdvertisingCostsPolicyTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CustomerRelationshipsMember" xlink:to="us-gaap_CustomerRelationshipsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressStateOrProvince" xlink:to="dei_EntityAddressStateOrProvince_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_OtherCurrentLiabilitiesFairValueDisclosure" xlink:to="mksi_OtherCurrentLiabilitiesFairValueDisclosure_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GuaranteesAndProductWarrantiesAbstract" xlink:to="us-gaap_GuaranteesAndProductWarrantiesAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NonCurrentInterestRateFairValueHedgeAssetAtFairValue" xlink:to="mksi_NonCurrentInterestRateFairValueHedgeAssetAtFairValue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_TaxCreditCarryForwardExpirationYearEnd" xlink:to="mksi_TaxCreditCarryForwardExpirationYearEnd_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredFinanceCostsGross" xlink:to="us-gaap_DeferredFinanceCostsGross_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PreferredStockSharesOutstanding" xlink:to="us-gaap_PreferredStockSharesOutstanding_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="us-gaap_ComprehensiveIncomeNetOfTax_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_CappedCallTransactionReductionOrOffsetPerShare" xlink:to="mksi_CappedCallTransactionReductionOrOffsetPerShare_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ResearchAndDevelopmentExpensePolicy" xlink:to="us-gaap_ResearchAndDevelopmentExpensePolicy_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance" xlink:to="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" xlink:to="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfAssumptionsUsedTableTextBlock" xlink:to="us-gaap_ScheduleOfAssumptionsUsedTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_StatementGeographicalAxis" xlink:to="srt_StatementGeographicalAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_VacuumSolutionsDivisionMember" xlink:to="mksi_VacuumSolutionsDivisionMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_EffectiveIncomeTaxRateReconciliationIntercompanyRoyalty" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationIntercompanyRoyalty_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LineOfCreditFacilityLenderDomain" xlink:to="us-gaap_LineOfCreditFacilityLenderDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ScheduleOfCapitalExpenditureDepreciationAndAmortizationAndAssetsReportableSegmentsTableTextBlock" xlink:to="mksi_ScheduleOfCapitalExpenditureDepreciationAndAmortizationAndAssetsReportableSegmentsTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountsReceivableMember" xlink:to="us-gaap_AccountsReceivableMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareDiluted" xlink:to="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareDiluted_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NumberOfCustomersAccountedForGreaterThanOrEqualToTenPercentOfRevenue" xlink:to="mksi_NumberOfCustomersAccountedForGreaterThanOrEqualToTenPercentOfRevenue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes" xlink:to="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock" xlink:to="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityStatementOfFinancialPositionExtensibleList" xlink:to="us-gaap_FinanceLeaseLiabilityStatementOfFinancialPositionExtensibleList_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationNondeductibleExpenseOther" xlink:to="us-gaap_IncomeTaxReconciliationNondeductibleExpenseOther_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DebtInstrumentConversionRateShares" xlink:to="mksi_DebtInstrumentConversionRateShares_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ComprehensiveIncomePolicyPolicyTextBlock" xlink:to="us-gaap_ComprehensiveIncomePolicyPolicyTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xlink:to="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestAndOtherIncome" xlink:to="us-gaap_InterestAndOtherIncome_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_SignificantSupplyCommitmentTimePeriod" xlink:to="mksi_SignificantSupplyCommitmentTimePeriod_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_StateMember" xlink:to="mksi_StateMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_EffectiveIncomeTaxRateReconciliationChangeInIncomeTaxReserves" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationChangeInIncomeTaxReserves_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongTermDebtFairValue" xlink:to="us-gaap_LongTermDebtFairValue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SubsequentEventMember" xlink:to="us-gaap_SubsequentEventMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NumberOfFacilitiesYetToClose" xlink:to="mksi_NumberOfFacilitiesYetToClose_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_PatentsTrademarksTradeNamesAndOtherMember" xlink:to="mksi_PatentsTrademarksTradeNamesAndOtherMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentAbstract" xlink:to="us-gaap_PropertyPlantAndEquipmentAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherAssetsNoncurrent" xlink:to="us-gaap_OtherAssetsNoncurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_SegmentAssets" xlink:to="mksi_SegmentAssets_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" xlink:to="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NonCurrentLeaseLiability" xlink:to="mksi_NonCurrentLeaseLiability_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy" xlink:to="us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxPaidForeignAfterRefundReceived" xlink:to="us-gaap_IncomeTaxPaidForeignAfterRefundReceived_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoInterestExpense" xlink:to="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoInterestExpense_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestExpenseDebt" xlink:to="us-gaap_InterestExpenseDebt_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax" xlink:to="us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock" xlink:to="us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="srt_NameOfMajorCustomerDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ChangesInValueOfFinancialInstrumentsDesignatedAsCashFlowHedgesMember" xlink:to="mksi_ChangesInValueOfFinancialInstrumentsDesignatedAsCashFlowHedgesMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativeLiabilities" xlink:to="us-gaap_DerivativeLiabilities_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DeferredTaxAssetsCapitalizedResearchExpenditures" xlink:to="mksi_DeferredTaxAssetsCapitalizedResearchExpenditures_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillImpairmentLoss" xlink:to="us-gaap_GoodwillImpairmentLoss_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_CompletedTechnologyMember" xlink:to="mksi_CompletedTechnologyMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ContractWithCustomerAssumedDeferredRevenueAndCustomerAdvances" xlink:to="mksi_ContractWithCustomerAssumedDeferredRevenueAndCustomerAdvances_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_TermLoanFacilityMember" xlink:to="mksi_TermLoanFacilityMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PreferredStockValue" xlink:to="us-gaap_PreferredStockValue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SellingGeneralAndAdministrativeExpense" xlink:to="us-gaap_SellingGeneralAndAdministrativeExpense_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentMaturityDate" xlink:to="us-gaap_DebtInstrumentMaturityDate_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NumberOfCustomersAccountedForTenPercentOrMoreOfNetRevenue" xlink:to="mksi_NumberOfCustomersAccountedForTenPercentOrMoreOfNetRevenue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanEquitySecuritiesMember" xlink:to="us-gaap_DefinedBenefitPlanEquitySecuritiesMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashFlowHedgeGainLossToBeReclassifiedWithinTwelveMonths" xlink:to="us-gaap_CashFlowHedgeGainLossToBeReclassifiedWithinTwelveMonths_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DebtInstrumentConvertibleConversionPricePercentage" xlink:to="mksi_DebtInstrumentConvertibleConversionPricePercentage_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_MinimumMember" xlink:to="srt_MinimumMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AssetsCurrentAbstract" xlink:to="us-gaap_AssetsCurrentAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AmortizationOfIntangibleAssets" xlink:to="us-gaap_AmortizationOfIntangibleAssets_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueInputsLevel3Member" xlink:to="us-gaap_FairValueInputsLevel3Member_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts" xlink:to="mksi_BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NumberOfCustomersAccountedForElevenPercentOfNetRevenue" xlink:to="mksi_NumberOfCustomersAccountedForElevenPercentOfNetRevenue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanWeightedAverageAssumptionsUsedInCalculatingNetPeriodicBenefitCostAbstract" xlink:to="us-gaap_DefinedBenefitPlanWeightedAverageAssumptionsUsedInCalculatingNetPeriodicBenefitCostAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IntangibleAssetsFairValue" xlink:to="mksi_IntangibleAssetsFairValue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="us-gaap_SegmentReportingAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock" xlink:to="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BusinessCombinationsPolicy" xlink:to="us-gaap_BusinessCombinationsPolicy_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedGainLossNetCashFlowHedgeParentMember" xlink:to="us-gaap_AccumulatedGainLossNetCashFlowHedgeParentMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LiabilitiesCurrentAbstract" xlink:to="us-gaap_LiabilitiesCurrentAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductMember" xlink:to="us-gaap_ProductMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockRepurchasedAndRetiredDuringPeriodValue" xlink:to="us-gaap_StockRepurchasedAndRetiredDuringPeriodValue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherCurrentLiabilitiesTableTextBlock" xlink:to="us-gaap_OtherCurrentLiabilitiesTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_WeightedAverageNumberOfDilutedShares" xlink:to="mksi_WeightedAverageNumberOfDilutedShares_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLossCarryforwards" xlink:to="us-gaap_OperatingLossCarryforwards_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountsReceivableNetCurrent" xlink:to="us-gaap_AccountsReceivableNetCurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredFinanceCostsNoncurrentGross" xlink:to="us-gaap_DeferredFinanceCostsNoncurrentGross_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxPaidByIndividualJurisdictionAbstract" xlink:to="us-gaap_IncomeTaxPaidByIndividualJurisdictionAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ReportingUnitAxis" xlink:to="us-gaap_ReportingUnitAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommitmentsAndContingencies" xlink:to="us-gaap_CommitmentsAndContingencies_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_OtherCountriesMember" xlink:to="mksi_OtherCountriesMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeLeasesPolicyTextBlock" xlink:to="us-gaap_LesseeLeasesPolicyTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowancesAndReservesDomain" xlink:to="us-gaap_ValuationAllowancesAndReservesDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanServiceCost" xlink:to="us-gaap_DefinedBenefitPlanServiceCost_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation" xlink:to="us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiability" xlink:to="us-gaap_OperatingLeaseLiability_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryWorkInProcessNetOfReserves" xlink:to="us-gaap_InventoryWorkInProcessNetOfReserves_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AuditorFirmId" xlink:to="dei_AuditorFirmId_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IncomeTaxReconciliationForeignTaxCreditRelatedToWithholdingTaxes" xlink:to="mksi_IncomeTaxReconciliationForeignTaxCreditRelatedToWithholdingTaxes_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1" xlink:to="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ScenarioForecastMember" xlink:to="srt_ScenarioForecastMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShortTermBorrowings" xlink:to="us-gaap_ShortTermBorrowings_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IncomeTaxReconciliationRealizedForeignExchangeGainLoss" xlink:to="mksi_IncomeTaxReconciliationRealizedForeignExchangeGainLoss_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockNoParValue" xlink:to="us-gaap_CommonStockNoParValue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SegmentReportingAssetReconcilingItemLineItems" xlink:to="us-gaap_SegmentReportingAssetReconcilingItemLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_EuriborRateFloorMember" xlink:to="mksi_EuriborRateFloorMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IncreaseDecreaseCurrentAndNonCurrentAccruedCompensation" xlink:to="mksi_IncreaseDecreaseCurrentAndNonCurrentAccruedCompensation_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_EffectiveIncomeTaxRateReconciliationExecutiveCompensation" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationExecutiveCompensation_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:to="us-gaap_ConcentrationRiskByBenchmarkAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyLiabilityLineItems" xlink:to="us-gaap_ProductWarrantyLiabilityLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredFinanceCostsNoncurrentNet" xlink:to="us-gaap_DeferredFinanceCostsNoncurrentNet_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearTwo" xlink:to="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearTwo_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ExpenseOfRestructuringActivitiesAndOtherTextBlock" xlink:to="mksi_ExpenseOfRestructuringActivitiesAndOtherTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendPerShare" xlink:to="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendPerShare_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent" xlink:to="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInDeferredTaxAssetsValuationAllowance" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInDeferredTaxAssetsValuationAllowance_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xlink:to="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DeferredTaxLiabilitiesDepreciationAndAmortization" xlink:to="mksi_DeferredTaxLiabilitiesDepreciationAndAmortization_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BankTimeDepositsMember" xlink:to="us-gaap_BankTimeDepositsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProfitLoss" xlink:to="us-gaap_ProfitLoss_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdiction" xlink:to="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdiction_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTextBlock" xlink:to="us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleTextBlock" xlink:to="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DefinedBenefitPlanAssetCategoriesOtherAssetsMember" xlink:to="mksi_DefinedBenefitPlanAssetCategoriesOtherAssetsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NumberOfCustomersAccountedForFortySevenPercentFortyFourPercentAndThirtyThreePercentOfRevenue" xlink:to="mksi_NumberOfCustomersAccountedForFortySevenPercentFortyFourPercentAndThirtyThreePercentOfRevenue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_CorporateReconcilingItemsAndEliminationsMember" xlink:to="mksi_CorporateReconcilingItemsAndEliminationsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_StatementScenarioAxis" xlink:to="srt_StatementScenarioAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IsraeliPensionAssetsMember" xlink:to="mksi_IsraeliPensionAssetsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanChangeInFairValueOfPlanAssetsRollForward" xlink:to="us-gaap_DefinedBenefitPlanChangeInFairValueOfPlanAssetsRollForward_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationOtherReconcilingItems" xlink:to="us-gaap_IncomeTaxReconciliationOtherReconcilingItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IncomeTaxReconciliationSubpartFNetOfForeignTaxCredits" xlink:to="mksi_IncomeTaxReconciliationSubpartFNetOfForeignTaxCredits_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xlink:to="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementBusinessSegmentsAxis" xlink:to="us-gaap_StatementBusinessSegmentsAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ScheduleOfFutureLeasePaymentsUnderNonCancelableLeasesTableTextBlock" xlink:to="mksi_ScheduleOfFutureLeasePaymentsUnderNonCancelableLeasesTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ScheduleOfEarningsPerShareTable" xlink:to="mksi_ScheduleOfEarningsPerShareTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualNoncurrent" xlink:to="us-gaap_ProductWarrantyAccrualNoncurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="cyd_CybersecurityRiskProcessForInformingManagementOrCommitteesResponsibleTextBlock" xlink:to="cyd_CybersecurityRiskProcessForInformingManagementOrCommitteesResponsibleTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfShortTermDebtTextBlock" xlink:to="us-gaap_ScheduleOfShortTermDebtTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SubsequentEventsTextBlock" xlink:to="us-gaap_SubsequentEventsTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryRawMaterialsNetOfReserves" xlink:to="us-gaap_InventoryRawMaterialsNetOfReserves_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_MutualFundsAndExchangeTradedFundsMember" xlink:to="mksi_MutualFundsAndExchangeTradedFundsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCredits" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCredits_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongTermDebt" xlink:to="us-gaap_LongTermDebt_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetInterestCarryforward" xlink:to="us-gaap_DeferredTaxAssetInterestCarryforward_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" xlink:to="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_TotalIncomeTaxPaymentsNetOfRefunds" xlink:to="mksi_TotalIncomeTaxPaymentsNetOfRefunds_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentInterestRateTerms" xlink:to="us-gaap_DebtInstrumentInterestRateTerms_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_IncomeTaxDisclosureLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DeferredTaxLiabilityRightOfUseAsset" xlink:to="mksi_DeferredTaxLiabilityRightOfUseAsset_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_VariableRateDomain" xlink:to="us-gaap_VariableRateDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanActuarialGainLoss" xlink:to="us-gaap_DefinedBenefitPlanActuarialGainLoss_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" xlink:to="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockholdersEquity" xlink:to="us-gaap_StockholdersEquity_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PreferredStockParOrStatedValuePerShare" xlink:to="us-gaap_PreferredStockParOrStatedValuePerShare_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DeferredTaxAssetsLeaseLiability" xlink:to="mksi_DeferredTaxAssetsLeaseLiability_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfOtherDerivativesNotDesignatedAsHedgingInstrumentsStatementsOfFinancialPerformanceAndFinancialPositionLocationTableTextBlock" xlink:to="us-gaap_ScheduleOfOtherDerivativesNotDesignatedAsHedgingInstrumentsStatementsOfFinancialPerformanceAndFinancialPositionLocationTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock" xlink:to="us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementOfStockholdersEquityAbstract" xlink:to="us-gaap_StatementOfStockholdersEquityAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_AtotechMember" xlink:to="mksi_AtotechMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TypeOfRestructuringDomain" xlink:to="us-gaap_TypeOfRestructuringDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_RestructuringExpense" xlink:to="mksi_RestructuringExpense_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_WarrantyPeriod" xlink:to="mksi_WarrantyPeriod_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_EffectiveIncomeTaxRateReconciliationBaseErosionWaiverOfDeductions" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationBaseErosionWaiverOfDeductions_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_TermSofrRatePlusApplicableCreditSpreadAdjustmentMember" xlink:to="mksi_TermSofrRatePlusApplicableCreditSpreadAdjustmentMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFive" xlink:to="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFive_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="us-gaap_DefinedBenefitPlanDisclosureLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LeaseholdImprovementsMember" xlink:to="us-gaap_LeaseholdImprovementsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OciBeforeReclassificationsNetOfTaxAttributableToParent" xlink:to="us-gaap_OciBeforeReclassificationsNetOfTaxAttributableToParent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DividendsPayableDateDeclaredDayMonthAndYear" xlink:to="us-gaap_DividendsPayableDateDeclaredDayMonthAndYear_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NewTermLoanFacilityMember" xlink:to="mksi_NewTermLoanFacilityMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="country_NL" xlink:to="country_NL_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ForeignInterestCarryforwards" xlink:to="mksi_ForeignInterestCarryforwards_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="country_US" xlink:to="country_US_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember" xlink:to="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoCostOfRevenues" xlink:to="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoCostOfRevenues_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="us-gaap_DebtInstrumentNameDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherAssetsCurrent" xlink:to="us-gaap_OtherAssetsCurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFour" xlink:to="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFour_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BusinessAcquisitionEffectiveDateOfAcquisition1" xlink:to="us-gaap_BusinessAcquisitionEffectiveDateOfAcquisition1_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ScheduleOfRestructuringAndOtherCostTable" xlink:to="mksi_ScheduleOfRestructuringAndOtherCostTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxPaidForeignAfterRefundReceivedAbstract" xlink:to="us-gaap_IncomeTaxPaidForeignAfterRefundReceivedAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock" xlink:to="us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract" xlink:to="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentPeriodicPayment" xlink:to="us-gaap_DebtInstrumentPeriodicPayment_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SegmentReportingCodmIndividualTitleAndPositionOrGroupOrCommitteeNameExtensibleEnumeration" xlink:to="us-gaap_SegmentReportingCodmIndividualTitleAndPositionOrGroupOrCommitteeNameExtensibleEnumeration_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InProcessResearchAndDevelopmentMember" xlink:to="us-gaap_InProcessResearchAndDevelopmentMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesNetOfForeignTaxCredits" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesNetOfForeignTaxCredits_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PlanNameDomain" xlink:to="us-gaap_PlanNameDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShortTermDebtRefinancedAmount" xlink:to="us-gaap_ShortTermDebtRefinancedAmount_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock" xlink:to="us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInOtherOperatingAssets" xlink:to="us-gaap_IncreaseDecreaseInOtherOperatingAssets_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestExpense" xlink:to="us-gaap_InterestExpense_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_AdjustedEBITDAMember" xlink:to="mksi_AdjustedEBITDAMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BuildingMember" xlink:to="us-gaap_BuildingMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_TermLoansUnderNewTermLoanFacilityMember" xlink:to="mksi_TermLoansUnderNewTermLoanFacilityMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CreditFacilityAxis" xlink:to="us-gaap_CreditFacilityAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantTextBlock" xlink:to="cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_SegmentGrossProfitLoss" xlink:to="mksi_SegmentGrossProfitLoss_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CurrentStateAndLocalTaxExpenseBenefit" xlink:to="us-gaap_CurrentStateAndLocalTaxExpenseBenefit_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfExpectedBenefitPaymentsTableTextBlock" xlink:to="us-gaap_ScheduleOfExpectedBenefitPaymentsTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="cyd_CybersecurityRiskManagementExpertiseOfManagementResponsibleTextBlock" xlink:to="cyd_CybersecurityRiskManagementExpertiseOfManagementResponsibleTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IncomeTaxReconciliationIntercompanyRoyalty" xlink:to="mksi_IncomeTaxReconciliationIntercompanyRoyalty_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable" xlink:to="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_OriginalIssueDiscountMember" xlink:to="mksi_OriginalIssueDiscountMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesAmount" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesAmount_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ScheduledQuarterlyPaymentsPercentageOfOriginalPrincipalAmount" xlink:to="mksi_ScheduledQuarterlyPaymentsPercentageOfOriginalPrincipalAmount_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ProceedsFromPaymentsForEmployeeStockAwards" xlink:to="mksi_ProceedsFromPaymentsForEmployeeStockAwards_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_MaximumPercentageOfPayrollForPurchaseOfStock" xlink:to="mksi_MaximumPercentageOfPayrollForPurchaseOfStock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_MinimumAgeLimitForSpecifiedAdditionalAmount" xlink:to="mksi_MinimumAgeLimitForSpecifiedAdditionalAmount_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_USFederalMember" xlink:to="mksi_USFederalMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationOtherAdjustments" xlink:to="us-gaap_IncomeTaxReconciliationOtherAdjustments_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_AMICIncreases" xlink:to="mksi_AMICIncreases_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentPolicyTextBlock" xlink:to="us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NumberOfCustomersAccountedForFifteenPercentOfRevenue" xlink:to="mksi_NumberOfCustomersAccountedForFifteenPercentOfRevenue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_GovernmentIncentivesPolicyTextBlock" xlink:to="mksi_GovernmentIncentivesPolicyTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IncrementalUsdTrancheBMember" xlink:to="mksi_IncrementalUsdTrancheBMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressCityOrTown" xlink:to="dei_EntityAddressCityOrTown_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_PriorTermLoanFacilityMember" xlink:to="mksi_PriorTermLoanFacilityMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="mksi_GoodwillAndIntangibleAssetsLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockRepurchasedDuringPeriodShares" xlink:to="us-gaap_StockRepurchasedDuringPeriodShares_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowancesAndReservesReservesOfBusinessesAcquired" xlink:to="us-gaap_ValuationAllowancesAndReservesReservesOfBusinessesAcquired_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NumberOfReportableSegments" xlink:to="us-gaap_NumberOfReportableSegments_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_SecurityExchangeName" xlink:to="dei_SecurityExchangeName_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NumberOfInterestRateDerivativesHeld" xlink:to="us-gaap_NumberOfInterestRateDerivativesHeld_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CreditFacilityDomain" xlink:to="us-gaap_CreditFacilityDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_EuropeMember" xlink:to="srt_EuropeMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IndefiniteLivedIntangibleAssetsExcludingGoodwill" xlink:to="us-gaap_IndefiniteLivedIntangibleAssetsExcludingGoodwill_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BusinessAcquisitionDateOfAcquisitionAgreement1" xlink:to="us-gaap_BusinessAcquisitionDateOfAcquisitionAgreement1_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentCarryingAmount" xlink:to="us-gaap_DebtInstrumentCarryingAmount_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationOtherAdjustments" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationOtherAdjustments_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentGross" xlink:to="us-gaap_PropertyPlantAndEquipmentGross_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:to="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DebtIssuanceCostsAmortizationPeriod" xlink:to="mksi_DebtIssuanceCostsAmortizationPeriod_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtWeightedAverageInterestRate" xlink:to="us-gaap_DebtWeightedAverageInterestRate_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditInterestCostStatementOfIncomeOrComprehensiveIncomeExtensibleList" xlink:to="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditInterestCostStatementOfIncomeOrComprehensiveIncomeExtensibleList_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskTypeDomain" xlink:to="us-gaap_ConcentrationRiskTypeDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CompensationRelatedCostsAbstract" xlink:to="us-gaap_CompensationRelatedCostsAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfCashFlowHedgesIncludedInAccumulatedOtherComprehensiveIncomeLossTableTextBlock" xlink:to="us-gaap_ScheduleOfCashFlowHedgesIncludedInAccumulatedOtherComprehensiveIncomeLossTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_MeasurementInputTypeDomain" xlink:to="us-gaap_MeasurementInputTypeDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AntidilutiveSecuritiesNameDomain" xlink:to="us-gaap_AntidilutiveSecuritiesNameDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IncrementalTrancheBLoansFourthAmendmentMember" xlink:to="mksi_IncrementalTrancheBLoansFourthAmendmentMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationForeignIncomeTaxRateDifferential" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationForeignIncomeTaxRateDifferential_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockholdersEquityNoteAbstract" xlink:to="us-gaap_StockholdersEquityNoteAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryNet" xlink:to="us-gaap_InventoryNet_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestPaidNet" xlink:to="us-gaap_InterestPaidNet_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable" xlink:to="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_RangeMember" xlink:to="srt_RangeMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AssetsCurrent" xlink:to="us-gaap_AssetsCurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AllocatedShareBasedCompensationExpense" xlink:to="us-gaap_AllocatedShareBasedCompensationExpense_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentPeriodEndDate" xlink:to="dei_DocumentPeriodEndDate_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtSecuritiesAvailableForSaleAndHeldToMaturityAmortizedCostAfterAllowanceForCreditLoss" xlink:to="us-gaap_DebtSecuritiesAvailableForSaleAndHeldToMaturityAmortizedCostAfterAllowanceForCreditLoss_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:to="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_IcfrAuditorAttestationFlag" xlink:to="dei_IcfrAuditorAttestationFlag_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ImpairmentOfIntangibleAssetsIndefinitelivedExcludingGoodwill" xlink:to="us-gaap_ImpairmentOfIntangibleAssetsIndefinitelivedExcludingGoodwill_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanBenefitObligationBenefitsPaid" xlink:to="us-gaap_DefinedBenefitPlanBenefitObligationBenefitsPaid_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_AccountsReceivableAllowancesPolicyTextBlock" xlink:to="mksi_AccountsReceivableAllowancesPolicyTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GainLossOnSaleOfPropertyPlantEquipment" xlink:to="us-gaap_GainLossOnSaleOfPropertyPlantEquipment_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ReportingUnitPercentageOfFairValueInExcessOfCarryingAmount" xlink:to="us-gaap_ReportingUnitPercentageOfFairValueInExcessOfCarryingAmount_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xlink:to="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IncrementalTrancheBLoansSecondAmendmentMember" xlink:to="mksi_IncrementalTrancheBLoansSecondAmendmentMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_StatementOfFinancialPositionAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RestrictedStockUnitsRSUMember" xlink:to="us-gaap_RestrictedStockUnitsRSUMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_VestingAxis" xlink:to="us-gaap_VestingAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IndentureAndTheNotesMember" xlink:to="mksi_IndentureAndTheNotesMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_OtherComprehensiveIncomeLossNetInvestmentHedgeGainLossNetOfTax" xlink:to="mksi_OtherComprehensiveIncomeLossNetInvestmentHedgeGainLossNetOfTax_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_GroupInsuranceContractsMember" xlink:to="mksi_GroupInsuranceContractsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxLiabilities" xlink:to="us-gaap_DeferredTaxLiabilities_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_Year5Member" xlink:to="mksi_Year5Member_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CompensationAndEmployeeBenefitPlansTextBlock" xlink:to="us-gaap_CompensationAndEmployeeBenefitPlansTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefit" xlink:to="us-gaap_CurrentIncomeTaxExpenseBenefit_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IncomeTaxesDisclosureAbstract" xlink:to="mksi_IncomeTaxesDisclosureAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="cyd_CybersecurityRiskManagementStrategyAndGovernanceLineItems" xlink:to="cyd_CybersecurityRiskManagementStrategyAndGovernanceLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:to="srt_ValuationAndQualifyingAccountsDisclosureLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NondesignatedMember" xlink:to="us-gaap_NondesignatedMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInEnactedTaxRate" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInEnactedTaxRate_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IncrementalBorrowings" xlink:to="mksi_IncrementalBorrowings_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_Liabilities" xlink:to="us-gaap_Liabilities_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_OtherNonCurrentAssetsFairValueDisclosure" xlink:to="mksi_OtherNonCurrentAssetsFairValueDisclosure_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="country_KR" xlink:to="country_KR_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential" xlink:to="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativeLiabilityStatementOfFinancialPositionExtensibleEnumeration" xlink:to="us-gaap_DerivativeLiabilityStatementOfFinancialPositionExtensibleEnumeration_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanExpectedReturnOnPlanAssets" xlink:to="us-gaap_DefinedBenefitPlanExpectedReturnOnPlanAssets_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativeInstrumentsGainLossLineItems" xlink:to="us-gaap_DerivativeInstrumentsGainLossLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ForeignExchangeForwardMember" xlink:to="us-gaap_ForeignExchangeForwardMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_VariableRateAxis" xlink:to="us-gaap_VariableRateAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowancesAndReservesBalance" xlink:to="us-gaap_ValuationAllowancesAndReservesBalance_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsGross" xlink:to="us-gaap_FiniteLivedIntangibleAssetsGross_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_MaximumPeriodOfCompanysResearchAndDevelopmentProjects" xlink:to="mksi_MaximumPeriodOfCompanysResearchAndDevelopmentProjects_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:to="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityFileNumber" xlink:to="dei_EntityFileNumber_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ChangeInContractWithCustomerLiabilityLineItems" xlink:to="mksi_ChangeInContractWithCustomerLiabilityLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PaymentsOfDividendsCommonStock" xlink:to="us-gaap_PaymentsOfDividendsCommonStock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationOtherReconcilingItemsPercent" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationOtherReconcilingItemsPercent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_BalanceSheetHedgesMember" xlink:to="mksi_BalanceSheetHedgesMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsSharesFromAcquisition" xlink:to="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsSharesFromAcquisition_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CoverAbstract" xlink:to="dei_CoverAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_LineOfCreditFacilityRenewalPeriod" xlink:to="mksi_LineOfCreditFacilityRenewalPeriod_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_MeasurementInputTypeAxis" xlink:to="us-gaap_MeasurementInputTypeAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanEstimatedFutureBenefitPaymentsAbstract" xlink:to="us-gaap_DefinedBenefitPlanEstimatedFutureBenefitPaymentsAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_BorrowingsUnderRevolvingFacilityMember" xlink:to="mksi_BorrowingsUnderRevolvingFacilityMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfCarryingValuesAndEstimatedFairValuesOfDebtInstrumentsTableTextBlock" xlink:to="us-gaap_ScheduleOfCarryingValuesAndEstimatedFairValuesOfDebtInstrumentsTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NumberOfCustomersAccountedForNinetyPercentOfRevenue" xlink:to="mksi_NumberOfCustomersAccountedForNinetyPercentOfRevenue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="mksi_IncomeTaxesLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TaxesPayableCurrent" xlink:to="us-gaap_TaxesPayableCurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InvestmentTypeCategorizationMember" xlink:to="us-gaap_InvestmentTypeCategorizationMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable" xlink:to="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="country_SG" xlink:to="country_SG_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SalesRevenueNetMember" xlink:to="us-gaap_SalesRevenueNetMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ScenarioUnspecifiedDomain" xlink:to="srt_ScenarioUnspecifiedDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ForeignCurrencyTransactionGainLossUnrealized" xlink:to="us-gaap_ForeignCurrencyTransactionGainLossUnrealized_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_USTreasurySecuritiesMember" xlink:to="us-gaap_USTreasurySecuritiesMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SegmentReportingDisclosureTextBlock" xlink:to="us-gaap_SegmentReportingDisclosureTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_CommonStockExercisePrice" xlink:to="mksi_CommonStockExercisePrice_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_MeasurementPeriodMember" xlink:to="mksi_MeasurementPeriodMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockIssuedDuringPeriodSharesAcquisitions" xlink:to="us-gaap_StockIssuedDuringPeriodSharesAcquisitions_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureTable" xlink:to="srt_ValuationAndQualifyingAccountsDisclosureTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments" xlink:to="us-gaap_GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SubsequentEventTable" xlink:to="us-gaap_SubsequentEventTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PurchaseCommitmentRemainingMinimumAmountCommitted" xlink:to="us-gaap_PurchaseCommitmentRemainingMinimumAmountCommitted_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsOther" xlink:to="us-gaap_DeferredTaxAssetsOther_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsNet" xlink:to="us-gaap_FiniteLivedIntangibleAssetsNet_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentConvertibleConversionPrice1" xlink:to="us-gaap_DebtInstrumentConvertibleConversionPrice1_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_StepUpMember" xlink:to="mksi_StepUpMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate" xlink:to="us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyDisclosureTextBlock" xlink:to="us-gaap_ProductWarrantyDisclosureTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:to="us-gaap_GainsLossesOnExtinguishmentOfDebt_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentFinStmtRestatementRecoveryAnalysisFlag" xlink:to="dei_DocumentFinStmtRestatementRecoveryAnalysisFlag_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NumberOfCustomersAccountedForThirtyPercentFortyTwoPercentAndFourtySixPercentOfRevenue" xlink:to="mksi_NumberOfCustomersAccountedForThirtyPercentFortyTwoPercentAndFourtySixPercentOfRevenue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentInterestRateIncreaseDecrease" xlink:to="us-gaap_DebtInstrumentInterestRateIncreaseDecrease_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RestructuringCharges" xlink:to="us-gaap_RestructuringCharges_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentUsefulLife" xlink:to="us-gaap_PropertyPlantAndEquipmentUsefulLife_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativeInstrumentsNotDesignatedAsHedgingInstrumentsAbstract" xlink:to="us-gaap_DerivativeInstrumentsNotDesignatedAsHedgingInstrumentsAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipByIncomeStatementLocationByDerivativeInstrumentRiskTable" xlink:to="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipByIncomeStatementLocationByDerivativeInstrumentRiskTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerLiabilityCurrent" xlink:to="us-gaap_ContractWithCustomerLiabilityCurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseOther" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseOther_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeSeveranceMember" xlink:to="us-gaap_EmployeeSeveranceMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_AtotechLimitedMember" xlink:to="mksi_AtotechLimitedMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_AccumulatedOtherComprehensiveIncomeLossChangeInNetInvestmentHedgeMember" xlink:to="mksi_AccumulatedOtherComprehensiveIncomeLossChangeInNetInvestmentHedgeMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_Depreciation" xlink:to="us-gaap_Depreciation_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockSharesOutstanding" xlink:to="us-gaap_CommonStockSharesOutstanding_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DividendsDomain" xlink:to="us-gaap_DividendsDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="cyd_CybersecurityRiskManagementProcessesIntegratedFlag" xlink:to="cyd_CybersecurityRiskManagementProcessesIntegratedFlag_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentTransitionReport" xlink:to="dei_DocumentTransitionReport_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShortTermInvestments" xlink:to="us-gaap_ShortTermInvestments_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_OtherNonCurrentLiabilitiesFairValueDisclosure" xlink:to="mksi_OtherNonCurrentLiabilitiesFairValueDisclosure_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ResearchAndDevelopmentExpense" xlink:to="us-gaap_ResearchAndDevelopmentExpense_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IncomeTaxDisclosureTable" xlink:to="mksi_IncomeTaxDisclosureTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeasesTextBlock" xlink:to="us-gaap_LesseeOperatingLeasesTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PaymentsForRepurchaseOfCommonStock" xlink:to="us-gaap_PaymentsForRepurchaseOfCommonStock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" xlink:to="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnrealizedGainLossOnDerivatives" xlink:to="us-gaap_UnrealizedGainLossOnDerivatives_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementOfCashFlowsAbstract" xlink:to="us-gaap_StatementOfCashFlowsAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_CompletedTechnologyRightsMember" xlink:to="mksi_CompletedTechnologyRightsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DeferredTaxAssetsInventoryAndWarrantyReserves" xlink:to="mksi_DeferredTaxAssetsInventoryAndWarrantyReserves_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="country_HK" xlink:to="country_HK_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CurrentFederalTaxExpenseBenefit" xlink:to="us-gaap_CurrentFederalTaxExpenseBenefit_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ChangeInContractWithCustomerLiabilityTable" xlink:to="mksi_ChangeInContractWithCustomerLiabilityTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseShareBasedCompensationCost" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseShareBasedCompensationCost_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired" xlink:to="us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTable" xlink:to="us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestRateSwapMember" xlink:to="us-gaap_InterestRateSwapMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockholdersEquityNoteDisclosureTextBlock" xlink:to="us-gaap_StockholdersEquityNoteDisclosureTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsLineItems" xlink:to="us-gaap_FiniteLivedIntangibleAssetsLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerShareTextBlock" xlink:to="us-gaap_EarningsPerShareTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharesIssued" xlink:to="us-gaap_SharesIssued_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="cyd_CybersecurityRiskManagementProcessesIntegratedTextBlock" xlink:to="cyd_CybersecurityRiskManagementProcessesIntegratedTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_CashAndCashEquivalentsAndInvestmentsPolicyTextBlock" xlink:to="mksi_CashAndCashEquivalentsAndInvestmentsPolicyTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DebtInstrumentConvertibleApplicableConversionPrice" xlink:to="mksi_DebtInstrumentConvertibleApplicableConversionPrice_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetIncomeLoss" xlink:to="us-gaap_NetIncomeLoss_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryWriteDown" xlink:to="us-gaap_InventoryWriteDown_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInInventories" xlink:to="us-gaap_IncreaseDecreaseInInventories_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_InProcessResearchAndDevelopmentReclassifiedIntoCompletedTechnology" xlink:to="mksi_InProcessResearchAndDevelopmentReclassifiedIntoCompletedTechnology_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseCost" xlink:to="us-gaap_OperatingLeaseCost_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DerivativeAndHedgingTable" xlink:to="mksi_DerivativeAndHedgingTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PensionAndOtherPostretirementBenefitContributions" xlink:to="us-gaap_PensionAndOtherPostretirementBenefitContributions_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue" xlink:to="us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromPaymentsForOtherFinancingActivities" xlink:to="us-gaap_ProceedsFromPaymentsForOtherFinancingActivities_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ContractWithCustomerLiabilityAdditions" xlink:to="mksi_ContractWithCustomerLiabilityAdditions_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeasePayments" xlink:to="us-gaap_OperatingLeasePayments_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiPercent" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiPercent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualWarrantiesIssued" xlink:to="us-gaap_ProductWarrantyAccrualWarrantiesIssued_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DefinedContributionPlanMinimumAnnualContributionsPerEmployeePercent" xlink:to="mksi_DefinedContributionPlanMinimumAnnualContributionsPerEmployeePercent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AssetsAbstract" xlink:to="us-gaap_AssetsAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxAuthorityNameAxis" xlink:to="us-gaap_IncomeTaxAuthorityNameAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConstructionInProgressMember" xlink:to="us-gaap_ConstructionInProgressMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RepaymentsOfDebt" xlink:to="us-gaap_RepaymentsOfDebt_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AmortizationOfFinancingCostsAndDiscounts" xlink:to="us-gaap_AmortizationOfFinancingCostsAndDiscounts_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeitedWeightedAverageGrantDateFairValue" xlink:to="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeitedWeightedAverageGrantDateFairValue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RestructuringAndRelatedActivitiesAbstract" xlink:to="us-gaap_RestructuringAndRelatedActivitiesAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentFiscalYearFocus" xlink:to="dei_DocumentFiscalYearFocus_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt" xlink:to="us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" xlink:to="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain" xlink:to="us-gaap_ConcentrationRiskBenchmarkDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_GoodwillAndIntangibleAssetsTable" xlink:to="mksi_GoodwillAndIntangibleAssetsTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:to="us-gaap_CompensationAndRetirementDisclosureAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountsPayableCurrent" xlink:to="us-gaap_AccountsPayableCurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedInPeriodFairValue1" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedInPeriodFairValue1_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations" xlink:to="us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ComponentsOfCashPaidForTaxesTableTextBlock" xlink:to="mksi_ComponentsOfCashPaidForTaxesTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ResearchAndDevelopmentExpenseMember" xlink:to="us-gaap_ResearchAndDevelopmentExpenseMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfNetBenefitCostsTableTextBlock" xlink:to="us-gaap_ScheduleOfNetBenefitCostsTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="mksi_ScheduleOfSignificantAccountingPoliciesTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesAbstract" xlink:to="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativeMaturityDates" xlink:to="us-gaap_DerivativeMaturityDates_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock" xlink:to="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredFederalIncomeTaxExpenseBenefit" xlink:to="us-gaap_DeferredFederalIncomeTaxExpenseBenefit_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation" xlink:to="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_LineOfCreditFacilityMinimumAdditionalBorrowingCapacity" xlink:to="mksi_LineOfCreditFacilityMinimumAdditionalBorrowingCapacity_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_AccountingStandardsUpdated201409Member" xlink:to="mksi_AccountingStandardsUpdated201409Member_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xlink:to="us-gaap_ComponentsOfDeferredTaxAssetsAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_LevelOfPerformanceTargetAchievedPercentage" xlink:to="mksi_LevelOfPerformanceTargetAchievedPercentage_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_PaymentsAndAdjustmentForRestructuring" xlink:to="mksi_PaymentsAndAdjustmentForRestructuring_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanDebtSecurityMember" xlink:to="us-gaap_DefinedBenefitPlanDebtSecurityMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueDisclosuresAbstract" xlink:to="us-gaap_FairValueDisclosuresAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:to="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="country_CA" xlink:to="country_CA_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockIssuedDuringPeriodValueAcquisitions" xlink:to="us-gaap_StockIssuedDuringPeriodValueAcquisitions_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DeferredTaxAssetsDepreciationAndAmortization" xlink:to="mksi_DeferredTaxAssetsDepreciationAndAmortization_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareBasic" xlink:to="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareBasic_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LineOfCredit" xlink:to="us-gaap_LineOfCredit_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativeInstrumentRiskAxis" xlink:to="us-gaap_DerivativeInstrumentRiskAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanInterestCost" xlink:to="us-gaap_DefinedBenefitPlanInterestCost_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AssetsFairValueDisclosure" xlink:to="us-gaap_AssetsFairValueDisclosure_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets" xlink:to="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativesPolicyTextBlock" xlink:to="us-gaap_DerivativesPolicyTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskPercentage1" xlink:to="us-gaap_ConcentrationRiskPercentage1_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsNextTwelveMonths" xlink:to="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsNextTwelveMonths_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfNonvestedRestrictedStockUnitsActivityTableTextBlock" xlink:to="us-gaap_ScheduleOfNonvestedRestrictedStockUnitsActivityTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_TermSofrBorrowingsMember" xlink:to="mksi_TermSofrBorrowingsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivities_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShortTermDebtRefinancedDescription" xlink:to="us-gaap_ShortTermDebtRefinancedDescription_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1" xlink:to="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_Security12bTitle" xlink:to="dei_Security12bTitle_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeRelatedLiabilitiesCurrentAndNoncurrent" xlink:to="us-gaap_EmployeeRelatedLiabilitiesCurrentAndNoncurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" xlink:to="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureTextBlock" xlink:to="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxPaidByIndividualJurisdictionTable" xlink:to="us-gaap_IncomeTaxPaidByIndividualJurisdictionTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_MoneyMarketFundsMember" xlink:to="us-gaap_MoneyMarketFundsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearSixToTen" xlink:to="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearSixToTen_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFive" xlink:to="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFive_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_InterestRateHegesMember" xlink:to="mksi_InterestRateHegesMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxDisclosureTextBlock" xlink:to="us-gaap_IncomeTaxDisclosureTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditExpectedReturnLossStatementOfIncomeOrComprehensiveIncomeExtensibleList" xlink:to="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditExpectedReturnLossStatementOfIncomeOrComprehensiveIncomeExtensibleList_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_UnrecognizedTaxBenefitsOffsetAgainstRestructuringReserves" xlink:to="mksi_UnrecognizedTaxBenefitsOffsetAgainstRestructuringReserves_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestExpenseMember" xlink:to="us-gaap_InterestExpenseMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember" xlink:to="mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_OperatingLossCarryforwardsExpiringTwoThousandThirtyNineMember" xlink:to="mksi_OperatingLossCarryforwardsExpiringTwoThousandThirtyNineMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherLiabilitiesNoncurrent" xlink:to="us-gaap_OtherLiabilitiesNoncurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentRedemptionPeriodDomain" xlink:to="us-gaap_DebtInstrumentRedemptionPeriodDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NumberOfCustomersAccountedForFourteenPercentOfRevenue" xlink:to="mksi_NumberOfCustomersAccountedForFourteenPercentOfRevenue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:to="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentTextBlock" xlink:to="us-gaap_PropertyPlantAndEquipmentTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanFairValueOfPlanAssets" xlink:to="us-gaap_DefinedBenefitPlanFairValueOfPlanAssets_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ComponentsOfCashPaidNetOfRefundsReceivedForIncomeTaxesTableTextBlock" xlink:to="mksi_ComponentsOfCashPaidNetOfRefundsReceivedForIncomeTaxesTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_IncomeTaxDisclosureAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnrecognizedTaxBenefits" xlink:to="us-gaap_UnrecognizedTaxBenefits_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdditionalPaidInCapitalMember" xlink:to="us-gaap_AdditionalPaidInCapitalMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ConvertibleSeniorNotesDue2030Member" xlink:to="mksi_ConvertibleSeniorNotesDue2030Member_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueMeasurementFrequencyDomain" xlink:to="us-gaap_FairValueMeasurementFrequencyDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherOperatingIncomeExpenseMember" xlink:to="us-gaap_OtherOperatingIncomeExpenseMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_StockRepurchaseProgramAuthorizedAmount1" xlink:to="srt_StockRepurchaseProgramAuthorizedAmount1_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeStatementLocationAxis" xlink:to="us-gaap_IncomeStatementLocationAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems" xlink:to="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_TradingSymbol" xlink:to="dei_TradingSymbol_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_RestructuringCostAndOtherCostLineItems" xlink:to="mksi_RestructuringCostAndOtherCostLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable" xlink:to="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock" xlink:to="us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" xlink:to="mksi_NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SubsequentEventTypeAxis" xlink:to="us-gaap_SubsequentEventTypeAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_CustomerAdvancesMember" xlink:to="mksi_CustomerAdvancesMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock" xlink:to="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:to="us-gaap_EmployeeRelatedLiabilitiesCurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="country_TW" xlink:to="country_TW_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_TaxBenefitRelatedToHistoricalOutsideBasisDifferences" xlink:to="mksi_TaxBenefitRelatedToHistoricalOutsideBasisDifferences_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueMeasurementsRecurringMember" xlink:to="us-gaap_FairValueMeasurementsRecurringMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCreditsResearch" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCreditsResearch_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_TermLoanFacilityNetMember" xlink:to="mksi_TermLoanFacilityNetMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DefinedBenefitPlanAssetsForPlanBenefitsPercentage" xlink:to="mksi_DefinedBenefitPlanAssetsForPlanBenefitsPercentage_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillAndIntangibleAssetImpairment" xlink:to="us-gaap_GoodwillAndIntangibleAssetImpairment_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementEquityComponentsAxis" xlink:to="us-gaap_StatementEquityComponentsAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ContractWithCustomerAmountOfDeferredRevenueAndCustomerAdvancesRecognized" xlink:to="mksi_ContractWithCustomerAmountOfDeferredRevenueAndCustomerAdvancesRecognized_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_RepurchaseOfDebtPercentage" xlink:to="mksi_RepurchaseOfDebtPercentage_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NonoperatingIncomeExpense" xlink:to="us-gaap_NonoperatingIncomeExpense_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_EquityComponentDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueByAssetClassAxis" xlink:to="us-gaap_FairValueByAssetClassAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:to="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StateAndLocalTaxJurisdictionOtherMember" xlink:to="us-gaap_StateAndLocalTaxJurisdictionOtherMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_SpecialtyIndustrialMember" xlink:to="mksi_SpecialtyIndustrialMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrual" xlink:to="us-gaap_ProductWarrantyAccrual_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember" xlink:to="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_CurrentAssetsFairValueDisclosure" xlink:to="mksi_CurrentAssetsFairValueDisclosure_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentAnnualReport" xlink:to="dei_DocumentAnnualReport_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_ScheduleOfSignificantAccountingPoliciesLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_EffectiveIncomeTaxRateReconciliationSubpartFNetOfForeignTaxCredits" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationSubpartFNetOfForeignTaxCredits_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillTransfers" xlink:to="us-gaap_GoodwillTransfers_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BusinessAcquisitionAxis" xlink:to="us-gaap_BusinessAcquisitionAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList" xlink:to="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostRateOfCompensationIncrease" xlink:to="us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostRateOfCompensationIncrease_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_MachineryAndEquipmentMember" xlink:to="us-gaap_MachineryAndEquipmentMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PostemploymentBenefitsAbstract" xlink:to="us-gaap_PostemploymentBenefitsAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_MajorCustomersAxis" xlink:to="srt_MajorCustomersAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IncomeTaxReconciliationAuditSettlementRelatedToIntercompanyTransactions" xlink:to="mksi_IncomeTaxReconciliationAuditSettlementRelatedToIntercompanyTransactions_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IncomeTaxesTableTable" xlink:to="mksi_IncomeTaxesTableTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_OneCustomerMember" xlink:to="mksi_OneCustomerMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NewportCorporationMember" xlink:to="mksi_NewportCorporationMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_MinimumPercentageOfEarningsBeforeInterestTaxesDepreciationAndAmortization" xlink:to="mksi_MinimumPercentageOfEarningsBeforeInterestTaxesDepreciationAndAmortization_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DepreciationAndAmortization" xlink:to="us-gaap_DepreciationAndAmortization_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_EmployeePerformanceAwardBonusExpense" xlink:to="mksi_EmployeePerformanceAwardBonusExpense_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BuildingAndBuildingImprovementsMember" xlink:to="us-gaap_BuildingAndBuildingImprovementsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationTaxContingencies" xlink:to="us-gaap_IncomeTaxReconciliationTaxContingencies_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_UsdTrancheBFirstAmmendmentMember" xlink:to="mksi_UsdTrancheBFirstAmmendmentMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_MaximumMember" xlink:to="srt_MaximumMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DividendPayableDateToBePaidDayMonthAndYear" xlink:to="us-gaap_DividendPayableDateToBePaidDayMonthAndYear_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DesignatedAsHedgingInstrumentMember" xlink:to="us-gaap_DesignatedAsHedgingInstrumentMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_RangeAxis" xlink:to="srt_RangeAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_MinimumPercentageOfIncomeTaxPaymentNetOfRefundsReceived" xlink:to="mksi_MinimumPercentageOfIncomeTaxPaymentNetOfRefundsReceived_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerLiabilityNoncurrent" xlink:to="us-gaap_ContractWithCustomerLiabilityNoncurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanPlanAssetsForeignCurrencyTranslationGainLoss" xlink:to="us-gaap_DefinedBenefitPlanPlanAssetsForeignCurrencyTranslationGainLoss_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockValue" xlink:to="us-gaap_CommonStockValue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IncrementalTrancheBLoansMember" xlink:to="mksi_IncrementalTrancheBLoansMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_AMIC" xlink:to="mksi_AMIC_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeasePrincipalPayments" xlink:to="us-gaap_FinanceLeasePrincipalPayments_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_StockExercisePriceAsPercentageOfClosingMarketPrice" xlink:to="mksi_StockExercisePriceAsPercentageOfClosingMarketPrice_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DividendsAxis" xlink:to="us-gaap_DividendsAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DeferredRevenueMember" xlink:to="mksi_DeferredRevenueMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SecuredOvernightFinancingRateSofrMember" xlink:to="us-gaap_SecuredOvernightFinancingRateSofrMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DefinedBenefitPlanPensionPlanChangeInBenefitObligationAbstract" xlink:to="mksi_DefinedBenefitPlanPensionPlanChangeInBenefitObligationAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ComprehensiveIncomeNetOfTaxAbstract" xlink:to="us-gaap_ComprehensiveIncomeNetOfTaxAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards" xlink:to="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock" xlink:to="cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TaxCreditCarryforwardAxis" xlink:to="us-gaap_TaxCreditCarryforwardAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock" xlink:to="us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationBeatAmount" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationBeatAmount_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent" xlink:to="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationStateAndLocalIncomeTaxes" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationStateAndLocalIncomeTaxes_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AmortizationOfFinancingCosts" xlink:to="us-gaap_AmortizationOfFinancingCosts_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NumberOfCustomersAccountedForThirtyTwoPercentThirtyPercentAndFortyTwoPercentOfRevenue" xlink:to="mksi_NumberOfCustomersAccountedForThirtyTwoPercentThirtyPercentAndFortyTwoPercentOfRevenue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IncrementalRevolvingCommitmentsMember" xlink:to="mksi_IncrementalRevolvingCommitmentsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_SixthAmendmentMember" xlink:to="mksi_SixthAmendmentMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock" xlink:to="us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_BorrowingsUnderNewRevolvingFacilityMember" xlink:to="mksi_BorrowingsUnderNewRevolvingFacilityMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_CurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" xlink:to="mksi_CurrentInterestRateFairValueHedgeLiabilitiesAtFairValue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityPublicFloat" xlink:to="dei_EntityPublicFloat_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ZeroCustomerMember" xlink:to="mksi_ZeroCustomerMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PreferredStockSharesAuthorized" xlink:to="us-gaap_PreferredStockSharesAuthorized_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:to="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanBusinessCombinationsAndAcquisitionsPlanAssets" xlink:to="us-gaap_DefinedBenefitPlanBusinessCombinationsAndAcquisitionsPlanAssets_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfDebtTableTextBlock" xlink:to="us-gaap_ScheduleOfDebtTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentAnnualPrincipalPayment" xlink:to="us-gaap_DebtInstrumentAnnualPrincipalPayment_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ReductionToInterestExpense" xlink:to="mksi_ReductionToInterestExpense_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LineOfCreditFacilityAxis" xlink:to="us-gaap_LineOfCreditFacilityAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RepaymentsOfConvertibleDebt" xlink:to="us-gaap_RepaymentsOfConvertibleDebt_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_NumberOfConsecutiveTradingDays" xlink:to="mksi_NumberOfConsecutiveTradingDays_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueFromContractWithCustomerTextBlock" xlink:to="us-gaap_RevenueFromContractWithCustomerTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityRegistrantName" xlink:to="dei_EntityRegistrantName_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued" xlink:to="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtDisclosureTextBlock" xlink:to="us-gaap_DebtDisclosureTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentPeriodicPaymentPrincipal" xlink:to="us-gaap_DebtInstrumentPeriodicPaymentPrincipal_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityVoluntaryFilers" xlink:to="dei_EntityVoluntaryFilers_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CustomerConcentrationRiskMember" xlink:to="us-gaap_CustomerConcentrationRiskMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_PercentageOfPayrollDeductionToCompensation" xlink:to="mksi_PercentageOfPayrollDeductionToCompensation_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherNonoperatingIncomeExpense" xlink:to="us-gaap_OtherNonoperatingIncomeExpense_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit" xlink:to="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SubsequentEventsAbstract" xlink:to="us-gaap_SubsequentEventsAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ValuationAndQualifyingAccountsAbstract" xlink:to="srt_ValuationAndQualifyingAccountsAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleFlag" xlink:to="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleFlag_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxExpenseBenefit" xlink:to="us-gaap_IncomeTaxExpenseBenefit_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueByMeasurementFrequencyAxis" xlink:to="us-gaap_FairValueByMeasurementFrequencyAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockDividendsPerShareCashPaid" xlink:to="us-gaap_CommonStockDividendsPerShareCashPaid_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFive" xlink:to="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFive_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DeferredCompensationPlanAssetsFairValueDisclosure" xlink:to="mksi_DeferredCompensationPlanAssetsFairValueDisclosure_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockRepurchasedDuringPeriodValue" xlink:to="us-gaap_StockRepurchasedDuringPeriodValue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_OtherCurrentLiabilitiesTextBlock" xlink:to="mksi_OtherCurrentLiabilitiesTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_PercentageOfAggregateAmountOfAllCommitments" xlink:to="mksi_PercentageOfAggregateAmountOfAllCommitments_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityCommonStockSharesOutstanding" xlink:to="dei_EntityCommonStockSharesOutstanding_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskCreditRisk" xlink:to="us-gaap_ConcentrationRiskCreditRisk_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentConvertibleTermsOfConversionFeature" xlink:to="us-gaap_DebtInstrumentConvertibleTermsOfConversionFeature_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CompensationRelatedCostsPolicyTextBlock" xlink:to="us-gaap_CompensationRelatedCostsPolicyTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestExpenseDebtAbstract" xlink:to="us-gaap_InterestExpenseDebtAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_SegmentGrossProfitPercentage" xlink:to="mksi_SegmentGrossProfitPercentage_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ConsolidationItemsAxis" xlink:to="srt_ConsolidationItemsAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_EmployeeStockPurchasePlanMember" xlink:to="mksi_EmployeeStockPurchasePlanMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:to="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_Assets" xlink:to="us-gaap_Assets_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryPolicyTextBlock" xlink:to="us-gaap_InventoryPolicyTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:to="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceived" xlink:to="us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceived_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeStatementAbstract" xlink:to="us-gaap_IncomeStatementAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RatioOfIndebtednessToNetCapital1" xlink:to="us-gaap_RatioOfIndebtednessToNetCapital1_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowancesAndReservesChargedToOtherAccounts" xlink:to="us-gaap_ValuationAllowancesAndReservesChargedToOtherAccounts_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherPercent" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherPercent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestRateCapMember" xlink:to="us-gaap_InterestRateCapMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseInterestPaymentOnLiability" xlink:to="us-gaap_FinanceLeaseInterestPaymentOnLiability_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy" xlink:to="us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_TermLoanMember" xlink:to="mksi_TermLoanMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefit_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SellingGeneralAndAdministrativeExpensesMember" xlink:to="us-gaap_SellingGeneralAndAdministrativeExpensesMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_O2026Q1DividendsMember" xlink:to="mksi_O2026Q1DividendsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ChangeInContractWithCustomerLiabilityAbstract" xlink:to="us-gaap_ChangeInContractWithCustomerLiabilityAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationGiltiPercent" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationGiltiPercent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LeaseCostAbstract" xlink:to="us-gaap_LeaseCostAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_CumulativeInflationRates" xlink:to="mksi_CumulativeInflationRates_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerShareDilutedAbstract" xlink:to="us-gaap_EarningsPerShareDilutedAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerShareDiluted" xlink:to="us-gaap_EarningsPerShareDiluted_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock" xlink:to="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingSegmentsMember" xlink:to="us-gaap_OperatingSegmentsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInAccountsPayableTrade" xlink:to="us-gaap_IncreaseDecreaseInAccountsPayableTrade_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CityAreaCode" xlink:to="dei_CityAreaCode_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongTermDebtAbstract" xlink:to="us-gaap_LongTermDebtAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentIssuedPrincipal" xlink:to="us-gaap_DebtInstrumentIssuedPrincipal_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanCashMember" xlink:to="us-gaap_DefinedBenefitPlanCashMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_EffectiveIncomeTaxRateReconciliationAuditSettlementRelatedToIntercompanyTransactions" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationAuditSettlementRelatedToIntercompanyTransactions_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AuditorName" xlink:to="dei_AuditorName_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTextBlock" xlink:to="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_MinimumPercentageOfRecognizedTaxBenefitsFromUncertainTaxPosition" xlink:to="mksi_MinimumPercentageOfRecognizedTaxBenefitsFromUncertainTaxPosition_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentFaceAmount" xlink:to="us-gaap_DebtInstrumentFaceAmount_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:to="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" xlink:to="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsTaxCreditCarryforwards" xlink:to="us-gaap_DeferredTaxAssetsTaxCreditCarryforwards_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_UsdTrancheAMember" xlink:to="mksi_UsdTrancheAMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxReconciliationTaxCreditsResearch" xlink:to="us-gaap_IncomeTaxReconciliationTaxCreditsResearch_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseImpairmentLosses" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseImpairmentLosses_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestRateFloorMember" xlink:to="us-gaap_InterestRateFloorMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConvertibleDebtNoncurrent" xlink:to="us-gaap_ConvertibleDebtNoncurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyLiabilityTable" xlink:to="us-gaap_ProductWarrantyLiabilityTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_EarningsPerShareLineItems" xlink:to="mksi_EarningsPerShareLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" xlink:to="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ChangesInProjectedBenefitObligationsFairValueOfPlanAssetsAndFundedStatusOfPlanTableTextBlock" xlink:to="us-gaap_ChangesInProjectedBenefitObligationsFairValueOfPlanAssetsAndFundedStatusOfPlanTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_InsuranceReimbursementReceived" xlink:to="mksi_InsuranceReimbursementReceived_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_SegmentReportingInformationLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LeaseCost" xlink:to="us-gaap_LeaseCost_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_SemiconductorProductsMember" xlink:to="mksi_SemiconductorProductsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GuaranteesAbstract" xlink:to="us-gaap_GuaranteesAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_CostToPurchaseCappedCallTransactions" xlink:to="mksi_CostToPurchaseCappedCallTransactions_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentNet" xlink:to="us-gaap_PropertyPlantAndEquipmentNet_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RightOfUseAssetObtainedInExchangeForFinanceLeaseLiability" xlink:to="us-gaap_RightOfUseAssetObtainedInExchangeForFinanceLeaseLiability_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy" xlink:to="us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearThree" xlink:to="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearThree_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_TermLoansUnderTermLoanFacilityMember" xlink:to="mksi_TermLoansUnderTermLoanFacilityMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_FederalStateAndForeignMember" xlink:to="mksi_FederalStateAndForeignMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredForeignIncomeTaxExpenseBenefit" xlink:to="us-gaap_DeferredForeignIncomeTaxExpenseBenefit_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_CashPaidDuringPeriodForInterestAndIncomeTaxAbstract" xlink:to="mksi_CashPaidDuringPeriodForInterestAndIncomeTaxAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromBankDebt" xlink:to="us-gaap_ProceedsFromBankDebt_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AociIncludingPortionAttributableToNoncontrollingInterestPeriodIncreaseDecrease" xlink:to="us-gaap_AociIncludingPortionAttributableToNoncontrollingInterestPeriodIncreaseDecrease_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_OperatingIncomeLoss_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillForeignCurrencyTranslationGainLoss" xlink:to="us-gaap_GoodwillForeignCurrencyTranslationGainLoss_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostDiscountRate" xlink:to="us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostDiscountRate_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_SemiconductorMember" xlink:to="mksi_SemiconductorMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock" xlink:to="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RetainedEarningsMember" xlink:to="us-gaap_RetainedEarningsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_UnallocatedCorporateExpenses" xlink:to="mksi_UnallocatedCorporateExpenses_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensation" xlink:to="us-gaap_ShareBasedCompensation_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_SummaryOfWeightedAverageRemainingTermsForAllLeasesTableTextBlock" xlink:to="mksi_SummaryOfWeightedAverageRemainingTermsForAllLeasesTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent" xlink:to="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueInputsLevel1Member" xlink:to="us-gaap_FairValueInputsLevel1Member_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_ClassOfStockLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivities_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShortTermDebtLineItems" xlink:to="us-gaap_ShortTermDebtLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodPercentageExercisePrice" xlink:to="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodPercentageExercisePrice_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsShareFromAcquisitionWeightedAverageGrantDateFairValue" xlink:to="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsShareFromAcquisitionWeightedAverageGrantDateFairValue_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LeaseCostTableTextBlock" xlink:to="us-gaap_LeaseCostTableTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AuditorLocation" xlink:to="dei_AuditorLocation_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredIncomeTaxLiabilitiesNet" xlink:to="us-gaap_DeferredIncomeTaxLiabilitiesNet_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_FurnitureAndFixturesOfficeEquipmentAndSoftwareMember" xlink:to="mksi_FurnitureAndFixturesOfficeEquipmentAndSoftwareMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_Years3And4Member" xlink:to="mksi_Years3And4Member_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_DerivativeContractTypeDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FiniteLivedIntangibleAssetsForeignCurrencyTranslationGainLoss" xlink:to="us-gaap_FiniteLivedIntangibleAssetsForeignCurrencyTranslationGainLoss_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_RestrictedStockUnitsGrantedToDirectorsMember" xlink:to="mksi_RestrictedStockUnitsGrantedToDirectorsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="us-gaap_IncomeTaxAuthorityDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityInteractiveDataCurrent" xlink:to="dei_EntityInteractiveDataCurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_Time-BasedRSUMember" xlink:to="mksi_Time-BasedRSUMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanByPlanAssetCategoriesAxis" xlink:to="us-gaap_DefinedBenefitPlanByPlanAssetCategoriesAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_IncomeStatementLocationDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FurnitureAndFixturesMember" xlink:to="us-gaap_FurnitureAndFixturesMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_OtherReportingUnitsMember" xlink:to="mksi_OtherReportingUnitsMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock" xlink:to="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceivedAbstract" xlink:to="us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceivedAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualPeriodIncreaseDecrease" xlink:to="us-gaap_ProductWarrantyAccrualPeriodIncreaseDecrease_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerAssetNet" xlink:to="us-gaap_ContractWithCustomerAssetNet_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_TopTenCustomersMember" xlink:to="mksi_TopTenCustomersMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract" xlink:to="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockDividendsPerShareDeclared" xlink:to="us-gaap_CommonStockDividendsPerShareDeclared_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_BorrowingsUnderEuroTrancheBMember" xlink:to="mksi_BorrowingsUnderEuroTrancheBMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityTaxIdentificationNumber" xlink:to="dei_EntityTaxIdentificationNumber_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenuesAbstract" xlink:to="us-gaap_RevenuesAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LandMember" xlink:to="us-gaap_LandMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShortTermBorrowingsAbstract" xlink:to="us-gaap_ShortTermBorrowingsAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DebtInstrumentPremiumPercentage" xlink:to="mksi_DebtInstrumentPremiumPercentage_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_PaymentsForCostOfCappedCallTransactions" xlink:to="mksi_PaymentsForCostOfCappedCallTransactions_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan" xlink:to="mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_OperatingLossCarryforwardsExpiringTwoThousandSeventeenMember" xlink:to="mksi_OperatingLossCarryforwardsExpiringTwoThousandSeventeenMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities" xlink:to="us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" xlink:to="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_WeightedAverageRevenueGrowthRateFutureUndiscountedCashFlows" xlink:to="mksi_WeightedAverageRevenueGrowthRateFutureUndiscountedCashFlows_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxAuthorityNameDomain" xlink:to="us-gaap_IncomeTaxAuthorityNameDomain_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_LocalPhoneNumber" xlink:to="dei_LocalPhoneNumber_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCost" xlink:to="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCost_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherLiabilitiesCurrent" xlink:to="us-gaap_OtherLiabilitiesCurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShortTermLeaseCost" xlink:to="us-gaap_ShortTermLeaseCost_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="country_CN" xlink:to="country_CN_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AuditorOpinionTextBlock" xlink:to="dei_AuditorOpinionTextBlock_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PaymentsOfFinancingCosts" xlink:to="us-gaap_PaymentsOfFinancingCosts_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_DefinedBenefitPlanAssetsForPlanBenefitsGuaranteedRateOfReturn" xlink:to="mksi_DefinedBenefitPlanAssetsForPlanBenefitsGuaranteedRateOfReturn_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NoncurrentAssets" xlink:to="us-gaap_NoncurrentAssets_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_AccountingPoliciesAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherCurrentLiabilitiesMember" xlink:to="us-gaap_OtherCurrentLiabilitiesMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="us-gaap_DisaggregationOfRevenueLineItems_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherSundryLiabilitiesCurrent" xlink:to="us-gaap_OtherSundryLiabilitiesCurrent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings" xlink:to="us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:to="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetIncomeLossAbstract" xlink:to="us-gaap_NetIncomeLossAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OfficeEquipmentMember" xlink:to="us-gaap_OfficeEquipmentMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent" xlink:to="us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxPaidFederalAfterRefundReceivedAbstract" xlink:to="us-gaap_IncomeTaxPaidFederalAfterRefundReceivedAbstract_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_ForeignSubpartFIncomeTaxedInUSNetOfForeignTaxCredits" xlink:to="mksi_ForeignSubpartFIncomeTaxedInUSNetOfForeignTaxCredits_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="mksi_IndefiniteMember" xlink:to="mksi_IndefiniteMember_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfStockByClassTable" xlink:to="us-gaap_ScheduleOfStockByClassTable_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:to="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityEmergingGrowthCompany" xlink:to="dei_EntityEmergingGrowthCompany_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis" xlink:to="us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis_lbl"/>
          <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TaxCreditCarryforwardNameDomain" xlink:to="us-gaap_TaxCreditCarryforwardNameDomain_lbl"/>
        </link:labelLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DocumentCoverPage" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_CoverAbstract" xlink:label="dei_CoverAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_AmendmentFlag" xlink:label="dei_AmendmentFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentType" xlink:label="dei_DocumentType"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentAnnualReport" xlink:label="dei_DocumentAnnualReport"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentFiscalYearFocus" xlink:label="dei_DocumentFiscalYearFocus"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentFiscalPeriodFocus" xlink:label="dei_DocumentFiscalPeriodFocus"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentTransitionReport" xlink:label="dei_DocumentTransitionReport"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_CurrentFiscalYearEndDate" xlink:label="dei_CurrentFiscalYearEndDate"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityWellKnownSeasonedIssuer" xlink:label="dei_EntityWellKnownSeasonedIssuer"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityVoluntaryFilers" xlink:label="dei_EntityVoluntaryFilers"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentPeriodEndDate" xlink:label="dei_DocumentPeriodEndDate"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityInteractiveDataCurrent" xlink:label="dei_EntityInteractiveDataCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityCurrentReportingStatus" xlink:label="dei_EntityCurrentReportingStatus"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityRegistrantName" xlink:label="dei_EntityRegistrantName"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityCentralIndexKey" xlink:label="dei_EntityCentralIndexKey"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_TradingSymbol" xlink:label="dei_TradingSymbol"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityFilerCategory" xlink:label="dei_EntityFilerCategory"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityShellCompany" xlink:label="dei_EntityShellCompany"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityEmergingGrowthCompany" xlink:label="dei_EntityEmergingGrowthCompany"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntitySmallBusiness" xlink:label="dei_EntitySmallBusiness"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityCommonStockSharesOutstanding" xlink:label="dei_EntityCommonStockSharesOutstanding"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityPublicFloat" xlink:label="dei_EntityPublicFloat"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityFileNumber" xlink:label="dei_EntityFileNumber"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityTaxIdentificationNumber" xlink:label="dei_EntityTaxIdentificationNumber"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressAddressLine1" xlink:label="dei_EntityAddressAddressLine1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressCityOrTown" xlink:label="dei_EntityAddressCityOrTown"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressStateOrProvince" xlink:label="dei_EntityAddressStateOrProvince"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityAddressPostalZipCode" xlink:label="dei_EntityAddressPostalZipCode"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_EntityIncorporationStateCountryCode" xlink:label="dei_EntityIncorporationStateCountryCode"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_CityAreaCode" xlink:label="dei_CityAreaCode"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_LocalPhoneNumber" xlink:label="dei_LocalPhoneNumber"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_SecurityExchangeName" xlink:label="dei_SecurityExchangeName"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_Security12bTitle" xlink:label="dei_Security12bTitle"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_IcfrAuditorAttestationFlag" xlink:label="dei_IcfrAuditorAttestationFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentFinStmtErrorCorrectionFlag" xlink:label="dei_DocumentFinStmtErrorCorrectionFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentFinStmtRestatementRecoveryAnalysisFlag" xlink:label="dei_DocumentFinStmtRestatementRecoveryAnalysisFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_AuditorFirmId" xlink:label="dei_AuditorFirmId"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_AuditorName" xlink:label="dei_AuditorName"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_AuditorLocation" xlink:label="dei_AuditorLocation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_AuditorOpinionTextBlock" xlink:label="dei_AuditorOpinionTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2025/dei-2025.xsd#dei_DocumentsIncorporatedByReferenceTextBlock" xlink:label="dei_DocumentsIncorporatedByReferenceTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_AmendmentFlag" order="49.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentType" order="50.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentAnnualReport" order="51.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentFiscalYearFocus" order="52.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentFiscalPeriodFocus" order="53.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentTransitionReport" order="54.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_CurrentFiscalYearEndDate" order="55.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityWellKnownSeasonedIssuer" order="56.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityVoluntaryFilers" order="57.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentPeriodEndDate" order="58.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityInteractiveDataCurrent" order="59.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityCurrentReportingStatus" order="60.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityRegistrantName" order="61.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityCentralIndexKey" order="62.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_TradingSymbol" order="63.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityFilerCategory" order="64.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityShellCompany" order="65.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityEmergingGrowthCompany" order="66.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntitySmallBusiness" order="67.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityCommonStockSharesOutstanding" order="68.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityPublicFloat" order="69.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityFileNumber" order="70.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityTaxIdentificationNumber" order="71.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressAddressLine1" order="72.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressCityOrTown" order="73.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressStateOrProvince" order="74.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressPostalZipCode" order="75.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityIncorporationStateCountryCode" order="76.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_CityAreaCode" order="77.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_LocalPhoneNumber" order="78.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_SecurityExchangeName" order="79.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_Security12bTitle" order="80.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_IcfrAuditorAttestationFlag" order="81.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentFinStmtErrorCorrectionFlag" order="82.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentFinStmtRestatementRecoveryAnalysisFlag" order="83.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_AuditorFirmId" order="84.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_AuditorName" order="85.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_AuditorLocation" order="86.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_AuditorOpinionTextBlock" order="87.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentsIncorporatedByReferenceTextBlock" order="88.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_StatementConsolidatedBalanceSheets" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockholdersEquityAbstract" xlink:label="us-gaap_StockholdersEquityAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PreferredStockValue" xlink:label="us-gaap_PreferredStockValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:label="us-gaap_LiabilitiesAndStockholdersEquityAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LiabilitiesCurrentAbstract" xlink:label="us-gaap_LiabilitiesCurrentAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AssetsCurrentAbstract" xlink:label="us-gaap_AssetsCurrentAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermBorrowings" xlink:label="us-gaap_ShortTermBorrowings"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementOfFinancialPositionAbstract" xlink:label="us-gaap_StatementOfFinancialPositionAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AssetsAbstract" xlink:label="us-gaap_AssetsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockValue" xlink:label="us-gaap_CommonStockValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebt" xlink:label="us-gaap_LongTermDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="us-gaap_AccountsReceivableNetCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccountsPayableCurrent" xlink:label="us-gaap_AccountsPayableCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AdditionalPaidInCapitalCommonStock" xlink:label="us-gaap_AdditionalPaidInCapitalCommonStock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredIncomeTaxLiabilitiesNet" xlink:label="us-gaap_DeferredIncomeTaxLiabilitiesNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherLiabilitiesCurrent" xlink:label="us-gaap_OtherLiabilitiesCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrentAndNoncurrent" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrentAndNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherAssetsCurrent" xlink:label="us-gaap_OtherAssetsCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LiabilitiesCurrent" xlink:label="us-gaap_LiabilitiesCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_Goodwill" xlink:label="us-gaap_Goodwill"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NonCurrentLeaseLiability" xlink:label="mksi_NonCurrentLeaseLiability"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AssetsCurrent" xlink:label="us-gaap_AssetsCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherLiabilitiesNoncurrent" xlink:label="us-gaap_OtherLiabilitiesNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="us-gaap_OtherAssetsNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_Liabilities" xlink:label="us-gaap_Liabilities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_Assets" xlink:label="us-gaap_Assets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommitmentsAndContingencies" xlink:label="us-gaap_CommitmentsAndContingencies"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract" xlink:to="us-gaap_PreferredStockValue" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:to="us-gaap_LiabilitiesCurrentAbstract" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract" xlink:to="us-gaap_ShortTermBorrowings" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_AssetsAbstract" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract" xlink:to="us-gaap_AssetsCurrentAbstract" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract" xlink:to="us-gaap_CommonStockValue" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:to="us-gaap_LongTermDebt" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract" xlink:to="us-gaap_AccountsReceivableNetCurrent" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract" xlink:to="us-gaap_AccountsPayableCurrent" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_LiabilitiesAndStockholdersEquityAbstract" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract" xlink:to="us-gaap_PropertyPlantAndEquipmentNet" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract" xlink:to="us-gaap_AdditionalPaidInCapitalCommonStock" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:to="us-gaap_DeferredIncomeTaxLiabilitiesNet" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract" xlink:to="us-gaap_InventoryNet" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract" xlink:to="us-gaap_OtherLiabilitiesCurrent" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract" xlink:to="us-gaap_RetainedEarningsAccumulatedDeficit" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:to="us-gaap_EmployeeRelatedLiabilitiesCurrentAndNoncurrent" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract" xlink:to="us-gaap_OtherAssetsCurrent" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract" xlink:to="us-gaap_LiabilitiesCurrent" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract" xlink:to="us-gaap_Goodwill" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:to="mksi_NonCurrentLeaseLiability" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract" xlink:to="us-gaap_AssetsCurrent" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract" xlink:to="us-gaap_FiniteLivedIntangibleAssetsNet" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract" xlink:to="us-gaap_StockholdersEquity" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:to="us-gaap_OtherLiabilitiesNoncurrent" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract" xlink:to="us-gaap_OtherAssetsNoncurrent" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:to="us-gaap_Liabilities" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract" xlink:to="us-gaap_Assets" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:to="us-gaap_CommitmentsAndContingencies" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:to="us-gaap_StockholdersEquityAbstract" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:to="us-gaap_LiabilitiesAndStockholdersEquity" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_StatementConsolidatedBalanceSheetsParenthetical" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementOfFinancialPositionAbstract" xlink:label="us-gaap_StatementOfFinancialPositionAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PreferredStockParOrStatedValuePerShare" xlink:label="us-gaap_PreferredStockParOrStatedValuePerShare"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PreferredStockSharesAuthorized" xlink:label="us-gaap_PreferredStockSharesAuthorized"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PreferredStockSharesIssued" xlink:label="us-gaap_PreferredStockSharesIssued"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PreferredStockSharesOutstanding" xlink:label="us-gaap_PreferredStockSharesOutstanding"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockNoParValue" xlink:label="us-gaap_CommonStockNoParValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockSharesAuthorized" xlink:label="us-gaap_CommonStockSharesAuthorized"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockSharesIssued" xlink:label="us-gaap_CommonStockSharesIssued"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockSharesOutstanding" xlink:label="us-gaap_CommonStockSharesOutstanding"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_PreferredStockParOrStatedValuePerShare" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_PreferredStockSharesAuthorized" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_PreferredStockSharesIssued" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_PreferredStockSharesOutstanding" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_CommonStockNoParValue" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_CommonStockSharesAuthorized" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_CommonStockSharesIssued" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_CommonStockSharesOutstanding" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/StatementConsolidatedStatementsOfOperationsAndComprehensiveIncomeLoss" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenuesAbstract" xlink:label="us-gaap_RevenuesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductMember" xlink:label="us-gaap_ProductMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="us-gaap_EarningsPerShareAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerShareBasic" xlink:label="us-gaap_EarningsPerShareBasic"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CostOfRevenueAbstract" xlink:label="us-gaap_CostOfRevenueAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization" xlink:label="us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent" xlink:label="us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeStatementAbstract" xlink:label="us-gaap_IncomeStatementAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ServiceMember" xlink:label="us-gaap_ServiceMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="us-gaap_EarningsPerShareDiluted"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GrossProfit" xlink:label="us-gaap_GrossProfit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="us-gaap_ResearchAndDevelopmentExpense"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherComprehensiveIncomeLossNetInvestmentHedgeGainLossNetOfTax" xlink:label="mksi_OtherComprehensiveIncomeLossNetInvestmentHedgeGainLossNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SellingGeneralAndAdministrativeExpense" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessCombinationAcquisitionRelatedCosts" xlink:label="us-gaap_BusinessCombinationAcquisitionRelatedCosts"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestructuringCharges" xlink:label="us-gaap_RestructuringCharges"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan" xlink:label="mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AmortizationOfIntangibleAssets" xlink:label="us-gaap_AmortizationOfIntangibleAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetImpairment" xlink:label="us-gaap_GoodwillAndIntangibleAssetImpairment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainLossOnSaleOfPropertyPlantEquipment" xlink:label="us-gaap_GainLossOnSaleOfPropertyPlantEquipment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingIncomeLoss" xlink:label="us-gaap_OperatingIncomeLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestAndOtherIncome" xlink:label="us-gaap_InterestAndOtherIncome"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="us-gaap_OtherNonoperatingIncomeExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetIncomeLoss" xlink:label="us-gaap_NetIncomeLoss"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductOrServiceAxis" xlink:to="srt_ProductsAndServicesDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable" xlink:to="srt_ProductOrServiceAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_RevenuesAbstract" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain" xlink:to="us-gaap_ProductMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_EarningsPerShareBasic" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:to="us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementAbstract" xlink:to="us-gaap_StatementTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenuesAbstract" xlink:to="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable" xlink:to="us-gaap_StatementLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_CostOfRevenueAbstract" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain" xlink:to="us-gaap_ServiceMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_EarningsPerShareDiluted" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_GrossProfit" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:to="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_ResearchAndDevelopmentExpense" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:to="mksi_OtherComprehensiveIncomeLossNetInvestmentHedgeGainLossNetOfTax" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_EarningsPerShareAbstract" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_SellingGeneralAndAdministrativeExpense" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:to="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_BusinessCombinationAcquisitionRelatedCosts" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:to="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_RestructuringCharges" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:to="us-gaap_ComprehensiveIncomeNetOfTax" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_AmortizationOfIntangibleAssets" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_GoodwillAndIntangibleAssetImpairment" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_GainLossOnSaleOfPropertyPlantEquipment" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_OperatingIncomeLoss" order="10" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_InterestAndOtherIncome" order="11" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_InterestExpense" order="12" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_GainsLossesOnExtinguishmentOfDebt" order="13" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_OtherNonoperatingIncomeExpense" order="14" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" order="15" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_IncomeTaxExpenseBenefit" order="16" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_NetIncomeLoss" order="17" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_StatementConsolidatedStatementsOfStockholdersEquity" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementOfStockholdersEquityAbstract" xlink:label="us-gaap_StatementOfStockholdersEquityAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockMember" xlink:label="us-gaap_CommonStockMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ComprehensiveIncomeNetOfTaxAbstract" xlink:label="us-gaap_ComprehensiveIncomeNetOfTaxAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetIncomeLoss" xlink:label="us-gaap_NetIncomeLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SharesIssued" xlink:label="us-gaap_SharesIssued"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AdditionalPaidInCapitalMember" xlink:label="us-gaap_AdditionalPaidInCapitalMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation" xlink:label="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RetainedEarningsMember" xlink:label="us-gaap_RetainedEarningsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation" xlink:label="us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockIssuedDuringPeriodValueAcquisitions" xlink:label="us-gaap_StockIssuedDuringPeriodValueAcquisitions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockIssuedDuringPeriodSharesAcquisitions" xlink:label="us-gaap_StockIssuedDuringPeriodSharesAcquisitions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockRepurchasedAndRetiredDuringPeriodShares" xlink:label="us-gaap_StockRepurchasedAndRetiredDuringPeriodShares"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockRepurchasedAndRetiredDuringPeriodValue" xlink:label="us-gaap_StockRepurchasedAndRetiredDuringPeriodValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendsCommonStockCash" xlink:label="us-gaap_DividendsCommonStockCash"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity_12"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SharesIssued" xlink:label="us-gaap_SharesIssued_13"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable" xlink:to="us-gaap_StatementEquityComponentsAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StockholdersEquity" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfStockholdersEquityAbstract" xlink:to="us-gaap_StatementTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis" xlink:to="us-gaap_EquityComponentDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_CommonStockMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComprehensiveIncomeNetOfTaxAbstract" xlink:to="us-gaap_NetIncomeLoss" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable" xlink:to="us-gaap_StatementLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_SharesIssued" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AdditionalPaidInCapitalMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComprehensiveIncomeNetOfTaxAbstract" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_RetainedEarningsMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeMember" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StockIssuedDuringPeriodValueAcquisitions" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StockIssuedDuringPeriodSharesAcquisitions" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StockRepurchasedAndRetiredDuringPeriodShares" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StockRepurchasedAndRetiredDuringPeriodValue" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_DividendsCommonStockCash" order="10" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_ComprehensiveIncomeNetOfTaxAbstract" order="11" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StockholdersEquity_12" order="12" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_SharesIssued_13" order="13" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_StatementConsolidatedStatementsOfStockholdersEquityParenthetical" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementOfStockholdersEquityAbstract" xlink:label="us-gaap_StatementOfStockholdersEquityAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockDividendsPerShareDeclared" xlink:label="us-gaap_CommonStockDividendsPerShareDeclared"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfStockholdersEquityAbstract" xlink:to="us-gaap_CommonStockDividendsPerShareDeclared" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_StatementConsolidatedStatementsOfCashFlows" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashFlowNoncashInvestingAndFinancingActivitiesDisclosureAbstract" xlink:label="us-gaap_CashFlowNoncashInvestingAndFinancingActivitiesDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RightOfUseAssetObtainedInExchangeForFinanceLeaseLiability" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForFinanceLeaseLiability"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DepreciationAndAmortization" xlink:label="us-gaap_DepreciationAndAmortization"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SupplementalCashFlowInformationAbstract" xlink:label="us-gaap_SupplementalCashFlowInformationAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CashPaidDuringPeriodForInterestAndIncomeTaxAbstract" xlink:label="mksi_CashPaidDuringPeriodForInterestAndIncomeTaxAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementOfCashFlowsAbstract" xlink:label="us-gaap_StatementOfCashFlowsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired" xlink:label="us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:label="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:label="us-gaap_IncreaseDecreaseInAccountsReceivable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsForRepurchaseOfCommonStock" xlink:label="us-gaap_PaymentsForRepurchaseOfCommonStock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestPaidNet" xlink:label="us-gaap_InterestPaidNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProfitLoss" xlink:label="us-gaap_ProfitLoss"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AmortizationOfInventoryStepUpToFairValue" xlink:label="mksi_AmortizationOfInventoryStepUpToFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt" xlink:label="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="us-gaap_IncreaseDecreaseInInventories"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProceedsFromBankDebt" xlink:label="us-gaap_ProceedsFromBankDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxesPaid" xlink:label="us-gaap_IncomeTaxesPaid"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetImpairment" xlink:label="us-gaap_GoodwillAndIntangibleAssetImpairment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities" xlink:label="us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncreaseDecreaseInOtherOperatingAssets" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RepaymentsOfDebt" xlink:label="us-gaap_RepaymentsOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_UnrealizedGainLossOnDerivatives" xlink:label="us-gaap_UnrealizedGainLossOnDerivatives"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment" xlink:label="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncreaseDecreaseInAccountsPayableTrade" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableTrade"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RepaymentsOfConvertibleDebt" xlink:label="us-gaap_RepaymentsOfConvertibleDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AmortizationOfFinancingCostsAndDiscounts" xlink:label="us-gaap_AmortizationOfFinancingCostsAndDiscounts"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncreaseDecreaseCurrentAndNonCurrentAccruedCompensation" xlink:label="mksi_IncreaseDecreaseCurrentAndNonCurrentAccruedCompensation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsOfFinancingCosts" xlink:label="us-gaap_PaymentsOfFinancingCosts"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable" xlink:label="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsOfDividendsCommonStock" xlink:label="us-gaap_PaymentsOfDividendsCommonStock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainLossOnSaleOfPropertyPlantEquipment" xlink:label="us-gaap_GainLossOnSaleOfPropertyPlantEquipment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_6"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncreaseDecreaseInOtherOperatingLiabilities" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingLiabilities"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ProceedsFromPaymentsForEmployeeStockAwards" xlink:label="mksi_ProceedsFromPaymentsForEmployeeStockAwards"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensation" xlink:label="us-gaap_ShareBasedCompensation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProceedsFromPaymentsForOtherFinancingActivities" xlink:label="us-gaap_ProceedsFromPaymentsForOtherFinancingActivities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryWriteDown" xlink:label="us-gaap_InventoryWriteDown"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherNoncashIncomeExpense" xlink:label="us-gaap_OtherNoncashIncomeExpense"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CashFlowNoncashInvestingAndFinancingActivitiesDisclosureAbstract" xlink:to="us-gaap_RightOfUseAssetObtainedInExchangeForFinanceLeaseLiability" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="us-gaap_DepreciationAndAmortization" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SupplementalCashFlowInformationAbstract" xlink:to="mksi_CashPaidDuringPeriodForInterestAndIncomeTaxAbstract" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xlink:to="us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:to="us-gaap_IncreaseDecreaseInAccountsReceivable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:to="us-gaap_PaymentsForRepurchaseOfCommonStock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_CashPaidDuringPeriodForInterestAndIncomeTaxAbstract" xlink:to="us-gaap_InterestPaidNet" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="us-gaap_ProfitLoss" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="mksi_AmortizationOfInventoryStepUpToFairValue" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xlink:to="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:to="us-gaap_IncreaseDecreaseInInventories" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:to="us-gaap_ProceedsFromBankDebt" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_CashPaidDuringPeriodForInterestAndIncomeTaxAbstract" xlink:to="us-gaap_IncomeTaxesPaid" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="us-gaap_GoodwillAndIntangibleAssetImpairment" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xlink:to="us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:to="us-gaap_IncreaseDecreaseInOtherOperatingAssets" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:to="us-gaap_RepaymentsOfDebt" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="us-gaap_UnrealizedGainLossOnDerivatives" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract" xlink:to="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xlink:to="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:to="us-gaap_IncreaseDecreaseInAccountsPayableTrade" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:to="us-gaap_RepaymentsOfConvertibleDebt" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivities" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="us-gaap_AmortizationOfFinancingCostsAndDiscounts" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xlink:to="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:to="mksi_IncreaseDecreaseCurrentAndNonCurrentAccruedCompensation" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:to="us-gaap_PaymentsOfFinancingCosts" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="us-gaap_GainsLossesOnExtinguishmentOfDebt" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivities" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:to="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:to="us-gaap_PaymentsOfDividendsCommonStock" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="us-gaap_GainLossOnSaleOfPropertyPlantEquipment" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations_6" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:to="us-gaap_IncreaseDecreaseInOtherOperatingLiabilities" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:to="mksi_ProceedsFromPaymentsForEmployeeStockAwards" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="us-gaap_ShareBasedCompensation" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract" xlink:to="us-gaap_SupplementalCashFlowInformationAbstract" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:to="us-gaap_ProceedsFromPaymentsForOtherFinancingActivities" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="us-gaap_InventoryWriteDown" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract" xlink:to="us-gaap_CashFlowNoncashInvestingAndFinancingActivitiesDisclosureAbstract" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivities" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefit" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="us-gaap_OtherNoncashIncomeExpense" order="10" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureCybersecurityRiskManagementStrategyAndGovernance" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementStrategyAndGovernanceAbstract" xlink:label="cyd_CybersecurityRiskManagementStrategyAndGovernanceAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementStrategyAndGovernanceTable" xlink:label="cyd_CybersecurityRiskManagementStrategyAndGovernanceTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" xlink:label="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock" xlink:label="cyd_CybersecurityRiskBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementStrategyAndGovernanceLineItems" xlink:label="cyd_CybersecurityRiskManagementStrategyAndGovernanceLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock" xlink:label="cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementProcessesIntegratedFlag" xlink:label="cyd_CybersecurityRiskManagementProcessesIntegratedFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskProcessForInformingBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock" xlink:label="cyd_CybersecurityRiskProcessForInformingBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementProcessesIntegratedTextBlock" xlink:label="cyd_CybersecurityRiskManagementProcessesIntegratedTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskRoleOfManagementTextBlock" xlink:label="cyd_CybersecurityRiskRoleOfManagementTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementThirdPartyEngagedFlag" xlink:label="cyd_CybersecurityRiskManagementThirdPartyEngagedFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleFlag" xlink:label="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskThirdPartyOversightAndIdentificationProcessesFlag" xlink:label="cyd_CybersecurityRiskThirdPartyOversightAndIdentificationProcessesFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleTextBlock" xlink:label="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantFlag" xlink:label="cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementExpertiseOfManagementResponsibleTextBlock" xlink:label="cyd_CybersecurityRiskManagementExpertiseOfManagementResponsibleTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantTextBlock" xlink:label="cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskProcessForInformingManagementOrCommitteesResponsibleTextBlock" xlink:label="cyd_CybersecurityRiskProcessForInformingManagementOrCommitteesResponsibleTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleReportToBoardFlag" xlink:label="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleReportToBoardFlag"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="cyd_CybersecurityRiskManagementStrategyAndGovernanceAbstract" xlink:to="cyd_CybersecurityRiskManagementStrategyAndGovernanceTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" xlink:to="cyd_CybersecurityRiskBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="cyd_CybersecurityRiskManagementStrategyAndGovernanceLineItems" xlink:to="cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock" xlink:to="cyd_CybersecurityRiskManagementProcessesIntegratedFlag" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="cyd_CybersecurityRiskManagementStrategyAndGovernanceAbstract" xlink:to="cyd_CybersecurityRiskManagementStrategyAndGovernanceLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" xlink:to="cyd_CybersecurityRiskProcessForInformingBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="cyd_CybersecurityRiskManagementStrategyAndGovernanceLineItems" xlink:to="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock" xlink:to="cyd_CybersecurityRiskManagementProcessesIntegratedTextBlock" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" xlink:to="cyd_CybersecurityRiskRoleOfManagementTextBlock" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock" xlink:to="cyd_CybersecurityRiskManagementThirdPartyEngagedFlag" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" xlink:to="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleFlag" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock" xlink:to="cyd_CybersecurityRiskThirdPartyOversightAndIdentificationProcessesFlag" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" xlink:to="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleTextBlock" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock" xlink:to="cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantFlag" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" xlink:to="cyd_CybersecurityRiskManagementExpertiseOfManagementResponsibleTextBlock" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock" xlink:to="cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantTextBlock" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" xlink:to="cyd_CybersecurityRiskProcessForInformingManagementOrCommitteesResponsibleTextBlock" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" xlink:to="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleReportToBoardFlag" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureBusinessDescription" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NatureOfOperations" xlink:label="us-gaap_NatureOfOperations"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_NatureOfOperations" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureBasisOfPresentation" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureSummaryOfSignificantAccountingPolicies" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccountingPoliciesAbstract" xlink:label="us-gaap_AccountingPoliciesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SignificantAccountingPoliciesTextBlock" xlink:label="us-gaap_SignificantAccountingPoliciesTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_SignificantAccountingPoliciesTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRecentAccountingPronouncements" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesAbstract" xlink:label="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock" xlink:label="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesAbstract" xlink:to="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureRevenueFromContractsWithCustomers" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueFromContractWithCustomerAbstract" xlink:label="us-gaap_RevenueFromContractWithCustomerAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueFromContractWithCustomerTextBlock" xlink:label="us-gaap_RevenueFromContractWithCustomerTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_RevenueFromContractWithCustomerTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureNetIncomeLossPerShare" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="us-gaap_EarningsPerShareAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerShareTextBlock" xlink:label="us-gaap_EarningsPerShareTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_EarningsPerShareTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureFairValueMeasurements" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="us-gaap_FairValueDisclosuresAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueMeasurementInputsDisclosureTextBlock" xlink:label="us-gaap_FairValueMeasurementInputsDisclosureTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueDisclosuresAbstract" xlink:to="us-gaap_FairValueMeasurementInputsDisclosureTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedge" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureTextBlock" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract" xlink:to="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureInventories" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="us-gaap_InventoryDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryDisclosureTextBlock" xlink:label="us-gaap_InventoryDisclosureTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract" xlink:to="us-gaap_InventoryDisclosureTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosurePropertyPlantAndEquipment" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentAbstract" xlink:label="us-gaap_PropertyPlantAndEquipmentAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock" xlink:label="us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentAbstract" xlink:to="us-gaap_PropertyPlantAndEquipmentDisclosureTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureLeases" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeasesTextBlock" xlink:label="us-gaap_LesseeOperatingLeasesTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_LesseeOperatingLeasesTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureGoodwillAndIntangibleAssets" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:to="us-gaap_GoodwillAndIntangibleAssetsDisclosureTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureProductWarranties" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GuaranteesAndProductWarrantiesAbstract" xlink:label="us-gaap_GuaranteesAndProductWarrantiesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyDisclosureTextBlock" xlink:label="us-gaap_ProductWarrantyDisclosureTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GuaranteesAndProductWarrantiesAbstract" xlink:to="us-gaap_ProductWarrantyDisclosureTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureDebt" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="us-gaap_DebtDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtDisclosureTextBlock" xlink:label="us-gaap_DebtDisclosureTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtDisclosureAbstract" xlink:to="us-gaap_DebtDisclosureTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureOtherCurrentLiabilities" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherLiabilitiesCurrentAbstract" xlink:label="us-gaap_OtherLiabilitiesCurrentAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherCurrentLiabilitiesTextBlock" xlink:label="mksi_OtherCurrentLiabilitiesTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherLiabilitiesCurrentAbstract" xlink:to="mksi_OtherCurrentLiabilitiesTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureIncomeTaxes" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxDisclosureTextBlock" xlink:label="us-gaap_IncomeTaxDisclosureTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_IncomeTaxDisclosureTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockBasedCompensation" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockholdersEquity" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FederalHomeLoanBanksAbstract" xlink:label="us-gaap_FederalHomeLoanBanksAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockholdersEquityNoteDisclosureTextBlock" xlink:label="us-gaap_StockholdersEquityNoteDisclosureTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FederalHomeLoanBanksAbstract" xlink:to="us-gaap_StockholdersEquityNoteDisclosureTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlans" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PostemploymentBenefitsAbstract" xlink:label="us-gaap_PostemploymentBenefitsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CompensationAndEmployeeBenefitPlansTextBlock" xlink:label="us-gaap_CompensationAndEmployeeBenefitPlansTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PostemploymentBenefitsAbstract" xlink:to="us-gaap_CompensationAndEmployeeBenefitPlansTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformation" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingAbstract" xlink:label="us-gaap_SegmentReportingAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingDisclosureTextBlock" xlink:label="us-gaap_SegmentReportingDisclosureTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="us-gaap_SegmentReportingDisclosureTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRestructuring1" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ExpenseOfRestructuringActivitiesAndOtherAbstract" xlink:label="mksi_ExpenseOfRestructuringActivitiesAndOtherAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ExpenseOfRestructuringActivitiesAndOtherTextBlock" xlink:label="mksi_ExpenseOfRestructuringActivitiesAndOtherTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ExpenseOfRestructuringActivitiesAndOtherAbstract" xlink:to="mksi_ExpenseOfRestructuringActivitiesAndOtherTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureCommitmentsAndContingencies" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommitmentsAndContingenciesDisclosureTextBlock" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:to="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureSubsequentEvents" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventsAbstract" xlink:label="us-gaap_SubsequentEventsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventsTextBlock" xlink:label="us-gaap_SubsequentEventsTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventsAbstract" xlink:to="us-gaap_SubsequentEventsTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureScheduleIIValuationAndQualifyingAccounts" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ValuationAndQualifyingAccountsAbstract" xlink:label="srt_ValuationAndQualifyingAccountsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock" xlink:label="srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ValuationAndQualifyingAccountsAbstract" xlink:to="srt_ScheduleOfValuationAndQualifyingAccountsDisclosureTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureSummaryOfSignificantAccountingPoliciesPolicies" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueFromContractWithCustomerPolicyTextBlock" xlink:label="us-gaap_RevenueFromContractWithCustomerPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AccountsReceivableAllowancesPolicyTextBlock" xlink:label="mksi_AccountsReceivableAllowancesPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ResearchAndDevelopmentExpensePolicy" xlink:label="us-gaap_ResearchAndDevelopmentExpensePolicy"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AdvertisingCostsPolicyTextBlock" xlink:label="us-gaap_AdvertisingCostsPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_GovernmentIncentivesPolicyTextBlock" xlink:label="mksi_GovernmentIncentivesPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeLeasesPolicyTextBlock" xlink:label="us-gaap_LesseeLeasesPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy" xlink:label="us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ComprehensiveIncomePolicyPolicyTextBlock" xlink:label="us-gaap_ComprehensiveIncomePolicyPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerSharePolicyTextBlock" xlink:label="us-gaap_EarningsPerSharePolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CashAndCashEquivalentsAndInvestmentsPolicyTextBlock" xlink:label="mksi_CashAndCashEquivalentsAndInvestmentsPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskCreditRisk" xlink:label="us-gaap_ConcentrationRiskCreditRisk"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryPolicyTextBlock" xlink:label="us-gaap_InventoryPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentPolicyTextBlock" xlink:label="us-gaap_PropertyPlantAndEquipmentPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessCombinationsPolicy" xlink:label="us-gaap_BusinessCombinationsPolicy"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy" xlink:label="us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy" xlink:label="us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock" xlink:label="us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" xlink:label="us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CompensationRelatedCostsPolicyTextBlock" xlink:label="us-gaap_CompensationRelatedCostsPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPolicyTextBlock" xlink:label="us-gaap_IncomeTaxPolicyTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativesPolicyTextBlock" xlink:label="us-gaap_DerivativesPolicyTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_RevenueFromContractWithCustomerPolicyTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="mksi_AccountsReceivableAllowancesPolicyTextBlock" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_ResearchAndDevelopmentExpensePolicy" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_AdvertisingCostsPolicyTextBlock" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="mksi_GovernmentIncentivesPolicyTextBlock" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_LesseeLeasesPolicyTextBlock" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_ComprehensiveIncomePolicyPolicyTextBlock" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_EarningsPerSharePolicyTextBlock" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="mksi_CashAndCashEquivalentsAndInvestmentsPolicyTextBlock" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_ConcentrationRiskCreditRisk" order="10" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_InventoryPolicyTextBlock" order="11" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_PropertyPlantAndEquipmentPolicyTextBlock" order="12" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_BusinessCombinationsPolicy" order="13" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy" order="14" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy" order="15" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock" order="16" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_ForeignCurrencyTransactionsAndTranslationsPolicyTextBlock" order="17" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_CompensationRelatedCostsPolicyTextBlock" order="18" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_IncomeTaxPolicyTextBlock" order="19" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_DerivativesPolicyTextBlock" order="20" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureRevenueFromContractsWithCustomersTables" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueFromContractWithCustomerAbstract" xlink:label="us-gaap_RevenueFromContractWithCustomerAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock" xlink:label="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DisaggregationOfRevenueTableTextBlock" xlink:label="us-gaap_DisaggregationOfRevenueTableTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_DisaggregationOfRevenueTableTextBlock" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureNetIncomeLossPerShareTables" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="us-gaap_EarningsPerShareAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xlink:label="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureFairValueMeasurementsTables" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="us-gaap_FairValueDisclosuresAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock" xlink:label="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfCarryingValuesAndEstimatedFairValuesOfDebtInstrumentsTableTextBlock" xlink:label="us-gaap_ScheduleOfCarryingValuesAndEstimatedFairValuesOfDebtInstrumentsTableTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueDisclosuresAbstract" xlink:to="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueDisclosuresAbstract" xlink:to="us-gaap_ScheduleOfCarryingValuesAndEstimatedFairValuesOfDebtInstrumentsTableTextBlock" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedgeTables" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfNotionalAmountsOfOutstandingDerivativePositionsTableTextBlock" xlink:label="us-gaap_ScheduleOfNotionalAmountsOfOutstandingDerivativePositionsTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfCashFlowHedgesIncludedInAccumulatedOtherComprehensiveIncomeLossTableTextBlock" xlink:label="us-gaap_ScheduleOfCashFlowHedgesIncludedInAccumulatedOtherComprehensiveIncomeLossTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfOtherDerivativesNotDesignatedAsHedgingInstrumentsStatementsOfFinancialPerformanceAndFinancialPositionLocationTableTextBlock" xlink:label="us-gaap_ScheduleOfOtherDerivativesNotDesignatedAsHedgingInstrumentsStatementsOfFinancialPerformanceAndFinancialPositionLocationTableTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract" xlink:to="us-gaap_ScheduleOfNotionalAmountsOfOutstandingDerivativePositionsTableTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract" xlink:to="us-gaap_ScheduleOfCashFlowHedgesIncludedInAccumulatedOtherComprehensiveIncomeLossTableTextBlock" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract" xlink:to="us-gaap_ScheduleOfOtherDerivativesNotDesignatedAsHedgingInstrumentsStatementsOfFinancialPerformanceAndFinancialPositionLocationTableTextBlock" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureInventoriesTables" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="us-gaap_InventoryDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfInventoryCurrentTableTextBlock" xlink:label="us-gaap_ScheduleOfInventoryCurrentTableTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract" xlink:to="us-gaap_ScheduleOfInventoryCurrentTableTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosurePropertyPlantAndEquipmentTables" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentAbstract" xlink:label="us-gaap_PropertyPlantAndEquipmentAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentTextBlock" xlink:label="us-gaap_PropertyPlantAndEquipmentTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentAbstract" xlink:to="us-gaap_PropertyPlantAndEquipmentTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureLeasesTables" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LeaseCostTableTextBlock" xlink:label="us-gaap_LeaseCostTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfCashFlowSupplementalDisclosuresTableTextBlock" xlink:label="us-gaap_ScheduleOfCashFlowSupplementalDisclosuresTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SummaryOfWeightedAverageRemainingTermsForAllLeasesTableTextBlock" xlink:label="mksi_SummaryOfWeightedAverageRemainingTermsForAllLeasesTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduleOfFutureLeasePaymentsUnderNonCancelableLeasesTableTextBlock" xlink:label="mksi_ScheduleOfFutureLeasePaymentsUnderNonCancelableLeasesTableTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_LeaseCostTableTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_ScheduleOfCashFlowSupplementalDisclosuresTableTextBlock" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="mksi_SummaryOfWeightedAverageRemainingTermsForAllLeasesTableTextBlock" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityMaturityTableTextBlock" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="mksi_ScheduleOfFutureLeasePaymentsUnderNonCancelableLeasesTableTextBlock" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureGoodwillAndIntangibleAssetsTables" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduleOfGoodwillAssociatedWithReportableSegmentsTableTextBlock" xlink:label="mksi_ScheduleOfGoodwillAssociatedWithReportableSegmentsTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock" xlink:label="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock" xlink:label="us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:to="mksi_ScheduleOfGoodwillAssociatedWithReportableSegmentsTableTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:to="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:to="us-gaap_ScheduleofFiniteLivedIntangibleAssetsFutureAmortizationExpenseTableTextBlock" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureProductWarrantiesTables" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GuaranteesAndProductWarrantiesAbstract" xlink:label="us-gaap_GuaranteesAndProductWarrantiesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xlink:label="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GuaranteesAndProductWarrantiesAbstract" xlink:to="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureDebtTables" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="us-gaap_DebtDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfDebtTableTextBlock" xlink:label="us-gaap_ScheduleOfDebtTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfShortTermDebtTextBlock" xlink:label="us-gaap_ScheduleOfShortTermDebtTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock" xlink:label="us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfMaturitiesOfLongTermDebtTableTextBlock" xlink:label="us-gaap_ScheduleOfMaturitiesOfLongTermDebtTableTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtDisclosureAbstract" xlink:to="us-gaap_ScheduleOfDebtTableTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtDisclosureAbstract" xlink:to="us-gaap_ScheduleOfShortTermDebtTextBlock" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtDisclosureAbstract" xlink:to="us-gaap_InterestIncomeAndInterestExpenseDisclosureTableTextBlock" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtDisclosureAbstract" xlink:to="us-gaap_ScheduleOfMaturitiesOfLongTermDebtTableTextBlock" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureOtherCurrentLiabilitiesTables" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherLiabilitiesCurrentAbstract" xlink:label="us-gaap_OtherLiabilitiesCurrentAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherCurrentLiabilitiesTableTextBlock" xlink:label="us-gaap_OtherCurrentLiabilitiesTableTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherLiabilitiesCurrentAbstract" xlink:to="us-gaap_OtherCurrentLiabilitiesTableTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureIncomeTaxesTables" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" xlink:label="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" xlink:label="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" xlink:label="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock" xlink:label="us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ComponentsOfCashPaidForTaxesTableTextBlock" xlink:label="mksi_ComponentsOfCashPaidForTaxesTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ComponentsOfCashPaidNetOfRefundsReceivedForIncomeTaxesTableTextBlock" xlink:label="mksi_ComponentsOfCashPaidNetOfRefundsReceivedForIncomeTaxesTableTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_ScheduleOfComponentsOfIncomeTaxExpenseBenefitTableTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_ScheduleOfEffectiveIncomeTaxRateReconciliationTableTextBlock" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_ScheduleOfDeferredTaxAssetsAndLiabilitiesTableTextBlock" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_ScheduleOfUnrecognizedTaxBenefitsRollForwardTableTextBlock" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="mksi_ComponentsOfCashPaidForTaxesTableTextBlock" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="mksi_ComponentsOfCashPaidNetOfRefundsReceivedForIncomeTaxesTableTextBlock" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockBasedCompensationTables" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock" xlink:label="us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfNonvestedRestrictedStockUnitsActivityTableTextBlock" xlink:label="us-gaap_ScheduleOfNonvestedRestrictedStockUnitsActivityTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock" xlink:label="us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock" xlink:label="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfShareBasedPaymentAwardEmployeeStockPurchasePlanValuationAssumptionsTableTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfNonvestedRestrictedStockUnitsActivityTableTextBlock" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTextBlock" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureStockholdersEquityTables" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockholdersEquityNoteAbstract" xlink:label="us-gaap_StockholdersEquityNoteAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" xlink:label="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityNoteAbstract" xlink:to="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansTables" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PostemploymentBenefitsAbstract" xlink:label="us-gaap_PostemploymentBenefitsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfNetBenefitCostsTableTextBlock" xlink:label="us-gaap_ScheduleOfNetBenefitCostsTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ChangesInProjectedBenefitObligationsFairValueOfPlanAssetsAndFundedStatusOfPlanTableTextBlock" xlink:label="us-gaap_ChangesInProjectedBenefitObligationsFairValueOfPlanAssetsAndFundedStatusOfPlanTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfExpectedBenefitPaymentsTableTextBlock" xlink:label="us-gaap_ScheduleOfExpectedBenefitPaymentsTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfAssumptionsUsedTableTextBlock" xlink:label="us-gaap_ScheduleOfAssumptionsUsedTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTextBlock" xlink:label="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PostemploymentBenefitsAbstract" xlink:to="us-gaap_ScheduleOfNetBenefitCostsTableTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PostemploymentBenefitsAbstract" xlink:to="us-gaap_ChangesInProjectedBenefitObligationsFairValueOfPlanAssetsAndFundedStatusOfPlanTableTextBlock" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PostemploymentBenefitsAbstract" xlink:to="us-gaap_ScheduleOfExpectedBenefitPaymentsTableTextBlock" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PostemploymentBenefitsAbstract" xlink:to="us-gaap_ScheduleOfAssumptionsUsedTableTextBlock" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PostemploymentBenefitsAbstract" xlink:to="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTextBlock" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationTables" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingAbstract" xlink:label="us-gaap_SegmentReportingAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ReconciliationOfOperatingProfitLossFromSegmentsToConsolidatedTextBlock" xlink:label="us-gaap_ReconciliationOfOperatingProfitLossFromSegmentsToConsolidatedTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduleOfCapitalExpenditureDepreciationAndAmortizationAndAssetsReportableSegmentsTableTextBlock" xlink:label="mksi_ScheduleOfCapitalExpenditureDepreciationAndAmortizationAndAssetsReportableSegmentsTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTextBlock" xlink:label="us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduleOfGoodwillAssociatedWithReportableSegmentsTableTextBlock" xlink:label="mksi_ScheduleOfGoodwillAssociatedWithReportableSegmentsTableTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="us-gaap_ReconciliationOfOperatingProfitLossFromSegmentsToConsolidatedTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="mksi_ScheduleOfCapitalExpenditureDepreciationAndAmortizationAndAssetsReportableSegmentsTableTextBlock" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTextBlock" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="mksi_ScheduleOfGoodwillAssociatedWithReportableSegmentsTableTextBlock" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsByGeographicalAreasTableTextBlock" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRestructuringTables" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ExpenseOfRestructuringActivitiesAndOtherAbstract" xlink:label="mksi_ExpenseOfRestructuringActivitiesAndOtherAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfRestructuringAndRelatedCostsTextBlock" xlink:label="us-gaap_ScheduleOfRestructuringAndRelatedCostsTextBlock"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ExpenseOfRestructuringActivitiesAndOtherAbstract" xlink:to="us-gaap_ScheduleOfRestructuringAndRelatedCostsTextBlock" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBasisOfPresentationAdditionalInformationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NumberOfReportableSegments" xlink:label="us-gaap_NumberOfReportableSegments"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_NumberOfReportableSegments" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureSummaryOfSignificantAccountingPoliciesAdditionalInformationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="us-gaap_ConcentrationRiskByTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="us-gaap_ConcentrationRiskTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AdjustmentsForNewAccountingPronouncementsAxis" xlink:label="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TypeOfAdoptionMember" xlink:label="us-gaap_TypeOfAdoptionMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AccountingStandardsUpdated201409Member" xlink:label="mksi_AccountingStandardsUpdated201409Member"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_NameOfMajorCustomerDomain" xlink:label="srt_NameOfMajorCustomerDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SemiconductorProductsMember" xlink:label="mksi_SemiconductorProductsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BuildingMember" xlink:label="us-gaap_BuildingMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AdjustedEBITDAMember" xlink:label="mksi_AdjustedEBITDAMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="us-gaap_CustomerConcentrationRiskMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InProcessResearchAndDevelopmentMember" xlink:label="us-gaap_InProcessResearchAndDevelopmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SalesRevenueNetMember" xlink:label="us-gaap_SalesRevenueNetMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:label="mksi_ScheduleOfSignificantAccountingPoliciesTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:label="mksi_ScheduleOfSignificantAccountingPoliciesLineItems"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_RevenueRecognitionPaymentTerms" xlink:label="mksi_RevenueRecognitionPaymentTerms"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MajorCustomersAxis" xlink:label="srt_MajorCustomersAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherExpenseMember" xlink:label="us-gaap_OtherExpenseMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccountingPoliciesAbstract" xlink:label="us-gaap_AccountingPoliciesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OneCustomerMember" xlink:label="mksi_OneCustomerMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="us-gaap_MachineryAndEquipmentMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_Time-BasedRSUMember" xlink:label="mksi_Time-BasedRSUMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccountsReceivableMember" xlink:label="us-gaap_AccountsReceivableMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_WarrantyPeriod" xlink:label="mksi_WarrantyPeriod"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ZeroCustomerMember" xlink:label="mksi_ZeroCustomerMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FurnitureAndFixturesMember" xlink:label="us-gaap_FurnitureAndFixturesMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SeparatelyPricedContractsTerm" xlink:label="mksi_SeparatelyPricedContractsTerm"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeMember" xlink:label="srt_RangeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OfficeEquipmentMember" xlink:label="us-gaap_OfficeEquipmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueRemainingPerformanceObligationOptionalExemptionRemainingDuration" xlink:label="us-gaap_RevenueRemainingPerformanceObligationOptionalExemptionRemainingDuration"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MinimumPeriodOfCompanysResearchAndDevelopmentProjects" xlink:label="mksi_MinimumPeriodOfCompanysResearchAndDevelopmentProjects"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MaximumPeriodOfCompanysResearchAndDevelopmentProjects" xlink:label="mksi_MaximumPeriodOfCompanysResearchAndDevelopmentProjects"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AMIC" xlink:label="mksi_AMIC"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AMICIncreases" xlink:label="mksi_AMICIncreases"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InvestmentTaxCredit" xlink:label="us-gaap_InvestmentTaxCredit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_LevelOfPerformanceTargetAchievedPercentage" xlink:label="mksi_LevelOfPerformanceTargetAchievedPercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossForeignCurrencyTranslationAdjustmentNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossForeignCurrencyTranslationAdjustmentNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AociDerivativeQualifyingAsHedgeExcludedComponentAfterTax" xlink:label="us-gaap_AociDerivativeQualifyingAsHedgeExcludedComponentAfterTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="us-gaap_ConcentrationRiskPercentage1"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForTenOrMorePercentOfAccountsReceivable" xlink:label="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfAccountsReceivable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentUsefulLife" xlink:label="us-gaap_PropertyPlantAndEquipmentUsefulLife"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AmortizationPeriodOfLeaseholdImprovements" xlink:label="mksi_AmortizationPeriodOfLeaseholdImprovements"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CumulativeInflationRates" xlink:label="mksi_CumulativeInflationRates"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetUsefulLife" xlink:label="us-gaap_FiniteLivedIntangibleAssetUsefulLife"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignCurrencyTransactionGainLossRealized" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossRealized"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MinimumPercentageOfRecognizedTaxBenefitsFromUncertainTaxPosition" xlink:label="mksi_MinimumPercentageOfRecognizedTaxBenefitsFromUncertainTaxPosition"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskByTypeAxis" xlink:to="us-gaap_ConcentrationRiskTypeDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameAxis" xlink:to="us-gaap_PlanNameDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis" xlink:to="us-gaap_TypeOfAdoptionMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TypeOfAdoptionMember" xlink:to="mksi_AccountingStandardsUpdated201409Member" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="mksi_SemiconductorProductsMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:to="us-gaap_ConcentrationRiskBenchmarkDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_BuildingMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameDomain" xlink:to="mksi_AdjustedEBITDAMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTypeDomain" xlink:to="us-gaap_CustomerConcentrationRiskMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="us-gaap_InProcessResearchAndDevelopmentMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain" xlink:to="us-gaap_SalesRevenueNetMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="srt_RangeAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationAxis" xlink:to="us-gaap_IncomeStatementLocationDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_RevenueRecognitionPaymentTerms" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_MajorCustomersAxis" xlink:to="srt_NameOfMajorCustomerDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_OtherExpenseMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="mksi_ScheduleOfSignificantAccountingPoliciesTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis" xlink:to="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="mksi_OneCustomerMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_MachineryAndEquipmentMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameDomain" xlink:to="mksi_Time-BasedRSUMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain" xlink:to="us-gaap_AccountsReceivableMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_WarrantyPeriod" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="mksi_ZeroCustomerMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AwardTypeAxis" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" order="2.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_FurnitureAndFixturesMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="us-gaap_ConcentrationRiskByTypeAxis" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_SeparatelyPricedContractsTerm" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" order="2.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="us-gaap_RestrictedStockUnitsRSUMember" order="3.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_OfficeEquipmentMember" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="srt_MajorCustomersAxis" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="us-gaap_RevenueRemainingPerformanceObligationOptionalExemptionRemainingDuration" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="us-gaap_ConcentrationRiskByBenchmarkAxis" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_MinimumPeriodOfCompanysResearchAndDevelopmentProjects" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="us-gaap_PropertyPlantAndEquipmentByTypeAxis" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_MaximumPeriodOfCompanysResearchAndDevelopmentProjects" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" order="6.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="us-gaap_IncomeStatementLocationAxis" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_AMIC" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" order="7.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_AMICIncreases" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="us-gaap_AwardTypeAxis" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="us-gaap_InvestmentTaxCredit" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="us-gaap_PlanNameAxis" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" order="10" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" order="10" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_LevelOfPerformanceTargetAchievedPercentage" order="11" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossForeignCurrencyTranslationAdjustmentNetOfTax" order="12" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="us-gaap_AociDerivativeQualifyingAsHedgeExcludedComponentAfterTax" order="13" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="us-gaap_ConcentrationRiskPercentage1" order="14" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfAccountsReceivable" order="15" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentUsefulLife" order="16" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_AmortizationPeriodOfLeaseholdImprovements" order="17" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_CumulativeInflationRates" order="18" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="us-gaap_FiniteLivedIntangibleAssetUsefulLife" order="19" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="us-gaap_ForeignCurrencyTransactionGainLossRealized" order="20" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_MinimumPercentageOfRecognizedTaxBenefitsFromUncertainTaxPosition" order="21" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRecentAccountingPronouncementsAdditionalInformationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable" xlink:label="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems" xlink:label="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesAbstract" xlink:label="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TotalIncomeTaxPaymentsNetOfRefunds" xlink:label="mksi_TotalIncomeTaxPaymentsNetOfRefunds"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MinimumPercentageOfIncomeTaxPaymentNetOfRefundsReceived" xlink:label="mksi_MinimumPercentageOfIncomeTaxPaymentNetOfRefundsReceived"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable" xlink:to="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesAbstract" xlink:to="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems" xlink:to="mksi_TotalIncomeTaxPaymentsNetOfRefunds" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems" xlink:to="mksi_MinimumPercentageOfIncomeTaxPaymentNetOfRefundsReceived" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureRevenueFromContractsWithCustomersAdditionalInformationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ChangeInContractWithCustomerLiabilityAbstract" xlink:label="us-gaap_ChangeInContractWithCustomerLiabilityAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ContractWithCustomerAssetNet" xlink:label="us-gaap_ContractWithCustomerAssetNet"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ChangeInContractWithCustomerLiabilityAbstract" xlink:to="us-gaap_ContractWithCustomerAssetNet" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureRevenueFromContractsWithCustomersScheduleOfDeferredRevenueAndCustomerAdvancesByArrangementDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ChangeInContractWithCustomerLiabilityAbstract" xlink:label="us-gaap_ChangeInContractWithCustomerLiabilityAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ContractWithCustomerLiability" xlink:label="us-gaap_ContractWithCustomerLiability"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ContractWithCustomerAssumedDeferredRevenueAndCustomerAdvances" xlink:label="mksi_ContractWithCustomerAssumedDeferredRevenueAndCustomerAdvances"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ContractWithCustomerLiabilityAdditions" xlink:label="mksi_ContractWithCustomerLiabilityAdditions"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ContractWithCustomerAmountOfDeferredRevenueAndCustomerAdvancesRecognized" xlink:label="mksi_ContractWithCustomerAmountOfDeferredRevenueAndCustomerAdvancesRecognized"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ContractWithCustomerLiability" xlink:label="us-gaap_ContractWithCustomerLiability_4"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ChangeInContractWithCustomerLiabilityAbstract" xlink:to="us-gaap_ContractWithCustomerLiability" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ChangeInContractWithCustomerLiabilityAbstract" xlink:to="mksi_ContractWithCustomerAssumedDeferredRevenueAndCustomerAdvances" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ChangeInContractWithCustomerLiabilityAbstract" xlink:to="mksi_ContractWithCustomerLiabilityAdditions" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ChangeInContractWithCustomerLiabilityAbstract" xlink:to="mksi_ContractWithCustomerAmountOfDeferredRevenueAndCustomerAdvancesRecognized" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ChangeInContractWithCustomerLiabilityAbstract" xlink:to="us-gaap_ContractWithCustomerLiability_4" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureRevenueFromContractsWithCustomersScheduleOfDeferredRevenueAndCustomerAdvancesByArrangementParentheticalDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="us-gaap_BalanceSheetLocationDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredRevenueMember" xlink:label="mksi_DeferredRevenueMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BalanceSheetLocationAxis" xlink:label="us-gaap_BalanceSheetLocationAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ChangeInContractWithCustomerLiabilityLineItems" xlink:label="mksi_ChangeInContractWithCustomerLiabilityLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ContractWithCustomerLiabilityNoncurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ChangeInContractWithCustomerLiabilityTable" xlink:label="mksi_ChangeInContractWithCustomerLiabilityTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ChangeInContractWithCustomerLiabilityAbstract" xlink:label="us-gaap_ChangeInContractWithCustomerLiabilityAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CustomerAdvancesMember" xlink:label="mksi_CustomerAdvancesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ContractWithCustomerLiabilityCurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BalanceSheetLocationDomain" xlink:to="mksi_DeferredRevenueMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BalanceSheetLocationAxis" xlink:to="us-gaap_BalanceSheetLocationDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ChangeInContractWithCustomerLiabilityLineItems" xlink:to="us-gaap_ContractWithCustomerLiabilityNoncurrent" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ChangeInContractWithCustomerLiabilityTable" xlink:to="us-gaap_BalanceSheetLocationAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ChangeInContractWithCustomerLiabilityAbstract" xlink:to="mksi_ChangeInContractWithCustomerLiabilityTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BalanceSheetLocationDomain" xlink:to="mksi_CustomerAdvancesMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ChangeInContractWithCustomerLiabilityLineItems" xlink:to="us-gaap_ContractWithCustomerLiabilityCurrent" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ChangeInContractWithCustomerLiabilityTable" xlink:to="mksi_ChangeInContractWithCustomerLiabilityLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRevenueFromContractsWithCustomersSummaryOfRevenueFromContractsWithCustomersDetails" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueFromContractWithCustomerAbstract" xlink:label="us-gaap_RevenueFromContractWithCustomerAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DisaggregationOfRevenueTable" xlink:label="us-gaap_DisaggregationOfRevenueTable"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SemiconductorMember" xlink:label="mksi_SemiconductorMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DisaggregationOfRevenueLineItems" xlink:label="us-gaap_DisaggregationOfRevenueLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ElectronicsAndPackagingMember" xlink:label="mksi_ElectronicsAndPackagingMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SpecialtyIndustrialMember" xlink:label="mksi_SpecialtyIndustrialMember"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductOrServiceAxis" xlink:to="srt_ProductsAndServicesDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_DisaggregationOfRevenueTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueTable" xlink:to="srt_ProductOrServiceAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain" xlink:to="mksi_SemiconductorMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueTable" xlink:to="us-gaap_DisaggregationOfRevenueLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain" xlink:to="mksi_ElectronicsAndPackagingMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain" xlink:to="mksi_SpecialtyIndustrialMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureNetIncomeLossPerShareComputationOfBasicAndDilutedNetIncomeLossPerShareDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerShareBasicAbstract" xlink:label="us-gaap_EarningsPerShareBasicAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerShareBasic" xlink:label="us-gaap_EarningsPerShareBasic"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="us-gaap_EarningsPerShareAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetIncomeLossAbstract" xlink:label="us-gaap_NetIncomeLossAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerShareDilutedAbstract" xlink:label="us-gaap_EarningsPerShareDilutedAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="us-gaap_EarningsPerShareDiluted"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetIncomeLoss" xlink:label="us-gaap_NetIncomeLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" xlink:label="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_WeightedAverageNumberOfDilutedShares" xlink:label="mksi_WeightedAverageNumberOfDilutedShares"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareBasicAbstract" xlink:to="us-gaap_EarningsPerShareBasic" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_NetIncomeLossAbstract" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareDilutedAbstract" xlink:to="us-gaap_EarningsPerShareDiluted" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetIncomeLossAbstract" xlink:to="us-gaap_NetIncomeLoss" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:to="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_EarningsPerShareBasicAbstract" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:to="mksi_WeightedAverageNumberOfDilutedShares" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_EarningsPerShareDilutedAbstract" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureFairValueMeasurementsScheduleOfFairValueOfAssetsAndLiabilitiesMeasuredOnRecurringBasisDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="us-gaap_BalanceSheetLocationDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherCurrentLiabilitiesMember" xlink:label="us-gaap_OtherCurrentLiabilitiesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MoneyMarketFundsMember" xlink:label="us-gaap_MoneyMarketFundsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:label="us-gaap_FairValueByFairValueHierarchyLevelAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BalanceSheetLocationAxis" xlink:label="us-gaap_BalanceSheetLocationAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InvestmentTypeAxis" xlink:label="us-gaap_InvestmentTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InvestmentTypeCategorizationMember" xlink:label="us-gaap_InvestmentTypeCategorizationMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashAndCashEquivalentsFairValueDisclosure" xlink:label="us-gaap_CashAndCashEquivalentsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueInputsLevel1Member" xlink:label="us-gaap_FairValueInputsLevel1Member"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_GroupInsuranceContractsMember" xlink:label="mksi_GroupInsuranceContractsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="us-gaap_FairValueDisclosuresAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentRiskAxis" xlink:label="us-gaap_DerivativeInstrumentRiskAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeContractTypeDomain" xlink:label="us-gaap_DerivativeContractTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueByMeasurementFrequencyAxis" xlink:label="us-gaap_FairValueByMeasurementFrequencyAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueMeasurementFrequencyDomain" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueMeasurementsRecurringMember" xlink:label="us-gaap_FairValueMeasurementsRecurringMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueByAssetClassAxis" xlink:label="us-gaap_FairValueByAssetClassAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestRateCapMember" xlink:label="us-gaap_InterestRateCapMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherNoncurrentLiabilitiesMember" xlink:label="us-gaap_OtherNoncurrentLiabilitiesMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TimeDepositsAndCertificatesOfDepositMember" xlink:label="mksi_TimeDepositsAndCertificatesOfDepositMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtSecuritiesAvailableForSaleAndHeldToMaturityAmortizedCostAfterAllowanceForCreditLoss" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleAndHeldToMaturityAmortizedCostAfterAllowanceForCreditLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueInputsLevel2Member" xlink:label="us-gaap_FairValueInputsLevel2Member"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IsraeliPensionAssetsMember" xlink:label="mksi_IsraeliPensionAssetsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestRateSwapMember" xlink:label="us-gaap_InterestRateSwapMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_USTreasurySecuritiesMember" xlink:label="us-gaap_USTreasurySecuritiesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EquitySecuritiesFvNiCurrentAndNoncurrent" xlink:label="us-gaap_EquitySecuritiesFvNiCurrentAndNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueInputsLevel3Member" xlink:label="us-gaap_FairValueInputsLevel3Member"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignExchangeForwardMember" xlink:label="us-gaap_ForeignExchangeForwardMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_USGovernmentAgenciesDebtSecuritiesMember" xlink:label="us-gaap_USGovernmentAgenciesDebtSecuritiesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue" xlink:label="us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignExchangeOptionMember" xlink:label="us-gaap_ForeignExchangeOptionMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MutualFundsAndExchangeTradedFundsMember" xlink:label="mksi_MutualFundsAndExchangeTradedFundsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignCurrencyContractAssetFairValueDisclosure" xlink:label="us-gaap_ForeignCurrencyContractAssetFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BankTimeDepositsMember" xlink:label="us-gaap_BankTimeDepositsMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CurrentInterestRateFairValueHedgeAssetAtFairValue" xlink:label="mksi_CurrentInterestRateFairValueHedgeAssetAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NonCurrentInterestRateFairValueHedgeAssetAtFairValue" xlink:label="mksi_NonCurrentInterestRateFairValueHedgeAssetAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PensionAndDeferredCompensationPlanAssets" xlink:label="mksi_PensionAndDeferredCompensationPlanAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent" xlink:label="us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredCompensationPlanAssetsFairValueDisclosure" xlink:label="mksi_DeferredCompensationPlanAssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AssetsFairValueDisclosure" xlink:label="us-gaap_AssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue" xlink:label="us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" xlink:label="mksi_CurrentInterestRateFairValueHedgeLiabilitiesAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" xlink:label="mksi_NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeLiabilities" xlink:label="us-gaap_DerivativeLiabilities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermInvestments" xlink:label="us-gaap_ShortTermInvestments"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherCurrentAssetsFairValueDisclosure" xlink:label="mksi_OtherCurrentAssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CurrentAssetsFairValueDisclosure" xlink:label="mksi_CurrentAssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AvailableForSaleSecuritiesDebtSecuritiesNoncurrent" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherNonCurrentAssetsFairValueDisclosure" xlink:label="mksi_OtherNonCurrentAssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NonCurrentAssetsFairValueDisclosure" xlink:label="mksi_NonCurrentAssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherCurrentLiabilitiesFairValueDisclosure" xlink:label="mksi_OtherCurrentLiabilitiesFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeLiabilityStatementOfFinancialPositionExtensibleEnumeration" xlink:label="us-gaap_DerivativeLiabilityStatementOfFinancialPositionExtensibleEnumeration"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherNonCurrentLiabilitiesFairValueDisclosure" xlink:label="mksi_OtherNonCurrentLiabilitiesFairValueDisclosure"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BalanceSheetLocationDomain" xlink:to="us-gaap_OtherCurrentLiabilitiesMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:to="us-gaap_MoneyMarketFundsMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:to="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BalanceSheetLocationAxis" xlink:to="us-gaap_BalanceSheetLocationDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InvestmentTypeAxis" xlink:to="us-gaap_InvestmentTypeCategorizationMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_CashAndCashEquivalentsFairValueDisclosure" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:to="us-gaap_FairValueInputsLevel1Member" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InvestmentTypeCategorizationMember" xlink:to="mksi_GroupInsuranceContractsMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueDisclosuresAbstract" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentRiskAxis" xlink:to="us-gaap_DerivativeContractTypeDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueByMeasurementFrequencyAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueMeasurementFrequencyDomain" xlink:to="us-gaap_FairValueMeasurementsRecurringMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueByAssetClassAxis" xlink:to="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueByMeasurementFrequencyAxis" xlink:to="us-gaap_FairValueMeasurementFrequencyDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_InterestRateCapMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BalanceSheetLocationDomain" xlink:to="us-gaap_OtherNoncurrentLiabilitiesMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:to="mksi_TimeDepositsAndCertificatesOfDepositMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_DebtSecuritiesAvailableForSaleAndHeldToMaturityAmortizedCostAfterAllowanceForCreditLoss" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:to="us-gaap_FairValueInputsLevel2Member" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InvestmentTypeCategorizationMember" xlink:to="mksi_IsraeliPensionAssetsMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueByFairValueHierarchyLevelAxis" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_InterestRateSwapMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:to="us-gaap_USTreasurySecuritiesMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_EquitySecuritiesFvNiCurrentAndNoncurrent" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:to="us-gaap_FairValueInputsLevel3Member" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_BalanceSheetLocationAxis" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_ForeignExchangeForwardMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:to="us-gaap_USGovernmentAgenciesDebtSecuritiesMember" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueByAssetClassAxis" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_ForeignExchangeOptionMember" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:to="mksi_MutualFundsAndExchangeTradedFundsMember" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_ForeignCurrencyContractAssetFairValueDisclosure" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_InvestmentTypeAxis" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:to="us-gaap_BankTimeDepositsMember" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_CurrentInterestRateFairValueHedgeAssetAtFairValue" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_DerivativeInstrumentRiskAxis" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_NonCurrentInterestRateFairValueHedgeAssetAtFairValue" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_PensionAndDeferredCompensationPlanAssets" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_DeferredCompensationPlanAssetsFairValueDisclosure" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_AssetsFairValueDisclosure" order="10" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue" order="11" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_CurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" order="12" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" order="13" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_DerivativeLiabilities" order="14" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_ShortTermInvestments" order="15" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_OtherCurrentAssetsFairValueDisclosure" order="16" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_CurrentAssetsFairValueDisclosure" order="17" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesNoncurrent" order="18" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_OtherNonCurrentAssetsFairValueDisclosure" order="19" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_NonCurrentAssetsFairValueDisclosure" order="20" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_OtherCurrentLiabilitiesFairValueDisclosure" order="21" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_DerivativeLiabilityStatementOfFinancialPositionExtensibleEnumeration" order="22" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_OtherNonCurrentLiabilitiesFairValueDisclosure" order="23" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureFairValueMeasurementsScheduleOfFairValueOfAssetsAndLiabilitiesMeasuredOnRecurringBasisParentheticalDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="us-gaap_FairValueDisclosuresAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueDisclosuresAbstract" xlink:to="us-gaap_CashAndCashEquivalentsAtCarryingValue" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureFairValueMeasurementsScheduleOfEstimatedFairValueAndCarryingValueOfCompanysDebtDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoanFacilityMember" xlink:label="mksi_TermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentFaceAmount" xlink:label="us-gaap_DebtInstrumentFaceAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="us-gaap_FairValueDisclosuresAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ConvertibleSeniorNotesDue2030Member" xlink:label="mksi_ConvertibleSeniorNotesDue2030Member"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebtNoncurrent" xlink:label="us-gaap_LongTermDebtNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebtFairValue" xlink:label="us-gaap_LongTermDebtFairValue"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermLoanFacilityMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_DebtInstrumentFaceAmount" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueDisclosuresAbstract" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_DebtInstrumentAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_ConvertibleSeniorNotesDue2030Member" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_LongTermDebtNoncurrent" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_LongTermDebtFairValue" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" order="2.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedgeAdditionalInformationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AtotechLimitedMember" xlink:label="mksi_AtotechLimitedMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis" xlink:label="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_HedgingRelationshipDomain" xlink:label="us-gaap_HedgingRelationshipDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MaximumRemainingMaturityOfForeignCurrencyDerivatives1" xlink:label="us-gaap_MaximumRemainingMaturityOfForeignCurrencyDerivatives1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingDomain" xlink:label="us-gaap_VestingDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EuroTrancheBMember" xlink:label="mksi_EuroTrancheBMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetInvestmentHedgingMember" xlink:label="us-gaap_NetInvestmentHedgingMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoanMember" xlink:label="mksi_TermLoanMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingAxis" xlink:label="us-gaap_VestingAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentRiskAxis" xlink:label="us-gaap_DerivativeInstrumentRiskAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeContractTypeDomain" xlink:label="us-gaap_DerivativeContractTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="us-gaap_BusinessAcquisitionAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestRateSwapMember" xlink:label="us-gaap_InterestRateSwapMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherOperatingIncomeExpenseMember" xlink:label="us-gaap_OtherOperatingIncomeExpenseMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncrementalBorrowings" xlink:label="mksi_IncrementalBorrowings"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignExchangeOptionMember" xlink:label="us-gaap_ForeignExchangeOptionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestExpenseMember" xlink:label="us-gaap_InterestExpenseMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeNotionalAmount" xlink:label="us-gaap_DerivativeNotionalAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignExchangeForwardMember" xlink:label="us-gaap_ForeignExchangeForwardMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionEffectiveDateOfAcquisition1" xlink:label="us-gaap_BusinessAcquisitionEffectiveDateOfAcquisition1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestRateCapMember" xlink:label="us-gaap_InterestRateCapMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeMaturityDates" xlink:label="us-gaap_DerivativeMaturityDates"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignCurrencyTransactionGainLossUnrealized" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossUnrealized"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TranslationAdjustmentForNetInvestmentHedgeNetOfTax" xlink:label="us-gaap_TranslationAdjustmentForNetInvestmentHedgeNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NumberOfInterestRateDerivativesHeld" xlink:label="us-gaap_NumberOfInterestRateDerivativesHeld"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashFlowHedgeGainLossToBeReclassifiedWithinTwelveMonths" xlink:label="us-gaap_CashFlowHedgeGainLossToBeReclassifiedWithinTwelveMonths"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments" xlink:label="us-gaap_GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ReductionToInterestExpense" xlink:label="mksi_ReductionToInterestExpense"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ReductionInInterestExpense" xlink:label="mksi_ReductionInInterestExpense"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BusinessAcquisitionAcquireeDomain" xlink:to="mksi_AtotechLimitedMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis" xlink:to="us-gaap_HedgingRelationshipDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="us-gaap_MaximumRemainingMaturityOfForeignCurrencyDerivatives1" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_EuroTrancheBMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_HedgingRelationshipDomain" xlink:to="us-gaap_NetInvestmentHedgingMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermLoanMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract" xlink:to="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VestingAxis" xlink:to="us-gaap_VestingDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable" xlink:to="us-gaap_DerivativeInstrumentRiskAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentRiskAxis" xlink:to="us-gaap_DerivativeContractTypeDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationAxis" xlink:to="us-gaap_IncomeStatementLocationDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BusinessAcquisitionAxis" xlink:to="us-gaap_BusinessAcquisitionAcquireeDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_InterestRateSwapMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_OtherOperatingIncomeExpenseMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="mksi_IncrementalBorrowings" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable" xlink:to="us-gaap_DebtInstrumentAxis" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_ForeignExchangeOptionMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_InterestExpenseMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="us-gaap_DerivativeNotionalAmount" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable" xlink:to="us-gaap_IncomeStatementLocationAxis" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" order="2.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_ForeignExchangeForwardMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="us-gaap_BusinessAcquisitionEffectiveDateOfAcquisition1" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable" xlink:to="us-gaap_VestingAxis" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_InterestRateCapMember" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="us-gaap_DerivativeMaturityDates" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable" xlink:to="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="us-gaap_ForeignCurrencyTransactionGainLossUnrealized" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable" xlink:to="us-gaap_BusinessAcquisitionAxis" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="us-gaap_TranslationAdjustmentForNetInvestmentHedgeNetOfTax" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable" xlink:to="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="us-gaap_NumberOfInterestRateDerivativesHeld" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="us-gaap_CashFlowHedgeGainLossToBeReclassifiedWithinTwelveMonths" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="us-gaap_GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="mksi_ReductionToInterestExpense" order="10" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="mksi_ReductionInInterestExpense" order="11" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedgeSummaryOfNotionalValuesOfForeignExchangeForwardContractsOutstandingDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis" xlink:label="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_HedgingRelationshipDomain" xlink:label="us-gaap_HedgingRelationshipDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeLineItems" xlink:label="us-gaap_DerivativeLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeAssetNotionalAmount" xlink:label="us-gaap_DerivativeAssetNotionalAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_HedgingDesignationDomain" xlink:label="us-gaap_HedgingDesignationDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DesignatedAsHedgingInstrumentMember" xlink:label="us-gaap_DesignatedAsHedgingInstrumentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_HedgingDesignationAxis" xlink:label="us-gaap_HedgingDesignationAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashFlowHedgingMember" xlink:label="us-gaap_CashFlowHedgingMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeTable" xlink:label="us-gaap_DerivativeTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentRiskAxis" xlink:label="us-gaap_DerivativeInstrumentRiskAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeContractTypeDomain" xlink:label="us-gaap_DerivativeContractTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignExchangeForwardMember" xlink:label="us-gaap_ForeignExchangeForwardMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NondesignatedMember" xlink:label="us-gaap_NondesignatedMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_BalanceSheetHedgesMember" xlink:label="mksi_BalanceSheetHedgesMember"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis" xlink:to="us-gaap_HedgingRelationshipDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeLineItems" xlink:to="us-gaap_DerivativeAssetNotionalAmount" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_HedgingDesignationDomain" xlink:to="us-gaap_DesignatedAsHedgingInstrumentMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_HedgingDesignationAxis" xlink:to="us-gaap_HedgingDesignationDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_HedgingRelationshipDomain" xlink:to="us-gaap_CashFlowHedgingMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeTable" xlink:to="us-gaap_DerivativeInstrumentRiskAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract" xlink:to="us-gaap_DerivativeTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentRiskAxis" xlink:to="us-gaap_DerivativeContractTypeDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_ForeignExchangeForwardMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_HedgingDesignationDomain" xlink:to="us-gaap_NondesignatedMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_HedgingRelationshipDomain" xlink:to="mksi_BalanceSheetHedgesMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeTable" xlink:to="us-gaap_HedgingDesignationAxis" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeTable" xlink:to="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeTable" xlink:to="us-gaap_DerivativeLineItems" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedgeSummaryOfNetGainsLossesOnDerivativesDesignatedAsCashFlowHedgingInstrumentsDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis" xlink:label="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_HedgingRelationshipDomain" xlink:label="us-gaap_HedgingRelationshipDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignExchangeForwardMember" xlink:label="us-gaap_ForeignExchangeForwardMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipByIncomeStatementLocationByDerivativeInstrumentRiskTable" xlink:label="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipByIncomeStatementLocationByDerivativeInstrumentRiskTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsGainLossLineItems" xlink:label="us-gaap_DerivativeInstrumentsGainLossLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent" xlink:label="us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentRiskAxis" xlink:label="us-gaap_DerivativeInstrumentRiskAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeContractTypeDomain" xlink:label="us-gaap_DerivativeContractTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashFlowHedgingMember" xlink:label="us-gaap_CashFlowHedgingMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_InterestRateHegesMember" xlink:label="mksi_InterestRateHegesMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoCostOfRevenues" xlink:label="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoCostOfRevenues"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoInterestExpense" xlink:label="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoInterestExpense"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis" xlink:to="us-gaap_HedgingRelationshipDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_HedgingRelationshipDomain" xlink:to="us-gaap_ForeignExchangeForwardMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosureAbstract" xlink:to="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipByIncomeStatementLocationByDerivativeInstrumentRiskTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsGainLossLineItems" xlink:to="us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipByIncomeStatementLocationByDerivativeInstrumentRiskTable" xlink:to="us-gaap_DerivativeInstrumentRiskAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentRiskAxis" xlink:to="us-gaap_DerivativeContractTypeDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_CashFlowHedgingMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_HedgingRelationshipDomain" xlink:to="mksi_InterestRateHegesMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsGainLossLineItems" xlink:to="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoCostOfRevenues" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipByIncomeStatementLocationByDerivativeInstrumentRiskTable" xlink:to="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsGainLossLineItems" xlink:to="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoInterestExpense" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipByIncomeStatementLocationByDerivativeInstrumentRiskTable" xlink:to="us-gaap_DerivativeInstrumentsGainLossLineItems" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedgeSummaryOfNetLossesGainsOnDerivativesNotDesignatedAsHedgingInstrumentsDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DerivativeInstrumentsGainLossNotDesignatedAsHedgingInstrumentsLineItems" xlink:label="mksi_DerivativeInstrumentsGainLossNotDesignatedAsHedgingInstrumentsLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments" xlink:label="us-gaap_GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_HedgingDesignationDomain" xlink:label="us-gaap_HedgingDesignationDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NondesignatedMember" xlink:label="us-gaap_NondesignatedMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_HedgingDesignationAxis" xlink:label="us-gaap_HedgingDesignationAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsNotDesignatedAsHedgingInstrumentsAbstract" xlink:label="us-gaap_DerivativeInstrumentsNotDesignatedAsHedgingInstrumentsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DerivativeAndHedgingTable" xlink:label="mksi_DerivativeAndHedgingTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentRiskAxis" xlink:label="us-gaap_DerivativeInstrumentRiskAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeContractTypeDomain" xlink:label="us-gaap_DerivativeContractTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignExchangeForwardMember" xlink:label="us-gaap_ForeignExchangeForwardMember"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_DerivativeInstrumentsGainLossNotDesignatedAsHedgingInstrumentsLineItems" xlink:to="us-gaap_GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_HedgingDesignationDomain" xlink:to="us-gaap_NondesignatedMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_HedgingDesignationAxis" xlink:to="us-gaap_HedgingDesignationDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentsNotDesignatedAsHedgingInstrumentsAbstract" xlink:to="mksi_DerivativeAndHedgingTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_DerivativeAndHedgingTable" xlink:to="us-gaap_DerivativeInstrumentRiskAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentRiskAxis" xlink:to="us-gaap_DerivativeContractTypeDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_ForeignExchangeForwardMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_DerivativeAndHedgingTable" xlink:to="us-gaap_HedgingDesignationAxis" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_DerivativeAndHedgingTable" xlink:to="mksi_DerivativeInstrumentsGainLossNotDesignatedAsHedgingInstrumentsLineItems" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureInventoriesSummaryOfInventoriesDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="us-gaap_InventoryDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryRawMaterialsNetOfReserves" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract" xlink:to="us-gaap_InventoryRawMaterialsNetOfReserves" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract" xlink:to="us-gaap_InventoryWorkInProcessNetOfReserves" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract" xlink:to="us-gaap_InventoryFinishedGoodsNetOfReserves" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract" xlink:to="us-gaap_InventoryNet" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureInventoriesAdditionalInformationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="us-gaap_InventoryDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryWriteDown" xlink:label="us-gaap_InventoryWriteDown"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract" xlink:to="us-gaap_InventoryWriteDown" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosurePropertyPlantAndEquipmentSummaryOfPropertyPlantAndEquipmentDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="us-gaap_PropertyPlantAndEquipmentGross"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentAbstract" xlink:label="us-gaap_PropertyPlantAndEquipmentAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:label="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LandMember" xlink:label="us-gaap_LandMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BuildingAndBuildingImprovementsMember" xlink:label="us-gaap_BuildingAndBuildingImprovementsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="us-gaap_MachineryAndEquipmentMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FurnitureAndFixturesOfficeEquipmentAndSoftwareMember" xlink:label="mksi_FurnitureAndFixturesOfficeEquipmentAndSoftwareMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LeaseholdImprovementsMember" xlink:label="us-gaap_LeaseholdImprovementsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConstructionInProgressMember" xlink:label="us-gaap_ConstructionInProgressMember"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentGross" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentAbstract" xlink:to="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_LandMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:to="us-gaap_PropertyPlantAndEquipmentByTypeAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_BuildingAndBuildingImprovementsMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:to="us-gaap_PropertyPlantAndEquipmentLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentNet" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_MachineryAndEquipmentMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="mksi_FurnitureAndFixturesOfficeEquipmentAndSoftwareMember" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_LeaseholdImprovementsMember" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_ConstructionInProgressMember" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosurePropertyPlantAndEquipmentAdditionalInformationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentAbstract" xlink:label="us-gaap_PropertyPlantAndEquipmentAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_Depreciation" xlink:label="us-gaap_Depreciation"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentAbstract" xlink:to="us-gaap_Depreciation" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureLeasesScheduleOfLeasesDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LeaseCostAbstract" xlink:label="us-gaap_LeaseCostAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseCost" xlink:label="us-gaap_OperatingLeaseCost"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FinanceLeaseCosts" xlink:label="mksi_FinanceLeaseCosts"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermLeaseCost" xlink:label="us-gaap_ShortTermLeaseCost"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LeaseCost" xlink:label="us-gaap_LeaseCost"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_LeaseCostAbstract" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeaseCostAbstract" xlink:to="us-gaap_OperatingLeaseCost" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeaseCostAbstract" xlink:to="mksi_FinanceLeaseCosts" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeaseCostAbstract" xlink:to="us-gaap_ShortTermLeaseCost" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeaseCostAbstract" xlink:to="us-gaap_LeaseCost" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureLeasesSummaryOfSupplementalCashFlowInformationRelatedToLeasesDetails" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeasePayments" xlink:label="us-gaap_OperatingLeasePayments"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseInterestPaymentOnLiability" xlink:label="us-gaap_FinanceLeaseInterestPaymentOnLiability"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeasePrincipalPayments" xlink:label="us-gaap_FinanceLeasePrincipalPayments"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RightOfUseAssetObtainedInExchangeForFinanceLeaseLiability" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForFinanceLeaseLiability"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_OperatingLeasePayments" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_FinanceLeaseInterestPaymentOnLiability" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_FinanceLeasePrincipalPayments" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_RightOfUseAssetObtainedInExchangeForFinanceLeaseLiability" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureLeasesSummaryOfWeightedAverageRemainingTermsForAllLeasesDetails" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1" xlink:label="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent" xlink:label="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent" xlink:label="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureLeasesScheduleOfFutureLeasePaymentsDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:label="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:label="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseLiability" xlink:label="us-gaap_OperatingLeaseLiability"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiability" xlink:label="us-gaap_FinanceLeaseLiability"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_FinanceLeaseLiabilityStatementOfFinancialPositionExtensibleList"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDue" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_OperatingLeaseLiability" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiability" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityStatementOfFinancialPositionExtensibleList" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList" order="10" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureGoodwillAndIntangibleAssetsSummaryOfGoodwillAssociatedWithReportableSegmentsDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentDomain" xlink:label="us-gaap_SegmentDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_VacuumSolutionsDivisionMember" xlink:label="mksi_VacuumSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="us-gaap_StatementBusinessSegmentsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="us-gaap_SegmentReportingInformationLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillGross" xlink:label="us-gaap_GoodwillGross"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PhotonicsSolutionsDivisionMember" xlink:label="mksi_PhotonicsSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillTransfers" xlink:label="us-gaap_GoodwillTransfers"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MaterialsSolutionsDivisionMember" xlink:label="mksi_MaterialsSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillForeignCurrencyTranslationGainLoss" xlink:label="us-gaap_GoodwillForeignCurrencyTranslationGainLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillGross" xlink:label="us-gaap_GoodwillGross_3"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillImpairmentLoss" xlink:label="us-gaap_GoodwillImpairmentLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_6"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_Goodwill" xlink:label="us-gaap_Goodwill"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_VacuumSolutionsDivisionMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementBusinessSegmentsAxis" xlink:to="us-gaap_SegmentDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_StatementBusinessSegmentsAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:to="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillGross" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_PhotonicsSolutionsDivisionMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_SegmentReportingInformationLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillTransfers" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_MaterialsSolutionsDivisionMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillForeignCurrencyTranslationGainLoss" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillGross_3" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedPeriodStartLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillImpairmentLoss" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_6" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedPeriodEndLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_Goodwill" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureGoodwillAndIntangibleAssetsComponentsOfIntangibleAssetsDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CompletedTechnologyRightsMember" xlink:label="mksi_CompletedTechnologyRightsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsLineItems" xlink:label="us-gaap_FiniteLivedIntangibleAssetsLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsGross" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable" xlink:label="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CustomerRelationshipsMember" xlink:label="us-gaap_CustomerRelationshipsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ImpairmentOfIntangibleAssetsIndefinitelivedExcludingGoodwill" xlink:label="us-gaap_ImpairmentOfIntangibleAssetsIndefinitelivedExcludingGoodwill"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PatentsTrademarksTradeNamesAndOtherMember" xlink:label="mksi_PatentsTrademarksTradeNamesAndOtherMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ImpairmentOfIntangibleAssetIndefiniteLivedExcludingGoodwillStatementOfIncomeOrComprehensiveIncomeExtensibleEnumeration" xlink:label="us-gaap_ImpairmentOfIntangibleAssetIndefiniteLivedExcludingGoodwillStatementOfIncomeOrComprehensiveIncomeExtensibleEnumeration"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsForeignCurrencyTranslationGainLoss" xlink:label="us-gaap_FiniteLivedIntangibleAssetsForeignCurrencyTranslationGainLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="mksi_CompletedTechnologyRightsMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsLineItems" xlink:to="us-gaap_FiniteLivedIntangibleAssetsGross" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable" xlink:to="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:to="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:to="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="us-gaap_CustomerRelationshipsMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsLineItems" xlink:to="us-gaap_ImpairmentOfIntangibleAssetsIndefinitelivedExcludingGoodwill" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable" xlink:to="us-gaap_FiniteLivedIntangibleAssetsLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="mksi_PatentsTrademarksTradeNamesAndOtherMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsLineItems" xlink:to="us-gaap_ImpairmentOfIntangibleAssetIndefiniteLivedExcludingGoodwillStatementOfIncomeOrComprehensiveIncomeExtensibleEnumeration" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsLineItems" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsLineItems" xlink:to="us-gaap_FiniteLivedIntangibleAssetsForeignCurrencyTranslationGainLoss" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsLineItems" xlink:to="us-gaap_FiniteLivedIntangibleAssetsNet" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureGoodwillAndIntangibleAssetsAdditionalInformationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AtotechLimitedMember" xlink:label="mksi_AtotechLimitedMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ReportingUnitDomain" xlink:label="us-gaap_ReportingUnitDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EquipmentSolutionsBusinessMember" xlink:label="mksi_EquipmentSolutionsBusinessMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InProcessResearchAndDevelopmentMember" xlink:label="us-gaap_InProcessResearchAndDevelopmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ReportingUnitAxis" xlink:label="us-gaap_ReportingUnitAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_GoodwillAndIntangibleAssetsLineItems" xlink:label="mksi_GoodwillAndIntangibleAssetsLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NumberOfReportingUnits" xlink:label="us-gaap_NumberOfReportingUnits"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TrademarksAndTradeNamesMember" xlink:label="us-gaap_TrademarksAndTradeNamesMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_GoodwillAndIntangibleAssetsTable" xlink:label="mksi_GoodwillAndIntangibleAssetsTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="us-gaap_BusinessAcquisitionAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ElectronicsMember" xlink:label="mksi_ElectronicsMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CompletedTechnologyMember" xlink:label="mksi_CompletedTechnologyMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IntangibleAssetsFairValue" xlink:label="mksi_IntangibleAssetsFairValue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_GeneralMetalFinishingMember" xlink:label="mksi_GeneralMetalFinishingMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillImpairmentLoss" xlink:label="us-gaap_GoodwillImpairmentLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeMember" xlink:label="srt_RangeMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherReportingUnitsMember" xlink:label="mksi_OtherReportingUnitsMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IntangibleAssetsUsefulLifeFutureUndiscountedCashFlows" xlink:label="mksi_IntangibleAssetsUsefulLifeFutureUndiscountedCashFlows"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_WeightedAverageRevenueGrowthRateFutureUndiscountedCashFlows" xlink:label="mksi_WeightedAverageRevenueGrowthRateFutureUndiscountedCashFlows"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DiscountRateFutureUndiscountedCashFlows" xlink:label="mksi_DiscountRateFutureUndiscountedCashFlows"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AmortizationOfIntangibleAssets" xlink:label="us-gaap_AmortizationOfIntangibleAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_InProcessResearchAndDevelopmentReclassifiedIntoCompletedTechnology" xlink:label="mksi_InProcessResearchAndDevelopmentReclassifiedIntoCompletedTechnology"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IndefiniteLivedIntangibleAssetsExcludingGoodwill" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsExcludingGoodwill"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsGross" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetImpairment" xlink:label="us-gaap_GoodwillAndIntangibleAssetImpairment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsGross" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross_12"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ReportingUnitPercentageOfFairValueInExcessOfCarryingAmount" xlink:label="us-gaap_ReportingUnitPercentageOfFairValueInExcessOfCarryingAmount"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BusinessAcquisitionAcquireeDomain" xlink:to="mksi_AtotechLimitedMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReportingUnitDomain" xlink:to="mksi_EquipmentSolutionsBusinessMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="us-gaap_InProcessResearchAndDevelopmentMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReportingUnitAxis" xlink:to="us-gaap_ReportingUnitDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="us-gaap_NumberOfReportingUnits" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="us-gaap_TrademarksAndTradeNamesMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_GoodwillAndIntangibleAssetsTable" xlink:to="us-gaap_ReportingUnitAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:to="mksi_GoodwillAndIntangibleAssetsTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BusinessAcquisitionAxis" xlink:to="us-gaap_BusinessAcquisitionAcquireeDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:to="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis" xlink:to="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReportingUnitDomain" xlink:to="mksi_ElectronicsMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="mksi_CompletedTechnologyMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="mksi_IntangibleAssetsFairValue" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_GoodwillAndIntangibleAssetsTable" xlink:to="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReportingUnitDomain" xlink:to="mksi_GeneralMetalFinishingMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="us-gaap_GoodwillImpairmentLoss" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_GoodwillAndIntangibleAssetsTable" xlink:to="us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" order="2.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReportingUnitDomain" xlink:to="mksi_OtherReportingUnitsMember" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="mksi_IntangibleAssetsUsefulLifeFutureUndiscountedCashFlows" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_GoodwillAndIntangibleAssetsTable" xlink:to="us-gaap_BusinessAcquisitionAxis" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="mksi_WeightedAverageRevenueGrowthRateFutureUndiscountedCashFlows" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_GoodwillAndIntangibleAssetsTable" xlink:to="srt_RangeAxis" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="mksi_DiscountRateFutureUndiscountedCashFlows" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_GoodwillAndIntangibleAssetsTable" xlink:to="mksi_GoodwillAndIntangibleAssetsLineItems" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="us-gaap_AmortizationOfIntangibleAssets" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" order="6.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="mksi_InProcessResearchAndDevelopmentReclassifiedIntoCompletedTechnology" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="us-gaap_IndefiniteLivedIntangibleAssetsExcludingGoodwill" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="us-gaap_FiniteLivedIntangibleAssetsGross" order="10" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="us-gaap_GoodwillAndIntangibleAssetImpairment" order="11" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="us-gaap_FiniteLivedIntangibleAssetsGross_12" order="12" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="us-gaap_ReportingUnitPercentageOfFairValueInExcessOfCarryingAmount" order="13" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureGoodwillAndIntangibleAssetsEstimatedAmortizationExpenseDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:label="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseNextTwelveMonths" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearTwo" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearThree" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFour" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseYearFive" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GoodwillAndIntangibleAssetsDisclosureAbstract" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAmortizationExpenseAfterYearFive" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureProductWarrantiesProductWarrantyActivitiesDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PhotonControlMember" xlink:label="mksi_PhotonControlMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyLiabilityLineItems" xlink:label="us-gaap_ProductWarrantyLiabilityLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="us-gaap_ProductWarrantyAccrual"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="us-gaap_BusinessAcquisitionAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyLiabilityTable" xlink:label="us-gaap_ProductWarrantyLiabilityTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GuaranteesAbstract" xlink:label="us-gaap_GuaranteesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AtotechLimitedMember" xlink:label="mksi_AtotechLimitedMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyAccrualWarrantiesIssued" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyAccrualPeriodIncreaseDecrease" xlink:label="us-gaap_ProductWarrantyAccrualPeriodIncreaseDecrease"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="us-gaap_ProductWarrantyAccrual_3"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BusinessAcquisitionAcquireeDomain" xlink:to="mksi_PhotonControlMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantyLiabilityLineItems" xlink:to="us-gaap_ProductWarrantyAccrual" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BusinessAcquisitionAxis" xlink:to="us-gaap_BusinessAcquisitionAcquireeDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantyLiabilityTable" xlink:to="us-gaap_BusinessAcquisitionAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GuaranteesAbstract" xlink:to="us-gaap_ProductWarrantyLiabilityTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BusinessAcquisitionAcquireeDomain" xlink:to="mksi_AtotechLimitedMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantyLiabilityLineItems" xlink:to="us-gaap_ProductWarrantyAccrualWarrantiesIssued" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantyLiabilityTable" xlink:to="us-gaap_ProductWarrantyLiabilityLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantyLiabilityLineItems" xlink:to="us-gaap_ProductWarrantyAccrualPeriodIncreaseDecrease" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantyLiabilityLineItems" xlink:to="us-gaap_ProductWarrantyAccrual_3" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureProductWarrantiesAdditionalInformationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="us-gaap_BalanceSheetLocationDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherCurrentLiabilitiesMember" xlink:label="us-gaap_OtherCurrentLiabilitiesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BalanceSheetLocationAxis" xlink:label="us-gaap_BalanceSheetLocationAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyLiabilityLineItems" xlink:label="us-gaap_ProductWarrantyLiabilityLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyLiabilityTable" xlink:label="us-gaap_ProductWarrantyLiabilityTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GuaranteesAbstract" xlink:label="us-gaap_GuaranteesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherNoncurrentLiabilitiesMember" xlink:label="us-gaap_OtherNoncurrentLiabilitiesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyAccrualNoncurrent" xlink:label="us-gaap_ProductWarrantyAccrualNoncurrent"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BalanceSheetLocationDomain" xlink:to="us-gaap_OtherCurrentLiabilitiesMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BalanceSheetLocationAxis" xlink:to="us-gaap_BalanceSheetLocationDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantyLiabilityLineItems" xlink:to="us-gaap_ProductWarrantyAccrualClassifiedCurrent" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantyLiabilityTable" xlink:to="us-gaap_BalanceSheetLocationAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_GuaranteesAbstract" xlink:to="us-gaap_ProductWarrantyLiabilityTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BalanceSheetLocationDomain" xlink:to="us-gaap_OtherNoncurrentLiabilitiesMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantyLiabilityLineItems" xlink:to="us-gaap_ProductWarrantyAccrualNoncurrent" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantyLiabilityTable" xlink:to="us-gaap_ProductWarrantyLiabilityLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureDebtScheduleOfShortTermDebtDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfShortTermDebtTable" xlink:label="us-gaap_ScheduleOfShortTermDebtTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoanFacilityMember" xlink:label="mksi_TermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermDebtLineItems" xlink:label="us-gaap_ShortTermDebtLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermBorrowings" xlink:label="us-gaap_ShortTermBorrowings"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermBorrowingsAbstract" xlink:label="us-gaap_ShortTermBorrowingsAbstract"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShortTermDebtTable" xlink:to="us-gaap_DebtInstrumentAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermLoanFacilityMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShortTermDebtLineItems" xlink:to="us-gaap_ShortTermBorrowings" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShortTermBorrowingsAbstract" xlink:to="us-gaap_ScheduleOfShortTermDebtTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShortTermDebtTable" xlink:to="us-gaap_ShortTermDebtLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" order="2.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureDebtScheduleOfLongTermDebtDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentCarryingAmount" xlink:label="us-gaap_DebtInstrumentCarryingAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoanFacilityMember" xlink:label="mksi_TermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebtAbstract" xlink:label="us-gaap_LongTermDebtAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConvertibleDebtNoncurrent" xlink:label="us-gaap_ConvertibleDebtNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConvertibleDebtMember" xlink:label="us-gaap_ConvertibleDebtMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredFinanceCostsNoncurrentGross" xlink:label="us-gaap_DeferredFinanceCostsNoncurrentGross"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebt" xlink:label="us-gaap_LongTermDebt"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentCarryingAmount" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermLoanFacilityMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LongTermDebtAbstract" xlink:to="us-gaap_DebtInstrumentTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_ConvertibleDebtNoncurrent" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="us-gaap_ConvertibleDebtMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DeferredFinanceCostsNoncurrentGross" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" order="2.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LongTermDebt" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDebtCreditFacilitiesAdditionalInformationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AtotechMember" xlink:label="mksi_AtotechMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionDateOfAcquisitionAgreement1" xlink:label="us-gaap_BusinessAcquisitionDateOfAcquisitionAgreement1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingDomain" xlink:label="us-gaap_VestingDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UsdTrancheAMember" xlink:label="mksi_UsdTrancheAMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentRedemptionPeriodAxis" xlink:label="us-gaap_DebtInstrumentRedemptionPeriodAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentRedemptionPeriodDomain" xlink:label="us-gaap_DebtInstrumentRedemptionPeriodDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="us-gaap_DebtDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingAxis" xlink:label="us-gaap_VestingAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VariableRateDomain" xlink:label="us-gaap_VariableRateDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FederalFundsRateMember" xlink:label="mksi_FederalFundsRateMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_BaseRateBorrowingsMember" xlink:label="mksi_BaseRateBorrowingsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CreditFacilityAxis" xlink:label="us-gaap_CreditFacilityAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CreditFacilityDomain" xlink:label="us-gaap_CreditFacilityDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncrementalRevolvingCommitmentsMember" xlink:label="mksi_IncrementalRevolvingCommitmentsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VariableRateAxis" xlink:label="us-gaap_VariableRateAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentRiskAxis" xlink:label="us-gaap_DerivativeInstrumentRiskAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeContractTypeDomain" xlink:label="us-gaap_DerivativeContractTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_Years3And4Member" xlink:label="mksi_Years3And4Member"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="us-gaap_BusinessAcquisitionAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OriginalIssueDiscountMember" xlink:label="mksi_OriginalIssueDiscountMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UsdTrancheBMember" xlink:label="mksi_UsdTrancheBMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermSofrRatePlusApplicableCreditSpreadAdjustmentMember" xlink:label="mksi_TermSofrRatePlusApplicableCreditSpreadAdjustmentMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermSofrBorrowingsMember" xlink:label="mksi_TermSofrBorrowingsMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_Year5Member" xlink:label="mksi_Year5Member"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentInterestRateTerms" xlink:label="us-gaap_DebtInstrumentInterestRateTerms"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UsdTrancheBFirstAmmendmentMember" xlink:label="mksi_UsdTrancheBFirstAmmendmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestRateFloorMember" xlink:label="us-gaap_InterestRateFloorMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_BorrowingsUnderEuroTrancheBMember" xlink:label="mksi_BorrowingsUnderEuroTrancheBMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AnnualStepDownMember" xlink:label="mksi_AnnualStepDownMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeMember" xlink:label="srt_RangeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentBasisSpreadOnVariableRate1" xlink:label="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EuroTrancheBMember" xlink:label="mksi_EuroTrancheBMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EuriborRateFloorMember" xlink:label="mksi_EuriborRateFloorMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_BorrowingsUnderNewRevolvingFacilityMember" xlink:label="mksi_BorrowingsUnderNewRevolvingFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_StepUpMember" xlink:label="mksi_StepUpMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OriginalIssueDiscountPercentageOfPrincipalAmount" xlink:label="mksi_OriginalIssueDiscountPercentageOfPrincipalAmount"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EuroTrancheMember" xlink:label="mksi_EuroTrancheMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BaseRateMember" xlink:label="us-gaap_BaseRateMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_BorrowingsUnderRevolvingFacilityMember" xlink:label="mksi_BorrowingsUnderRevolvingFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_InitialCommitmentFeePercentage" xlink:label="mksi_InitialCommitmentFeePercentage"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FirstLienNetLeverageRatioMember" xlink:label="mksi_FirstLienNetLeverageRatioMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoansUnderNewTermLoanFacilityMember" xlink:label="mksi_TermLoansUnderNewTermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_LoanVoluntaryPrepaymentAmount" xlink:label="mksi_LoanVoluntaryPrepaymentAmount"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncrementalUsdTrancheBMember" xlink:label="mksi_IncrementalUsdTrancheBMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoansUnderTermLoanFacilityMember" xlink:label="mksi_TermLoansUnderTermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredFinanceCostsGross" xlink:label="us-gaap_DeferredFinanceCostsGross"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncrementalTrancheBLoansMember" xlink:label="mksi_IncrementalTrancheBLoansMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NewRevolvingFacilityMember" xlink:label="mksi_NewRevolvingFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncrementalTrancheBLoansSecondAmendmentMember" xlink:label="mksi_IncrementalTrancheBLoansSecondAmendmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevolvingCreditFacilityMember" xlink:label="us-gaap_RevolvingCreditFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PrepaymentPremiumPercentageOfAggregatePrincipalAmount" xlink:label="mksi_PrepaymentPremiumPercentageOfAggregatePrincipalAmount"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncrementalTrancheBLoansFourthAmendmentMember" xlink:label="mksi_IncrementalTrancheBLoansFourthAmendmentMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoanFacilityMember" xlink:label="mksi_TermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduledQuarterlyPaymentsPercentageOfOriginalPrincipalAmount" xlink:label="mksi_ScheduledQuarterlyPaymentsPercentageOfOriginalPrincipalAmount"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NewTermLoanFacilityMember" xlink:label="mksi_NewTermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentPeriodicPaymentPrincipal" xlink:label="us-gaap_DebtInstrumentPeriodicPaymentPrincipal"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PriorTermLoanFacilityMember" xlink:label="mksi_PriorTermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredFinanceCostsNoncurrentNet" xlink:label="us-gaap_DeferredFinanceCostsNoncurrentNet"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DebtIssuanceCostsAmortizationPeriod" xlink:label="mksi_DebtIssuanceCostsAmortizationPeriod"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_LineOfCreditFacilityMinimumAdditionalBorrowingCapacity" xlink:label="mksi_LineOfCreditFacilityMinimumAdditionalBorrowingCapacity"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MinimumPercentageOfEarningsBeforeInterestTaxesDepreciationAndAmortization" xlink:label="mksi_MinimumPercentageOfEarningsBeforeInterestTaxesDepreciationAndAmortization"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RatioOfIndebtednessToNetCapital1" xlink:label="us-gaap_RatioOfIndebtednessToNetCapital1"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PercentageOfAggregateAmountOfAllCommitments" xlink:label="mksi_PercentageOfAggregateAmountOfAllCommitments"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCredit" xlink:label="us-gaap_LineOfCredit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentAnnualPrincipalPayment" xlink:label="us-gaap_DebtInstrumentAnnualPrincipalPayment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentPeriodicPayment" xlink:label="us-gaap_DebtInstrumentPeriodicPayment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentFaceAmount" xlink:label="us-gaap_DebtInstrumentFaceAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCreditFacilityIncreaseDecreaseForPeriodNet" xlink:label="us-gaap_LineOfCreditFacilityIncreaseDecreaseForPeriodNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermDebtRefinancedDescription" xlink:label="us-gaap_ShortTermDebtRefinancedDescription"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermDebtRefinancedAmount" xlink:label="us-gaap_ShortTermDebtRefinancedAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentInterestRateIncreaseDecrease" xlink:label="us-gaap_DebtInstrumentInterestRateIncreaseDecrease"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtWeightedAverageInterestRate" xlink:label="us-gaap_DebtWeightedAverageInterestRate"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredFinancingCostsInLongTermDebt" xlink:label="mksi_DeferredFinancingCostsInLongTermDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentMaturityDate" xlink:label="us-gaap_DebtInstrumentMaturityDate"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BusinessAcquisitionAcquireeDomain" xlink:to="mksi_AtotechMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_BusinessAcquisitionDateOfAcquisitionAgreement1" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_UsdTrancheAMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentRedemptionPeriodAxis" xlink:to="us-gaap_DebtInstrumentRedemptionPeriodDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtDisclosureAbstract" xlink:to="us-gaap_DebtInstrumentTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_VestingAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VariableRateDomain" xlink:to="mksi_FederalFundsRateMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_BaseRateBorrowingsMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CreditFacilityAxis" xlink:to="us-gaap_CreditFacilityDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CreditFacilityDomain" xlink:to="mksi_IncrementalRevolvingCommitmentsMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VestingAxis" xlink:to="us-gaap_VestingDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VariableRateAxis" xlink:to="us-gaap_VariableRateDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeInstrumentRiskAxis" xlink:to="us-gaap_DerivativeContractTypeDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentRedemptionPeriodDomain" xlink:to="mksi_Years3And4Member" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BusinessAcquisitionAxis" xlink:to="us-gaap_BusinessAcquisitionAcquireeDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="mksi_OriginalIssueDiscountMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_UsdTrancheBMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_BusinessAcquisitionAxis" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VariableRateDomain" xlink:to="mksi_TermSofrRatePlusApplicableCreditSpreadAdjustmentMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermSofrBorrowingsMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentRedemptionPeriodDomain" xlink:to="mksi_Year5Member" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentInterestRateTerms" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_UsdTrancheBFirstAmmendmentMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_VariableRateAxis" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VariableRateDomain" xlink:to="us-gaap_InterestRateFloorMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_BorrowingsUnderEuroTrancheBMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" order="2.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentRedemptionPeriodDomain" xlink:to="mksi_AnnualStepDownMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" order="2.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_EuroTrancheBMember" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DerivativeInstrumentRiskAxis" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VariableRateDomain" xlink:to="mksi_EuriborRateFloorMember" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_BorrowingsUnderNewRevolvingFacilityMember" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentRedemptionPeriodDomain" xlink:to="mksi_StepUpMember" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_OriginalIssueDiscountPercentageOfPrincipalAmount" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_EuroTrancheMember" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentAxis" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VariableRateDomain" xlink:to="us-gaap_BaseRateMember" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_BorrowingsUnderRevolvingFacilityMember" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_InitialCommitmentFeePercentage" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_FirstLienNetLeverageRatioMember" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentRedemptionPeriodAxis" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermLoansUnderNewTermLoanFacilityMember" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_LoanVoluntaryPrepaymentAmount" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_IncrementalUsdTrancheBMember" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="srt_RangeAxis" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermLoansUnderTermLoanFacilityMember" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" order="6.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DeferredFinanceCostsGross" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_IncrementalTrancheBLoansMember" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_CreditFacilityAxis" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_NewRevolvingFacilityMember" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" order="7.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_GainsLossesOnExtinguishmentOfDebt" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_IncrementalTrancheBLoansSecondAmendmentMember" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentLineItems" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="us-gaap_RevolvingCreditFacilityMember" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_PrepaymentPremiumPercentageOfAggregatePrincipalAmount" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_IncrementalTrancheBLoansFourthAmendmentMember" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermLoanFacilityMember" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_ScheduledQuarterlyPaymentsPercentageOfOriginalPrincipalAmount" order="10" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_NewTermLoanFacilityMember" order="10" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentPeriodicPaymentPrincipal" order="11" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_PriorTermLoanFacilityMember" order="11" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DeferredFinanceCostsNoncurrentNet" order="12" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_DebtIssuanceCostsAmortizationPeriod" order="13" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_LineOfCreditFacilityMinimumAdditionalBorrowingCapacity" order="14" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_MinimumPercentageOfEarningsBeforeInterestTaxesDepreciationAndAmortization" order="15" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_RatioOfIndebtednessToNetCapital1" order="16" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_PercentageOfAggregateAmountOfAllCommitments" order="17" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LineOfCredit" order="18" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentAnnualPrincipalPayment" order="19" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentPeriodicPayment" order="20" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentFaceAmount" order="21" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LineOfCreditFacilityIncreaseDecreaseForPeriodNet" order="22" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_ShortTermDebtRefinancedDescription" order="23" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_ShortTermDebtRefinancedAmount" order="24" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentInterestRateIncreaseDecrease" order="25" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtWeightedAverageInterestRate" order="26" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_DeferredFinancingCostsInLongTermDebt" order="27" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentMaturityDate" order="28" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDebtConvertibleSeniorNotesAdditionalInformationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentFaceAmount" xlink:label="us-gaap_DebtInstrumentFaceAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingDomain" xlink:label="us-gaap_VestingDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UsdTrancheBMember" xlink:label="mksi_UsdTrancheBMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="us-gaap_DebtDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCreditFacilityLenderDomain" xlink:label="us-gaap_LineOfCreditFacilityLenderDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IndentureAndTheNotesMember" xlink:label="mksi_IndentureAndTheNotesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ConvertibleSeniorNotesDue2030Member" xlink:label="mksi_ConvertibleSeniorNotesDue2030Member"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MeasurementInputTypeDomain" xlink:label="us-gaap_MeasurementInputTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MeasurementPeriodMember" xlink:label="mksi_MeasurementPeriodMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingAxis" xlink:label="us-gaap_VestingAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MeasurementInputTypeAxis" xlink:label="us-gaap_MeasurementInputTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCreditFacilityAxis" xlink:label="us-gaap_LineOfCreditFacilityAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentIssuedPrincipal" xlink:label="us-gaap_DebtInstrumentIssuedPrincipal"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CappedCallTransactionsMember" xlink:label="mksi_CappedCallTransactionsMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoanFacilityNetMember" xlink:label="mksi_TermLoanFacilityNetMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DebtInstrumentIssuedPrincipalOptionToPurchase" xlink:label="mksi_DebtInstrumentIssuedPrincipalOptionToPurchase"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeMember" xlink:label="srt_RangeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProceedsFromIssuanceOfDebt" xlink:label="us-gaap_ProceedsFromIssuanceOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PaymentsForCostOfCappedCallTransactions" xlink:label="mksi_PaymentsForCostOfCappedCallTransactions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RepaymentsOfDebt" xlink:label="us-gaap_RepaymentsOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentInterestRateStatedPercentage" xlink:label="us-gaap_DebtInstrumentInterestRateStatedPercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentFrequencyOfPeriodicPayment" xlink:label="us-gaap_DebtInstrumentFrequencyOfPeriodicPayment"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" xlink:label="mksi_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentMaturityDate" xlink:label="us-gaap_DebtInstrumentMaturityDate"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentRedemptionPricePercentage" xlink:label="us-gaap_DebtInstrumentRedemptionPricePercentage"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DebtInstrumentConvertibleConversionPricePercentage" xlink:label="mksi_DebtInstrumentConvertibleConversionPricePercentage"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfTradingDays" xlink:label="mksi_NumberOfTradingDays"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfConsecutiveTradingDays" xlink:label="mksi_NumberOfConsecutiveTradingDays"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentConvertibleTermsOfConversionFeature" xlink:label="us-gaap_DebtInstrumentConvertibleTermsOfConversionFeature"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DebtInstrumentConversionRateShares" xlink:label="mksi_DebtInstrumentConversionRateShares"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentConvertibleConversionPrice1" xlink:label="us-gaap_DebtInstrumentConvertibleConversionPrice1"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DebtInstrumentConvertibleApplicableConversionPrice" xlink:label="mksi_DebtInstrumentConvertibleApplicableConversionPrice"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_RepurchaseOfDebtPercentage" xlink:label="mksi_RepurchaseOfDebtPercentage"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EstimatedAggregatePrincipalAmountPercentage" xlink:label="mksi_EstimatedAggregatePrincipalAmountPercentage"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CappedCallTransactionReductionOrOffsetPerShare" xlink:label="mksi_CappedCallTransactionReductionOrOffsetPerShare"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DebtInstrumentPremiumPercentage" xlink:label="mksi_DebtInstrumentPremiumPercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SaleOfStockPricePerShare" xlink:label="us-gaap_SaleOfStockPricePerShare"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CostToPurchaseCappedCallTransactions" xlink:label="mksi_CostToPurchaseCappedCallTransactions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredFinanceCostsNoncurrentNet" xlink:label="us-gaap_DeferredFinanceCostsNoncurrentNet"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentFaceAmount" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_UsdTrancheBMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtDisclosureAbstract" xlink:to="us-gaap_DebtInstrumentTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="srt_RangeAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LineOfCreditFacilityLenderDomain" xlink:to="mksi_IndentureAndTheNotesMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_ConvertibleSeniorNotesDue2030Member" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MeasurementInputTypeDomain" xlink:to="mksi_MeasurementPeriodMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VestingAxis" xlink:to="us-gaap_VestingDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MeasurementInputTypeAxis" xlink:to="us-gaap_MeasurementInputTypeDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LineOfCreditFacilityAxis" xlink:to="us-gaap_LineOfCreditFacilityLenderDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentIssuedPrincipal" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_LineOfCreditFacilityAxis" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LineOfCreditFacilityLenderDomain" xlink:to="mksi_CappedCallTransactionsMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermLoanFacilityNetMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_DebtInstrumentIssuedPrincipalOptionToPurchase" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_MeasurementInputTypeAxis" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" order="2.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" order="2.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_ProceedsFromIssuanceOfDebt" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentAxis" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_PaymentsForCostOfCappedCallTransactions" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_VestingAxis" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_RepaymentsOfDebt" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentLineItems" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_GainsLossesOnExtinguishmentOfDebt" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" order="6.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentInterestRateStatedPercentage" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" order="7.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentFrequencyOfPeriodicPayment" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentMaturityDate" order="10" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentRedemptionPricePercentage" order="11" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_DebtInstrumentConvertibleConversionPricePercentage" order="12" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_NumberOfTradingDays" order="13" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_NumberOfConsecutiveTradingDays" order="14" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentConvertibleTermsOfConversionFeature" order="15" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_DebtInstrumentConversionRateShares" order="16" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentConvertibleConversionPrice1" order="17" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_DebtInstrumentConvertibleApplicableConversionPrice" order="18" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_RepurchaseOfDebtPercentage" order="19" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_EstimatedAggregatePrincipalAmountPercentage" order="20" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_CappedCallTransactionReductionOrOffsetPerShare" order="21" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_DebtInstrumentPremiumPercentage" order="22" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_SaleOfStockPricePerShare" order="23" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_CostToPurchaseCappedCallTransactions" order="24" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DeferredFinanceCostsNoncurrentNet" order="25" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDebtScheduleOfInterestExpenseDetails" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestExpenseDebtExcludingAmortization" xlink:label="us-gaap_InterestExpenseDebtExcludingAmortization"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoanFacilityMember" xlink:label="mksi_TermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestExpenseDebtAbstract" xlink:label="us-gaap_InterestExpenseDebtAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AmortizationOfFinancingCosts" xlink:label="us-gaap_AmortizationOfFinancingCosts"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ConvertibleSeniorNotesDue2030Member" xlink:label="mksi_ConvertibleSeniorNotesDue2030Member"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestExpenseDebt" xlink:label="us-gaap_InterestExpenseDebt"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherInterestIncomeExpenseNet" xlink:label="mksi_OtherInterestIncomeExpenseNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_InterestExpenseDebtExcludingAmortization" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermLoanFacilityMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InterestExpenseDebtAbstract" xlink:to="us-gaap_DebtInstrumentTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_AmortizationOfFinancingCosts" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_ConvertibleSeniorNotesDue2030Member" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_InterestExpenseDebt" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" order="2.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_OtherInterestIncomeExpenseNet" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_InterestExpense" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureDebtLinesOfCreditAndBorrowingArrangementsAdditionalInformationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_LineOfCreditFacilityRenewalPeriod" xlink:label="mksi_LineOfCreditFacilityRenewalPeriod"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/exch/2025/exch-2025.xsd#exch_JPBX" xlink:label="exch_JPBX"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="us-gaap_DebtDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CreditFacilityAxis" xlink:label="us-gaap_CreditFacilityAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CreditFacilityDomain" xlink:label="us-gaap_CreditFacilityDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevolvingCreditFacilityMember" xlink:label="us-gaap_RevolvingCreditFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCredit" xlink:label="us-gaap_LineOfCredit"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_LineOfCreditFacilityRenewalPeriod" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain" xlink:to="exch_JPBX" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtDisclosureAbstract" xlink:to="us-gaap_DebtInstrumentTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_CreditFacilityAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_StatementGeographicalAxis" xlink:to="srt_SegmentGeographicalDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CreditFacilityAxis" xlink:to="us-gaap_CreditFacilityDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CreditFacilityDomain" xlink:to="us-gaap_RevolvingCreditFacilityMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="srt_StatementGeographicalAxis" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LineOfCredit" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentLineItems" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureDebtScheduleOfContractualMaturitiesOfDebtObligationsDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MaturitiesOfLongTermDebtAbstract" xlink:label="us-gaap_MaturitiesOfLongTermDebtAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInNextTwelveMonths" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInNextTwelveMonths"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearTwo" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearTwo"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearThree" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearThree"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFour" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFour"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFive" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFive"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFive" xlink:label="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFive"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MaturitiesOfLongTermDebtAbstract" xlink:to="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInNextTwelveMonths" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MaturitiesOfLongTermDebtAbstract" xlink:to="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearTwo" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MaturitiesOfLongTermDebtAbstract" xlink:to="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearThree" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MaturitiesOfLongTermDebtAbstract" xlink:to="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFour" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MaturitiesOfLongTermDebtAbstract" xlink:to="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalInYearFive" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MaturitiesOfLongTermDebtAbstract" xlink:to="us-gaap_LongTermDebtMaturitiesRepaymentsOfPrincipalAfterYearFive" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureOtherCurrentLiabilitiesSummaryOfOtherCurrentLiabilitiesDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherLiabilitiesCurrentAbstract" xlink:label="us-gaap_OtherLiabilitiesCurrentAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ContractWithCustomerLiabilityCurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TaxesPayableCurrent" xlink:label="us-gaap_TaxesPayableCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccruedLiabilitiesCurrent" xlink:label="us-gaap_AccruedLiabilitiesCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherSundryLiabilitiesCurrent" xlink:label="us-gaap_OtherSundryLiabilitiesCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherLiabilitiesCurrent" xlink:label="us-gaap_OtherLiabilitiesCurrent"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherLiabilitiesCurrentAbstract" xlink:to="us-gaap_EmployeeRelatedLiabilitiesCurrent" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherLiabilitiesCurrentAbstract" xlink:to="us-gaap_ContractWithCustomerLiabilityCurrent" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherLiabilitiesCurrentAbstract" xlink:to="us-gaap_TaxesPayableCurrent" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherLiabilitiesCurrentAbstract" xlink:to="us-gaap_AccruedLiabilitiesCurrent" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherLiabilitiesCurrentAbstract" xlink:to="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherLiabilitiesCurrentAbstract" xlink:to="us-gaap_OtherSundryLiabilitiesCurrent" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherLiabilitiesCurrentAbstract" xlink:to="us-gaap_OtherLiabilitiesCurrent" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureIncomeTaxesComponentsOfIncomeLossBeforeIncomeTaxesAndRelatedProvisionBenefitForIncomeTaxesDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredFederalIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredFederalIncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CurrentFederalTaxExpenseBenefit" xlink:label="us-gaap_CurrentFederalTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CurrentStateAndLocalTaxExpenseBenefit" xlink:label="us-gaap_CurrentStateAndLocalTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredForeignIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredForeignIncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CurrentForeignTaxExpenseBenefit" xlink:label="us-gaap_CurrentForeignTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CurrentIncomeTaxExpenseBenefit" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:to="us-gaap_DeferredFederalIncomeTaxExpenseBenefit" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:to="us-gaap_CurrentFederalTaxExpenseBenefit" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:to="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:to="us-gaap_CurrentStateAndLocalTaxExpenseBenefit" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestmentsAbstract" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:to="us-gaap_DeferredForeignIncomeTaxExpenseBenefit" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:to="us-gaap_CurrentForeignTaxExpenseBenefit" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefit" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:to="us-gaap_CurrentIncomeTaxExpenseBenefit" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefitContinuingOperationsAbstract" xlink:to="us-gaap_IncomeTaxExpenseBenefit" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureIncomeTaxesReconciliationOfCompanySEffectiveTaxRateToUSFederalStatutoryRateDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityAxis" xlink:label="us-gaap_IncomeTaxAuthorityAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityDomain" xlink:label="us-gaap_IncomeTaxAuthorityDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxDisclosureLineItems" xlink:label="mksi_IncomeTaxDisclosureLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" xlink:label="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxDisclosureTable" xlink:label="mksi_IncomeTaxDisclosureTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_CN" xlink:label="country_CN"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes" xlink:label="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_DE" xlink:label="country_DE"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxReconciliationIntercompanyRoyalty" xlink:label="mksi_IncomeTaxReconciliationIntercompanyRoyalty"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_HK" xlink:label="country_HK"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesAmount" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_IL" xlink:label="country_IL"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxReconciliationAuditSettlementRelatedToIntercompanyTransactions" xlink:label="mksi_IncomeTaxReconciliationAuditSettlementRelatedToIntercompanyTransactions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_KR" xlink:label="country_KR"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate" xlink:label="us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_NL" xlink:label="country_NL"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationOtherAdjustments" xlink:label="us-gaap_IncomeTaxReconciliationOtherAdjustments"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_TW" xlink:label="country_TW"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential" xlink:label="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxReconciliationRealizedForeignExchangeGainLoss" xlink:label="mksi_IncomeTaxReconciliationRealizedForeignExchangeGainLoss"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdictions" xlink:label="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdictions"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdiction" xlink:label="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdiction"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationBeatAmount" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationBeatAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxReconciliationSubpartFNetOfForeignTaxCredits" xlink:label="mksi_IncomeTaxReconciliationSubpartFNetOfForeignTaxCredits"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherAmount" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationTaxCreditsResearch" xlink:label="us-gaap_IncomeTaxReconciliationTaxCreditsResearch"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxReconciliationForeignTaxCreditRelatedToWithholdingTaxes" xlink:label="mksi_IncomeTaxReconciliationForeignTaxCreditRelatedToWithholdingTaxes"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationNondeductibleExpenseOther" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseOther"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationTaxContingencies" xlink:label="us-gaap_IncomeTaxReconciliationTaxContingencies"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationOtherReconcilingItems" xlink:label="us-gaap_IncomeTaxReconciliationOtherReconcilingItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationStateAndLocalIncomeTaxes" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationStateAndLocalIncomeTaxes"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationIntercompanyRoyalty" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationIntercompanyRoyalty"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesNetOfForeignTaxCredits" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesNetOfForeignTaxCredits"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationAuditSettlementRelatedToIntercompanyTransactions" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationAuditSettlementRelatedToIntercompanyTransactions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationChangeInEnactedTaxRate" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInEnactedTaxRate"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationOtherAdjustments" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationOtherAdjustments"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationForeignIncomeTaxRateDifferential" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationForeignIncomeTaxRateDifferential"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationChangeInDeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInDeferredTaxAssetsValuationAllowance"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationRealizedForeignExchangeGainLoss" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationRealizedForeignExchangeGainLoss"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationForeignTaxEffectsOtherJurisdictions" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxEffectsOtherJurisdictions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationBeatPercent" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationBeatPercent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationFdiiPercent" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiPercent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationSubpartFNetOfForeignTaxCredits" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationSubpartFNetOfForeignTaxCredits"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherPercent" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherPercent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationTaxCreditsResearch" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCreditsResearch"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationForeignTaxCreditRelatedToWithholdingTaxes" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxCreditRelatedToWithholdingTaxes"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseOther" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseOther"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationTaxContingencies" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationTaxContingencies"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseShareBasedCompensationCost" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseShareBasedCompensationCost"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationOtherReconcilingItemsPercent" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationOtherReconcilingItemsPercent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationTaxCredits" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCredits"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationChangeInIncomeTaxReserves" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationChangeInIncomeTaxReserves"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationBaseErosionWaiverOfDeductions" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationBaseErosionWaiverOfDeductions"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationExecutiveCompensation" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationExecutiveCompensation"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ForeignSubpartFIncomeTaxedInUSNetOfForeignTaxCredits" xlink:label="mksi_ForeignSubpartFIncomeTaxedInUSNetOfForeignTaxCredits"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationGiltiPercent" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationGiltiPercent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseImpairmentLosses" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseImpairmentLosses"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:label="us-gaap_EffectiveIncomeTaxRateContinuingOperations"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityAxis" xlink:to="us-gaap_IncomeTaxAuthorityDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureTable" xlink:to="us-gaap_IncomeTaxAuthorityAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="mksi_IncomeTaxDisclosureTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_CN" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureTable" xlink:to="mksi_IncomeTaxDisclosureLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_DE" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_IncomeTaxReconciliationIntercompanyRoyalty" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_HK" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesAmount" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_IL" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_IncomeTaxReconciliationAuditSettlementRelatedToIntercompanyTransactions" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_KR" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_NL" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationOtherAdjustments" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_TW" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_IncomeTaxReconciliationRealizedForeignExchangeGainLoss" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdictions" order="10" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdiction" order="11" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationBeatAmount" order="12" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount" order="13" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_IncomeTaxReconciliationSubpartFNetOfForeignTaxCredits" order="14" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherAmount" order="15" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationTaxCreditsResearch" order="16" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_IncomeTaxReconciliationForeignTaxCreditRelatedToWithholdingTaxes" order="17" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" order="18" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationNondeductibleExpenseOther" order="19" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationTaxContingencies" order="20" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationOtherReconcilingItems" order="21" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxExpenseBenefit" order="22" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate" order="23" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationStateAndLocalIncomeTaxes" order="24" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationIntercompanyRoyalty" order="25" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesNetOfForeignTaxCredits" order="26" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationAuditSettlementRelatedToIntercompanyTransactions" order="27" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInEnactedTaxRate" order="28" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationOtherAdjustments" order="29" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationForeignIncomeTaxRateDifferential" order="30" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInDeferredTaxAssetsValuationAllowance" order="31" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationRealizedForeignExchangeGainLoss" order="32" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxEffectsOtherJurisdictions" order="33" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationBeatPercent" order="34" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiPercent" order="35" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationSubpartFNetOfForeignTaxCredits" order="36" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherPercent" order="37" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCreditsResearch" order="38" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxCreditRelatedToWithholdingTaxes" order="39" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseOther" order="40" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationTaxContingencies" order="41" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseShareBasedCompensationCost" order="42" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationOtherReconcilingItemsPercent" order="43" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCredits" order="44" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationChangeInIncomeTaxReserves" order="45" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationBaseErosionWaiverOfDeductions" order="46" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationExecutiveCompensation" order="47" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_ForeignSubpartFIncomeTaxedInUSNetOfForeignTaxCredits" order="48" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationGiltiPercent" order="49" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseImpairmentLosses" order="50" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateContinuingOperations" order="51" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureIncomeTaxesSignificantComponentsOfDeferredTaxAssetsAndDeferredTaxLiabilitiesDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxesDisclosureAbstract" xlink:label="mksi_IncomeTaxesDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xlink:label="us-gaap_ComponentsOfDeferredTaxAssetsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxAssetInterestCarryforward" xlink:label="us-gaap_DeferredTaxAssetInterestCarryforward"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract" xlink:label="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets" xlink:label="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxAssetsOperatingLossCarryforwards" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxLiabilityRightOfUseAsset" xlink:label="mksi_DeferredTaxLiabilityRightOfUseAsset"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxAssetsTaxCreditCarryforwards" xlink:label="us-gaap_DeferredTaxAssetsTaxCreditCarryforwards"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings" xlink:label="us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxAssetsCapitalizedResearchExpenditures" xlink:label="mksi_DeferredTaxAssetsCapitalizedResearchExpenditures"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxLiabilitiesLoanCosts" xlink:label="mksi_DeferredTaxLiabilitiesLoanCosts"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxAssetsLeaseLiability" xlink:label="mksi_DeferredTaxAssetsLeaseLiability"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxLiabilitiesDepreciationAndAmortization" xlink:label="mksi_DeferredTaxLiabilitiesDepreciationAndAmortization"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxAssetsDepreciationAndAmortization" xlink:label="mksi_DeferredTaxAssetsDepreciationAndAmortization"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredIncomeTaxLiabilities" xlink:label="us-gaap_DeferredIncomeTaxLiabilities"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxAssetsInventoryAndWarrantyReserves" xlink:label="mksi_DeferredTaxAssetsInventoryAndWarrantyReserves"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxLiabilities" xlink:label="us-gaap_DeferredTaxLiabilities"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxAssetsAccruedExpensesAndOtherReserves" xlink:label="mksi_DeferredTaxAssetsAccruedExpensesAndOtherReserves"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxAssetsOther" xlink:label="us-gaap_DeferredTaxAssetsOther"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxAssetsGross" xlink:label="us-gaap_DeferredTaxAssetsGross"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxAssetsNet" xlink:label="us-gaap_DeferredTaxAssetsNet"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxesDisclosureAbstract" xlink:to="us-gaap_ComponentsOfDeferredTaxAssetsAbstract" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xlink:to="us-gaap_DeferredTaxAssetInterestCarryforward" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract" xlink:to="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxesDisclosureAbstract" xlink:to="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xlink:to="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract" xlink:to="mksi_DeferredTaxLiabilityRightOfUseAsset" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xlink:to="us-gaap_DeferredTaxAssetsTaxCreditCarryforwards" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract" xlink:to="us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xlink:to="mksi_DeferredTaxAssetsCapitalizedResearchExpenditures" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract" xlink:to="mksi_DeferredTaxLiabilitiesLoanCosts" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xlink:to="mksi_DeferredTaxAssetsLeaseLiability" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract" xlink:to="mksi_DeferredTaxLiabilitiesDepreciationAndAmortization" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xlink:to="mksi_DeferredTaxAssetsDepreciationAndAmortization" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract" xlink:to="us-gaap_DeferredIncomeTaxLiabilities" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedTotalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xlink:to="mksi_DeferredTaxAssetsInventoryAndWarrantyReserves" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxLiabilitiesAbstract" xlink:to="us-gaap_DeferredTaxLiabilities" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedTotalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xlink:to="mksi_DeferredTaxAssetsAccruedExpensesAndOtherReserves" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xlink:to="us-gaap_DeferredTaxAssetsOther" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xlink:to="us-gaap_DeferredTaxAssetsGross" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xlink:to="us-gaap_DeferredTaxAssetsValuationAllowance" order="10" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ComponentsOfDeferredTaxAssetsAbstract" xlink:to="us-gaap_DeferredTaxAssetsNet" order="11" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureIncomeTaxesAdditionalInformationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AtotechLimitedMember" xlink:label="mksi_AtotechLimitedMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityAxis" xlink:label="us-gaap_IncomeTaxAuthorityAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityDomain" xlink:label="us-gaap_IncomeTaxAuthorityDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxesLineItems" xlink:label="mksi_IncomeTaxesLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TaxCreditCarryforwardAmount" xlink:label="us-gaap_TaxCreditCarryforwardAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityNameAxis" xlink:label="us-gaap_IncomeTaxAuthorityNameAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityNameDomain" xlink:label="us-gaap_IncomeTaxAuthorityNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxesTableTable" xlink:label="mksi_IncomeTaxesTableTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="us-gaap_BusinessAcquisitionAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TaxCreditCarryforwardAxis" xlink:label="us-gaap_TaxCreditCarryforwardAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TaxCreditCarryforwardNameDomain" xlink:label="us-gaap_TaxCreditCarryforwardNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FederalStateAndForeignMember" xlink:label="mksi_FederalStateAndForeignMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InlandRevenueSingaporeIRASMember" xlink:label="us-gaap_InlandRevenueSingaporeIRASMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IndefiniteMember" xlink:label="mksi_IndefiniteMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TaxCreditCarryForwardExpirationYearEnd" xlink:label="mksi_TaxCreditCarryForwardExpirationYearEnd"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_USFederalMember" xlink:label="mksi_USFederalMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OperatingLossCarryforwardsExpiringTwoThousandSeventeenMember" xlink:label="mksi_OperatingLossCarryforwardsExpiringTwoThousandSeventeenMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLossCarryforwards" xlink:label="us-gaap_OperatingLossCarryforwards"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_StateMember" xlink:label="mksi_StateMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OperatingLossCarryforwardsExpiringTwoThousandThirtyNineMember" xlink:label="mksi_OperatingLossCarryforwardsExpiringTwoThousandThirtyNineMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLossCarryforwardsExpirationDate" xlink:label="us-gaap_OperatingLossCarryforwardsExpirationDate"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ForeignMember" xlink:label="mksi_ForeignMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UnrecognizedTaxBenefitsOffsetAgainstRestructuringReserves" xlink:label="mksi_UnrecognizedTaxBenefitsOffsetAgainstRestructuringReserves"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount" xlink:label="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ForeignInterestCarryforwards" xlink:label="mksi_ForeignInterestCarryforwards"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FederalInterestCarryForwards" xlink:label="mksi_FederalInterestCarryForwards"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TaxBenefitRelatedToHistoricalOutsideBasisDifferences" xlink:label="mksi_TaxBenefitRelatedToHistoricalOutsideBasisDifferences"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxesPaidNet" xlink:label="us-gaap_IncomeTaxesPaidNet"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BusinessAcquisitionAcquireeDomain" xlink:to="mksi_AtotechLimitedMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityAxis" xlink:to="us-gaap_IncomeTaxAuthorityDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="us-gaap_TaxCreditCarryforwardAmount" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityNameAxis" xlink:to="us-gaap_IncomeTaxAuthorityNameDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="mksi_IncomeTaxesTableTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BusinessAcquisitionAxis" xlink:to="us-gaap_BusinessAcquisitionAcquireeDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxesTableTable" xlink:to="us-gaap_IncomeTaxAuthorityAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TaxCreditCarryforwardAxis" xlink:to="us-gaap_TaxCreditCarryforwardNameDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="mksi_FederalStateAndForeignMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityNameDomain" xlink:to="us-gaap_InlandRevenueSingaporeIRASMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TaxCreditCarryforwardNameDomain" xlink:to="mksi_IndefiniteMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="mksi_TaxCreditCarryForwardExpirationYearEnd" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxesTableTable" xlink:to="us-gaap_TaxCreditCarryforwardAxis" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="mksi_USFederalMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TaxCreditCarryforwardNameDomain" xlink:to="mksi_OperatingLossCarryforwardsExpiringTwoThousandSeventeenMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="us-gaap_OperatingLossCarryforwards" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxesTableTable" xlink:to="us-gaap_IncomeTaxAuthorityNameAxis" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="mksi_StateMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TaxCreditCarryforwardNameDomain" xlink:to="mksi_OperatingLossCarryforwardsExpiringTwoThousandThirtyNineMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="us-gaap_OperatingLossCarryforwardsExpirationDate" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxesTableTable" xlink:to="us-gaap_BusinessAcquisitionAxis" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="mksi_ForeignMember" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="mksi_UnrecognizedTaxBenefitsOffsetAgainstRestructuringReserves" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxesTableTable" xlink:to="mksi_IncomeTaxesLineItems" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="mksi_ForeignInterestCarryforwards" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="mksi_FederalInterestCarryForwards" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="mksi_TaxBenefitRelatedToHistoricalOutsideBasisDifferences" order="10" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="us-gaap_IncomeTaxesPaidNet" order="11" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureIncomeTaxesReconciliationOfBeginningAndEndingAmountOfGrossUnrecognizedTaxBenefitsExcludingInterestAndPenaltiesDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_UnrecognizedTaxBenefits" xlink:label="us-gaap_UnrecognizedTaxBenefits"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UnrecognizedTaxBenefitsIncreaseDecreaseResultingFromPriorPeriodTaxPositions" xlink:label="mksi_UnrecognizedTaxBenefitsIncreaseDecreaseResultingFromPriorPeriodTaxPositions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations" xlink:label="us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_UnrecognizedTaxBenefits" xlink:label="us-gaap_UnrecognizedTaxBenefits_4"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_UnrecognizedTaxBenefits" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="mksi_UnrecognizedTaxBenefitsIncreaseDecreaseResultingFromPriorPeriodTaxPositions" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromCurrentPeriodTaxPositions" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_UnrecognizedTaxBenefits_4" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureIncomeTaxesComponentsOfCashPaidNetOfRefundsReceivedForIncomeTaxesDetails" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityAxis" xlink:label="us-gaap_IncomeTaxAuthorityAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityDomain" xlink:label="us-gaap_IncomeTaxAuthorityDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidByIndividualJurisdictionLineItems" xlink:label="us-gaap_IncomeTaxPaidByIndividualJurisdictionLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidFederalAfterRefundReceivedAbstract" xlink:label="us-gaap_IncomeTaxPaidFederalAfterRefundReceivedAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidByIndividualJurisdictionAbstract" xlink:label="us-gaap_IncomeTaxPaidByIndividualJurisdictionAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidByIndividualJurisdictionTable" xlink:label="us-gaap_IncomeTaxPaidByIndividualJurisdictionTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidForeignAfterRefundReceivedAbstract" xlink:label="us-gaap_IncomeTaxPaidForeignAfterRefundReceivedAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidForeignAfterRefundReceived" xlink:label="us-gaap_IncomeTaxPaidForeignAfterRefundReceived"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_US" xlink:label="country_US"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceivedAbstract" xlink:label="us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceivedAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceived" xlink:label="us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceived"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidFederalAfterRefundReceived" xlink:label="us-gaap_IncomeTaxPaidFederalAfterRefundReceived"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StateAndLocalTaxJurisdictionOtherMember" xlink:label="us-gaap_StateAndLocalTaxJurisdictionOtherMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_CA" xlink:label="country_CA"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxesPaidNet" xlink:label="us-gaap_IncomeTaxesPaidNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_CN" xlink:label="country_CN"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_DE" xlink:label="country_DE"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_KR" xlink:label="country_KR"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_NL" xlink:label="country_NL"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_TW" xlink:label="country_TW"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignTaxJurisdictionOtherMember" xlink:label="us-gaap_ForeignTaxJurisdictionOtherMember"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityAxis" xlink:to="us-gaap_IncomeTaxAuthorityDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxPaidByIndividualJurisdictionLineItems" xlink:to="us-gaap_IncomeTaxPaidFederalAfterRefundReceivedAbstract" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxPaidByIndividualJurisdictionAbstract" xlink:to="us-gaap_IncomeTaxPaidByIndividualJurisdictionTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxPaidForeignAfterRefundReceivedAbstract" xlink:to="us-gaap_IncomeTaxPaidForeignAfterRefundReceived" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxPaidByIndividualJurisdictionTable" xlink:to="us-gaap_IncomeTaxAuthorityAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_US" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceivedAbstract" xlink:to="us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceived" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxPaidFederalAfterRefundReceivedAbstract" xlink:to="us-gaap_IncomeTaxPaidFederalAfterRefundReceived" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxPaidByIndividualJurisdictionLineItems" xlink:to="us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceivedAbstract" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxPaidByIndividualJurisdictionTable" xlink:to="us-gaap_IncomeTaxPaidByIndividualJurisdictionLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="us-gaap_StateAndLocalTaxJurisdictionOtherMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxPaidByIndividualJurisdictionLineItems" xlink:to="us-gaap_IncomeTaxPaidForeignAfterRefundReceivedAbstract" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_CA" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxPaidByIndividualJurisdictionLineItems" xlink:to="us-gaap_IncomeTaxesPaidNet" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_CN" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_DE" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_KR" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_NL" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_TW" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="us-gaap_ForeignTaxJurisdictionOtherMember" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockBasedCompensationAdditionalInformationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingDomain" xlink:label="us-gaap_VestingDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationAwardTrancheOneMember" xlink:label="us-gaap_ShareBasedCompensationAwardTrancheOneMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember" xlink:label="mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CompensationRelatedCostsAbstract" xlink:label="us-gaap_CompensationRelatedCostsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingAxis" xlink:label="us-gaap_VestingAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OfferTerminateMember" xlink:label="mksi_OfferTerminateMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_StockIncentivePlanTwoThousandFourteenMember" xlink:label="mksi_StockIncentivePlanTwoThousandFourteenMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredCompensationArrangementWithIndividualSharesAuthorizedForIssuance" xlink:label="us-gaap_DeferredCompensationArrangementWithIndividualSharesAuthorizedForIssuance"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_StockIncentivePlanTwoThousandTwentyTwoMember" xlink:label="mksi_StockIncentivePlanTwoThousandTwentyTwoMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeMember" xlink:label="srt_RangeMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PercentageOfPayrollDeductionToCompensation" xlink:label="mksi_PercentageOfPayrollDeductionToCompensation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MaximumPercentageOfPayrollForPurchaseOfStock" xlink:label="mksi_MaximumPercentageOfPayrollForPurchaseOfStock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_RestrictedStockUnitsGrantedToEmployeesMember" xlink:label="mksi_RestrictedStockUnitsGrantedToEmployeesMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_StockExercisePriceAsPercentageOfClosingMarketPrice" xlink:label="mksi_StockExercisePriceAsPercentageOfClosingMarketPrice"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_RestrictedStockUnitsGrantedToDirectorsMember" xlink:label="mksi_RestrictedStockUnitsGrantedToDirectorsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockSharesIssued" xlink:label="us-gaap_CommonStockSharesIssued"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockAppreciationRightsSARSMember" xlink:label="us-gaap_StockAppreciationRightsSARSMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CommonStockExercisePrice" xlink:label="mksi_CommonStockExercisePrice"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockCapitalSharesReservedForFutureIssuance" xlink:label="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfSharesReturnedForEachShareOfCommonStock" xlink:label="mksi_NumberOfSharesReturnedForEachShareOfCommonStock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodPercentageExercisePrice" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodPercentageExercisePrice"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_LevelOfPerformanceTargetAchievedPercentage" xlink:label="mksi_LevelOfPerformanceTargetAchievedPercentage"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardVestingPeriodDescription" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardVestingPeriodDescription"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedInPeriodFairValue1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedInPeriodFairValue1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameAxis" xlink:to="us-gaap_PlanNameDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VestingDomain" xlink:to="us-gaap_ShareBasedCompensationAwardTrancheOneMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="srt_RangeAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameDomain" xlink:to="mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CompensationRelatedCostsAbstract" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VestingAxis" xlink:to="us-gaap_VestingDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain" xlink:to="mksi_OfferTerminateMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_PlanNameAxis" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameDomain" xlink:to="mksi_StockIncentivePlanTwoThousandFourteenMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_DeferredCompensationArrangementWithIndividualSharesAuthorizedForIssuance" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AwardTypeAxis" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" order="2.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameDomain" xlink:to="mksi_StockIncentivePlanTwoThousandTwentyTwoMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" order="2.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_PercentageOfPayrollDeductionToCompensation" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="us-gaap_RestrictedStockUnitsRSUMember" order="3.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_AwardTypeAxis" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_MaximumPercentageOfPayrollForPurchaseOfStock" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="mksi_RestrictedStockUnitsGrantedToEmployeesMember" order="4.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_VestingAxis" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_StockExercisePriceAsPercentageOfClosingMarketPrice" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="mksi_RestrictedStockUnitsGrantedToDirectorsMember" order="5.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_CommonStockSharesIssued" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="us-gaap_StockAppreciationRightsSARSMember" order="6.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" order="6.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_CommonStockExercisePrice" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" order="7.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_NumberOfSharesReturnedForEachShareOfCommonStock" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodPercentageExercisePrice" order="10" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage" order="11" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_LevelOfPerformanceTargetAchievedPercentage" order="12" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardVestingPeriodDescription" order="13" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" order="14" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedInPeriodFairValue1" order="15" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" order="16" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" order="17" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockBasedCompensationFairValueOfEmployeePurchaseRightsEstimatedUsingBlackScholesOptionPricingModelDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendPerShare" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendPerShare"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendPerShare" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockBasedCompensationSummaryOfActivityForRsusDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_StockIncentivePlanTwoThousandFourteenMember" xlink:label="mksi_StockIncentivePlanTwoThousandFourteenMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_StockIncentivePlanTwoThousandTwentyTwoMember" xlink:label="mksi_StockIncentivePlanTwoThousandTwentyTwoMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsSharesFromAcquisition" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsSharesFromAcquisition"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeited" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeited"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_4"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsShareFromAcquisitionWeightedAverageGrantDateFairValue" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsShareFromAcquisitionWeightedAverageGrantDateFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeitedWeightedAverageGrantDateFairValue" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeitedWeightedAverageGrantDateFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_9"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameAxis" xlink:to="us-gaap_PlanNameDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_AwardTypeAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameDomain" xlink:to="mksi_StockIncentivePlanTwoThousandFourteenMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_PlanNameAxis" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameDomain" xlink:to="mksi_StockIncentivePlanTwoThousandTwentyTwoMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsSharesFromAcquisition" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AwardTypeAxis" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" order="2.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="us-gaap_RestrictedStockUnitsRSUMember" order="3.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeited" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_4" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsShareFromAcquisitionWeightedAverageGrantDateFairValue" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeitedWeightedAverageGrantDateFairValue" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_9" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockBasedCompensationEffectOfRecordingStockBasedCompensationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax" xlink:label="us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareBasic" xlink:label="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareBasic"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EmployeeStockPurchasePlanMember" xlink:label="mksi_EmployeeStockPurchasePlanMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareDiluted" xlink:label="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareDiluted"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_AwardTypeAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_AllocatedShareBasedCompensationExpense" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AwardTypeAxis" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" order="2.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="us-gaap_RestrictedStockUnitsRSUMember" order="3.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareBasic" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="mksi_EmployeeStockPurchasePlanMember" order="4.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareDiluted" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureStockbasedCompensationScheduleOfStockbasedCompensationIncludedInCompanysConsolidatedStatementsOfOperationsAndComprehensiveIncomeLos" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsLineItems" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable" xlink:label="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CostOfSalesMember" xlink:label="us-gaap_CostOfSalesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ResearchAndDevelopmentExpenseMember" xlink:label="us-gaap_ResearchAndDevelopmentExpenseMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SellingGeneralAndAdministrativeExpensesMember" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpensesMember"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsLineItems" xlink:to="us-gaap_AllocatedShareBasedCompensationExpense" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable" xlink:to="us-gaap_IncomeStatementLocationAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationAxis" xlink:to="us-gaap_IncomeStatementLocationDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_CostOfSalesMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_ResearchAndDevelopmentExpenseMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_SellingGeneralAndAdministrativeExpensesMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockholdersEquityAdditionalInformationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EquityAbstract" xlink:label="us-gaap_EquityAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfStockByClassTable" xlink:label="us-gaap_ScheduleOfStockByClassTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="us-gaap_SubsequentEventTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventMember" xlink:label="us-gaap_SubsequentEventMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendsDomain" xlink:label="us-gaap_DividendsDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_O2025Q1DividendsMember" xlink:label="mksi_O2025Q1DividendsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventTypeAxis" xlink:label="us-gaap_SubsequentEventTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendsAxis" xlink:label="us-gaap_DividendsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ClassOfStockLineItems" xlink:label="us-gaap_ClassOfStockLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_StockRepurchaseProgramAuthorizedAmount1" xlink:label="srt_StockRepurchaseProgramAuthorizedAmount1"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_O2026Q1DividendsMember" xlink:label="mksi_O2026Q1DividendsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockRepurchasedDuringPeriodShares" xlink:label="us-gaap_StockRepurchasedDuringPeriodShares"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockRepurchasedAndRetiredDuringPeriodShares" xlink:label="us-gaap_StockRepurchasedAndRetiredDuringPeriodShares"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockRepurchasedAndRetiredDuringPeriodValue" xlink:label="us-gaap_StockRepurchasedAndRetiredDuringPeriodValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockRepurchasedDuringPeriodValue" xlink:label="us-gaap_StockRepurchasedDuringPeriodValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockDividendsPerShareCashPaid" xlink:label="us-gaap_CommonStockDividendsPerShareCashPaid"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsOfDividendsCommonStock" xlink:label="us-gaap_PaymentsOfDividendsCommonStock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendsPayableDateDeclaredDayMonthAndYear" xlink:label="us-gaap_DividendsPayableDateDeclaredDayMonthAndYear"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendsPayableAmountPerShare" xlink:label="us-gaap_DividendsPayableAmountPerShare"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendPayableDateToBePaidDayMonthAndYear" xlink:label="us-gaap_DividendPayableDateToBePaidDayMonthAndYear"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendsPayableDateOfRecordDayMonthAndYear" xlink:label="us-gaap_DividendsPayableDateOfRecordDayMonthAndYear"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AociIncludingPortionAttributableToNoncontrollingInterestPeriodIncreaseDecrease" xlink:label="us-gaap_AociIncludingPortionAttributableToNoncontrollingInterestPeriodIncreaseDecrease"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquityAbstract" xlink:to="us-gaap_ScheduleOfStockByClassTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventTypeDomain" xlink:to="us-gaap_SubsequentEventMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DividendsDomain" xlink:to="mksi_O2025Q1DividendsMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventTypeAxis" xlink:to="us-gaap_SubsequentEventTypeDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis" xlink:to="us-gaap_EquityComponentDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DividendsAxis" xlink:to="us-gaap_DividendsDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="srt_StockRepurchaseProgramAuthorizedAmount1" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfStockByClassTable" xlink:to="us-gaap_DividendsAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DividendsDomain" xlink:to="mksi_O2026Q1DividendsMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_StockRepurchasedDuringPeriodShares" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfStockByClassTable" xlink:to="us-gaap_SubsequentEventTypeAxis" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_StockRepurchasedAndRetiredDuringPeriodShares" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfStockByClassTable" xlink:to="us-gaap_StatementEquityComponentsAxis" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_StockRepurchasedAndRetiredDuringPeriodValue" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfStockByClassTable" xlink:to="us-gaap_ClassOfStockLineItems" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_StockRepurchasedDuringPeriodValue" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_CommonStockDividendsPerShareCashPaid" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_PaymentsOfDividendsCommonStock" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_DividendsPayableDateDeclaredDayMonthAndYear" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_DividendsPayableAmountPerShare" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_DividendPayableDateToBePaidDayMonthAndYear" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_DividendsPayableDateOfRecordDayMonthAndYear" order="10" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" order="11" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_AociIncludingPortionAttributableToNoncontrollingInterestPeriodIncreaseDecrease" order="12" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureStockholdersEquityScheduleOfChangeInAccumulatedOtherComprehensiveIncomeLossByComponentNetOfTaxDetails" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockholdersEquityNoteAbstract" xlink:label="us-gaap_StockholdersEquityNoteAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ChangesInValueOfFinancialInstrumentsDesignatedAsCashFlowHedgesMember" xlink:label="mksi_ChangesInValueOfFinancialInstrumentsDesignatedAsCashFlowHedgesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedTranslationAdjustmentMember" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OciBeforeReclassificationsNetOfTaxAttributableToParent" xlink:label="us-gaap_OciBeforeReclassificationsNetOfTaxAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AccumulatedOtherComprehensiveIncomeLossChangeInNetInvestmentHedgeMember" xlink:label="mksi_AccumulatedOtherComprehensiveIncomeLossChangeInNetInvestmentHedgeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ReclassificationFromAociCurrentPeriodNetOfTaxAttributableToParent" xlink:label="us-gaap_ReclassificationFromAociCurrentPeriodNetOfTaxAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember" xlink:label="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedGainLossNetCashFlowHedgeParentMember" xlink:label="us-gaap_AccumulatedGainLossNetCashFlowHedgeParentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity_4"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityNoteAbstract" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis" xlink:to="us-gaap_EquityComponentDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquityComponentDomain" xlink:to="mksi_ChangesInValueOfFinancialInstrumentsDesignatedAsCashFlowHedgesMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:to="us-gaap_StatementEquityComponentsAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:to="us-gaap_StockholdersEquity" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedTranslationAdjustmentMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:to="us-gaap_OciBeforeReclassificationsNetOfTaxAttributableToParent" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquityComponentDomain" xlink:to="mksi_AccumulatedOtherComprehensiveIncomeLossChangeInNetInvestmentHedgeMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:to="us-gaap_ReclassificationFromAociCurrentPeriodNetOfTaxAttributableToParent" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedGainLossNetCashFlowHedgeParentMember" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:to="us-gaap_StockholdersEquity_4" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeMember" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansAdditionalInformationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RetirementPlanTypeAxis" xlink:label="us-gaap_RetirementPlanTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RetirementPlanTypeDomain" xlink:label="us-gaap_RetirementPlanTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_IL" xlink:label="country_IL"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:label="us-gaap_DefinedBenefitPlanDisclosureLineItems"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedContributionPlanMinimumAnnualContributionsPerEmployeePercent" xlink:label="mksi_DefinedContributionPlanMinimumAnnualContributionsPerEmployeePercent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ScenarioUnspecifiedDomain" xlink:label="srt_ScenarioUnspecifiedDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ScenarioForecastMember" xlink:label="srt_ScenarioForecastMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:label="us-gaap_CompensationAndRetirementDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" xlink:label="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_StatementScenarioAxis" xlink:label="srt_StatementScenarioAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_DE" xlink:label="country_DE"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent" xlink:label="us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MinimumAgeLimitForSpecifiedAdditionalAmount" xlink:label="mksi_MinimumAgeLimitForSpecifiedAdditionalAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeMember" xlink:label="srt_RangeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PensionAndOtherPostretirementBenefitContributions" xlink:label="us-gaap_PensionAndOtherPostretirementBenefitContributions"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EmployeePerformanceAwardBonusExpense" xlink:label="mksi_EmployeePerformanceAwardBonusExpense"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SupplementalRetirementBenefitsCost" xlink:label="mksi_SupplementalRetirementBenefitsCost"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SupplementalRetirementBenefitsAccumulatedBenefitObligationNoncurrent" xlink:label="mksi_SupplementalRetirementBenefitsAccumulatedBenefitObligationNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent" xlink:label="us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanVestedBenefitObligation" xlink:label="mksi_DefinedBenefitPlanVestedBenefitObligation"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanAssetsForPlanBenefitsGuaranteedRateOfReturn" xlink:label="mksi_DefinedBenefitPlanAssetsForPlanBenefitsGuaranteedRateOfReturn"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RetirementPlanTypeAxis" xlink:to="us-gaap_RetirementPlanTypeDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RetirementPlanTypeDomain" xlink:to="country_IL" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="mksi_DefinedContributionPlanMinimumAnnualContributionsPerEmployeePercent" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ScenarioUnspecifiedDomain" xlink:to="srt_ScenarioForecastMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:to="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" xlink:to="srt_StatementScenarioAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RetirementPlanTypeDomain" xlink:to="country_DE" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" xlink:to="srt_RangeAxis" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_StatementScenarioAxis" xlink:to="srt_ScenarioUnspecifiedDomain" order="2.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="mksi_MinimumAgeLimitForSpecifiedAdditionalAmount" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" order="2.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" xlink:to="us-gaap_RetirementPlanTypeAxis" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="us-gaap_PensionAndOtherPostretirementBenefitContributions" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" xlink:to="us-gaap_DefinedBenefitPlanDisclosureLineItems" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="mksi_EmployeePerformanceAwardBonusExpense" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="mksi_SupplementalRetirementBenefitsCost" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="mksi_SupplementalRetirementBenefitsAccumulatedBenefitObligationNoncurrent" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" order="6.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" order="7.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="mksi_DefinedBenefitPlanVestedBenefitObligation" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="mksi_DefinedBenefitPlanAssetsForPlanBenefitsGuaranteedRateOfReturn" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansSummaryOfNetPeriodicBenefitCostsDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostAbstract" xlink:label="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanServiceCost" xlink:label="us-gaap_DefinedBenefitPlanServiceCost"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanInterestCost" xlink:label="us-gaap_DefinedBenefitPlanInterestCost"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditInterestCostStatementOfIncomeOrComprehensiveIncomeExtensibleList" xlink:label="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditInterestCostStatementOfIncomeOrComprehensiveIncomeExtensibleList"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanExpectedReturnOnPlanAssets" xlink:label="us-gaap_DefinedBenefitPlanExpectedReturnOnPlanAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditExpectedReturnLossStatementOfIncomeOrComprehensiveIncomeExtensibleList" xlink:label="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditExpectedReturnLossStatementOfIncomeOrComprehensiveIncomeExtensibleList"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanAmortizationOfActuarialGainLoss" xlink:label="mksi_DefinedBenefitPlanAmortizationOfActuarialGainLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanNetPeriodicBenefitCost" xlink:label="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCost"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostAbstract" xlink:to="us-gaap_DefinedBenefitPlanServiceCost" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostAbstract" xlink:to="us-gaap_DefinedBenefitPlanInterestCost" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostAbstract" xlink:to="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditInterestCostStatementOfIncomeOrComprehensiveIncomeExtensibleList" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostAbstract" xlink:to="us-gaap_DefinedBenefitPlanExpectedReturnOnPlanAssets" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostAbstract" xlink:to="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditExpectedReturnLossStatementOfIncomeOrComprehensiveIncomeExtensibleList" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostAbstract" xlink:to="mksi_DefinedBenefitPlanAmortizationOfActuarialGainLoss" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostAbstract" xlink:to="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCost" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansSummaryOfChangesInProjectedBenefitObligationsAndPlanAssetsAndEndingBalancesOfDefinedBenefitPlansDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanChangeInFairValueOfPlanAssetsRollForward" xlink:label="us-gaap_DefinedBenefitPlanChangeInFairValueOfPlanAssetsRollForward"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanFairValueOfPlanAssets" xlink:label="us-gaap_DefinedBenefitPlanFairValueOfPlanAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:label="us-gaap_CompensationAndRetirementDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanPensionPlanChangeInBenefitObligationAbstract" xlink:label="mksi_DefinedBenefitPlanPensionPlanChangeInBenefitObligationAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanBenefitObligation" xlink:label="us-gaap_DefinedBenefitPlanBenefitObligation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanBusinessCombinationsAndAcquisitionsPlanAssets" xlink:label="us-gaap_DefinedBenefitPlanBusinessCombinationsAndAcquisitionsPlanAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanBusinessCombinationsAndAcquisitionsBenefitObligation" xlink:label="us-gaap_DefinedBenefitPlanBusinessCombinationsAndAcquisitionsBenefitObligation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanContributionsByEmployer" xlink:label="us-gaap_DefinedBenefitPlanContributionsByEmployer"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanServiceCost" xlink:label="us-gaap_DefinedBenefitPlanServiceCost"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanActualReturnOnPlanAssets" xlink:label="us-gaap_DefinedBenefitPlanActualReturnOnPlanAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanInterestCost" xlink:label="us-gaap_DefinedBenefitPlanInterestCost"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanPlanAssetsBenefitsPaid" xlink:label="us-gaap_DefinedBenefitPlanPlanAssetsBenefitsPaid"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanActuarialGainLoss" xlink:label="us-gaap_DefinedBenefitPlanActuarialGainLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanPlanAssetsForeignCurrencyTranslationGainLoss" xlink:label="us-gaap_DefinedBenefitPlanPlanAssetsForeignCurrencyTranslationGainLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanBenefitObligationBenefitsPaid" xlink:label="us-gaap_DefinedBenefitPlanBenefitObligationBenefitsPaid"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanFairValueOfPlanAssets" xlink:label="us-gaap_DefinedBenefitPlanFairValueOfPlanAssets_6"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditAmortizationOfPriorServiceCostCreditStatementOfIncomeOrComprehensiveIncomeExtensibleList" xlink:label="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditAmortizationOfPriorServiceCostCreditStatementOfIncomeOrComprehensiveIncomeExtensibleList"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanFundedStatusOfPlan" xlink:label="us-gaap_DefinedBenefitPlanFundedStatusOfPlan"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanForeignCurrencyExchangeRateChangesBenefitObligation" xlink:label="us-gaap_DefinedBenefitPlanForeignCurrencyExchangeRateChangesBenefitObligation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanBenefitObligation" xlink:label="us-gaap_DefinedBenefitPlanBenefitObligation_8"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanChangeInFairValueOfPlanAssetsRollForward" xlink:to="us-gaap_DefinedBenefitPlanFairValueOfPlanAssets" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:to="mksi_DefinedBenefitPlanPensionPlanChangeInBenefitObligationAbstract" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_DefinedBenefitPlanPensionPlanChangeInBenefitObligationAbstract" xlink:to="us-gaap_DefinedBenefitPlanBenefitObligation" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanChangeInFairValueOfPlanAssetsRollForward" xlink:to="us-gaap_DefinedBenefitPlanBusinessCombinationsAndAcquisitionsPlanAssets" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CompensationAndRetirementDisclosureAbstract" xlink:to="us-gaap_DefinedBenefitPlanChangeInFairValueOfPlanAssetsRollForward" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_DefinedBenefitPlanPensionPlanChangeInBenefitObligationAbstract" xlink:to="us-gaap_DefinedBenefitPlanBusinessCombinationsAndAcquisitionsBenefitObligation" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanChangeInFairValueOfPlanAssetsRollForward" xlink:to="us-gaap_DefinedBenefitPlanContributionsByEmployer" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_DefinedBenefitPlanPensionPlanChangeInBenefitObligationAbstract" xlink:to="us-gaap_DefinedBenefitPlanServiceCost" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanChangeInFairValueOfPlanAssetsRollForward" xlink:to="us-gaap_DefinedBenefitPlanActualReturnOnPlanAssets" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_DefinedBenefitPlanPensionPlanChangeInBenefitObligationAbstract" xlink:to="us-gaap_DefinedBenefitPlanInterestCost" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanChangeInFairValueOfPlanAssetsRollForward" xlink:to="us-gaap_DefinedBenefitPlanPlanAssetsBenefitsPaid" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_DefinedBenefitPlanPensionPlanChangeInBenefitObligationAbstract" xlink:to="us-gaap_DefinedBenefitPlanActuarialGainLoss" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanChangeInFairValueOfPlanAssetsRollForward" xlink:to="us-gaap_DefinedBenefitPlanPlanAssetsForeignCurrencyTranslationGainLoss" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_DefinedBenefitPlanPensionPlanChangeInBenefitObligationAbstract" xlink:to="us-gaap_DefinedBenefitPlanBenefitObligationBenefitsPaid" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanChangeInFairValueOfPlanAssetsRollForward" xlink:to="us-gaap_DefinedBenefitPlanFairValueOfPlanAssets_6" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_DefinedBenefitPlanPensionPlanChangeInBenefitObligationAbstract" xlink:to="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCostCreditAmortizationOfPriorServiceCostCreditStatementOfIncomeOrComprehensiveIncomeExtensibleList" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanChangeInFairValueOfPlanAssetsRollForward" xlink:to="us-gaap_DefinedBenefitPlanFundedStatusOfPlan" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_DefinedBenefitPlanPensionPlanChangeInBenefitObligationAbstract" xlink:to="us-gaap_DefinedBenefitPlanForeignCurrencyExchangeRateChangesBenefitObligation" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_DefinedBenefitPlanPensionPlanChangeInBenefitObligationAbstract" xlink:to="us-gaap_DefinedBenefitPlanBenefitObligation_8" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansSummaryOfEstimatedBenefitPaymentsForDefinedBenefitPlansForNext10YearsDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanEstimatedFutureBenefitPaymentsAbstract" xlink:label="us-gaap_DefinedBenefitPlanEstimatedFutureBenefitPaymentsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsNextTwelveMonths" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsNextTwelveMonths"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearTwo" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearTwo"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearThree" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearThree"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFour" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFour"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFive" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFive"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearSixToTen" xlink:label="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearSixToTen"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears" xlink:label="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanEstimatedFutureBenefitPaymentsAbstract" xlink:to="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsNextTwelveMonths" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanEstimatedFutureBenefitPaymentsAbstract" xlink:to="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearTwo" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanEstimatedFutureBenefitPaymentsAbstract" xlink:to="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearThree" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanEstimatedFutureBenefitPaymentsAbstract" xlink:to="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFour" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanEstimatedFutureBenefitPaymentsAbstract" xlink:to="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFive" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanEstimatedFutureBenefitPaymentsAbstract" xlink:to="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearSixToTen" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanEstimatedFutureBenefitPaymentsAbstract" xlink:to="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansScheduleOfWeightedAverageRatesUsedToDetermineNetPeriodicBenefitCostsDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanWeightedAverageAssumptionsUsedInCalculatingNetPeriodicBenefitCostAbstract" xlink:label="us-gaap_DefinedBenefitPlanWeightedAverageAssumptionsUsedInCalculatingNetPeriodicBenefitCostAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostDiscountRate" xlink:label="us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostDiscountRate"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostRateOfCompensationIncrease" xlink:label="us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostRateOfCompensationIncrease"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostExpectedLongTermReturnOnAssets" xlink:label="us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostExpectedLongTermReturnOnAssets"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanWeightedAverageAssumptionsUsedInCalculatingNetPeriodicBenefitCostAbstract" xlink:to="us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostDiscountRate" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanWeightedAverageAssumptionsUsedInCalculatingNetPeriodicBenefitCostAbstract" xlink:to="us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostRateOfCompensationIncrease" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanWeightedAverageAssumptionsUsedInCalculatingNetPeriodicBenefitCostAbstract" xlink:to="us-gaap_DefinedBenefitPlanAssumptionsUsedCalculatingNetPeriodicBenefitCostExpectedLongTermReturnOnAssets" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansScheduleOfDefinedBenefitPlanAssetsDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PlanAssetCategoriesDomain" xlink:label="us-gaap_PlanAssetCategoriesDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanDebtSecurityMember" xlink:label="us-gaap_DefinedBenefitPlanDebtSecurityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:label="us-gaap_DefinedBenefitPlanDisclosureLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanFairValueOfPlanAssets" xlink:label="us-gaap_DefinedBenefitPlanFairValueOfPlanAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CompensationRelatedCostsAbstract" xlink:label="us-gaap_CompensationRelatedCostsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" xlink:label="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanByPlanAssetCategoriesAxis" xlink:label="us-gaap_DefinedBenefitPlanByPlanAssetCategoriesAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanEquitySecuritiesMember" xlink:label="us-gaap_DefinedBenefitPlanEquitySecuritiesMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanAssetsForPlanBenefitsPercentage" xlink:label="mksi_DefinedBenefitPlanAssetsForPlanBenefitsPercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanCashMember" xlink:label="us-gaap_DefinedBenefitPlanCashMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanAssetCategoriesOtherAssetsMember" xlink:label="mksi_DefinedBenefitPlanAssetCategoriesOtherAssetsMember"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanAssetCategoriesDomain" xlink:to="us-gaap_DefinedBenefitPlanDebtSecurityMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="us-gaap_DefinedBenefitPlanFairValueOfPlanAssets" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CompensationRelatedCostsAbstract" xlink:to="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" xlink:to="us-gaap_DefinedBenefitPlanByPlanAssetCategoriesAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanByPlanAssetCategoriesAxis" xlink:to="us-gaap_PlanAssetCategoriesDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanAssetCategoriesDomain" xlink:to="us-gaap_DefinedBenefitPlanEquitySecuritiesMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="mksi_DefinedBenefitPlanAssetsForPlanBenefitsPercentage" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" xlink:to="us-gaap_DefinedBenefitPlanDisclosureLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanAssetCategoriesDomain" xlink:to="us-gaap_DefinedBenefitPlanCashMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanAssetCategoriesDomain" xlink:to="mksi_DefinedBenefitPlanAssetCategoriesOtherAssetsMember" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureNetIncomeLossPerShareAdditionalInformationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="us-gaap_EarningsPerShareAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduleOfEarningsPerShareTable" xlink:label="mksi_ScheduleOfEarningsPerShareTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AntidilutiveSecuritiesNameDomain" xlink:label="us-gaap_AntidilutiveSecuritiesNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EarningsPerShareLineItems" xlink:label="mksi_EarningsPerShareLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="mksi_ScheduleOfEarningsPerShareTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" xlink:to="us-gaap_AntidilutiveSecuritiesNameDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfEarningsPerShareTable" xlink:to="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AntidilutiveSecuritiesNameDomain" xlink:to="us-gaap_RestrictedStockUnitsRSUMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_EarningsPerShareLineItems" xlink:to="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfEarningsPerShareTable" xlink:to="mksi_EarningsPerShareLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationAdditionalInformationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="us-gaap_ConcentrationRiskByTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="us-gaap_ConcentrationRiskTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_NameOfMajorCustomerDomain" xlink:label="srt_NameOfMajorCustomerDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TopTenCustomersMember" xlink:label="mksi_TopTenCustomersMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingAbstract" xlink:label="us-gaap_SegmentReportingAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="us-gaap_CustomerConcentrationRiskMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SalesRevenueNetMember" xlink:label="us-gaap_SalesRevenueNetMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MajorCustomersAxis" xlink:label="srt_MajorCustomersAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="us-gaap_SegmentReportingInformationLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NumberOfReportableSegments" xlink:label="us-gaap_NumberOfReportableSegments"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingCodmIndividualTitleAndPositionOrGroupOrCommitteeNameExtensibleEnumeration" xlink:label="us-gaap_SegmentReportingCodmIndividualTitleAndPositionOrGroupOrCommitteeNameExtensibleEnumeration"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeMember" xlink:label="srt_RangeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingCodmProfitLossMeasureHowUsedDescription" xlink:label="us-gaap_SegmentReportingCodmProfitLossMeasureHowUsedDescription"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForThirtyTwoPercentThirtyPercentAndFortyTwoPercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForThirtyTwoPercentThirtyPercentAndFortyTwoPercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForFortySevenPercentFortyFourPercentAndThirtyThreePercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForFortySevenPercentFortyFourPercentAndThirtyThreePercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForThirtyPercentFortyTwoPercentAndFourtySixPercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForThirtyPercentFortyTwoPercentAndFourtySixPercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="us-gaap_ConcentrationRiskPercentage1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForNinetyPercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForNinetyPercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForTenPercentOrMoreOfNetRevenue" xlink:label="mksi_NumberOfCustomersAccountedForTenPercentOrMoreOfNetRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForGreaterThanOrEqualToTenPercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForGreaterThanOrEqualToTenPercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForFourteenPercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForFourteenPercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForTenPercentOfNetRevenue" xlink:label="mksi_NumberOfCustomersAccountedForTenPercentOfNetRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForFifteenPercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForFifteenPercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForElevenPercentOfNetRevenue" xlink:label="mksi_NumberOfCustomersAccountedForElevenPercentOfNetRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForTenOrMorePercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfRevenue"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskByTypeAxis" xlink:to="us-gaap_ConcentrationRiskTypeDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="mksi_TopTenCustomersMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:to="us-gaap_ConcentrationRiskBenchmarkDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTypeDomain" xlink:to="us-gaap_CustomerConcentrationRiskMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain" xlink:to="us-gaap_SalesRevenueNetMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_ConcentrationRiskByBenchmarkAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_MajorCustomersAxis" xlink:to="srt_NameOfMajorCustomerDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_NumberOfReportableSegments" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_ConcentrationRiskByTypeAxis" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_SegmentReportingCodmIndividualTitleAndPositionOrGroupOrCommitteeNameExtensibleEnumeration" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="srt_MajorCustomersAxis" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" order="2.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_SegmentReportingCodmProfitLossMeasureHowUsedDescription" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="srt_RangeAxis" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForThirtyTwoPercentThirtyPercentAndFortyTwoPercentOfRevenue" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_SegmentReportingInformationLineItems" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForFortySevenPercentFortyFourPercentAndThirtyThreePercentOfRevenue" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForThirtyPercentFortyTwoPercentAndFourtySixPercentOfRevenue" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" order="6.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_ConcentrationRiskPercentage1" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" order="7.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForNinetyPercentOfRevenue" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForTenPercentOrMoreOfNetRevenue" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForGreaterThanOrEqualToTenPercentOfRevenue" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForFourteenPercentOfRevenue" order="10" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForTenPercentOfNetRevenue" order="11" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForFifteenPercentOfRevenue" order="12" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForElevenPercentOfNetRevenue" order="13" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfRevenue" order="14" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationScheduleOfReconcilesGrossProfitByReportableSegment" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentDomain" xlink:label="us-gaap_SegmentDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_VacuumSolutionsDivisionMember" xlink:label="mksi_VacuumSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ConsolidationItemsDomain" xlink:label="srt_ConsolidationItemsDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingSegmentsMember" xlink:label="us-gaap_OperatingSegmentsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductMember" xlink:label="us-gaap_ProductMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingAbstract" xlink:label="us-gaap_SegmentReportingAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="us-gaap_StatementBusinessSegmentsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ConsolidationItemsAxis" xlink:label="srt_ConsolidationItemsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="us-gaap_SegmentReportingInformationLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PhotonicsSolutionsDivisionMember" xlink:label="mksi_PhotonicsSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MaterialReconcilingItemsMember" xlink:label="us-gaap_MaterialReconcilingItemsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ServiceMember" xlink:label="us-gaap_ServiceMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization" xlink:label="us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MaterialsSolutionsDivisionMember" xlink:label="mksi_MaterialsSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SegmentGrossProfitLoss" xlink:label="mksi_SegmentGrossProfitLoss"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SegmentGrossProfitPercentage" xlink:label="mksi_SegmentGrossProfitPercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="us-gaap_ResearchAndDevelopmentExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SellingGeneralAndAdministrativeExpense" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpense"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts" xlink:label="mksi_BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestructuringCharges" xlink:label="us-gaap_RestructuringCharges"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FeesAndExpensesRelatedToRepricingOfTermLoanFacility" xlink:label="mksi_FeesAndExpensesRelatedToRepricingOfTermLoanFacility"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan" xlink:label="mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AmortizationOfIntangibleAssets" xlink:label="us-gaap_AmortizationOfIntangibleAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetImpairment" xlink:label="us-gaap_GoodwillAndIntangibleAssetImpairment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainLossOnSaleOfPropertyPlantEquipment" xlink:label="us-gaap_GainLossOnSaleOfPropertyPlantEquipment"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UnallocatedCorporateExpenses" xlink:label="mksi_UnallocatedCorporateExpenses"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingIncomeLoss" xlink:label="us-gaap_OperatingIncomeLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestAndOtherIncome" xlink:label="us-gaap_InterestAndOtherIncome"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NonoperatingIncomeExpense" xlink:label="us-gaap_NonoperatingIncomeExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_VacuumSolutionsDivisionMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductOrServiceAxis" xlink:to="srt_ProductsAndServicesDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ConsolidationItemsDomain" xlink:to="us-gaap_OperatingSegmentsMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain" xlink:to="us-gaap_ProductMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementBusinessSegmentsAxis" xlink:to="us-gaap_SegmentDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_StatementBusinessSegmentsAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ConsolidationItemsAxis" xlink:to="srt_ConsolidationItemsDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_PhotonicsSolutionsDivisionMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ConsolidationItemsDomain" xlink:to="us-gaap_MaterialReconcilingItemsMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain" xlink:to="us-gaap_ServiceMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="srt_ConsolidationItemsAxis" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_MaterialsSolutionsDivisionMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="srt_ProductOrServiceAxis" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_SegmentGrossProfitLoss" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_SegmentReportingInformationLineItems" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_SegmentGrossProfitPercentage" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_ResearchAndDevelopmentExpense" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_SellingGeneralAndAdministrativeExpense" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_RestructuringCharges" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_FeesAndExpensesRelatedToRepricingOfTermLoanFacility" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_AmortizationOfIntangibleAssets" order="10" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillAndIntangibleAssetImpairment" order="11" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GainLossOnSaleOfPropertyPlantEquipment" order="12" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_UnallocatedCorporateExpenses" order="13" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_OperatingIncomeLoss" order="14" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_InterestAndOtherIncome" order="15" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_InterestExpense" order="16" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GainsLossesOnExtinguishmentOfDebt" order="17" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_NonoperatingIncomeExpense" order="18" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" order="19" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationScheduleOfCapitalExpendituresDepreciationAndAmortiz" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentDomain" xlink:label="us-gaap_SegmentDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_VacuumSolutionsDivisionMember" xlink:label="mksi_VacuumSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingAbstract" xlink:label="us-gaap_SegmentReportingAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="us-gaap_StatementBusinessSegmentsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="us-gaap_SegmentReportingInformationLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentExpenditureAdditionToLongLivedAssets" xlink:label="us-gaap_SegmentExpenditureAdditionToLongLivedAssets"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PhotonicsSolutionsDivisionMember" xlink:label="mksi_PhotonicsSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DepreciationAndAmortization" xlink:label="us-gaap_DepreciationAndAmortization"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MaterialsSolutionsDivisionMember" xlink:label="mksi_MaterialsSolutionsDivisionMember"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_VacuumSolutionsDivisionMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementBusinessSegmentsAxis" xlink:to="us-gaap_SegmentDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_StatementBusinessSegmentsAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_SegmentExpenditureAdditionToLongLivedAssets" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_PhotonicsSolutionsDivisionMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_SegmentReportingInformationLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_DepreciationAndAmortization" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_MaterialsSolutionsDivisionMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationSegmentAssetsByReportableSegmentDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentDomain" xlink:label="us-gaap_SegmentDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_VacuumSolutionsDivisionMember" xlink:label="mksi_VacuumSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ConsolidationItemsDomain" xlink:label="srt_ConsolidationItemsDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingSegmentsMember" xlink:label="us-gaap_OperatingSegmentsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingAbstract" xlink:label="us-gaap_SegmentReportingAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="us-gaap_StatementBusinessSegmentsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ConsolidationItemsAxis" xlink:label="srt_ConsolidationItemsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="us-gaap_SegmentReportingInformationLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="us-gaap_AccountsReceivableNetCurrent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PhotonicsSolutionsDivisionMember" xlink:label="mksi_PhotonicsSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CorporateReconcilingItemsAndEliminationsMember" xlink:label="mksi_CorporateReconcilingItemsAndEliminationsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MaterialsSolutionsDivisionMember" xlink:label="mksi_MaterialsSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SegmentAssets" xlink:label="mksi_SegmentAssets"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_VacuumSolutionsDivisionMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ConsolidationItemsDomain" xlink:to="us-gaap_OperatingSegmentsMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementBusinessSegmentsAxis" xlink:to="us-gaap_SegmentDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_StatementBusinessSegmentsAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ConsolidationItemsAxis" xlink:to="srt_ConsolidationItemsDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_AccountsReceivableNetCurrent" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_PhotonicsSolutionsDivisionMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ConsolidationItemsDomain" xlink:to="mksi_CorporateReconcilingItemsAndEliminationsMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="srt_ConsolidationItemsAxis" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_InventoryNet" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_MaterialsSolutionsDivisionMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_SegmentReportingInformationLineItems" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_SegmentAssets" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationReconcilesTotalSegmentAssetsToTotalAssetsDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ConsolidationItemsDomain" xlink:label="srt_ConsolidationItemsDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MaterialReconcilingItemsMember" xlink:label="us-gaap_MaterialReconcilingItemsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingAbstract" xlink:label="us-gaap_SegmentReportingAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTable" xlink:label="us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingAssetReconcilingItemLineItems" xlink:label="us-gaap_SegmentReportingAssetReconcilingItemLineItems"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SegmentAssets" xlink:label="mksi_SegmentAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ConsolidationItemsAxis" xlink:label="srt_ConsolidationItemsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherAssetsCurrent" xlink:label="us-gaap_OtherAssetsCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IntangibleAssetsNetIncludingGoodwill" xlink:label="us-gaap_IntangibleAssetsNetIncludingGoodwill"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="us-gaap_OtherAssetsNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_Assets" xlink:label="us-gaap_Assets"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ConsolidationItemsDomain" xlink:to="us-gaap_MaterialReconcilingItemsMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAssetReconcilingItemLineItems" xlink:to="mksi_SegmentAssets" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTable" xlink:to="srt_ConsolidationItemsAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ConsolidationItemsAxis" xlink:to="srt_ConsolidationItemsDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAssetReconcilingItemLineItems" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTable" xlink:to="us-gaap_SegmentReportingAssetReconcilingItemLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAssetReconcilingItemLineItems" xlink:to="us-gaap_OtherAssetsCurrent" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAssetReconcilingItemLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentNet" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAssetReconcilingItemLineItems" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAssetReconcilingItemLineItems" xlink:to="us-gaap_IntangibleAssetsNetIncludingGoodwill" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAssetReconcilingItemLineItems" xlink:to="us-gaap_OtherAssetsNoncurrent" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAssetReconcilingItemLineItems" xlink:to="us-gaap_Assets" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationSummaryOfGoodwillAssociatedWithReportableSegmentsD" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentDomain" xlink:label="us-gaap_SegmentDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_VacuumSolutionsDivisionMember" xlink:label="mksi_VacuumSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingAbstract" xlink:label="us-gaap_SegmentReportingAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="us-gaap_StatementBusinessSegmentsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="us-gaap_SegmentReportingInformationLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillGross" xlink:label="us-gaap_GoodwillGross"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PhotonicsSolutionsDivisionMember" xlink:label="mksi_PhotonicsSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillTransfers" xlink:label="us-gaap_GoodwillTransfers"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MaterialsSolutionsDivisionMember" xlink:label="mksi_MaterialsSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillForeignCurrencyTranslationGainLoss" xlink:label="us-gaap_GoodwillForeignCurrencyTranslationGainLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillGross" xlink:label="us-gaap_GoodwillGross_3"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillImpairmentLoss" xlink:label="us-gaap_GoodwillImpairmentLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_6"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_Goodwill" xlink:label="us-gaap_Goodwill"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_VacuumSolutionsDivisionMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementBusinessSegmentsAxis" xlink:to="us-gaap_SegmentDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_StatementBusinessSegmentsAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillGross" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_PhotonicsSolutionsDivisionMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_SegmentReportingInformationLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillTransfers" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_MaterialsSolutionsDivisionMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillForeignCurrencyTranslationGainLoss" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillGross_3" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedPeriodStartLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillImpairmentLoss" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_6" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedPeriodEndLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_Goodwill" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationScheduleOfNetRevenuesAndLonglivedAssetsByGeograph" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_US" xlink:label="country_US"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:label="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingAbstract" xlink:label="us-gaap_SegmentReportingAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_CN" xlink:label="country_CN"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NoncurrentAssets" xlink:label="us-gaap_NoncurrentAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_KR" xlink:label="country_KR"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_JP" xlink:label="country_JP"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_TW" xlink:label="country_TW"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_SG" xlink:label="country_SG"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_DE" xlink:label="country_DE"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherCountriesMember" xlink:label="mksi_OtherCountriesMember"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xlink:to="srt_StatementGeographicalAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain" xlink:to="country_US" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:to="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_StatementGeographicalAxis" xlink:to="srt_SegmentGeographicalDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SegmentReportingAbstract" xlink:to="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xlink:to="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain" xlink:to="country_CN" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:to="us-gaap_NoncurrentAssets" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain" xlink:to="country_KR" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain" xlink:to="country_JP" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain" xlink:to="country_TW" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain" xlink:to="country_SG" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain" xlink:to="country_DE" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain" xlink:to="mksi_OtherCountriesMember" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRestructuringAdditionalInformationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NewportCorporationMember" xlink:label="mksi_NewportCorporationMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestructuringCostAndReserveAxis" xlink:label="us-gaap_RestructuringCostAndReserveAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TypeOfRestructuringDomain" xlink:label="us-gaap_TypeOfRestructuringDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_EuropeMember" xlink:label="srt_EuropeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeSeveranceMember" xlink:label="us-gaap_EmployeeSeveranceMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduleOfRestructuringAndOtherCostTable" xlink:label="mksi_ScheduleOfRestructuringAndOtherCostTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestructuringAndRelatedActivitiesAbstract" xlink:label="us-gaap_RestructuringAndRelatedActivitiesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_RestructuringCostAndOtherCostLineItems" xlink:label="mksi_RestructuringCostAndOtherCostLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestructuringCharges" xlink:label="us-gaap_RestructuringCharges"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="us-gaap_BusinessAcquisitionAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AtotechMember" xlink:label="mksi_AtotechMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfFacilitiesYetToClose" xlink:label="mksi_NumberOfFacilitiesYetToClose"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsForLegalSettlements" xlink:label="us-gaap_PaymentsForLegalSettlements"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherRestructuringCosts" xlink:label="us-gaap_OtherRestructuringCosts"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_InsuranceReimbursementReceived" xlink:label="mksi_InsuranceReimbursementReceived"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BusinessAcquisitionAcquireeDomain" xlink:to="mksi_NewportCorporationMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RestructuringCostAndReserveAxis" xlink:to="us-gaap_TypeOfRestructuringDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain" xlink:to="srt_EuropeMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_StatementGeographicalAxis" xlink:to="srt_SegmentGeographicalDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TypeOfRestructuringDomain" xlink:to="us-gaap_EmployeeSeveranceMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfRestructuringAndOtherCostTable" xlink:to="srt_StatementGeographicalAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RestructuringAndRelatedActivitiesAbstract" xlink:to="mksi_ScheduleOfRestructuringAndOtherCostTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_RestructuringCostAndOtherCostLineItems" xlink:to="us-gaap_RestructuringCharges" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BusinessAcquisitionAxis" xlink:to="us-gaap_BusinessAcquisitionAcquireeDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_BusinessAcquisitionAcquireeDomain" xlink:to="mksi_AtotechMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfRestructuringAndOtherCostTable" xlink:to="us-gaap_BusinessAcquisitionAxis" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_RestructuringCostAndOtherCostLineItems" xlink:to="mksi_NumberOfFacilitiesYetToClose" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfRestructuringAndOtherCostTable" xlink:to="us-gaap_RestructuringCostAndReserveAxis" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_RestructuringCostAndOtherCostLineItems" xlink:to="us-gaap_PaymentsForLegalSettlements" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_ScheduleOfRestructuringAndOtherCostTable" xlink:to="mksi_RestructuringCostAndOtherCostLineItems" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_RestructuringCostAndOtherCostLineItems" xlink:to="us-gaap_OtherRestructuringCosts" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="mksi_RestructuringCostAndOtherCostLineItems" xlink:to="mksi_InsuranceReimbursementReceived" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRestructuringScheduleOfCompanysRestructuringActivityDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestructuringAndRelatedActivitiesAbstract" xlink:label="us-gaap_RestructuringAndRelatedActivitiesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestructuringReserve" xlink:label="us-gaap_RestructuringReserve"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_RestructuringExpense" xlink:label="mksi_RestructuringExpense"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PaymentsAndAdjustmentForRestructuring" xlink:label="mksi_PaymentsAndAdjustmentForRestructuring"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestructuringReserve" xlink:label="us-gaap_RestructuringReserve_3"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RestructuringAndRelatedActivitiesAbstract" xlink:to="us-gaap_RestructuringReserve" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RestructuringAndRelatedActivitiesAbstract" xlink:to="mksi_RestructuringExpense" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RestructuringAndRelatedActivitiesAbstract" xlink:to="mksi_PaymentsAndAdjustmentForRestructuring" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RestructuringAndRelatedActivitiesAbstract" xlink:to="us-gaap_RestructuringReserve_3" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureCommitmentsAndContingenciesAdditionalInformationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SignificantSupplyCommitmentTimePeriod" xlink:label="mksi_SignificantSupplyCommitmentTimePeriod"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PurchaseCommitmentRemainingMinimumAmountCommitted" xlink:label="us-gaap_PurchaseCommitmentRemainingMinimumAmountCommitted"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:to="mksi_SignificantSupplyCommitmentTimePeriod" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:to="us-gaap_PurchaseCommitmentRemainingMinimumAmountCommitted" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureScheduleIIValuationAndQualifyingAccountsDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:label="us-gaap_ValuationAllowancesAndReservesTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesDomain" xlink:label="us-gaap_ValuationAllowancesAndReservesDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember" xlink:label="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:label="srt_ValuationAndQualifyingAccountsDisclosureLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesBalance" xlink:label="us-gaap_ValuationAllowancesAndReservesBalance"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ValuationAndQualifyingAccountsDisclosureTable" xlink:label="srt_ValuationAndQualifyingAccountsDisclosureTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ValuationAndQualifyingAccountsAbstract" xlink:label="srt_ValuationAndQualifyingAccountsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesReservesOfBusinessesAcquired" xlink:label="us-gaap_ValuationAllowancesAndReservesReservesOfBusinessesAcquired"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense" xlink:label="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesChargedToOtherAccounts" xlink:label="us-gaap_ValuationAllowancesAndReservesChargedToOtherAccounts"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesDeductions" xlink:label="us-gaap_ValuationAllowancesAndReservesDeductions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesBalance" xlink:label="us-gaap_ValuationAllowancesAndReservesBalance_5"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:to="us-gaap_ValuationAllowancesAndReservesDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ValuationAllowancesAndReservesDomain" xlink:to="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:to="us-gaap_ValuationAllowancesAndReservesBalance" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureTable" xlink:to="us-gaap_ValuationAllowancesAndReservesTypeAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ValuationAndQualifyingAccountsAbstract" xlink:to="srt_ValuationAndQualifyingAccountsDisclosureTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:to="us-gaap_ValuationAllowancesAndReservesReservesOfBusinessesAcquired" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureTable" xlink:to="srt_ValuationAndQualifyingAccountsDisclosureLineItems" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:to="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:to="us-gaap_ValuationAllowancesAndReservesChargedToOtherAccounts" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:to="us-gaap_ValuationAllowancesAndReservesDeductions" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:to="us-gaap_ValuationAllowancesAndReservesBalance_5" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel"/>
        </link:presentationLink>
        <link:presentationLink xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureSubsequentEventsAdditionalInformationDetail" xlink:title="presentationLink" xlink:type="extended">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventLineItems" xlink:label="us-gaap_SubsequentEventLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermDebtRefinancedDescription" xlink:label="us-gaap_ShortTermDebtRefinancedDescription"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingDomain" xlink:label="us-gaap_VestingDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UsdTrancheBMember" xlink:label="mksi_UsdTrancheBMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TypeOfArrangementAxis" xlink:label="us-gaap_TypeOfArrangementAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ArrangementsAndNonarrangementTransactionsMember" xlink:label="us-gaap_ArrangementsAndNonarrangementTransactionsMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SixthAmendmentMember" xlink:label="mksi_SixthAmendmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="us-gaap_SubsequentEventTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventMember" xlink:label="us-gaap_SubsequentEventMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermSofrBorrowingsMember" xlink:label="mksi_TermSofrBorrowingsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CreditFacilityAxis" xlink:label="us-gaap_CreditFacilityAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CreditFacilityDomain" xlink:label="us-gaap_CreditFacilityDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevolvingCreditFacilityMember" xlink:label="us-gaap_RevolvingCreditFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingAxis" xlink:label="us-gaap_VestingAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventTable" xlink:label="us-gaap_SubsequentEventTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventTypeAxis" xlink:label="us-gaap_SubsequentEventTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventsAbstract" xlink:label="us-gaap_SubsequentEventsAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermDebtRefinancedAmount" xlink:label="us-gaap_ShortTermDebtRefinancedAmount"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EuroTrancheBMember" xlink:label="mksi_EuroTrancheBMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_BaseRateBorrowingsMember" xlink:label="mksi_BaseRateBorrowingsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentInterestRateIncreaseDecrease" xlink:label="us-gaap_DebtInstrumentInterestRateIncreaseDecrease"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SecuredOvernightFinancingRateSofrMember" xlink:label="us-gaap_SecuredOvernightFinancingRateSofrMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SeniorNotesDue2034Member" xlink:label="mksi_SeniorNotesDue2034Member"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PrepaymentPremiumPercentageOfAggregatePrincipalAmount" xlink:label="mksi_PrepaymentPremiumPercentageOfAggregatePrincipalAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentFaceAmount" xlink:label="us-gaap_DebtInstrumentFaceAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentInterestRateStatedPercentage" xlink:label="us-gaap_DebtInstrumentInterestRateStatedPercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentFrequencyOfPeriodicPayment" xlink:label="us-gaap_DebtInstrumentFrequencyOfPeriodicPayment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RepaymentsOfDebt" xlink:label="us-gaap_RepaymentsOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentPeriodicPaymentPrincipal" xlink:label="us-gaap_DebtInstrumentPeriodicPaymentPrincipal"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_ShortTermDebtRefinancedDescription" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_UsdTrancheBMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_TypeOfArrangementAxis" xlink:to="us-gaap_ArrangementsAndNonarrangementTransactionsMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ArrangementsAndNonarrangementTransactionsMember" xlink:to="mksi_SixthAmendmentMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventTypeDomain" xlink:to="us-gaap_SubsequentEventMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermSofrBorrowingsMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CreditFacilityAxis" xlink:to="us-gaap_CreditFacilityDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CreditFacilityDomain" xlink:to="us-gaap_RevolvingCreditFacilityMember" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VestingAxis" xlink:to="us-gaap_VestingDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventTable" xlink:to="us-gaap_SubsequentEventTypeAxis" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventTypeAxis" xlink:to="us-gaap_SubsequentEventTypeDomain" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventsAbstract" xlink:to="us-gaap_SubsequentEventTable" order="0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_ShortTermDebtRefinancedAmount" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_EuroTrancheBMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_BaseRateBorrowingsMember" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventTable" xlink:to="us-gaap_VestingAxis" order="1" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_DebtInstrumentInterestRateIncreaseDecrease" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="us-gaap_SecuredOvernightFinancingRateSofrMember" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventTable" xlink:to="us-gaap_DebtInstrumentAxis" order="2" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" order="2.0" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_SeniorNotesDue2034Member" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventTable" xlink:to="us-gaap_CreditFacilityAxis" order="3" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="mksi_PrepaymentPremiumPercentageOfAggregatePrincipalAmount" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventTable" xlink:to="us-gaap_TypeOfArrangementAxis" order="4" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_DebtInstrumentFaceAmount" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventTable" xlink:to="us-gaap_SubsequentEventLineItems" order="5" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_DebtInstrumentInterestRateStatedPercentage" order="6" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_DebtInstrumentFrequencyOfPeriodicPayment" order="7" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_RepaymentsOfDebt" order="8" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel"/>
          <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_DebtInstrumentPeriodicPaymentPrincipal" order="9" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel"/>
        </link:presentationLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/StatementConsolidatedStatementsOfOperationsAndComprehensiveIncomeLoss">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenuesAbstract" xlink:label="us-gaap_RevenuesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductMember" xlink:label="us-gaap_ProductMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="us-gaap_EarningsPerShareAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerShareBasic" xlink:label="us-gaap_EarningsPerShareBasic"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CostOfRevenueAbstract" xlink:label="us-gaap_CostOfRevenueAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization" xlink:label="us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent" xlink:label="us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ServiceMember" xlink:label="us-gaap_ServiceMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="us-gaap_EarningsPerShareDiluted"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GrossProfit" xlink:label="us-gaap_GrossProfit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="us-gaap_ResearchAndDevelopmentExpense"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherComprehensiveIncomeLossNetInvestmentHedgeGainLossNetOfTax" xlink:label="mksi_OtherComprehensiveIncomeLossNetInvestmentHedgeGainLossNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SellingGeneralAndAdministrativeExpense" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessCombinationAcquisitionRelatedCosts" xlink:label="us-gaap_BusinessCombinationAcquisitionRelatedCosts"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestructuringCharges" xlink:label="us-gaap_RestructuringCharges"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan" xlink:label="mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AmortizationOfIntangibleAssets" xlink:label="us-gaap_AmortizationOfIntangibleAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetImpairment" xlink:label="us-gaap_GoodwillAndIntangibleAssetImpairment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainLossOnSaleOfPropertyPlantEquipment" xlink:label="us-gaap_GainLossOnSaleOfPropertyPlantEquipment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingIncomeLoss" xlink:label="us-gaap_OperatingIncomeLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestAndOtherIncome" xlink:label="us-gaap_InterestAndOtherIncome"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="us-gaap_OtherNonoperatingIncomeExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetIncomeLoss" xlink:label="us-gaap_NetIncomeLoss"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StatementTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="srt_ProductOrServiceAxis" xlink:to="srt_ProductsAndServicesDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="srt_ProductOrServiceAxis" xlink:to="srt_ProductsAndServicesDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_StatementTable" xlink:to="srt_ProductOrServiceAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_RevenuesAbstract" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_ProductsAndServicesDomain" xlink:to="us-gaap_ProductMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_EarningsPerShareBasic" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:to="us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_RevenuesAbstract" xlink:to="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_CostOfRevenueAbstract" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_ProductsAndServicesDomain" xlink:to="us-gaap_ServiceMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_EarningsPerShareDiluted" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_GrossProfit" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:to="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_ResearchAndDevelopmentExpense" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:to="mksi_OtherComprehensiveIncomeLossNetInvestmentHedgeGainLossNetOfTax" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_EarningsPerShareAbstract" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_SellingGeneralAndAdministrativeExpense" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:to="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_BusinessCombinationAcquisitionRelatedCosts" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:to="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_RestructuringCharges" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:to="us-gaap_ComprehensiveIncomeNetOfTax" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_AmortizationOfIntangibleAssets" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="8" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_GoodwillAndIntangibleAssetImpairment" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="9" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_GainLossOnSaleOfPropertyPlantEquipment" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="10" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_OperatingIncomeLoss" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="11" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_InterestAndOtherIncome" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="12" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_InterestExpense" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="13" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_GainsLossesOnExtinguishmentOfDebt" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="14" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_OtherNonoperatingIncomeExpense" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="15" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="16" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_IncomeTaxExpenseBenefit" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="17" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_NetIncomeLoss" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_StatementConsolidatedStatementsOfStockholdersEquity">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockMember" xlink:label="us-gaap_CommonStockMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ComprehensiveIncomeNetOfTaxAbstract" xlink:label="us-gaap_ComprehensiveIncomeNetOfTaxAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetIncomeLoss" xlink:label="us-gaap_NetIncomeLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SharesIssued" xlink:label="us-gaap_SharesIssued"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AdditionalPaidInCapitalMember" xlink:label="us-gaap_AdditionalPaidInCapitalMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation" xlink:label="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RetainedEarningsMember" xlink:label="us-gaap_RetainedEarningsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation" xlink:label="us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockIssuedDuringPeriodValueAcquisitions" xlink:label="us-gaap_StockIssuedDuringPeriodValueAcquisitions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockIssuedDuringPeriodSharesAcquisitions" xlink:label="us-gaap_StockIssuedDuringPeriodSharesAcquisitions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockRepurchasedAndRetiredDuringPeriodShares" xlink:label="us-gaap_StockRepurchasedAndRetiredDuringPeriodShares"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockRepurchasedAndRetiredDuringPeriodValue" xlink:label="us-gaap_StockRepurchasedAndRetiredDuringPeriodValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendsCommonStockCash" xlink:label="us-gaap_DividendsCommonStockCash"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StatementTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_StatementTable" xlink:to="us-gaap_StatementEquityComponentsAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StockholdersEquity" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_StatementEquityComponentsAxis" xlink:to="us-gaap_EquityComponentDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_StatementEquityComponentsAxis" xlink:to="us-gaap_EquityComponentDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_CommonStockMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ComprehensiveIncomeNetOfTaxAbstract" xlink:to="us-gaap_NetIncomeLoss" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_SharesIssued" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AdditionalPaidInCapitalMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ComprehensiveIncomeNetOfTaxAbstract" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StockIssuedDuringPeriodValueShareBasedCompensation" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_RetainedEarningsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StockIssuedDuringPeriodSharesShareBasedCompensation" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StockIssuedDuringPeriodValueAcquisitions" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StockIssuedDuringPeriodSharesAcquisitions" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StockRepurchasedAndRetiredDuringPeriodShares" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="8" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StockRepurchasedAndRetiredDuringPeriodValue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="9" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_AdjustmentsToAdditionalPaidInCapitalEquityComponentOfConvertibleDebt" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="10" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_DividendsCommonStockCash" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="11" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_ComprehensiveIncomeNetOfTaxAbstract" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureCybersecurityRiskManagementStrategyAndGovernance">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementStrategyAndGovernanceAbstract" xlink:label="cyd_CybersecurityRiskManagementStrategyAndGovernanceAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementStrategyAndGovernanceTable" xlink:label="cyd_CybersecurityRiskManagementStrategyAndGovernanceTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" xlink:label="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock" xlink:label="cyd_CybersecurityRiskBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementStrategyAndGovernanceLineItems" xlink:label="cyd_CybersecurityRiskManagementStrategyAndGovernanceLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock" xlink:label="cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementProcessesIntegratedFlag" xlink:label="cyd_CybersecurityRiskManagementProcessesIntegratedFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskProcessForInformingBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock" xlink:label="cyd_CybersecurityRiskProcessForInformingBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementProcessesIntegratedTextBlock" xlink:label="cyd_CybersecurityRiskManagementProcessesIntegratedTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskRoleOfManagementTextBlock" xlink:label="cyd_CybersecurityRiskRoleOfManagementTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementThirdPartyEngagedFlag" xlink:label="cyd_CybersecurityRiskManagementThirdPartyEngagedFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleFlag" xlink:label="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskThirdPartyOversightAndIdentificationProcessesFlag" xlink:label="cyd_CybersecurityRiskThirdPartyOversightAndIdentificationProcessesFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleTextBlock" xlink:label="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantFlag" xlink:label="cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantFlag"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementExpertiseOfManagementResponsibleTextBlock" xlink:label="cyd_CybersecurityRiskManagementExpertiseOfManagementResponsibleTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantTextBlock" xlink:label="cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskProcessForInformingManagementOrCommitteesResponsibleTextBlock" xlink:label="cyd_CybersecurityRiskProcessForInformingManagementOrCommitteesResponsibleTextBlock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/cyd/2025/cyd-2025.xsd#cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleReportToBoardFlag" xlink:label="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleReportToBoardFlag"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="cyd_CybersecurityRiskManagementStrategyAndGovernanceAbstract" xlink:to="cyd_CybersecurityRiskManagementStrategyAndGovernanceTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" xlink:to="cyd_CybersecurityRiskBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="cyd_CybersecurityRiskManagementStrategyAndGovernanceLineItems" xlink:to="cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock" xlink:to="cyd_CybersecurityRiskManagementProcessesIntegratedFlag" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="cyd_CybersecurityRiskManagementStrategyAndGovernanceAbstract" xlink:to="cyd_CybersecurityRiskManagementStrategyAndGovernanceLineItems" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" xlink:to="cyd_CybersecurityRiskProcessForInformingBoardCommitteeOrSubcommitteeResponsibleForOversightTextBlock" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="cyd_CybersecurityRiskManagementStrategyAndGovernanceLineItems" xlink:to="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock" xlink:to="cyd_CybersecurityRiskManagementProcessesIntegratedTextBlock" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" xlink:to="cyd_CybersecurityRiskRoleOfManagementTextBlock" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock" xlink:to="cyd_CybersecurityRiskManagementThirdPartyEngagedFlag" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" xlink:to="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleFlag" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock" xlink:to="cyd_CybersecurityRiskThirdPartyOversightAndIdentificationProcessesFlag" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" xlink:to="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleTextBlock" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock" xlink:to="cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantFlag" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" xlink:to="cyd_CybersecurityRiskManagementExpertiseOfManagementResponsibleTextBlock" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="cyd_CybersecurityRiskManagementProcessesForAssessingIdentifyingAndManagingThreatsTextBlock" xlink:to="cyd_CybersecurityRiskMateriallyAffectedOrReasonablyLikelyToMateriallyAffectRegistrantTextBlock" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" xlink:to="cyd_CybersecurityRiskProcessForInformingManagementOrCommitteesResponsibleTextBlock" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="cyd_CybersecurityRiskBoardOfDirectorsOversightTextBlock" xlink:to="cyd_CybersecurityRiskManagementPositionsOrCommitteesResponsibleReportToBoardFlag" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureSummaryOfSignificantAccountingPoliciesAdditionalInformationDetail">
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:label="mksi_ScheduleOfSignificantAccountingPoliciesLineItems"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:label="mksi_ScheduleOfSignificantAccountingPoliciesTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="us-gaap_ConcentrationRiskByTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="us-gaap_ConcentrationRiskTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="us-gaap_ConcentrationRiskTypeDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AdjustmentsForNewAccountingPronouncementsAxis" xlink:label="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TypeOfAdoptionMember" xlink:label="us-gaap_TypeOfAdoptionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TypeOfAdoptionMember" xlink:label="us-gaap_TypeOfAdoptionMember_default"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AccountingStandardsUpdated201409Member" xlink:label="mksi_AccountingStandardsUpdated201409Member"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_NameOfMajorCustomerDomain" xlink:label="srt_NameOfMajorCustomerDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SemiconductorProductsMember" xlink:label="mksi_SemiconductorProductsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BuildingMember" xlink:label="us-gaap_BuildingMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AdjustedEBITDAMember" xlink:label="mksi_AdjustedEBITDAMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="us-gaap_CustomerConcentrationRiskMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeMember" xlink:label="srt_RangeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InProcessResearchAndDevelopmentMember" xlink:label="us-gaap_InProcessResearchAndDevelopmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SalesRevenueNetMember" xlink:label="us-gaap_SalesRevenueNetMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_RevenueRecognitionPaymentTerms" xlink:label="mksi_RevenueRecognitionPaymentTerms"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MajorCustomersAxis" xlink:label="srt_MajorCustomersAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_NameOfMajorCustomerDomain" xlink:label="srt_NameOfMajorCustomerDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeMember" xlink:label="srt_RangeMember_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherExpenseMember" xlink:label="us-gaap_OtherExpenseMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OneCustomerMember" xlink:label="mksi_OneCustomerMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="us-gaap_MachineryAndEquipmentMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_Time-BasedRSUMember" xlink:label="mksi_Time-BasedRSUMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccountsReceivableMember" xlink:label="us-gaap_AccountsReceivableMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_WarrantyPeriod" xlink:label="mksi_WarrantyPeriod"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ZeroCustomerMember" xlink:label="mksi_ZeroCustomerMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FurnitureAndFixturesMember" xlink:label="us-gaap_FurnitureAndFixturesMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SeparatelyPricedContractsTerm" xlink:label="mksi_SeparatelyPricedContractsTerm"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OfficeEquipmentMember" xlink:label="us-gaap_OfficeEquipmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueRemainingPerformanceObligationOptionalExemptionRemainingDuration" xlink:label="us-gaap_RevenueRemainingPerformanceObligationOptionalExemptionRemainingDuration"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MinimumPeriodOfCompanysResearchAndDevelopmentProjects" xlink:label="mksi_MinimumPeriodOfCompanysResearchAndDevelopmentProjects"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MaximumPeriodOfCompanysResearchAndDevelopmentProjects" xlink:label="mksi_MaximumPeriodOfCompanysResearchAndDevelopmentProjects"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AMIC" xlink:label="mksi_AMIC"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AMICIncreases" xlink:label="mksi_AMICIncreases"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InvestmentTaxCredit" xlink:label="us-gaap_InvestmentTaxCredit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_LevelOfPerformanceTargetAchievedPercentage" xlink:label="mksi_LevelOfPerformanceTargetAchievedPercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossForeignCurrencyTranslationAdjustmentNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossForeignCurrencyTranslationAdjustmentNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AociDerivativeQualifyingAsHedgeExcludedComponentAfterTax" xlink:label="us-gaap_AociDerivativeQualifyingAsHedgeExcludedComponentAfterTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="us-gaap_ConcentrationRiskPercentage1"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForTenOrMorePercentOfAccountsReceivable" xlink:label="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfAccountsReceivable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentUsefulLife" xlink:label="us-gaap_PropertyPlantAndEquipmentUsefulLife"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AmortizationPeriodOfLeaseholdImprovements" xlink:label="mksi_AmortizationPeriodOfLeaseholdImprovements"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CumulativeInflationRates" xlink:label="mksi_CumulativeInflationRates"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetUsefulLife" xlink:label="us-gaap_FiniteLivedIntangibleAssetUsefulLife"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignCurrencyTransactionGainLossRealized" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossRealized"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MinimumPercentageOfRecognizedTaxBenefitsFromUncertainTaxPosition" xlink:label="mksi_MinimumPercentageOfRecognizedTaxBenefitsFromUncertainTaxPosition"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_ScheduleOfSignificantAccountingPoliciesTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_ConcentrationRiskByTypeAxis" xlink:to="us-gaap_ConcentrationRiskTypeDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_ConcentrationRiskByTypeAxis" xlink:to="us-gaap_ConcentrationRiskTypeDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_PlanNameAxis" xlink:to="us-gaap_PlanNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_PlanNameAxis" xlink:to="us-gaap_PlanNameDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis" xlink:to="us-gaap_TypeOfAdoptionMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis" xlink:to="us-gaap_TypeOfAdoptionMember_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_TypeOfAdoptionMember" xlink:to="mksi_AccountingStandardsUpdated201409Member" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="mksi_SemiconductorProductsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_AwardTypeAxis" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_AwardTypeAxis" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="us-gaap_RestrictedStockUnitsRSUMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:to="us-gaap_ConcentrationRiskBenchmarkDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:to="us-gaap_ConcentrationRiskBenchmarkDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_BuildingMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PlanNameDomain" xlink:to="mksi_AdjustedEBITDAMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ConcentrationRiskTypeDomain" xlink:to="us-gaap_CustomerConcentrationRiskMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="us-gaap_InProcessResearchAndDevelopmentMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain" xlink:to="us-gaap_SalesRevenueNetMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="srt_RangeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_IncomeStatementLocationAxis" xlink:to="us-gaap_IncomeStatementLocationDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_IncomeStatementLocationAxis" xlink:to="us-gaap_IncomeStatementLocationDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_RevenueRecognitionPaymentTerms" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="srt_MajorCustomersAxis" xlink:to="srt_NameOfMajorCustomerDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="srt_MajorCustomersAxis" xlink:to="srt_NameOfMajorCustomerDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_OtherExpenseMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis" xlink:to="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis" xlink:to="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="mksi_OneCustomerMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_MachineryAndEquipmentMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PlanNameDomain" xlink:to="mksi_Time-BasedRSUMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain" xlink:to="us-gaap_AccountsReceivableMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="us-gaap_AdjustmentsForNewAccountingPronouncementsAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_WarrantyPeriod" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="mksi_ZeroCustomerMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_FurnitureAndFixturesMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="us-gaap_ConcentrationRiskByTypeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_SeparatelyPricedContractsTerm" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_OfficeEquipmentMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="srt_MajorCustomersAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="us-gaap_RevenueRemainingPerformanceObligationOptionalExemptionRemainingDuration" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="us-gaap_ConcentrationRiskByBenchmarkAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_MinimumPeriodOfCompanysResearchAndDevelopmentProjects" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="us-gaap_PropertyPlantAndEquipmentByTypeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_MaximumPeriodOfCompanysResearchAndDevelopmentProjects" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="us-gaap_IncomeStatementLocationAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_AMIC" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_AMICIncreases" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="8" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="us-gaap_AwardTypeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="8" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="us-gaap_InvestmentTaxCredit" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="9" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesTable" xlink:to="us-gaap_PlanNameAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="9" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="10" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="11" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_LevelOfPerformanceTargetAchievedPercentage" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="12" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossForeignCurrencyTranslationAdjustmentNetOfTax" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="13" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="us-gaap_AociDerivativeQualifyingAsHedgeExcludedComponentAfterTax" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="14" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="us-gaap_ConcentrationRiskPercentage1" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="15" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfAccountsReceivable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="16" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentUsefulLife" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="17" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_AmortizationPeriodOfLeaseholdImprovements" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="18" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_CumulativeInflationRates" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="19" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="us-gaap_FiniteLivedIntangibleAssetUsefulLife" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="20" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="us-gaap_ForeignCurrencyTransactionGainLossRealized" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="21" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" xlink:to="mksi_MinimumPercentageOfRecognizedTaxBenefitsFromUncertainTaxPosition" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRecentAccountingPronouncementsAdditionalInformationDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems" xlink:label="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable" xlink:label="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TotalIncomeTaxPaymentsNetOfRefunds" xlink:label="mksi_TotalIncomeTaxPaymentsNetOfRefunds"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MinimumPercentageOfIncomeTaxPaymentNetOfRefundsReceived" xlink:label="mksi_MinimumPercentageOfIncomeTaxPaymentNetOfRefundsReceived"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems" xlink:to="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems" xlink:to="mksi_TotalIncomeTaxPaymentsNetOfRefunds" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_NewAccountingPronouncementsOrChangeInAccountingPrincipleLineItems" xlink:to="mksi_MinimumPercentageOfIncomeTaxPaymentNetOfRefundsReceived" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureRevenueFromContractsWithCustomersScheduleOfDeferredRevenueAndCustomerAdvancesByArrangementParentheticalDetail">
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ChangeInContractWithCustomerLiabilityLineItems" xlink:label="mksi_ChangeInContractWithCustomerLiabilityLineItems"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ChangeInContractWithCustomerLiabilityTable" xlink:label="mksi_ChangeInContractWithCustomerLiabilityTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="us-gaap_BalanceSheetLocationDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredRevenueMember" xlink:label="mksi_DeferredRevenueMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BalanceSheetLocationAxis" xlink:label="us-gaap_BalanceSheetLocationAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="us-gaap_BalanceSheetLocationDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ContractWithCustomerLiabilityNoncurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CustomerAdvancesMember" xlink:label="mksi_CustomerAdvancesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ContractWithCustomerLiabilityCurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="mksi_ChangeInContractWithCustomerLiabilityLineItems" xlink:to="mksi_ChangeInContractWithCustomerLiabilityTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_BalanceSheetLocationDomain" xlink:to="mksi_DeferredRevenueMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_BalanceSheetLocationAxis" xlink:to="us-gaap_BalanceSheetLocationDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_BalanceSheetLocationAxis" xlink:to="us-gaap_BalanceSheetLocationDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ChangeInContractWithCustomerLiabilityLineItems" xlink:to="us-gaap_ContractWithCustomerLiabilityNoncurrent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_ChangeInContractWithCustomerLiabilityTable" xlink:to="us-gaap_BalanceSheetLocationAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_BalanceSheetLocationDomain" xlink:to="mksi_CustomerAdvancesMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_ChangeInContractWithCustomerLiabilityLineItems" xlink:to="us-gaap_ContractWithCustomerLiabilityCurrent" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRevenueFromContractsWithCustomersSummaryOfRevenueFromContractsWithCustomersDetails">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DisaggregationOfRevenueLineItems" xlink:label="us-gaap_DisaggregationOfRevenueLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DisaggregationOfRevenueTable" xlink:label="us-gaap_DisaggregationOfRevenueTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SemiconductorMember" xlink:label="mksi_SemiconductorMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ElectronicsAndPackagingMember" xlink:label="mksi_ElectronicsAndPackagingMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SpecialtyIndustrialMember" xlink:label="mksi_SpecialtyIndustrialMember"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="us-gaap_DisaggregationOfRevenueTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="srt_ProductOrServiceAxis" xlink:to="srt_ProductsAndServicesDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DisaggregationOfRevenueTable" xlink:to="srt_ProductOrServiceAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_ProductsAndServicesDomain" xlink:to="mksi_SemiconductorMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_ProductsAndServicesDomain" xlink:to="mksi_ElectronicsAndPackagingMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_ProductsAndServicesDomain" xlink:to="mksi_SpecialtyIndustrialMember" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureFairValueMeasurementsScheduleOfFairValueOfAssetsAndLiabilitiesMeasuredOnRecurringBasisDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="us-gaap_BalanceSheetLocationDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherCurrentLiabilitiesMember" xlink:label="us-gaap_OtherCurrentLiabilitiesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MoneyMarketFundsMember" xlink:label="us-gaap_MoneyMarketFundsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:label="us-gaap_FairValueByFairValueHierarchyLevelAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BalanceSheetLocationAxis" xlink:label="us-gaap_BalanceSheetLocationAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InvestmentTypeAxis" xlink:label="us-gaap_InvestmentTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InvestmentTypeCategorizationMember" xlink:label="us-gaap_InvestmentTypeCategorizationMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InvestmentTypeCategorizationMember" xlink:label="us-gaap_InvestmentTypeCategorizationMember_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashAndCashEquivalentsFairValueDisclosure" xlink:label="us-gaap_CashAndCashEquivalentsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueInputsLevel1Member" xlink:label="us-gaap_FairValueInputsLevel1Member"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_GroupInsuranceContractsMember" xlink:label="mksi_GroupInsuranceContractsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentRiskAxis" xlink:label="us-gaap_DerivativeInstrumentRiskAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeContractTypeDomain" xlink:label="us-gaap_DerivativeContractTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeContractTypeDomain" xlink:label="us-gaap_DerivativeContractTypeDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueByMeasurementFrequencyAxis" xlink:label="us-gaap_FairValueByMeasurementFrequencyAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueMeasurementFrequencyDomain" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueMeasurementsRecurringMember" xlink:label="us-gaap_FairValueMeasurementsRecurringMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueByAssetClassAxis" xlink:label="us-gaap_FairValueByAssetClassAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueMeasurementFrequencyDomain" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestRateCapMember" xlink:label="us-gaap_InterestRateCapMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherNoncurrentLiabilitiesMember" xlink:label="us-gaap_OtherNoncurrentLiabilitiesMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TimeDepositsAndCertificatesOfDepositMember" xlink:label="mksi_TimeDepositsAndCertificatesOfDepositMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtSecuritiesAvailableForSaleAndHeldToMaturityAmortizedCostAfterAllowanceForCreditLoss" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleAndHeldToMaturityAmortizedCostAfterAllowanceForCreditLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueInputsLevel2Member" xlink:label="us-gaap_FairValueInputsLevel2Member"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IsraeliPensionAssetsMember" xlink:label="mksi_IsraeliPensionAssetsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestRateSwapMember" xlink:label="us-gaap_InterestRateSwapMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_USTreasurySecuritiesMember" xlink:label="us-gaap_USTreasurySecuritiesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EquitySecuritiesFvNiCurrentAndNoncurrent" xlink:label="us-gaap_EquitySecuritiesFvNiCurrentAndNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueInputsLevel3Member" xlink:label="us-gaap_FairValueInputsLevel3Member"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignExchangeForwardMember" xlink:label="us-gaap_ForeignExchangeForwardMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_USGovernmentAgenciesDebtSecuritiesMember" xlink:label="us-gaap_USGovernmentAgenciesDebtSecuritiesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue" xlink:label="us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignExchangeOptionMember" xlink:label="us-gaap_ForeignExchangeOptionMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MutualFundsAndExchangeTradedFundsMember" xlink:label="mksi_MutualFundsAndExchangeTradedFundsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignCurrencyContractAssetFairValueDisclosure" xlink:label="us-gaap_ForeignCurrencyContractAssetFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BankTimeDepositsMember" xlink:label="us-gaap_BankTimeDepositsMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CurrentInterestRateFairValueHedgeAssetAtFairValue" xlink:label="mksi_CurrentInterestRateFairValueHedgeAssetAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NonCurrentInterestRateFairValueHedgeAssetAtFairValue" xlink:label="mksi_NonCurrentInterestRateFairValueHedgeAssetAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PensionAndDeferredCompensationPlanAssets" xlink:label="mksi_PensionAndDeferredCompensationPlanAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent" xlink:label="us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredCompensationPlanAssetsFairValueDisclosure" xlink:label="mksi_DeferredCompensationPlanAssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AssetsFairValueDisclosure" xlink:label="us-gaap_AssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue" xlink:label="us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" xlink:label="mksi_CurrentInterestRateFairValueHedgeLiabilitiesAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" xlink:label="mksi_NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeLiabilities" xlink:label="us-gaap_DerivativeLiabilities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermInvestments" xlink:label="us-gaap_ShortTermInvestments"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherCurrentAssetsFairValueDisclosure" xlink:label="mksi_OtherCurrentAssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CurrentAssetsFairValueDisclosure" xlink:label="mksi_CurrentAssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AvailableForSaleSecuritiesDebtSecuritiesNoncurrent" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherNonCurrentAssetsFairValueDisclosure" xlink:label="mksi_OtherNonCurrentAssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NonCurrentAssetsFairValueDisclosure" xlink:label="mksi_NonCurrentAssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherCurrentLiabilitiesFairValueDisclosure" xlink:label="mksi_OtherCurrentLiabilitiesFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeLiabilityStatementOfFinancialPositionExtensibleEnumeration" xlink:label="us-gaap_DerivativeLiabilityStatementOfFinancialPositionExtensibleEnumeration"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherNonCurrentLiabilitiesFairValueDisclosure" xlink:label="mksi_OtherNonCurrentLiabilitiesFairValueDisclosure"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_BalanceSheetLocationDomain" xlink:to="us-gaap_OtherCurrentLiabilitiesMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:to="us-gaap_MoneyMarketFundsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:to="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:to="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_BalanceSheetLocationAxis" xlink:to="us-gaap_BalanceSheetLocationDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_InvestmentTypeAxis" xlink:to="us-gaap_InvestmentTypeCategorizationMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_InvestmentTypeAxis" xlink:to="us-gaap_InvestmentTypeCategorizationMember_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_CashAndCashEquivalentsFairValueDisclosure" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:to="us-gaap_FairValueInputsLevel1Member" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_InvestmentTypeCategorizationMember" xlink:to="mksi_GroupInsuranceContractsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_DerivativeInstrumentRiskAxis" xlink:to="us-gaap_DerivativeContractTypeDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_DerivativeInstrumentRiskAxis" xlink:to="us-gaap_DerivativeContractTypeDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueByMeasurementFrequencyAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueMeasurementFrequencyDomain" xlink:to="us-gaap_FairValueMeasurementsRecurringMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_FairValueByAssetClassAxis" xlink:to="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_FairValueByAssetClassAxis" xlink:to="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_FairValueByMeasurementFrequencyAxis" xlink:to="us-gaap_FairValueMeasurementFrequencyDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_FairValueByMeasurementFrequencyAxis" xlink:to="us-gaap_FairValueMeasurementFrequencyDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_InterestRateCapMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_BalanceSheetLocationDomain" xlink:to="us-gaap_OtherNoncurrentLiabilitiesMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:to="mksi_TimeDepositsAndCertificatesOfDepositMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_DebtSecuritiesAvailableForSaleAndHeldToMaturityAmortizedCostAfterAllowanceForCreditLoss" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:to="us-gaap_FairValueInputsLevel2Member" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_InvestmentTypeCategorizationMember" xlink:to="mksi_IsraeliPensionAssetsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueByFairValueHierarchyLevelAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_InterestRateSwapMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:to="us-gaap_USTreasurySecuritiesMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_EquitySecuritiesFvNiCurrentAndNoncurrent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:to="us-gaap_FairValueInputsLevel3Member" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_BalanceSheetLocationAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_ForeignExchangeForwardMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:to="us-gaap_USGovernmentAgenciesDebtSecuritiesMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueByAssetClassAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_ForeignExchangeOptionMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:to="mksi_MutualFundsAndExchangeTradedFundsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_ForeignCurrencyContractAssetFairValueDisclosure" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_InvestmentTypeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:to="us-gaap_BankTimeDepositsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_CurrentInterestRateFairValueHedgeAssetAtFairValue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_DerivativeInstrumentRiskAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_NonCurrentInterestRateFairValueHedgeAssetAtFairValue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_PensionAndDeferredCompensationPlanAssets" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="8" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="9" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_DeferredCompensationPlanAssetsFairValueDisclosure" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="10" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_AssetsFairValueDisclosure" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="11" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="12" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_CurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="13" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="14" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_DerivativeLiabilities" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="15" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_ShortTermInvestments" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="16" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_OtherCurrentAssetsFairValueDisclosure" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="17" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_CurrentAssetsFairValueDisclosure" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="18" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesNoncurrent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="19" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_OtherNonCurrentAssetsFairValueDisclosure" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="20" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_NonCurrentAssetsFairValueDisclosure" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="21" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_OtherCurrentLiabilitiesFairValueDisclosure" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="22" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_DerivativeLiabilityStatementOfFinancialPositionExtensibleEnumeration" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="23" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="mksi_OtherNonCurrentLiabilitiesFairValueDisclosure" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureFairValueMeasurementsScheduleOfEstimatedFairValueAndCarryingValueOfCompanysDebtDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoanFacilityMember" xlink:label="mksi_TermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentFaceAmount" xlink:label="us-gaap_DebtInstrumentFaceAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ConvertibleSeniorNotesDue2030Member" xlink:label="mksi_ConvertibleSeniorNotesDue2030Member"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebtNoncurrent" xlink:label="us-gaap_LongTermDebtNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebtFairValue" xlink:label="us-gaap_LongTermDebtFairValue"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermLoanFacilityMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_DebtInstrumentFaceAmount" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_DebtInstrumentAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_ConvertibleSeniorNotesDue2030Member" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_LongTermDebtNoncurrent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_LongTermDebtFairValue" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedgeAdditionalInformationDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable" xlink:label="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AtotechLimitedMember" xlink:label="mksi_AtotechLimitedMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis" xlink:label="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_HedgingRelationshipDomain" xlink:label="us-gaap_HedgingRelationshipDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_HedgingRelationshipDomain" xlink:label="us-gaap_HedgingRelationshipDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MaximumRemainingMaturityOfForeignCurrencyDerivatives1" xlink:label="us-gaap_MaximumRemainingMaturityOfForeignCurrencyDerivatives1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingDomain" xlink:label="us-gaap_VestingDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EuroTrancheBMember" xlink:label="mksi_EuroTrancheBMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetInvestmentHedgingMember" xlink:label="us-gaap_NetInvestmentHedgingMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoanMember" xlink:label="mksi_TermLoanMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingAxis" xlink:label="us-gaap_VestingAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingDomain" xlink:label="us-gaap_VestingDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentRiskAxis" xlink:label="us-gaap_DerivativeInstrumentRiskAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeContractTypeDomain" xlink:label="us-gaap_DerivativeContractTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="us-gaap_BusinessAcquisitionAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestRateSwapMember" xlink:label="us-gaap_InterestRateSwapMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherOperatingIncomeExpenseMember" xlink:label="us-gaap_OtherOperatingIncomeExpenseMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncrementalBorrowings" xlink:label="mksi_IncrementalBorrowings"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignExchangeOptionMember" xlink:label="us-gaap_ForeignExchangeOptionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestExpenseMember" xlink:label="us-gaap_InterestExpenseMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeNotionalAmount" xlink:label="us-gaap_DerivativeNotionalAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignExchangeForwardMember" xlink:label="us-gaap_ForeignExchangeForwardMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionEffectiveDateOfAcquisition1" xlink:label="us-gaap_BusinessAcquisitionEffectiveDateOfAcquisition1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestRateCapMember" xlink:label="us-gaap_InterestRateCapMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeMaturityDates" xlink:label="us-gaap_DerivativeMaturityDates"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignCurrencyTransactionGainLossUnrealized" xlink:label="us-gaap_ForeignCurrencyTransactionGainLossUnrealized"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TranslationAdjustmentForNetInvestmentHedgeNetOfTax" xlink:label="us-gaap_TranslationAdjustmentForNetInvestmentHedgeNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NumberOfInterestRateDerivativesHeld" xlink:label="us-gaap_NumberOfInterestRateDerivativesHeld"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashFlowHedgeGainLossToBeReclassifiedWithinTwelveMonths" xlink:label="us-gaap_CashFlowHedgeGainLossToBeReclassifiedWithinTwelveMonths"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments" xlink:label="us-gaap_GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ReductionToInterestExpense" xlink:label="mksi_ReductionToInterestExpense"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ReductionInInterestExpense" xlink:label="mksi_ReductionInInterestExpense"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_BusinessAcquisitionAcquireeDomain" xlink:to="mksi_AtotechLimitedMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis" xlink:to="us-gaap_HedgingRelationshipDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis" xlink:to="us-gaap_HedgingRelationshipDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="us-gaap_MaximumRemainingMaturityOfForeignCurrencyDerivatives1" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_EuroTrancheBMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_HedgingRelationshipDomain" xlink:to="us-gaap_NetInvestmentHedgingMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermLoanMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_VestingAxis" xlink:to="us-gaap_VestingDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_VestingAxis" xlink:to="us-gaap_VestingDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable" xlink:to="us-gaap_DerivativeInstrumentRiskAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_DerivativeInstrumentRiskAxis" xlink:to="us-gaap_DerivativeContractTypeDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_IncomeStatementLocationAxis" xlink:to="us-gaap_IncomeStatementLocationDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_BusinessAcquisitionAxis" xlink:to="us-gaap_BusinessAcquisitionAcquireeDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_BusinessAcquisitionAxis" xlink:to="us-gaap_BusinessAcquisitionAcquireeDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_InterestRateSwapMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_OtherOperatingIncomeExpenseMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="mksi_IncrementalBorrowings" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable" xlink:to="us-gaap_DebtInstrumentAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_ForeignExchangeOptionMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_InterestExpenseMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="us-gaap_DerivativeNotionalAmount" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable" xlink:to="us-gaap_IncomeStatementLocationAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_ForeignExchangeForwardMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="us-gaap_BusinessAcquisitionEffectiveDateOfAcquisition1" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable" xlink:to="us-gaap_VestingAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_InterestRateCapMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="us-gaap_DerivativeMaturityDates" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable" xlink:to="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="us-gaap_ForeignCurrencyTransactionGainLossUnrealized" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresTable" xlink:to="us-gaap_BusinessAcquisitionAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="us-gaap_TranslationAdjustmentForNetInvestmentHedgeNetOfTax" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="us-gaap_NumberOfInterestRateDerivativesHeld" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="8" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="us-gaap_CashFlowHedgeGainLossToBeReclassifiedWithinTwelveMonths" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="9" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="us-gaap_GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="10" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="mksi_ReductionToInterestExpense" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="11" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeInstrumentsAndHedgingActivitiesDisclosuresLineItems" xlink:to="mksi_ReductionInInterestExpense" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedgeSummaryOfNotionalValuesOfForeignExchangeForwardContractsOutstandingDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeLineItems" xlink:label="us-gaap_DerivativeLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeTable" xlink:label="us-gaap_DerivativeTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis" xlink:label="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_HedgingRelationshipDomain" xlink:label="us-gaap_HedgingRelationshipDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeAssetNotionalAmount" xlink:label="us-gaap_DerivativeAssetNotionalAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_HedgingDesignationDomain" xlink:label="us-gaap_HedgingDesignationDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DesignatedAsHedgingInstrumentMember" xlink:label="us-gaap_DesignatedAsHedgingInstrumentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_HedgingDesignationAxis" xlink:label="us-gaap_HedgingDesignationAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_HedgingDesignationDomain" xlink:label="us-gaap_HedgingDesignationDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashFlowHedgingMember" xlink:label="us-gaap_CashFlowHedgingMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentRiskAxis" xlink:label="us-gaap_DerivativeInstrumentRiskAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeContractTypeDomain" xlink:label="us-gaap_DerivativeContractTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignExchangeForwardMember" xlink:label="us-gaap_ForeignExchangeForwardMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NondesignatedMember" xlink:label="us-gaap_NondesignatedMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_BalanceSheetHedgesMember" xlink:label="mksi_BalanceSheetHedgesMember"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_DerivativeLineItems" xlink:to="us-gaap_DerivativeTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis" xlink:to="us-gaap_HedgingRelationshipDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeLineItems" xlink:to="us-gaap_DerivativeAssetNotionalAmount" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_HedgingDesignationDomain" xlink:to="us-gaap_DesignatedAsHedgingInstrumentMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_HedgingDesignationAxis" xlink:to="us-gaap_HedgingDesignationDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_HedgingDesignationAxis" xlink:to="us-gaap_HedgingDesignationDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_HedgingRelationshipDomain" xlink:to="us-gaap_CashFlowHedgingMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DerivativeTable" xlink:to="us-gaap_DerivativeInstrumentRiskAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_DerivativeInstrumentRiskAxis" xlink:to="us-gaap_DerivativeContractTypeDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_ForeignExchangeForwardMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_HedgingDesignationDomain" xlink:to="us-gaap_NondesignatedMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_HedgingRelationshipDomain" xlink:to="mksi_BalanceSheetHedgesMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DerivativeTable" xlink:to="us-gaap_HedgingDesignationAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DerivativeTable" xlink:to="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedgeSummaryOfNetGainsLossesOnDerivativesDesignatedAsCashFlowHedgingInstrumentsDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsGainLossLineItems" xlink:label="us-gaap_DerivativeInstrumentsGainLossLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipByIncomeStatementLocationByDerivativeInstrumentRiskTable" xlink:label="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipByIncomeStatementLocationByDerivativeInstrumentRiskTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis" xlink:label="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_HedgingRelationshipDomain" xlink:label="us-gaap_HedgingRelationshipDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignExchangeForwardMember" xlink:label="us-gaap_ForeignExchangeForwardMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent" xlink:label="us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentRiskAxis" xlink:label="us-gaap_DerivativeInstrumentRiskAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeContractTypeDomain" xlink:label="us-gaap_DerivativeContractTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashFlowHedgingMember" xlink:label="us-gaap_CashFlowHedgingMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_InterestRateHegesMember" xlink:label="mksi_InterestRateHegesMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoCostOfRevenues" xlink:label="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoCostOfRevenues"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoInterestExpense" xlink:label="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoInterestExpense"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_DerivativeInstrumentsGainLossLineItems" xlink:to="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipByIncomeStatementLocationByDerivativeInstrumentRiskTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis" xlink:to="us-gaap_HedgingRelationshipDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_HedgingRelationshipDomain" xlink:to="us-gaap_ForeignExchangeForwardMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeInstrumentsGainLossLineItems" xlink:to="us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipByIncomeStatementLocationByDerivativeInstrumentRiskTable" xlink:to="us-gaap_DerivativeInstrumentRiskAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_DerivativeInstrumentRiskAxis" xlink:to="us-gaap_DerivativeContractTypeDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_CashFlowHedgingMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_HedgingRelationshipDomain" xlink:to="mksi_InterestRateHegesMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeInstrumentsGainLossLineItems" xlink:to="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoCostOfRevenues" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipByIncomeStatementLocationByDerivativeInstrumentRiskTable" xlink:to="us-gaap_DerivativeInstrumentsGainLossByHedgingRelationshipAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeInstrumentsGainLossLineItems" xlink:to="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoInterestExpense" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDerivativesAndNetInvestmentHedgeSummaryOfNetLossesGainsOnDerivativesNotDesignatedAsHedgingInstrumentsDetail">
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DerivativeInstrumentsGainLossNotDesignatedAsHedgingInstrumentsLineItems" xlink:label="mksi_DerivativeInstrumentsGainLossNotDesignatedAsHedgingInstrumentsLineItems"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DerivativeAndHedgingTable" xlink:label="mksi_DerivativeAndHedgingTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments" xlink:label="us-gaap_GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_HedgingDesignationDomain" xlink:label="us-gaap_HedgingDesignationDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NondesignatedMember" xlink:label="us-gaap_NondesignatedMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_HedgingDesignationAxis" xlink:label="us-gaap_HedgingDesignationAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentRiskAxis" xlink:label="us-gaap_DerivativeInstrumentRiskAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeContractTypeDomain" xlink:label="us-gaap_DerivativeContractTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignExchangeForwardMember" xlink:label="us-gaap_ForeignExchangeForwardMember"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="mksi_DerivativeInstrumentsGainLossNotDesignatedAsHedgingInstrumentsLineItems" xlink:to="mksi_DerivativeAndHedgingTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_DerivativeInstrumentsGainLossNotDesignatedAsHedgingInstrumentsLineItems" xlink:to="us-gaap_GainLossOnForeignCurrencyDerivativeInstrumentsNotDesignatedAsHedgingInstruments" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_HedgingDesignationDomain" xlink:to="us-gaap_NondesignatedMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_HedgingDesignationAxis" xlink:to="us-gaap_HedgingDesignationDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_DerivativeAndHedgingTable" xlink:to="us-gaap_DerivativeInstrumentRiskAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_DerivativeInstrumentRiskAxis" xlink:to="us-gaap_DerivativeContractTypeDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="us-gaap_ForeignExchangeForwardMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_DerivativeAndHedgingTable" xlink:to="us-gaap_HedgingDesignationAxis" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosurePropertyPlantAndEquipmentSummaryOfPropertyPlantAndEquipmentDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="us-gaap_PropertyPlantAndEquipmentLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:label="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="us-gaap_PropertyPlantAndEquipmentGross"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LandMember" xlink:label="us-gaap_LandMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BuildingAndBuildingImprovementsMember" xlink:label="us-gaap_BuildingAndBuildingImprovementsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="us-gaap_MachineryAndEquipmentMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FurnitureAndFixturesOfficeEquipmentAndSoftwareMember" xlink:label="mksi_FurnitureAndFixturesOfficeEquipmentAndSoftwareMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LeaseholdImprovementsMember" xlink:label="us-gaap_LeaseholdImprovementsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConstructionInProgressMember" xlink:label="us-gaap_ConstructionInProgressMember"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentGross" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_LandMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:to="us-gaap_PropertyPlantAndEquipmentByTypeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_BuildingAndBuildingImprovementsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PropertyPlantAndEquipmentLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentNet" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_MachineryAndEquipmentMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="mksi_FurnitureAndFixturesOfficeEquipmentAndSoftwareMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_LeaseholdImprovementsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_ConstructionInProgressMember" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureGoodwillAndIntangibleAssetsSummaryOfGoodwillAssociatedWithReportableSegmentsDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="us-gaap_SegmentReportingInformationLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentDomain" xlink:label="us-gaap_SegmentDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_VacuumSolutionsDivisionMember" xlink:label="mksi_VacuumSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="us-gaap_StatementBusinessSegmentsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentDomain" xlink:label="us-gaap_SegmentDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillGross" xlink:label="us-gaap_GoodwillGross"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PhotonicsSolutionsDivisionMember" xlink:label="mksi_PhotonicsSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillTransfers" xlink:label="us-gaap_GoodwillTransfers"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MaterialsSolutionsDivisionMember" xlink:label="mksi_MaterialsSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillForeignCurrencyTranslationGainLoss" xlink:label="us-gaap_GoodwillForeignCurrencyTranslationGainLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillImpairmentLoss" xlink:label="us-gaap_GoodwillImpairmentLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_Goodwill" xlink:label="us-gaap_Goodwill"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_VacuumSolutionsDivisionMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_StatementBusinessSegmentsAxis" xlink:to="us-gaap_SegmentDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_StatementBusinessSegmentsAxis" xlink:to="us-gaap_SegmentDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_StatementBusinessSegmentsAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillGross" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_PhotonicsSolutionsDivisionMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillTransfers" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_MaterialsSolutionsDivisionMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillForeignCurrencyTranslationGainLoss" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillImpairmentLoss" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_Goodwill" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureGoodwillAndIntangibleAssetsComponentsOfIntangibleAssetsDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsLineItems" xlink:label="us-gaap_FiniteLivedIntangibleAssetsLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable" xlink:label="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CompletedTechnologyRightsMember" xlink:label="mksi_CompletedTechnologyRightsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsGross" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CustomerRelationshipsMember" xlink:label="us-gaap_CustomerRelationshipsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ImpairmentOfIntangibleAssetsIndefinitelivedExcludingGoodwill" xlink:label="us-gaap_ImpairmentOfIntangibleAssetsIndefinitelivedExcludingGoodwill"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PatentsTrademarksTradeNamesAndOtherMember" xlink:label="mksi_PatentsTrademarksTradeNamesAndOtherMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ImpairmentOfIntangibleAssetIndefiniteLivedExcludingGoodwillStatementOfIncomeOrComprehensiveIncomeExtensibleEnumeration" xlink:label="us-gaap_ImpairmentOfIntangibleAssetIndefiniteLivedExcludingGoodwillStatementOfIncomeOrComprehensiveIncomeExtensibleEnumeration"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsForeignCurrencyTranslationGainLoss" xlink:label="us-gaap_FiniteLivedIntangibleAssetsForeignCurrencyTranslationGainLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_FiniteLivedIntangibleAssetsLineItems" xlink:to="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="mksi_CompletedTechnologyRightsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FiniteLivedIntangibleAssetsLineItems" xlink:to="us-gaap_FiniteLivedIntangibleAssetsGross" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTable" xlink:to="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:to="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:to="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="us-gaap_CustomerRelationshipsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FiniteLivedIntangibleAssetsLineItems" xlink:to="us-gaap_ImpairmentOfIntangibleAssetsIndefinitelivedExcludingGoodwill" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="mksi_PatentsTrademarksTradeNamesAndOtherMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FiniteLivedIntangibleAssetsLineItems" xlink:to="us-gaap_ImpairmentOfIntangibleAssetIndefiniteLivedExcludingGoodwillStatementOfIncomeOrComprehensiveIncomeExtensibleEnumeration" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FiniteLivedIntangibleAssetsLineItems" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FiniteLivedIntangibleAssetsLineItems" xlink:to="us-gaap_FiniteLivedIntangibleAssetsForeignCurrencyTranslationGainLoss" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FiniteLivedIntangibleAssetsLineItems" xlink:to="us-gaap_FiniteLivedIntangibleAssetsNet" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureGoodwillAndIntangibleAssetsAdditionalInformationDetail">
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_GoodwillAndIntangibleAssetsLineItems" xlink:label="mksi_GoodwillAndIntangibleAssetsLineItems"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_GoodwillAndIntangibleAssetsTable" xlink:label="mksi_GoodwillAndIntangibleAssetsTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AtotechLimitedMember" xlink:label="mksi_AtotechLimitedMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ReportingUnitDomain" xlink:label="us-gaap_ReportingUnitDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EquipmentSolutionsBusinessMember" xlink:label="mksi_EquipmentSolutionsBusinessMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InProcessResearchAndDevelopmentMember" xlink:label="us-gaap_InProcessResearchAndDevelopmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ReportingUnitAxis" xlink:label="us-gaap_ReportingUnitAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ReportingUnitDomain" xlink:label="us-gaap_ReportingUnitDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NumberOfReportingUnits" xlink:label="us-gaap_NumberOfReportingUnits"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeMember" xlink:label="srt_RangeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TrademarksAndTradeNamesMember" xlink:label="us-gaap_TrademarksAndTradeNamesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="us-gaap_BusinessAcquisitionAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ElectronicsMember" xlink:label="mksi_ElectronicsMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CompletedTechnologyMember" xlink:label="mksi_CompletedTechnologyMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IntangibleAssetsFairValue" xlink:label="mksi_IntangibleAssetsFairValue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_GeneralMetalFinishingMember" xlink:label="mksi_GeneralMetalFinishingMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillImpairmentLoss" xlink:label="us-gaap_GoodwillImpairmentLoss"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherReportingUnitsMember" xlink:label="mksi_OtherReportingUnitsMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IntangibleAssetsUsefulLifeFutureUndiscountedCashFlows" xlink:label="mksi_IntangibleAssetsUsefulLifeFutureUndiscountedCashFlows"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_WeightedAverageRevenueGrowthRateFutureUndiscountedCashFlows" xlink:label="mksi_WeightedAverageRevenueGrowthRateFutureUndiscountedCashFlows"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DiscountRateFutureUndiscountedCashFlows" xlink:label="mksi_DiscountRateFutureUndiscountedCashFlows"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AmortizationOfIntangibleAssets" xlink:label="us-gaap_AmortizationOfIntangibleAssets"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_InProcessResearchAndDevelopmentReclassifiedIntoCompletedTechnology" xlink:label="mksi_InProcessResearchAndDevelopmentReclassifiedIntoCompletedTechnology"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization" xlink:label="us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IndefiniteLivedIntangibleAssetsExcludingGoodwill" xlink:label="us-gaap_IndefiniteLivedIntangibleAssetsExcludingGoodwill"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsGross" xlink:label="us-gaap_FiniteLivedIntangibleAssetsGross"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetImpairment" xlink:label="us-gaap_GoodwillAndIntangibleAssetImpairment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ReportingUnitPercentageOfFairValueInExcessOfCarryingAmount" xlink:label="us-gaap_ReportingUnitPercentageOfFairValueInExcessOfCarryingAmount"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="mksi_GoodwillAndIntangibleAssetsTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_BusinessAcquisitionAcquireeDomain" xlink:to="mksi_AtotechLimitedMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ReportingUnitDomain" xlink:to="mksi_EquipmentSolutionsBusinessMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="us-gaap_InProcessResearchAndDevelopmentMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_ReportingUnitAxis" xlink:to="us-gaap_ReportingUnitDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_ReportingUnitAxis" xlink:to="us-gaap_ReportingUnitDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="us-gaap_NumberOfReportingUnits" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="us-gaap_TrademarksAndTradeNamesMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_GoodwillAndIntangibleAssetsTable" xlink:to="us-gaap_ReportingUnitAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_BusinessAcquisitionAxis" xlink:to="us-gaap_BusinessAcquisitionAcquireeDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:to="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis" xlink:to="us-gaap_IndefiniteLivedIntangibleAssetsMajorClassNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ReportingUnitDomain" xlink:to="mksi_ElectronicsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:to="mksi_CompletedTechnologyMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="mksi_IntangibleAssetsFairValue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_GoodwillAndIntangibleAssetsTable" xlink:to="us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ReportingUnitDomain" xlink:to="mksi_GeneralMetalFinishingMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="us-gaap_GoodwillImpairmentLoss" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_GoodwillAndIntangibleAssetsTable" xlink:to="us-gaap_IndefiniteLivedIntangibleAssetsByMajorClassAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ReportingUnitDomain" xlink:to="mksi_OtherReportingUnitsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="mksi_IntangibleAssetsUsefulLifeFutureUndiscountedCashFlows" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_GoodwillAndIntangibleAssetsTable" xlink:to="us-gaap_BusinessAcquisitionAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="mksi_WeightedAverageRevenueGrowthRateFutureUndiscountedCashFlows" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_GoodwillAndIntangibleAssetsTable" xlink:to="srt_RangeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="mksi_DiscountRateFutureUndiscountedCashFlows" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="us-gaap_AmortizationOfIntangibleAssets" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="mksi_InProcessResearchAndDevelopmentReclassifiedIntoCompletedTechnology" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="8" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="9" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="us-gaap_IndefiniteLivedIntangibleAssetsExcludingGoodwill" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="10" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="us-gaap_FiniteLivedIntangibleAssetsGross" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="11" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="us-gaap_GoodwillAndIntangibleAssetImpairment" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="13" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_GoodwillAndIntangibleAssetsLineItems" xlink:to="us-gaap_ReportingUnitPercentageOfFairValueInExcessOfCarryingAmount" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureProductWarrantiesProductWarrantyActivitiesDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyLiabilityLineItems" xlink:label="us-gaap_ProductWarrantyLiabilityLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyLiabilityTable" xlink:label="us-gaap_ProductWarrantyLiabilityTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PhotonControlMember" xlink:label="mksi_PhotonControlMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="us-gaap_ProductWarrantyAccrual"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="us-gaap_BusinessAcquisitionAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AtotechLimitedMember" xlink:label="mksi_AtotechLimitedMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyAccrualWarrantiesIssued" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyAccrualPeriodIncreaseDecrease" xlink:label="us-gaap_ProductWarrantyAccrualPeriodIncreaseDecrease"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_ProductWarrantyLiabilityLineItems" xlink:to="us-gaap_ProductWarrantyLiabilityTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_BusinessAcquisitionAcquireeDomain" xlink:to="mksi_PhotonControlMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ProductWarrantyLiabilityLineItems" xlink:to="us-gaap_ProductWarrantyAccrual" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_BusinessAcquisitionAxis" xlink:to="us-gaap_BusinessAcquisitionAcquireeDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ProductWarrantyLiabilityTable" xlink:to="us-gaap_BusinessAcquisitionAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_BusinessAcquisitionAcquireeDomain" xlink:to="mksi_AtotechLimitedMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ProductWarrantyLiabilityLineItems" xlink:to="us-gaap_ProductWarrantyAccrualWarrantiesIssued" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ProductWarrantyLiabilityLineItems" xlink:to="us-gaap_ProductWarrantyAccrualPeriodIncreaseDecrease" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureProductWarrantiesAdditionalInformationDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyLiabilityLineItems" xlink:label="us-gaap_ProductWarrantyLiabilityLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyLiabilityTable" xlink:label="us-gaap_ProductWarrantyLiabilityTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="us-gaap_BalanceSheetLocationDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherCurrentLiabilitiesMember" xlink:label="us-gaap_OtherCurrentLiabilitiesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BalanceSheetLocationAxis" xlink:label="us-gaap_BalanceSheetLocationAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherNoncurrentLiabilitiesMember" xlink:label="us-gaap_OtherNoncurrentLiabilitiesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductWarrantyAccrualNoncurrent" xlink:label="us-gaap_ProductWarrantyAccrualNoncurrent"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_ProductWarrantyLiabilityLineItems" xlink:to="us-gaap_ProductWarrantyLiabilityTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_BalanceSheetLocationDomain" xlink:to="us-gaap_OtherCurrentLiabilitiesMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_BalanceSheetLocationAxis" xlink:to="us-gaap_BalanceSheetLocationDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ProductWarrantyLiabilityLineItems" xlink:to="us-gaap_ProductWarrantyAccrualClassifiedCurrent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ProductWarrantyLiabilityTable" xlink:to="us-gaap_BalanceSheetLocationAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_BalanceSheetLocationDomain" xlink:to="us-gaap_OtherNoncurrentLiabilitiesMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ProductWarrantyLiabilityLineItems" xlink:to="us-gaap_ProductWarrantyAccrualNoncurrent" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureDebtScheduleOfShortTermDebtDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermDebtLineItems" xlink:label="us-gaap_ShortTermDebtLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfShortTermDebtTable" xlink:label="us-gaap_ScheduleOfShortTermDebtTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoanFacilityMember" xlink:label="mksi_TermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermBorrowings" xlink:label="us-gaap_ShortTermBorrowings"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_ShortTermDebtLineItems" xlink:to="us-gaap_ScheduleOfShortTermDebtTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfShortTermDebtTable" xlink:to="us-gaap_DebtInstrumentAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermLoanFacilityMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShortTermDebtLineItems" xlink:to="us-gaap_ShortTermBorrowings" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureDebtScheduleOfLongTermDebtDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentCarryingAmount" xlink:label="us-gaap_DebtInstrumentCarryingAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoanFacilityMember" xlink:label="mksi_TermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConvertibleDebtNoncurrent" xlink:label="us-gaap_ConvertibleDebtNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConvertibleDebtMember" xlink:label="us-gaap_ConvertibleDebtMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredFinanceCostsNoncurrentGross" xlink:label="us-gaap_DeferredFinanceCostsNoncurrentGross"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebt" xlink:label="us-gaap_LongTermDebt"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentCarryingAmount" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermLoanFacilityMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_ConvertibleDebtNoncurrent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="us-gaap_ConvertibleDebtMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DeferredFinanceCostsNoncurrentGross" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LongTermDebt" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDebtCreditFacilitiesAdditionalInformationDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AtotechMember" xlink:label="mksi_AtotechMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionDateOfAcquisitionAgreement1" xlink:label="us-gaap_BusinessAcquisitionDateOfAcquisitionAgreement1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingDomain" xlink:label="us-gaap_VestingDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UsdTrancheAMember" xlink:label="mksi_UsdTrancheAMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentRedemptionPeriodAxis" xlink:label="us-gaap_DebtInstrumentRedemptionPeriodAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentRedemptionPeriodDomain" xlink:label="us-gaap_DebtInstrumentRedemptionPeriodDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentRedemptionPeriodDomain" xlink:label="us-gaap_DebtInstrumentRedemptionPeriodDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingAxis" xlink:label="us-gaap_VestingAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VariableRateDomain" xlink:label="us-gaap_VariableRateDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FederalFundsRateMember" xlink:label="mksi_FederalFundsRateMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_BaseRateBorrowingsMember" xlink:label="mksi_BaseRateBorrowingsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CreditFacilityAxis" xlink:label="us-gaap_CreditFacilityAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CreditFacilityDomain" xlink:label="us-gaap_CreditFacilityDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CreditFacilityDomain" xlink:label="us-gaap_CreditFacilityDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncrementalRevolvingCommitmentsMember" xlink:label="mksi_IncrementalRevolvingCommitmentsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeMember" xlink:label="srt_RangeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VariableRateAxis" xlink:label="us-gaap_VariableRateAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VariableRateDomain" xlink:label="us-gaap_VariableRateDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeInstrumentRiskAxis" xlink:label="us-gaap_DerivativeInstrumentRiskAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeContractTypeDomain" xlink:label="us-gaap_DerivativeContractTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_Years3And4Member" xlink:label="mksi_Years3And4Member"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="us-gaap_BusinessAcquisitionAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OriginalIssueDiscountMember" xlink:label="mksi_OriginalIssueDiscountMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UsdTrancheBMember" xlink:label="mksi_UsdTrancheBMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermSofrRatePlusApplicableCreditSpreadAdjustmentMember" xlink:label="mksi_TermSofrRatePlusApplicableCreditSpreadAdjustmentMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermSofrBorrowingsMember" xlink:label="mksi_TermSofrBorrowingsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_Year5Member" xlink:label="mksi_Year5Member"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentInterestRateTerms" xlink:label="us-gaap_DebtInstrumentInterestRateTerms"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UsdTrancheBFirstAmmendmentMember" xlink:label="mksi_UsdTrancheBFirstAmmendmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestRateFloorMember" xlink:label="us-gaap_InterestRateFloorMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_BorrowingsUnderEuroTrancheBMember" xlink:label="mksi_BorrowingsUnderEuroTrancheBMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AnnualStepDownMember" xlink:label="mksi_AnnualStepDownMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentBasisSpreadOnVariableRate1" xlink:label="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EuroTrancheBMember" xlink:label="mksi_EuroTrancheBMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EuriborRateFloorMember" xlink:label="mksi_EuriborRateFloorMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_BorrowingsUnderNewRevolvingFacilityMember" xlink:label="mksi_BorrowingsUnderNewRevolvingFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_StepUpMember" xlink:label="mksi_StepUpMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OriginalIssueDiscountPercentageOfPrincipalAmount" xlink:label="mksi_OriginalIssueDiscountPercentageOfPrincipalAmount"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EuroTrancheMember" xlink:label="mksi_EuroTrancheMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BaseRateMember" xlink:label="us-gaap_BaseRateMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_BorrowingsUnderRevolvingFacilityMember" xlink:label="mksi_BorrowingsUnderRevolvingFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_InitialCommitmentFeePercentage" xlink:label="mksi_InitialCommitmentFeePercentage"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FirstLienNetLeverageRatioMember" xlink:label="mksi_FirstLienNetLeverageRatioMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoansUnderNewTermLoanFacilityMember" xlink:label="mksi_TermLoansUnderNewTermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_LoanVoluntaryPrepaymentAmount" xlink:label="mksi_LoanVoluntaryPrepaymentAmount"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncrementalUsdTrancheBMember" xlink:label="mksi_IncrementalUsdTrancheBMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoansUnderTermLoanFacilityMember" xlink:label="mksi_TermLoansUnderTermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredFinanceCostsGross" xlink:label="us-gaap_DeferredFinanceCostsGross"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncrementalTrancheBLoansMember" xlink:label="mksi_IncrementalTrancheBLoansMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NewRevolvingFacilityMember" xlink:label="mksi_NewRevolvingFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncrementalTrancheBLoansSecondAmendmentMember" xlink:label="mksi_IncrementalTrancheBLoansSecondAmendmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevolvingCreditFacilityMember" xlink:label="us-gaap_RevolvingCreditFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PrepaymentPremiumPercentageOfAggregatePrincipalAmount" xlink:label="mksi_PrepaymentPremiumPercentageOfAggregatePrincipalAmount"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncrementalTrancheBLoansFourthAmendmentMember" xlink:label="mksi_IncrementalTrancheBLoansFourthAmendmentMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoanFacilityMember" xlink:label="mksi_TermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduledQuarterlyPaymentsPercentageOfOriginalPrincipalAmount" xlink:label="mksi_ScheduledQuarterlyPaymentsPercentageOfOriginalPrincipalAmount"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NewTermLoanFacilityMember" xlink:label="mksi_NewTermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentPeriodicPaymentPrincipal" xlink:label="us-gaap_DebtInstrumentPeriodicPaymentPrincipal"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PriorTermLoanFacilityMember" xlink:label="mksi_PriorTermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredFinanceCostsNoncurrentNet" xlink:label="us-gaap_DeferredFinanceCostsNoncurrentNet"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DebtIssuanceCostsAmortizationPeriod" xlink:label="mksi_DebtIssuanceCostsAmortizationPeriod"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_LineOfCreditFacilityMinimumAdditionalBorrowingCapacity" xlink:label="mksi_LineOfCreditFacilityMinimumAdditionalBorrowingCapacity"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MinimumPercentageOfEarningsBeforeInterestTaxesDepreciationAndAmortization" xlink:label="mksi_MinimumPercentageOfEarningsBeforeInterestTaxesDepreciationAndAmortization"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RatioOfIndebtednessToNetCapital1" xlink:label="us-gaap_RatioOfIndebtednessToNetCapital1"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PercentageOfAggregateAmountOfAllCommitments" xlink:label="mksi_PercentageOfAggregateAmountOfAllCommitments"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCredit" xlink:label="us-gaap_LineOfCredit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentAnnualPrincipalPayment" xlink:label="us-gaap_DebtInstrumentAnnualPrincipalPayment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentPeriodicPayment" xlink:label="us-gaap_DebtInstrumentPeriodicPayment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentFaceAmount" xlink:label="us-gaap_DebtInstrumentFaceAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCreditFacilityIncreaseDecreaseForPeriodNet" xlink:label="us-gaap_LineOfCreditFacilityIncreaseDecreaseForPeriodNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermDebtRefinancedDescription" xlink:label="us-gaap_ShortTermDebtRefinancedDescription"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermDebtRefinancedAmount" xlink:label="us-gaap_ShortTermDebtRefinancedAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentInterestRateIncreaseDecrease" xlink:label="us-gaap_DebtInstrumentInterestRateIncreaseDecrease"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtWeightedAverageInterestRate" xlink:label="us-gaap_DebtWeightedAverageInterestRate"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredFinancingCostsInLongTermDebt" xlink:label="mksi_DeferredFinancingCostsInLongTermDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentMaturityDate" xlink:label="us-gaap_DebtInstrumentMaturityDate"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_BusinessAcquisitionAcquireeDomain" xlink:to="mksi_AtotechMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_BusinessAcquisitionDateOfAcquisitionAgreement1" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_UsdTrancheAMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_DebtInstrumentRedemptionPeriodAxis" xlink:to="us-gaap_DebtInstrumentRedemptionPeriodDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_DebtInstrumentRedemptionPeriodAxis" xlink:to="us-gaap_DebtInstrumentRedemptionPeriodDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_VestingAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_VariableRateDomain" xlink:to="mksi_FederalFundsRateMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_BaseRateBorrowingsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_CreditFacilityAxis" xlink:to="us-gaap_CreditFacilityDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_CreditFacilityAxis" xlink:to="us-gaap_CreditFacilityDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_CreditFacilityDomain" xlink:to="mksi_IncrementalRevolvingCommitmentsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_VestingAxis" xlink:to="us-gaap_VestingDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_VariableRateAxis" xlink:to="us-gaap_VariableRateDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_VariableRateAxis" xlink:to="us-gaap_VariableRateDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_DerivativeInstrumentRiskAxis" xlink:to="us-gaap_DerivativeContractTypeDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentRedemptionPeriodDomain" xlink:to="mksi_Years3And4Member" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_BusinessAcquisitionAxis" xlink:to="us-gaap_BusinessAcquisitionAcquireeDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DerivativeContractTypeDomain" xlink:to="mksi_OriginalIssueDiscountMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_UsdTrancheBMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_BusinessAcquisitionAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_VariableRateDomain" xlink:to="mksi_TermSofrRatePlusApplicableCreditSpreadAdjustmentMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermSofrBorrowingsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentRedemptionPeriodDomain" xlink:to="mksi_Year5Member" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentInterestRateTerms" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_UsdTrancheBFirstAmmendmentMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_VariableRateAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_VariableRateDomain" xlink:to="us-gaap_InterestRateFloorMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_BorrowingsUnderEuroTrancheBMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentRedemptionPeriodDomain" xlink:to="mksi_AnnualStepDownMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentBasisSpreadOnVariableRate1" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_EuroTrancheBMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DerivativeInstrumentRiskAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_VariableRateDomain" xlink:to="mksi_EuriborRateFloorMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_BorrowingsUnderNewRevolvingFacilityMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentRedemptionPeriodDomain" xlink:to="mksi_StepUpMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_OriginalIssueDiscountPercentageOfPrincipalAmount" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_EuroTrancheMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_VariableRateDomain" xlink:to="us-gaap_BaseRateMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_BorrowingsUnderRevolvingFacilityMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_InitialCommitmentFeePercentage" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_FirstLienNetLeverageRatioMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentRedemptionPeriodAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermLoansUnderNewTermLoanFacilityMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_LoanVoluntaryPrepaymentAmount" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_IncrementalUsdTrancheBMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="srt_RangeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermLoansUnderTermLoanFacilityMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DeferredFinanceCostsGross" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_IncrementalTrancheBLoansMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_CreditFacilityAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_NewRevolvingFacilityMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="8" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_GainsLossesOnExtinguishmentOfDebt" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="8" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_IncrementalTrancheBLoansSecondAmendmentMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="8" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="us-gaap_RevolvingCreditFacilityMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="9" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_PrepaymentPremiumPercentageOfAggregatePrincipalAmount" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="9" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_IncrementalTrancheBLoansFourthAmendmentMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="9" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermLoanFacilityMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="10" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_ScheduledQuarterlyPaymentsPercentageOfOriginalPrincipalAmount" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="10" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_NewTermLoanFacilityMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="11" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentPeriodicPaymentPrincipal" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="11" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_PriorTermLoanFacilityMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="12" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DeferredFinanceCostsNoncurrentNet" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="13" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_DebtIssuanceCostsAmortizationPeriod" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="14" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_LineOfCreditFacilityMinimumAdditionalBorrowingCapacity" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="15" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_MinimumPercentageOfEarningsBeforeInterestTaxesDepreciationAndAmortization" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="16" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_RatioOfIndebtednessToNetCapital1" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="17" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_PercentageOfAggregateAmountOfAllCommitments" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="18" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LineOfCredit" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="19" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentAnnualPrincipalPayment" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="20" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentPeriodicPayment" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="21" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentFaceAmount" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="22" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LineOfCreditFacilityIncreaseDecreaseForPeriodNet" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="23" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_ShortTermDebtRefinancedDescription" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="24" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_ShortTermDebtRefinancedAmount" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="25" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentInterestRateIncreaseDecrease" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="26" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtWeightedAverageInterestRate" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="27" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_DeferredFinancingCostsInLongTermDebt" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="28" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentMaturityDate" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDebtConvertibleSeniorNotesAdditionalInformationDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentFaceAmount" xlink:label="us-gaap_DebtInstrumentFaceAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingDomain" xlink:label="us-gaap_VestingDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UsdTrancheBMember" xlink:label="mksi_UsdTrancheBMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCreditFacilityLenderDomain" xlink:label="us-gaap_LineOfCreditFacilityLenderDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IndentureAndTheNotesMember" xlink:label="mksi_IndentureAndTheNotesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ConvertibleSeniorNotesDue2030Member" xlink:label="mksi_ConvertibleSeniorNotesDue2030Member"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MeasurementInputTypeDomain" xlink:label="us-gaap_MeasurementInputTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MeasurementPeriodMember" xlink:label="mksi_MeasurementPeriodMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeMember" xlink:label="srt_RangeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingAxis" xlink:label="us-gaap_VestingAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MeasurementInputTypeAxis" xlink:label="us-gaap_MeasurementInputTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MeasurementInputTypeDomain" xlink:label="us-gaap_MeasurementInputTypeDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCreditFacilityAxis" xlink:label="us-gaap_LineOfCreditFacilityAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCreditFacilityLenderDomain" xlink:label="us-gaap_LineOfCreditFacilityLenderDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentIssuedPrincipal" xlink:label="us-gaap_DebtInstrumentIssuedPrincipal"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CappedCallTransactionsMember" xlink:label="mksi_CappedCallTransactionsMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoanFacilityNetMember" xlink:label="mksi_TermLoanFacilityNetMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DebtInstrumentIssuedPrincipalOptionToPurchase" xlink:label="mksi_DebtInstrumentIssuedPrincipalOptionToPurchase"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProceedsFromIssuanceOfDebt" xlink:label="us-gaap_ProceedsFromIssuanceOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PaymentsForCostOfCappedCallTransactions" xlink:label="mksi_PaymentsForCostOfCappedCallTransactions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RepaymentsOfDebt" xlink:label="us-gaap_RepaymentsOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentInterestRateStatedPercentage" xlink:label="us-gaap_DebtInstrumentInterestRateStatedPercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentFrequencyOfPeriodicPayment" xlink:label="us-gaap_DebtInstrumentFrequencyOfPeriodicPayment"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" xlink:label="mksi_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentMaturityDate" xlink:label="us-gaap_DebtInstrumentMaturityDate"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentRedemptionPricePercentage" xlink:label="us-gaap_DebtInstrumentRedemptionPricePercentage"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DebtInstrumentConvertibleConversionPricePercentage" xlink:label="mksi_DebtInstrumentConvertibleConversionPricePercentage"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfTradingDays" xlink:label="mksi_NumberOfTradingDays"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfConsecutiveTradingDays" xlink:label="mksi_NumberOfConsecutiveTradingDays"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentConvertibleTermsOfConversionFeature" xlink:label="us-gaap_DebtInstrumentConvertibleTermsOfConversionFeature"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DebtInstrumentConversionRateShares" xlink:label="mksi_DebtInstrumentConversionRateShares"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentConvertibleConversionPrice1" xlink:label="us-gaap_DebtInstrumentConvertibleConversionPrice1"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DebtInstrumentConvertibleApplicableConversionPrice" xlink:label="mksi_DebtInstrumentConvertibleApplicableConversionPrice"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_RepurchaseOfDebtPercentage" xlink:label="mksi_RepurchaseOfDebtPercentage"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EstimatedAggregatePrincipalAmountPercentage" xlink:label="mksi_EstimatedAggregatePrincipalAmountPercentage"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CappedCallTransactionReductionOrOffsetPerShare" xlink:label="mksi_CappedCallTransactionReductionOrOffsetPerShare"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DebtInstrumentPremiumPercentage" xlink:label="mksi_DebtInstrumentPremiumPercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SaleOfStockPricePerShare" xlink:label="us-gaap_SaleOfStockPricePerShare"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CostToPurchaseCappedCallTransactions" xlink:label="mksi_CostToPurchaseCappedCallTransactions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredFinanceCostsNoncurrentNet" xlink:label="us-gaap_DeferredFinanceCostsNoncurrentNet"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentFaceAmount" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_UsdTrancheBMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="srt_RangeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_LineOfCreditFacilityLenderDomain" xlink:to="mksi_IndentureAndTheNotesMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_ConvertibleSeniorNotesDue2030Member" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_MeasurementInputTypeDomain" xlink:to="mksi_MeasurementPeriodMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_VestingAxis" xlink:to="us-gaap_VestingDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_MeasurementInputTypeAxis" xlink:to="us-gaap_MeasurementInputTypeDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_MeasurementInputTypeAxis" xlink:to="us-gaap_MeasurementInputTypeDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_LineOfCreditFacilityAxis" xlink:to="us-gaap_LineOfCreditFacilityLenderDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_LineOfCreditFacilityAxis" xlink:to="us-gaap_LineOfCreditFacilityLenderDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentIssuedPrincipal" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_LineOfCreditFacilityAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_LineOfCreditFacilityLenderDomain" xlink:to="mksi_CappedCallTransactionsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermLoanFacilityNetMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_DebtInstrumentIssuedPrincipalOptionToPurchase" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_MeasurementInputTypeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_ProceedsFromIssuanceOfDebt" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_PaymentsForCostOfCappedCallTransactions" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_VestingAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_RepaymentsOfDebt" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_GainsLossesOnExtinguishmentOfDebt" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentInterestRateStatedPercentage" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="8" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentFrequencyOfPeriodicPayment" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="9" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="10" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentMaturityDate" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="11" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentRedemptionPricePercentage" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="12" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_DebtInstrumentConvertibleConversionPricePercentage" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="13" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_NumberOfTradingDays" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="14" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_NumberOfConsecutiveTradingDays" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="15" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentConvertibleTermsOfConversionFeature" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="16" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_DebtInstrumentConversionRateShares" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="17" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentConvertibleConversionPrice1" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="18" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_DebtInstrumentConvertibleApplicableConversionPrice" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="19" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_RepurchaseOfDebtPercentage" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="20" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_EstimatedAggregatePrincipalAmountPercentage" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="21" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_CappedCallTransactionReductionOrOffsetPerShare" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="22" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_DebtInstrumentPremiumPercentage" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="23" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_SaleOfStockPricePerShare" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="24" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_CostToPurchaseCappedCallTransactions" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="25" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DeferredFinanceCostsNoncurrentNet" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureDebtScheduleOfInterestExpenseDetails">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestExpenseDebtExcludingAmortization" xlink:label="us-gaap_InterestExpenseDebtExcludingAmortization"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermLoanFacilityMember" xlink:label="mksi_TermLoanFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AmortizationOfFinancingCosts" xlink:label="us-gaap_AmortizationOfFinancingCosts"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ConvertibleSeniorNotesDue2030Member" xlink:label="mksi_ConvertibleSeniorNotesDue2030Member"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestExpenseDebt" xlink:label="us-gaap_InterestExpenseDebt"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherInterestIncomeExpenseNet" xlink:label="mksi_OtherInterestIncomeExpenseNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_InterestExpenseDebtExcludingAmortization" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermLoanFacilityMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_AmortizationOfFinancingCosts" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_ConvertibleSeniorNotesDue2030Member" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_InterestExpenseDebt" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_OtherInterestIncomeExpenseNet" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_InterestExpense" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureDebtLinesOfCreditAndBorrowingArrangementsAdditionalInformationDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_LineOfCreditFacilityRenewalPeriod" xlink:label="mksi_LineOfCreditFacilityRenewalPeriod"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/exch/2025/exch-2025.xsd#exch_JPBX" xlink:label="exch_JPBX"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CreditFacilityAxis" xlink:label="us-gaap_CreditFacilityAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CreditFacilityDomain" xlink:label="us-gaap_CreditFacilityDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevolvingCreditFacilityMember" xlink:label="us-gaap_RevolvingCreditFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCredit" xlink:label="us-gaap_LineOfCredit"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="mksi_LineOfCreditFacilityRenewalPeriod" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_SegmentGeographicalDomain" xlink:to="exch_JPBX" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_CreditFacilityAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="srt_StatementGeographicalAxis" xlink:to="srt_SegmentGeographicalDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="srt_StatementGeographicalAxis" xlink:to="srt_SegmentGeographicalDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_CreditFacilityAxis" xlink:to="us-gaap_CreditFacilityDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_CreditFacilityDomain" xlink:to="us-gaap_RevolvingCreditFacilityMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="srt_StatementGeographicalAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LineOfCredit" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureIncomeTaxesReconciliationOfCompanySEffectiveTaxRateToUSFederalStatutoryRateDetail">
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxDisclosureLineItems" xlink:label="mksi_IncomeTaxDisclosureLineItems"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxDisclosureTable" xlink:label="mksi_IncomeTaxDisclosureTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityAxis" xlink:label="us-gaap_IncomeTaxAuthorityAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityDomain" xlink:label="us-gaap_IncomeTaxAuthorityDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityDomain" xlink:label="us-gaap_IncomeTaxAuthorityDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" xlink:label="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_CN" xlink:label="country_CN"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes" xlink:label="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_DE" xlink:label="country_DE"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxReconciliationIntercompanyRoyalty" xlink:label="mksi_IncomeTaxReconciliationIntercompanyRoyalty"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_HK" xlink:label="country_HK"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesAmount" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_IL" xlink:label="country_IL"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxReconciliationAuditSettlementRelatedToIntercompanyTransactions" xlink:label="mksi_IncomeTaxReconciliationAuditSettlementRelatedToIntercompanyTransactions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_KR" xlink:label="country_KR"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate" xlink:label="us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_NL" xlink:label="country_NL"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationOtherAdjustments" xlink:label="us-gaap_IncomeTaxReconciliationOtherAdjustments"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_TW" xlink:label="country_TW"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential" xlink:label="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxReconciliationRealizedForeignExchangeGainLoss" xlink:label="mksi_IncomeTaxReconciliationRealizedForeignExchangeGainLoss"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdictions" xlink:label="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdictions"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdiction" xlink:label="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdiction"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationBeatAmount" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationBeatAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxReconciliationSubpartFNetOfForeignTaxCredits" xlink:label="mksi_IncomeTaxReconciliationSubpartFNetOfForeignTaxCredits"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherAmount" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationTaxCreditsResearch" xlink:label="us-gaap_IncomeTaxReconciliationTaxCreditsResearch"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxReconciliationForeignTaxCreditRelatedToWithholdingTaxes" xlink:label="mksi_IncomeTaxReconciliationForeignTaxCreditRelatedToWithholdingTaxes"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationNondeductibleExpenseOther" xlink:label="us-gaap_IncomeTaxReconciliationNondeductibleExpenseOther"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationTaxContingencies" xlink:label="us-gaap_IncomeTaxReconciliationTaxContingencies"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxReconciliationOtherReconcilingItems" xlink:label="us-gaap_IncomeTaxReconciliationOtherReconcilingItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationStateAndLocalIncomeTaxes" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationStateAndLocalIncomeTaxes"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationIntercompanyRoyalty" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationIntercompanyRoyalty"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesNetOfForeignTaxCredits" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesNetOfForeignTaxCredits"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationAuditSettlementRelatedToIntercompanyTransactions" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationAuditSettlementRelatedToIntercompanyTransactions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationChangeInEnactedTaxRate" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInEnactedTaxRate"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationOtherAdjustments" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationOtherAdjustments"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationForeignIncomeTaxRateDifferential" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationForeignIncomeTaxRateDifferential"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationChangeInDeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInDeferredTaxAssetsValuationAllowance"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationRealizedForeignExchangeGainLoss" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationRealizedForeignExchangeGainLoss"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationForeignTaxEffectsOtherJurisdictions" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxEffectsOtherJurisdictions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationBeatPercent" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationBeatPercent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationFdiiPercent" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiPercent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationSubpartFNetOfForeignTaxCredits" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationSubpartFNetOfForeignTaxCredits"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherPercent" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherPercent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationTaxCreditsResearch" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCreditsResearch"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationForeignTaxCreditRelatedToWithholdingTaxes" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxCreditRelatedToWithholdingTaxes"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseOther" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseOther"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationTaxContingencies" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationTaxContingencies"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseShareBasedCompensationCost" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseShareBasedCompensationCost"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationOtherReconcilingItemsPercent" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationOtherReconcilingItemsPercent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationTaxCredits" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCredits"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationChangeInIncomeTaxReserves" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationChangeInIncomeTaxReserves"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationBaseErosionWaiverOfDeductions" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationBaseErosionWaiverOfDeductions"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationExecutiveCompensation" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationExecutiveCompensation"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ForeignSubpartFIncomeTaxedInUSNetOfForeignTaxCredits" xlink:label="mksi_ForeignSubpartFIncomeTaxedInUSNetOfForeignTaxCredits"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationGiltiPercent" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationGiltiPercent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseImpairmentLosses" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseImpairmentLosses"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:label="us-gaap_EffectiveIncomeTaxRateContinuingOperations"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_IncomeTaxDisclosureTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_IncomeTaxAuthorityAxis" xlink:to="us-gaap_IncomeTaxAuthorityDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_IncomeTaxAuthorityAxis" xlink:to="us-gaap_IncomeTaxAuthorityDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationIncomeTaxExpenseBenefitAtFederalStatutoryIncomeTaxRate" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_IncomeTaxDisclosureTable" xlink:to="us-gaap_IncomeTaxAuthorityAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_CN" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationStateAndLocalIncomeTaxes" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_DE" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_IncomeTaxReconciliationIntercompanyRoyalty" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_HK" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesAmount" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_IL" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_IncomeTaxReconciliationAuditSettlementRelatedToIntercompanyTransactions" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_KR" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationChangeInEnactedTaxRate" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_NL" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationOtherAdjustments" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_TW" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationForeignIncomeTaxRateDifferential" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="8" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationChangeInDeferredTaxAssetsValuationAllowance" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="9" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_IncomeTaxReconciliationRealizedForeignExchangeGainLoss" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="10" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdictions" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="11" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdiction" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="12" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationBeatAmount" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="13" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiAmount" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="14" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_IncomeTaxReconciliationSubpartFNetOfForeignTaxCredits" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="15" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherAmount" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="16" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationTaxCreditsResearch" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="17" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_IncomeTaxReconciliationForeignTaxCreditRelatedToWithholdingTaxes" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="18" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationNondeductibleExpenseShareBasedCompensationCost" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="19" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationNondeductibleExpenseOther" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="20" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationTaxContingencies" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="21" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxReconciliationOtherReconcilingItems" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="22" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_IncomeTaxExpenseBenefit" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="23" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="24" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationStateAndLocalIncomeTaxes" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="25" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationIntercompanyRoyalty" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="26" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesNetOfForeignTaxCredits" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="27" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationAuditSettlementRelatedToIntercompanyTransactions" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="28" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInEnactedTaxRate" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="29" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationOtherAdjustments" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="30" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationForeignIncomeTaxRateDifferential" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="31" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInDeferredTaxAssetsValuationAllowance" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="32" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationRealizedForeignExchangeGainLoss" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="33" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxEffectsOtherJurisdictions" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="34" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationBeatPercent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="35" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationFdiiPercent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="36" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationSubpartFNetOfForeignTaxCredits" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="37" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationCrossBorderOtherPercent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="38" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCreditsResearch" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="39" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxCreditRelatedToWithholdingTaxes" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="40" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseOther" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="41" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationTaxContingencies" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="42" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseShareBasedCompensationCost" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="43" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationOtherReconcilingItemsPercent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="44" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCredits" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="45" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationChangeInIncomeTaxReserves" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="46" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationBaseErosionWaiverOfDeductions" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="47" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationExecutiveCompensation" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="48" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="mksi_ForeignSubpartFIncomeTaxedInUSNetOfForeignTaxCredits" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="49" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationGiltiPercent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="50" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseImpairmentLosses" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="51" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxDisclosureLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateContinuingOperations" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureIncomeTaxesAdditionalInformationDetail">
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxesLineItems" xlink:label="mksi_IncomeTaxesLineItems"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncomeTaxesTableTable" xlink:label="mksi_IncomeTaxesTableTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AtotechLimitedMember" xlink:label="mksi_AtotechLimitedMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityAxis" xlink:label="us-gaap_IncomeTaxAuthorityAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityDomain" xlink:label="us-gaap_IncomeTaxAuthorityDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TaxCreditCarryforwardAmount" xlink:label="us-gaap_TaxCreditCarryforwardAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityNameAxis" xlink:label="us-gaap_IncomeTaxAuthorityNameAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityNameDomain" xlink:label="us-gaap_IncomeTaxAuthorityNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityNameDomain" xlink:label="us-gaap_IncomeTaxAuthorityNameDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="us-gaap_BusinessAcquisitionAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TaxCreditCarryforwardAxis" xlink:label="us-gaap_TaxCreditCarryforwardAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TaxCreditCarryforwardNameDomain" xlink:label="us-gaap_TaxCreditCarryforwardNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TaxCreditCarryforwardNameDomain" xlink:label="us-gaap_TaxCreditCarryforwardNameDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FederalStateAndForeignMember" xlink:label="mksi_FederalStateAndForeignMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InlandRevenueSingaporeIRASMember" xlink:label="us-gaap_InlandRevenueSingaporeIRASMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IndefiniteMember" xlink:label="mksi_IndefiniteMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TaxCreditCarryForwardExpirationYearEnd" xlink:label="mksi_TaxCreditCarryForwardExpirationYearEnd"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_USFederalMember" xlink:label="mksi_USFederalMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OperatingLossCarryforwardsExpiringTwoThousandSeventeenMember" xlink:label="mksi_OperatingLossCarryforwardsExpiringTwoThousandSeventeenMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLossCarryforwards" xlink:label="us-gaap_OperatingLossCarryforwards"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_StateMember" xlink:label="mksi_StateMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OperatingLossCarryforwardsExpiringTwoThousandThirtyNineMember" xlink:label="mksi_OperatingLossCarryforwardsExpiringTwoThousandThirtyNineMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLossCarryforwardsExpirationDate" xlink:label="us-gaap_OperatingLossCarryforwardsExpirationDate"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ForeignMember" xlink:label="mksi_ForeignMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UnrecognizedTaxBenefitsOffsetAgainstRestructuringReserves" xlink:label="mksi_UnrecognizedTaxBenefitsOffsetAgainstRestructuringReserves"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions" xlink:label="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount" xlink:label="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ForeignInterestCarryforwards" xlink:label="mksi_ForeignInterestCarryforwards"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FederalInterestCarryForwards" xlink:label="mksi_FederalInterestCarryForwards"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TaxBenefitRelatedToHistoricalOutsideBasisDifferences" xlink:label="mksi_TaxBenefitRelatedToHistoricalOutsideBasisDifferences"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxesPaidNet" xlink:label="us-gaap_IncomeTaxesPaidNet"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="mksi_IncomeTaxesTableTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_BusinessAcquisitionAcquireeDomain" xlink:to="mksi_AtotechLimitedMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_IncomeTaxAuthorityAxis" xlink:to="us-gaap_IncomeTaxAuthorityDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="us-gaap_TaxCreditCarryforwardAmount" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_IncomeTaxAuthorityNameAxis" xlink:to="us-gaap_IncomeTaxAuthorityNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_IncomeTaxAuthorityNameAxis" xlink:to="us-gaap_IncomeTaxAuthorityNameDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_BusinessAcquisitionAxis" xlink:to="us-gaap_BusinessAcquisitionAcquireeDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_IncomeTaxesTableTable" xlink:to="us-gaap_IncomeTaxAuthorityAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_TaxCreditCarryforwardAxis" xlink:to="us-gaap_TaxCreditCarryforwardNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_TaxCreditCarryforwardAxis" xlink:to="us-gaap_TaxCreditCarryforwardNameDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="mksi_FederalStateAndForeignMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxAuthorityNameDomain" xlink:to="us-gaap_InlandRevenueSingaporeIRASMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_TaxCreditCarryforwardNameDomain" xlink:to="mksi_IndefiniteMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="mksi_TaxCreditCarryForwardExpirationYearEnd" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_IncomeTaxesTableTable" xlink:to="us-gaap_TaxCreditCarryforwardAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="mksi_USFederalMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_TaxCreditCarryforwardNameDomain" xlink:to="mksi_OperatingLossCarryforwardsExpiringTwoThousandSeventeenMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="us-gaap_OperatingLossCarryforwards" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_IncomeTaxesTableTable" xlink:to="us-gaap_IncomeTaxAuthorityNameAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="mksi_StateMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_TaxCreditCarryforwardNameDomain" xlink:to="mksi_OperatingLossCarryforwardsExpiringTwoThousandThirtyNineMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="us-gaap_OperatingLossCarryforwardsExpirationDate" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_IncomeTaxesTableTable" xlink:to="us-gaap_BusinessAcquisitionAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="mksi_ForeignMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="mksi_UnrecognizedTaxBenefitsOffsetAgainstRestructuringReserves" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="us-gaap_UnrecognizedTaxBenefitsIncreasesResultingFromPriorPeriodTaxPositions" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="us-gaap_ValuationAllowanceDeferredTaxAssetChangeInAmount" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="8" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="mksi_ForeignInterestCarryforwards" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="9" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="mksi_FederalInterestCarryForwards" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="10" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="mksi_TaxBenefitRelatedToHistoricalOutsideBasisDifferences" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="11" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_IncomeTaxesLineItems" xlink:to="us-gaap_IncomeTaxesPaidNet" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureIncomeTaxesComponentsOfCashPaidNetOfRefundsReceivedForIncomeTaxesDetails">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidByIndividualJurisdictionLineItems" xlink:label="us-gaap_IncomeTaxPaidByIndividualJurisdictionLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidByIndividualJurisdictionTable" xlink:label="us-gaap_IncomeTaxPaidByIndividualJurisdictionTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityAxis" xlink:label="us-gaap_IncomeTaxAuthorityAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxAuthorityDomain" xlink:label="us-gaap_IncomeTaxAuthorityDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidFederalAfterRefundReceivedAbstract" xlink:label="us-gaap_IncomeTaxPaidFederalAfterRefundReceivedAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidForeignAfterRefundReceivedAbstract" xlink:label="us-gaap_IncomeTaxPaidForeignAfterRefundReceivedAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidForeignAfterRefundReceived" xlink:label="us-gaap_IncomeTaxPaidForeignAfterRefundReceived"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_US" xlink:label="country_US"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceivedAbstract" xlink:label="us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceivedAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceived" xlink:label="us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceived"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxPaidFederalAfterRefundReceived" xlink:label="us-gaap_IncomeTaxPaidFederalAfterRefundReceived"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StateAndLocalTaxJurisdictionOtherMember" xlink:label="us-gaap_StateAndLocalTaxJurisdictionOtherMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_CA" xlink:label="country_CA"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxesPaidNet" xlink:label="us-gaap_IncomeTaxesPaidNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_CN" xlink:label="country_CN"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_DE" xlink:label="country_DE"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_KR" xlink:label="country_KR"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_NL" xlink:label="country_NL"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_TW" xlink:label="country_TW"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignTaxJurisdictionOtherMember" xlink:label="us-gaap_ForeignTaxJurisdictionOtherMember"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_IncomeTaxPaidByIndividualJurisdictionLineItems" xlink:to="us-gaap_IncomeTaxPaidByIndividualJurisdictionTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_IncomeTaxAuthorityAxis" xlink:to="us-gaap_IncomeTaxAuthorityDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxPaidByIndividualJurisdictionLineItems" xlink:to="us-gaap_IncomeTaxPaidFederalAfterRefundReceivedAbstract" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxPaidForeignAfterRefundReceivedAbstract" xlink:to="us-gaap_IncomeTaxPaidForeignAfterRefundReceived" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_IncomeTaxPaidByIndividualJurisdictionTable" xlink:to="us-gaap_IncomeTaxAuthorityAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_US" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceivedAbstract" xlink:to="us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceived" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxPaidFederalAfterRefundReceivedAbstract" xlink:to="us-gaap_IncomeTaxPaidFederalAfterRefundReceived" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxPaidByIndividualJurisdictionLineItems" xlink:to="us-gaap_IncomeTaxPaidStateAndLocalAfterRefundReceivedAbstract" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="us-gaap_StateAndLocalTaxJurisdictionOtherMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxPaidByIndividualJurisdictionLineItems" xlink:to="us-gaap_IncomeTaxPaidForeignAfterRefundReceivedAbstract" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_CA" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxPaidByIndividualJurisdictionLineItems" xlink:to="us-gaap_IncomeTaxesPaidNet" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_CN" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_DE" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_KR" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_NL" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="country_TW" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="8" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeTaxAuthorityDomain" xlink:to="us-gaap_ForeignTaxJurisdictionOtherMember" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockBasedCompensationAdditionalInformationDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain" xlink:label="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingDomain" xlink:label="us-gaap_VestingDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationAwardTrancheOneMember" xlink:label="us-gaap_ShareBasedCompensationAwardTrancheOneMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember" xlink:label="mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeMember" xlink:label="srt_RangeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingAxis" xlink:label="us-gaap_VestingAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OfferTerminateMember" xlink:label="mksi_OfferTerminateMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_RestrictedStockUnitsGrantedToEmployeesMember" xlink:label="mksi_RestrictedStockUnitsGrantedToEmployeesMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_StockIncentivePlanTwoThousandFourteenMember" xlink:label="mksi_StockIncentivePlanTwoThousandFourteenMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredCompensationArrangementWithIndividualSharesAuthorizedForIssuance" xlink:label="us-gaap_DeferredCompensationArrangementWithIndividualSharesAuthorizedForIssuance"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_RestrictedStockUnitsGrantedToDirectorsMember" xlink:label="mksi_RestrictedStockUnitsGrantedToDirectorsMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_StockIncentivePlanTwoThousandTwentyTwoMember" xlink:label="mksi_StockIncentivePlanTwoThousandTwentyTwoMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PercentageOfPayrollDeductionToCompensation" xlink:label="mksi_PercentageOfPayrollDeductionToCompensation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockAppreciationRightsSARSMember" xlink:label="us-gaap_StockAppreciationRightsSARSMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MaximumPercentageOfPayrollForPurchaseOfStock" xlink:label="mksi_MaximumPercentageOfPayrollForPurchaseOfStock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_StockExercisePriceAsPercentageOfClosingMarketPrice" xlink:label="mksi_StockExercisePriceAsPercentageOfClosingMarketPrice"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockSharesIssued" xlink:label="us-gaap_CommonStockSharesIssued"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CommonStockExercisePrice" xlink:label="mksi_CommonStockExercisePrice"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockCapitalSharesReservedForFutureIssuance" xlink:label="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfSharesReturnedForEachShareOfCommonStock" xlink:label="mksi_NumberOfSharesReturnedForEachShareOfCommonStock"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodPercentageExercisePrice" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodPercentageExercisePrice"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_LevelOfPerformanceTargetAchievedPercentage" xlink:label="mksi_LevelOfPerformanceTargetAchievedPercentage"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardVestingPeriodDescription" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardVestingPeriodDescription"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedInPeriodFairValue1" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedInPeriodFairValue1"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_PlanNameAxis" xlink:to="us-gaap_PlanNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_VestingDomain" xlink:to="us-gaap_ShareBasedCompensationAwardTrancheOneMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_AwardTypeAxis" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="us-gaap_RestrictedStockUnitsRSUMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="srt_RangeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PlanNameDomain" xlink:to="mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_VestingAxis" xlink:to="us-gaap_VestingDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansExercisePriceRangeDomain" xlink:to="mksi_OfferTerminateMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognizedPeriodForRecognition1" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="mksi_RestrictedStockUnitsGrantedToEmployeesMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_PlanNameAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PlanNameDomain" xlink:to="mksi_StockIncentivePlanTwoThousandFourteenMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_DeferredCompensationArrangementWithIndividualSharesAuthorizedForIssuance" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="mksi_RestrictedStockUnitsGrantedToDirectorsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_ShareBasedCompensationSharesAuthorizedUnderStockOptionPlansByExercisePriceRangeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PlanNameDomain" xlink:to="mksi_StockIncentivePlanTwoThousandTwentyTwoMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_PercentageOfPayrollDeductionToCompensation" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="us-gaap_StockAppreciationRightsSARSMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_AwardTypeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_MaximumPercentageOfPayrollForPurchaseOfStock" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_VestingAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_StockExercisePriceAsPercentageOfClosingMarketPrice" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_CommonStockSharesIssued" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_CommonStockExercisePrice" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_CommonStockCapitalSharesReservedForFutureIssuance" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="8" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="9" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_NumberOfSharesReturnedForEachShareOfCommonStock" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="10" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodPercentageExercisePrice" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="11" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardAwardVestingRightsPercentage" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="12" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_LevelOfPerformanceTargetAchievedPercentage" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="13" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardVestingPeriodDescription" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="14" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="15" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardOptionsVestedInPeriodFairValue1" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="16" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationNonvestedAwardsTotalCompensationCostNotYetRecognized" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="17" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockBasedCompensationSummaryOfActivityForRsusDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_StockIncentivePlanTwoThousandFourteenMember" xlink:label="mksi_StockIncentivePlanTwoThousandFourteenMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_StockIncentivePlanTwoThousandTwentyTwoMember" xlink:label="mksi_StockIncentivePlanTwoThousandTwentyTwoMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsSharesFromAcquisition" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsSharesFromAcquisition"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeited" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeited"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsShareFromAcquisitionWeightedAverageGrantDateFairValue" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsShareFromAcquisitionWeightedAverageGrantDateFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeitedWeightedAverageGrantDateFairValue" xlink:label="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeitedWeightedAverageGrantDateFairValue"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_PlanNameAxis" xlink:to="us-gaap_PlanNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_AwardTypeAxis" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="us-gaap_RestrictedStockUnitsRSUMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_AwardTypeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PlanNameDomain" xlink:to="mksi_StockIncentivePlanTwoThousandFourteenMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_PlanNameAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PlanNameDomain" xlink:to="mksi_StockIncentivePlanTwoThousandTwentyTwoMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsSharesFromAcquisition" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriod" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeited" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsShareFromAcquisitionWeightedAverageGrantDateFairValue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="8" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeitedWeightedAverageGrantDateFairValue" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockBasedCompensationEffectOfRecordingStockBasedCompensationDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EmployeeStockPurchasePlanMember" xlink:label="mksi_EmployeeStockPurchasePlanMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax" xlink:label="us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareBasic" xlink:label="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareBasic"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareDiluted" xlink:label="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareDiluted"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_AwardTypeAxis" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="us-gaap_RestrictedStockUnitsRSUMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_AwardTypeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_AllocatedShareBasedCompensationExpense" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="mksi_EmployeeStockPurchasePlanMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareBasic" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareDiluted" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureStockbasedCompensationScheduleOfStockbasedCompensationIncludedInCompanysConsolidatedStatementsOfOperationsAndComprehensiveIncomeLos">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsLineItems" xlink:label="us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable" xlink:label="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CostOfSalesMember" xlink:label="us-gaap_CostOfSalesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ResearchAndDevelopmentExpenseMember" xlink:label="us-gaap_ResearchAndDevelopmentExpenseMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SellingGeneralAndAdministrativeExpensesMember" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpensesMember"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsLineItems" xlink:to="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_EmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsLineItems" xlink:to="us-gaap_AllocatedShareBasedCompensationExpense" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfEmployeeServiceShareBasedCompensationAllocationOfRecognizedPeriodCostsTable" xlink:to="us-gaap_IncomeStatementLocationAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_IncomeStatementLocationAxis" xlink:to="us-gaap_IncomeStatementLocationDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_CostOfSalesMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_ResearchAndDevelopmentExpenseMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_SellingGeneralAndAdministrativeExpensesMember" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureStockholdersEquityAdditionalInformationDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ClassOfStockLineItems" xlink:label="us-gaap_ClassOfStockLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfStockByClassTable" xlink:label="us-gaap_ScheduleOfStockByClassTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="us-gaap_SubsequentEventTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventMember" xlink:label="us-gaap_SubsequentEventMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendsDomain" xlink:label="us-gaap_DividendsDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_O2025Q1DividendsMember" xlink:label="mksi_O2025Q1DividendsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventTypeAxis" xlink:label="us-gaap_SubsequentEventTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="us-gaap_SubsequentEventTypeDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendsAxis" xlink:label="us-gaap_DividendsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendsDomain" xlink:label="us-gaap_DividendsDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_StockRepurchaseProgramAuthorizedAmount1" xlink:label="srt_StockRepurchaseProgramAuthorizedAmount1"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_O2026Q1DividendsMember" xlink:label="mksi_O2026Q1DividendsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockRepurchasedDuringPeriodShares" xlink:label="us-gaap_StockRepurchasedDuringPeriodShares"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockRepurchasedAndRetiredDuringPeriodShares" xlink:label="us-gaap_StockRepurchasedAndRetiredDuringPeriodShares"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockRepurchasedAndRetiredDuringPeriodValue" xlink:label="us-gaap_StockRepurchasedAndRetiredDuringPeriodValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockRepurchasedDuringPeriodValue" xlink:label="us-gaap_StockRepurchasedDuringPeriodValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockDividendsPerShareCashPaid" xlink:label="us-gaap_CommonStockDividendsPerShareCashPaid"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsOfDividendsCommonStock" xlink:label="us-gaap_PaymentsOfDividendsCommonStock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendsPayableDateDeclaredDayMonthAndYear" xlink:label="us-gaap_DividendsPayableDateDeclaredDayMonthAndYear"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendsPayableAmountPerShare" xlink:label="us-gaap_DividendsPayableAmountPerShare"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendPayableDateToBePaidDayMonthAndYear" xlink:label="us-gaap_DividendPayableDateToBePaidDayMonthAndYear"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DividendsPayableDateOfRecordDayMonthAndYear" xlink:label="us-gaap_DividendsPayableDateOfRecordDayMonthAndYear"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AociIncludingPortionAttributableToNoncontrollingInterestPeriodIncreaseDecrease" xlink:label="us-gaap_AociIncludingPortionAttributableToNoncontrollingInterestPeriodIncreaseDecrease"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_ScheduleOfStockByClassTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SubsequentEventTypeDomain" xlink:to="us-gaap_SubsequentEventMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DividendsDomain" xlink:to="mksi_O2025Q1DividendsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_SubsequentEventTypeAxis" xlink:to="us-gaap_SubsequentEventTypeDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_SubsequentEventTypeAxis" xlink:to="us-gaap_SubsequentEventTypeDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_StatementEquityComponentsAxis" xlink:to="us-gaap_EquityComponentDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_DividendsAxis" xlink:to="us-gaap_DividendsDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_DividendsAxis" xlink:to="us-gaap_DividendsDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="srt_StockRepurchaseProgramAuthorizedAmount1" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfStockByClassTable" xlink:to="us-gaap_DividendsAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DividendsDomain" xlink:to="mksi_O2026Q1DividendsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_StockRepurchasedDuringPeriodShares" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfStockByClassTable" xlink:to="us-gaap_SubsequentEventTypeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_StockRepurchasedAndRetiredDuringPeriodShares" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfStockByClassTable" xlink:to="us-gaap_StatementEquityComponentsAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_StockRepurchasedAndRetiredDuringPeriodValue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_StockRepurchasedDuringPeriodValue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_CommonStockDividendsPerShareCashPaid" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_PaymentsOfDividendsCommonStock" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_DividendsPayableDateDeclaredDayMonthAndYear" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="8" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_DividendsPayableAmountPerShare" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="9" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_DividendPayableDateToBePaidDayMonthAndYear" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="10" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_DividendsPayableDateOfRecordDayMonthAndYear" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="11" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="12" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ClassOfStockLineItems" xlink:to="us-gaap_AociIncludingPortionAttributableToNoncontrollingInterestPeriodIncreaseDecrease" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureStockholdersEquityScheduleOfChangeInAccumulatedOtherComprehensiveIncomeLossByComponentNetOfTaxDetails">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ChangesInValueOfFinancialInstrumentsDesignatedAsCashFlowHedgesMember" xlink:label="mksi_ChangesInValueOfFinancialInstrumentsDesignatedAsCashFlowHedgesMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedTranslationAdjustmentMember" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OciBeforeReclassificationsNetOfTaxAttributableToParent" xlink:label="us-gaap_OciBeforeReclassificationsNetOfTaxAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AccumulatedOtherComprehensiveIncomeLossChangeInNetInvestmentHedgeMember" xlink:label="mksi_AccumulatedOtherComprehensiveIncomeLossChangeInNetInvestmentHedgeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ReclassificationFromAociCurrentPeriodNetOfTaxAttributableToParent" xlink:label="us-gaap_ReclassificationFromAociCurrentPeriodNetOfTaxAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember" xlink:label="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedGainLossNetCashFlowHedgeParentMember" xlink:label="us-gaap_AccumulatedGainLossNetCashFlowHedgeParentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_StatementEquityComponentsAxis" xlink:to="us-gaap_EquityComponentDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_EquityComponentDomain" xlink:to="mksi_ChangesInValueOfFinancialInstrumentsDesignatedAsCashFlowHedgesMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:to="us-gaap_StatementEquityComponentsAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:to="us-gaap_StockholdersEquity" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedTranslationAdjustmentMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:to="us-gaap_OciBeforeReclassificationsNetOfTaxAttributableToParent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_EquityComponentDomain" xlink:to="mksi_AccumulatedOtherComprehensiveIncomeLossChangeInNetInvestmentHedgeMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:to="us-gaap_ReclassificationFromAociCurrentPeriodNetOfTaxAttributableToParent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedGainLossNetCashFlowHedgeParentMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeMember" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansAdditionalInformationDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:label="us-gaap_DefinedBenefitPlanDisclosureLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" xlink:label="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RetirementPlanTypeAxis" xlink:label="us-gaap_RetirementPlanTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RetirementPlanTypeDomain" xlink:label="us-gaap_RetirementPlanTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RetirementPlanTypeDomain" xlink:label="us-gaap_RetirementPlanTypeDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_IL" xlink:label="country_IL"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_StatementScenarioAxis" xlink:label="srt_StatementScenarioAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ScenarioUnspecifiedDomain" xlink:label="srt_ScenarioUnspecifiedDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ScenarioUnspecifiedDomain" xlink:label="srt_ScenarioUnspecifiedDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedContributionPlanMinimumAnnualContributionsPerEmployeePercent" xlink:label="mksi_DefinedContributionPlanMinimumAnnualContributionsPerEmployeePercent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeMember" xlink:label="srt_RangeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ScenarioForecastMember" xlink:label="srt_ScenarioForecastMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_DE" xlink:label="country_DE"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent" xlink:label="us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MinimumAgeLimitForSpecifiedAdditionalAmount" xlink:label="mksi_MinimumAgeLimitForSpecifiedAdditionalAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PensionAndOtherPostretirementBenefitContributions" xlink:label="us-gaap_PensionAndOtherPostretirementBenefitContributions"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EmployeePerformanceAwardBonusExpense" xlink:label="mksi_EmployeePerformanceAwardBonusExpense"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SupplementalRetirementBenefitsCost" xlink:label="mksi_SupplementalRetirementBenefitsCost"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SupplementalRetirementBenefitsAccumulatedBenefitObligationNoncurrent" xlink:label="mksi_SupplementalRetirementBenefitsAccumulatedBenefitObligationNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent" xlink:label="us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanVestedBenefitObligation" xlink:label="mksi_DefinedBenefitPlanVestedBenefitObligation"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanAssetsForPlanBenefitsGuaranteedRateOfReturn" xlink:label="mksi_DefinedBenefitPlanAssetsForPlanBenefitsGuaranteedRateOfReturn"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_RetirementPlanTypeAxis" xlink:to="us-gaap_RetirementPlanTypeDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_RetirementPlanTypeAxis" xlink:to="us-gaap_RetirementPlanTypeDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_RetirementPlanTypeDomain" xlink:to="country_IL" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="srt_StatementScenarioAxis" xlink:to="srt_ScenarioUnspecifiedDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="srt_StatementScenarioAxis" xlink:to="srt_ScenarioUnspecifiedDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="mksi_DefinedContributionPlanMinimumAnnualContributionsPerEmployeePercent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_ScenarioUnspecifiedDomain" xlink:to="srt_ScenarioForecastMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" xlink:to="srt_StatementScenarioAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_RetirementPlanTypeDomain" xlink:to="country_DE" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="us-gaap_DefinedContributionPlanMaximumAnnualContributionsPerEmployeePercent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" xlink:to="srt_RangeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="mksi_MinimumAgeLimitForSpecifiedAdditionalAmount" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" xlink:to="us-gaap_RetirementPlanTypeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="us-gaap_PensionAndOtherPostretirementBenefitContributions" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="mksi_EmployeePerformanceAwardBonusExpense" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="mksi_SupplementalRetirementBenefitsCost" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="mksi_SupplementalRetirementBenefitsAccumulatedBenefitObligationNoncurrent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="8" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="mksi_DefinedBenefitPlanVestedBenefitObligation" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="9" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="mksi_DefinedBenefitPlanAssetsForPlanBenefitsGuaranteedRateOfReturn" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansScheduleOfDefinedBenefitPlanAssetsDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:label="us-gaap_DefinedBenefitPlanDisclosureLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" xlink:label="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PlanAssetCategoriesDomain" xlink:label="us-gaap_PlanAssetCategoriesDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanDebtSecurityMember" xlink:label="us-gaap_DefinedBenefitPlanDebtSecurityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanFairValueOfPlanAssets" xlink:label="us-gaap_DefinedBenefitPlanFairValueOfPlanAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanByPlanAssetCategoriesAxis" xlink:label="us-gaap_DefinedBenefitPlanByPlanAssetCategoriesAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PlanAssetCategoriesDomain" xlink:label="us-gaap_PlanAssetCategoriesDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanEquitySecuritiesMember" xlink:label="us-gaap_DefinedBenefitPlanEquitySecuritiesMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanAssetsForPlanBenefitsPercentage" xlink:label="mksi_DefinedBenefitPlanAssetsForPlanBenefitsPercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanCashMember" xlink:label="us-gaap_DefinedBenefitPlanCashMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanAssetCategoriesOtherAssetsMember" xlink:label="mksi_DefinedBenefitPlanAssetCategoriesOtherAssetsMember"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PlanAssetCategoriesDomain" xlink:to="us-gaap_DefinedBenefitPlanDebtSecurityMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="us-gaap_DefinedBenefitPlanFairValueOfPlanAssets" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfDefinedBenefitPlansDisclosuresTable" xlink:to="us-gaap_DefinedBenefitPlanByPlanAssetCategoriesAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_DefinedBenefitPlanByPlanAssetCategoriesAxis" xlink:to="us-gaap_PlanAssetCategoriesDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_DefinedBenefitPlanByPlanAssetCategoriesAxis" xlink:to="us-gaap_PlanAssetCategoriesDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PlanAssetCategoriesDomain" xlink:to="us-gaap_DefinedBenefitPlanEquitySecuritiesMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DefinedBenefitPlanDisclosureLineItems" xlink:to="mksi_DefinedBenefitPlanAssetsForPlanBenefitsPercentage" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PlanAssetCategoriesDomain" xlink:to="us-gaap_DefinedBenefitPlanCashMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_PlanAssetCategoriesDomain" xlink:to="mksi_DefinedBenefitPlanAssetCategoriesOtherAssetsMember" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureNetIncomeLossPerShareAdditionalInformationDetail">
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EarningsPerShareLineItems" xlink:label="mksi_EarningsPerShareLineItems"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduleOfEarningsPerShareTable" xlink:label="mksi_ScheduleOfEarningsPerShareTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AntidilutiveSecuritiesNameDomain" xlink:label="us-gaap_AntidilutiveSecuritiesNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AntidilutiveSecuritiesNameDomain" xlink:label="us-gaap_AntidilutiveSecuritiesNameDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestrictedStockUnitsRSUMember" xlink:label="us-gaap_RestrictedStockUnitsRSUMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="mksi_EarningsPerShareLineItems" xlink:to="mksi_ScheduleOfEarningsPerShareTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" xlink:to="us-gaap_AntidilutiveSecuritiesNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" xlink:to="us-gaap_AntidilutiveSecuritiesNameDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_ScheduleOfEarningsPerShareTable" xlink:to="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_AntidilutiveSecuritiesNameDomain" xlink:to="us-gaap_RestrictedStockUnitsRSUMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_EarningsPerShareLineItems" xlink:to="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationAdditionalInformationDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="us-gaap_SegmentReportingInformationLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="us-gaap_ConcentrationRiskByTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="us-gaap_ConcentrationRiskTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_NameOfMajorCustomerDomain" xlink:label="srt_NameOfMajorCustomerDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TopTenCustomersMember" xlink:label="mksi_TopTenCustomersMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="us-gaap_CustomerConcentrationRiskMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeMember" xlink:label="srt_RangeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SalesRevenueNetMember" xlink:label="us-gaap_SalesRevenueNetMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MajorCustomersAxis" xlink:label="srt_MajorCustomersAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NumberOfReportableSegments" xlink:label="us-gaap_NumberOfReportableSegments"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingCodmIndividualTitleAndPositionOrGroupOrCommitteeNameExtensibleEnumeration" xlink:label="us-gaap_SegmentReportingCodmIndividualTitleAndPositionOrGroupOrCommitteeNameExtensibleEnumeration"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingCodmProfitLossMeasureHowUsedDescription" xlink:label="us-gaap_SegmentReportingCodmProfitLossMeasureHowUsedDescription"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForThirtyTwoPercentThirtyPercentAndFortyTwoPercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForThirtyTwoPercentThirtyPercentAndFortyTwoPercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForFortySevenPercentFortyFourPercentAndThirtyThreePercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForFortySevenPercentFortyFourPercentAndThirtyThreePercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForThirtyPercentFortyTwoPercentAndFourtySixPercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForThirtyPercentFortyTwoPercentAndFourtySixPercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="us-gaap_ConcentrationRiskPercentage1"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForNinetyPercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForNinetyPercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForTenPercentOrMoreOfNetRevenue" xlink:label="mksi_NumberOfCustomersAccountedForTenPercentOrMoreOfNetRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForGreaterThanOrEqualToTenPercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForGreaterThanOrEqualToTenPercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForFourteenPercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForFourteenPercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForTenPercentOfNetRevenue" xlink:label="mksi_NumberOfCustomersAccountedForTenPercentOfNetRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForFifteenPercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForFifteenPercentOfRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForElevenPercentOfNetRevenue" xlink:label="mksi_NumberOfCustomersAccountedForElevenPercentOfNetRevenue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfCustomersAccountedForTenOrMorePercentOfRevenue" xlink:label="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfRevenue"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_ConcentrationRiskByTypeAxis" xlink:to="us-gaap_ConcentrationRiskTypeDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="mksi_TopTenCustomersMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:to="us-gaap_ConcentrationRiskBenchmarkDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ConcentrationRiskTypeDomain" xlink:to="us-gaap_CustomerConcentrationRiskMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain" xlink:to="us-gaap_SalesRevenueNetMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_ConcentrationRiskByBenchmarkAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="srt_MajorCustomersAxis" xlink:to="srt_NameOfMajorCustomerDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_NumberOfReportableSegments" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_ConcentrationRiskByTypeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_SegmentReportingCodmIndividualTitleAndPositionOrGroupOrCommitteeNameExtensibleEnumeration" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="srt_MajorCustomersAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_SegmentReportingCodmProfitLossMeasureHowUsedDescription" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="srt_RangeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForThirtyTwoPercentThirtyPercentAndFortyTwoPercentOfRevenue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForFortySevenPercentFortyFourPercentAndThirtyThreePercentOfRevenue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForThirtyPercentFortyTwoPercentAndFourtySixPercentOfRevenue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_ConcentrationRiskPercentage1" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForNinetyPercentOfRevenue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="8" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForTenPercentOrMoreOfNetRevenue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="9" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForGreaterThanOrEqualToTenPercentOfRevenue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="10" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForFourteenPercentOfRevenue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="11" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForTenPercentOfNetRevenue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="12" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForFifteenPercentOfRevenue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="13" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForElevenPercentOfNetRevenue" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="14" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfRevenue" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationScheduleOfReconcilesGrossProfitByReportableSegment">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="us-gaap_SegmentReportingInformationLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentDomain" xlink:label="us-gaap_SegmentDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_VacuumSolutionsDivisionMember" xlink:label="mksi_VacuumSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ConsolidationItemsDomain" xlink:label="srt_ConsolidationItemsDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingSegmentsMember" xlink:label="us-gaap_OperatingSegmentsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProductMember" xlink:label="us-gaap_ProductMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="us-gaap_StatementBusinessSegmentsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ConsolidationItemsAxis" xlink:label="srt_ConsolidationItemsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ConsolidationItemsDomain" xlink:label="srt_ConsolidationItemsDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PhotonicsSolutionsDivisionMember" xlink:label="mksi_PhotonicsSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MaterialReconcilingItemsMember" xlink:label="us-gaap_MaterialReconcilingItemsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ServiceMember" xlink:label="us-gaap_ServiceMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization" xlink:label="us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MaterialsSolutionsDivisionMember" xlink:label="mksi_MaterialsSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SegmentGrossProfitLoss" xlink:label="mksi_SegmentGrossProfitLoss"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SegmentGrossProfitPercentage" xlink:label="mksi_SegmentGrossProfitPercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="us-gaap_ResearchAndDevelopmentExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SellingGeneralAndAdministrativeExpense" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpense"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts" xlink:label="mksi_BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestructuringCharges" xlink:label="us-gaap_RestructuringCharges"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FeesAndExpensesRelatedToRepricingOfTermLoanFacility" xlink:label="mksi_FeesAndExpensesRelatedToRepricingOfTermLoanFacility"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan" xlink:label="mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AmortizationOfIntangibleAssets" xlink:label="us-gaap_AmortizationOfIntangibleAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetImpairment" xlink:label="us-gaap_GoodwillAndIntangibleAssetImpairment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainLossOnSaleOfPropertyPlantEquipment" xlink:label="us-gaap_GainLossOnSaleOfPropertyPlantEquipment"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UnallocatedCorporateExpenses" xlink:label="mksi_UnallocatedCorporateExpenses"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingIncomeLoss" xlink:label="us-gaap_OperatingIncomeLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestAndOtherIncome" xlink:label="us-gaap_InterestAndOtherIncome"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NonoperatingIncomeExpense" xlink:label="us-gaap_NonoperatingIncomeExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_VacuumSolutionsDivisionMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="srt_ProductOrServiceAxis" xlink:to="srt_ProductsAndServicesDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_ConsolidationItemsDomain" xlink:to="us-gaap_OperatingSegmentsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_ProductsAndServicesDomain" xlink:to="us-gaap_ProductMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_StatementBusinessSegmentsAxis" xlink:to="us-gaap_SegmentDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_StatementBusinessSegmentsAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="srt_ConsolidationItemsAxis" xlink:to="srt_ConsolidationItemsDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="srt_ConsolidationItemsAxis" xlink:to="srt_ConsolidationItemsDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_PhotonicsSolutionsDivisionMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_ConsolidationItemsDomain" xlink:to="us-gaap_MaterialReconcilingItemsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_ProductsAndServicesDomain" xlink:to="us-gaap_ServiceMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="srt_ConsolidationItemsAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_MaterialsSolutionsDivisionMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="srt_ProductOrServiceAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_SegmentGrossProfitLoss" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_SegmentGrossProfitPercentage" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_ResearchAndDevelopmentExpense" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_SellingGeneralAndAdministrativeExpense" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_RestructuringCharges" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="8" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_FeesAndExpensesRelatedToRepricingOfTermLoanFacility" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="9" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="10" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_AmortizationOfIntangibleAssets" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="11" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillAndIntangibleAssetImpairment" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="12" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GainLossOnSaleOfPropertyPlantEquipment" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="13" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_UnallocatedCorporateExpenses" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="14" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_OperatingIncomeLoss" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="15" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_InterestAndOtherIncome" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="16" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_InterestExpense" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="17" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GainsLossesOnExtinguishmentOfDebt" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="18" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_NonoperatingIncomeExpense" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="19" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationScheduleOfCapitalExpendituresDepreciationAndAmortiz">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="us-gaap_SegmentReportingInformationLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentDomain" xlink:label="us-gaap_SegmentDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_VacuumSolutionsDivisionMember" xlink:label="mksi_VacuumSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="us-gaap_StatementBusinessSegmentsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentExpenditureAdditionToLongLivedAssets" xlink:label="us-gaap_SegmentExpenditureAdditionToLongLivedAssets"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PhotonicsSolutionsDivisionMember" xlink:label="mksi_PhotonicsSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DepreciationAndAmortization" xlink:label="us-gaap_DepreciationAndAmortization"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MaterialsSolutionsDivisionMember" xlink:label="mksi_MaterialsSolutionsDivisionMember"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_VacuumSolutionsDivisionMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_StatementBusinessSegmentsAxis" xlink:to="us-gaap_SegmentDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_StatementBusinessSegmentsAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_SegmentExpenditureAdditionToLongLivedAssets" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_PhotonicsSolutionsDivisionMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_DepreciationAndAmortization" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_MaterialsSolutionsDivisionMember" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationSegmentAssetsByReportableSegmentDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="us-gaap_SegmentReportingInformationLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentDomain" xlink:label="us-gaap_SegmentDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_VacuumSolutionsDivisionMember" xlink:label="mksi_VacuumSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ConsolidationItemsDomain" xlink:label="srt_ConsolidationItemsDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingSegmentsMember" xlink:label="us-gaap_OperatingSegmentsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="us-gaap_StatementBusinessSegmentsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ConsolidationItemsAxis" xlink:label="srt_ConsolidationItemsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="us-gaap_AccountsReceivableNetCurrent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PhotonicsSolutionsDivisionMember" xlink:label="mksi_PhotonicsSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CorporateReconcilingItemsAndEliminationsMember" xlink:label="mksi_CorporateReconcilingItemsAndEliminationsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MaterialsSolutionsDivisionMember" xlink:label="mksi_MaterialsSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SegmentAssets" xlink:label="mksi_SegmentAssets"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_VacuumSolutionsDivisionMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_ConsolidationItemsDomain" xlink:to="us-gaap_OperatingSegmentsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_StatementBusinessSegmentsAxis" xlink:to="us-gaap_SegmentDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_StatementBusinessSegmentsAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="srt_ConsolidationItemsAxis" xlink:to="srt_ConsolidationItemsDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_AccountsReceivableNetCurrent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_PhotonicsSolutionsDivisionMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_ConsolidationItemsDomain" xlink:to="mksi_CorporateReconcilingItemsAndEliminationsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="srt_ConsolidationItemsAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_InventoryNet" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_MaterialsSolutionsDivisionMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="mksi_SegmentAssets" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationReconcilesTotalSegmentAssetsToTotalAssetsDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingAssetReconcilingItemLineItems" xlink:label="us-gaap_SegmentReportingAssetReconcilingItemLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTable" xlink:label="us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ConsolidationItemsDomain" xlink:label="srt_ConsolidationItemsDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_MaterialReconcilingItemsMember" xlink:label="us-gaap_MaterialReconcilingItemsMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SegmentAssets" xlink:label="mksi_SegmentAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ConsolidationItemsAxis" xlink:label="srt_ConsolidationItemsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherAssetsCurrent" xlink:label="us-gaap_OtherAssetsCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IntangibleAssetsNetIncludingGoodwill" xlink:label="us-gaap_IntangibleAssetsNetIncludingGoodwill"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="us-gaap_OtherAssetsNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_Assets" xlink:label="us-gaap_Assets"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_SegmentReportingAssetReconcilingItemLineItems" xlink:to="us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_ConsolidationItemsDomain" xlink:to="us-gaap_MaterialReconcilingItemsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingAssetReconcilingItemLineItems" xlink:to="mksi_SegmentAssets" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ReconciliationOfAssetsFromSegmentToConsolidatedTable" xlink:to="srt_ConsolidationItemsAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="srt_ConsolidationItemsAxis" xlink:to="srt_ConsolidationItemsDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingAssetReconcilingItemLineItems" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingAssetReconcilingItemLineItems" xlink:to="us-gaap_OtherAssetsCurrent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingAssetReconcilingItemLineItems" xlink:to="us-gaap_PropertyPlantAndEquipmentNet" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingAssetReconcilingItemLineItems" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingAssetReconcilingItemLineItems" xlink:to="us-gaap_IntangibleAssetsNetIncludingGoodwill" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingAssetReconcilingItemLineItems" xlink:to="us-gaap_OtherAssetsNoncurrent" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingAssetReconcilingItemLineItems" xlink:to="us-gaap_Assets" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationSummaryOfGoodwillAssociatedWithReportableSegmentsD">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="us-gaap_SegmentReportingInformationLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SegmentDomain" xlink:label="us-gaap_SegmentDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_VacuumSolutionsDivisionMember" xlink:label="mksi_VacuumSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="us-gaap_StatementBusinessSegmentsAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillGross" xlink:label="us-gaap_GoodwillGross"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PhotonicsSolutionsDivisionMember" xlink:label="mksi_PhotonicsSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillTransfers" xlink:label="us-gaap_GoodwillTransfers"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_MaterialsSolutionsDivisionMember" xlink:label="mksi_MaterialsSolutionsDivisionMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillForeignCurrencyTranslationGainLoss" xlink:label="us-gaap_GoodwillForeignCurrencyTranslationGainLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillImpairmentLoss" xlink:label="us-gaap_GoodwillImpairmentLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_Goodwill" xlink:label="us-gaap_Goodwill"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_VacuumSolutionsDivisionMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_StatementBusinessSegmentsAxis" xlink:to="us-gaap_SegmentDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:to="us-gaap_StatementBusinessSegmentsAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillGross" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_PhotonicsSolutionsDivisionMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillTransfers" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentDomain" xlink:to="mksi_MaterialsSolutionsDivisionMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillForeignCurrencyTranslationGainLoss" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_GoodwillImpairmentLoss" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SegmentReportingInformationLineItems" xlink:to="us-gaap_Goodwill" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationScheduleOfNetRevenuesAndLonglivedAssetsByGeograph">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:label="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xlink:label="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_US" xlink:label="country_US"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_CN" xlink:label="country_CN"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NoncurrentAssets" xlink:label="us-gaap_NoncurrentAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_KR" xlink:label="country_KR"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_JP" xlink:label="country_JP"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_TW" xlink:label="country_TW"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_SG" xlink:label="country_SG"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/country/2025/country-2025.xsd#country_DE" xlink:label="country_DE"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherCountriesMember" xlink:label="mksi_OtherCountriesMember"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:to="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_ScheduleOfRevenuesFromExternalCustomersAndLongLivedAssetsTable" xlink:to="srt_StatementGeographicalAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_SegmentGeographicalDomain" xlink:to="country_US" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:to="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="srt_StatementGeographicalAxis" xlink:to="srt_SegmentGeographicalDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_SegmentGeographicalDomain" xlink:to="country_CN" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_RevenuesFromExternalCustomersAndLongLivedAssetsLineItems" xlink:to="us-gaap_NoncurrentAssets" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_SegmentGeographicalDomain" xlink:to="country_KR" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_SegmentGeographicalDomain" xlink:to="country_JP" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_SegmentGeographicalDomain" xlink:to="country_TW" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_SegmentGeographicalDomain" xlink:to="country_SG" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_SegmentGeographicalDomain" xlink:to="country_DE" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_SegmentGeographicalDomain" xlink:to="mksi_OtherCountriesMember" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureRestructuringAdditionalInformationDetail">
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_RestructuringCostAndOtherCostLineItems" xlink:label="mksi_RestructuringCostAndOtherCostLineItems"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ScheduleOfRestructuringAndOtherCostTable" xlink:label="mksi_ScheduleOfRestructuringAndOtherCostTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="us-gaap_BusinessAcquisitionAcquireeDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NewportCorporationMember" xlink:label="mksi_NewportCorporationMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestructuringCostAndReserveAxis" xlink:label="us-gaap_RestructuringCostAndReserveAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TypeOfRestructuringDomain" xlink:label="us-gaap_TypeOfRestructuringDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TypeOfRestructuringDomain" xlink:label="us-gaap_TypeOfRestructuringDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_EuropeMember" xlink:label="srt_EuropeMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeSeveranceMember" xlink:label="us-gaap_EmployeeSeveranceMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestructuringCharges" xlink:label="us-gaap_RestructuringCharges"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="us-gaap_BusinessAcquisitionAxis"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AtotechMember" xlink:label="mksi_AtotechMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NumberOfFacilitiesYetToClose" xlink:label="mksi_NumberOfFacilitiesYetToClose"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsForLegalSettlements" xlink:label="us-gaap_PaymentsForLegalSettlements"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherRestructuringCosts" xlink:label="us-gaap_OtherRestructuringCosts"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_InsuranceReimbursementReceived" xlink:label="mksi_InsuranceReimbursementReceived"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="mksi_RestructuringCostAndOtherCostLineItems" xlink:to="mksi_ScheduleOfRestructuringAndOtherCostTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_BusinessAcquisitionAcquireeDomain" xlink:to="mksi_NewportCorporationMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_RestructuringCostAndReserveAxis" xlink:to="us-gaap_TypeOfRestructuringDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_RestructuringCostAndReserveAxis" xlink:to="us-gaap_TypeOfRestructuringDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_SegmentGeographicalDomain" xlink:to="srt_EuropeMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="srt_StatementGeographicalAxis" xlink:to="srt_SegmentGeographicalDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_TypeOfRestructuringDomain" xlink:to="us-gaap_EmployeeSeveranceMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_ScheduleOfRestructuringAndOtherCostTable" xlink:to="srt_StatementGeographicalAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_RestructuringCostAndOtherCostLineItems" xlink:to="us-gaap_RestructuringCharges" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_BusinessAcquisitionAxis" xlink:to="us-gaap_BusinessAcquisitionAcquireeDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_BusinessAcquisitionAcquireeDomain" xlink:to="mksi_AtotechMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_ScheduleOfRestructuringAndOtherCostTable" xlink:to="us-gaap_BusinessAcquisitionAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_RestructuringCostAndOtherCostLineItems" xlink:to="mksi_NumberOfFacilitiesYetToClose" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="mksi_ScheduleOfRestructuringAndOtherCostTable" xlink:to="us-gaap_RestructuringCostAndReserveAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_RestructuringCostAndOtherCostLineItems" xlink:to="us-gaap_PaymentsForLegalSettlements" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_RestructuringCostAndOtherCostLineItems" xlink:to="us-gaap_OtherRestructuringCosts" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="mksi_RestructuringCostAndOtherCostLineItems" xlink:to="mksi_InsuranceReimbursementReceived" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureScheduleIIValuationAndQualifyingAccountsDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:label="srt_ValuationAndQualifyingAccountsDisclosureLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ValuationAndQualifyingAccountsDisclosureTable" xlink:label="srt_ValuationAndQualifyingAccountsDisclosureTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:label="us-gaap_ValuationAllowancesAndReservesTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesDomain" xlink:label="us-gaap_ValuationAllowancesAndReservesDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesDomain" xlink:label="us-gaap_ValuationAllowancesAndReservesDomain_default"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember" xlink:label="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesBalance" xlink:label="us-gaap_ValuationAllowancesAndReservesBalance"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesReservesOfBusinessesAcquired" xlink:label="us-gaap_ValuationAllowancesAndReservesReservesOfBusinessesAcquired"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense" xlink:label="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesChargedToOtherAccounts" xlink:label="us-gaap_ValuationAllowancesAndReservesChargedToOtherAccounts"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ValuationAllowancesAndReservesDeductions" xlink:label="us-gaap_ValuationAllowancesAndReservesDeductions"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:to="srt_ValuationAndQualifyingAccountsDisclosureTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:to="us-gaap_ValuationAllowancesAndReservesDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_ValuationAllowancesAndReservesTypeAxis" xlink:to="us-gaap_ValuationAllowancesAndReservesDomain_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ValuationAllowancesAndReservesDomain" xlink:to="us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:to="us-gaap_ValuationAllowancesAndReservesBalance" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureTable" xlink:to="us-gaap_ValuationAllowancesAndReservesTypeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:to="us-gaap_ValuationAllowancesAndReservesReservesOfBusinessesAcquired" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:to="us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:to="us-gaap_ValuationAllowancesAndReservesChargedToOtherAccounts" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_ValuationAndQualifyingAccountsDisclosureLineItems" xlink:to="us-gaap_ValuationAllowancesAndReservesDeductions" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureSubsequentEventsAdditionalInformationDetail">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventLineItems" xlink:label="us-gaap_SubsequentEventLineItems"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventTable" xlink:label="us-gaap_SubsequentEventTable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermDebtRefinancedDescription" xlink:label="us-gaap_ShortTermDebtRefinancedDescription"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingDomain" xlink:label="us-gaap_VestingDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UsdTrancheBMember" xlink:label="mksi_UsdTrancheBMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TypeOfArrangementAxis" xlink:label="us-gaap_TypeOfArrangementAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ArrangementsAndNonarrangementTransactionsMember" xlink:label="us-gaap_ArrangementsAndNonarrangementTransactionsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ArrangementsAndNonarrangementTransactionsMember" xlink:label="us-gaap_ArrangementsAndNonarrangementTransactionsMember_default"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SixthAmendmentMember" xlink:label="mksi_SixthAmendmentMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="us-gaap_SubsequentEventTypeDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventMember" xlink:label="us-gaap_SubsequentEventMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentNameDomain" xlink:label="us-gaap_DebtInstrumentNameDomain"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_TermSofrBorrowingsMember" xlink:label="mksi_TermSofrBorrowingsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CreditFacilityAxis" xlink:label="us-gaap_CreditFacilityAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CreditFacilityDomain" xlink:label="us-gaap_CreditFacilityDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevolvingCreditFacilityMember" xlink:label="us-gaap_RevolvingCreditFacilityMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_VestingAxis" xlink:label="us-gaap_VestingAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SubsequentEventTypeAxis" xlink:label="us-gaap_SubsequentEventTypeAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentAxis" xlink:label="us-gaap_DebtInstrumentAxis"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermDebtRefinancedAmount" xlink:label="us-gaap_ShortTermDebtRefinancedAmount"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EuroTrancheBMember" xlink:label="mksi_EuroTrancheBMember"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_BaseRateBorrowingsMember" xlink:label="mksi_BaseRateBorrowingsMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentInterestRateIncreaseDecrease" xlink:label="us-gaap_DebtInstrumentInterestRateIncreaseDecrease"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SecuredOvernightFinancingRateSofrMember" xlink:label="us-gaap_SecuredOvernightFinancingRateSofrMember"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SeniorNotesDue2034Member" xlink:label="mksi_SeniorNotesDue2034Member"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PrepaymentPremiumPercentageOfAggregatePrincipalAmount" xlink:label="mksi_PrepaymentPremiumPercentageOfAggregatePrincipalAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentFaceAmount" xlink:label="us-gaap_DebtInstrumentFaceAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentInterestRateStatedPercentage" xlink:label="us-gaap_DebtInstrumentInterestRateStatedPercentage"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentFrequencyOfPeriodicPayment" xlink:label="us-gaap_DebtInstrumentFrequencyOfPeriodicPayment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RepaymentsOfDebt" xlink:label="us-gaap_RepaymentsOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtInstrumentPeriodicPaymentPrincipal" xlink:label="us-gaap_DebtInstrumentPeriodicPaymentPrincipal"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="true" xbrldt:contextElement="segment" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_SubsequentEventTable" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_ShortTermDebtRefinancedDescription" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_UsdTrancheBMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_TypeOfArrangementAxis" xlink:to="us-gaap_ArrangementsAndNonarrangementTransactionsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="us-gaap_TypeOfArrangementAxis" xlink:to="us-gaap_ArrangementsAndNonarrangementTransactionsMember_default" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_ArrangementsAndNonarrangementTransactionsMember" xlink:to="mksi_SixthAmendmentMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SubsequentEventTypeDomain" xlink:to="us-gaap_SubsequentEventMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_TermSofrBorrowingsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_CreditFacilityAxis" xlink:to="us-gaap_CreditFacilityDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_CreditFacilityDomain" xlink:to="us-gaap_RevolvingCreditFacilityMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_VestingAxis" xlink:to="us-gaap_VestingDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_SubsequentEventTable" xlink:to="us-gaap_SubsequentEventTypeAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_DebtInstrumentAxis" xlink:to="us-gaap_DebtInstrumentNameDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="us-gaap_SubsequentEventTypeAxis" xlink:to="us-gaap_SubsequentEventTypeDomain" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_ShortTermDebtRefinancedAmount" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_VestingDomain" xlink:to="mksi_EuroTrancheBMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_BaseRateBorrowingsMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="1" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_SubsequentEventTable" xlink:to="us-gaap_VestingAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_DebtInstrumentInterestRateIncreaseDecrease" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="us-gaap_SecuredOvernightFinancingRateSofrMember" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="2" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_SubsequentEventTable" xlink:to="us-gaap_DebtInstrumentAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_DebtInstrumentNameDomain" xlink:to="mksi_SeniorNotesDue2034Member" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="3" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_SubsequentEventTable" xlink:to="us-gaap_CreditFacilityAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="mksi_PrepaymentPremiumPercentageOfAggregatePrincipalAmount" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="4" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="us-gaap_SubsequentEventTable" xlink:to="us-gaap_TypeOfArrangementAxis" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="5" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_DebtInstrumentFaceAmount" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="6" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_DebtInstrumentInterestRateStatedPercentage" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="7" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_DebtInstrumentFrequencyOfPeriodicPayment" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="8" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_RepaymentsOfDebt" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="9" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_SubsequentEventLineItems" xlink:to="us-gaap_DebtInstrumentPeriodicPaymentPrincipal" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://fasb.org/us-gaap/role/eedm/ExtensibleEnumerationLists">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeStatementAbstract" xlink:label="us-gaap_IncomeStatementAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AmortizationOfIntangibleAssets" xlink:label="us-gaap_AmortizationOfIntangibleAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LiabilitiesAbstract" xlink:label="us-gaap_LiabilitiesAbstract"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_Liabilities" xlink:label="us-gaap_Liabilities"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_IncomeStatementAbstract" xlink:to="us-gaap_AmortizationOfIntangibleAssets" priority="2" use="optional"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="us-gaap_LiabilitiesAbstract" xlink:to="us-gaap_Liabilities" priority="2" use="optional"/>
        </link:definitionLink>
        <link:definitionLink xlink:type="extended" xlink:role="http://fasb.org/srt/role/srt-eedm/ExtensibleEnumerationLists">
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_TitleOfIndividualWithRelationshipToEntityDomain" xlink:label="srt_TitleOfIndividualWithRelationshipToEntityDomain"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/srt/2025/elts/srt-2025.xsd#srt_ChiefExecutiveOfficerMember" xlink:label="srt_ChiefExecutiveOfficerMember"/>
          <link:definitionArc xlink:type="arc" order="0" xbrldt:closed="false" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="srt_TitleOfIndividualWithRelationshipToEntityDomain" xlink:to="srt_ChiefExecutiveOfficerMember" priority="2" use="optional"/>
        </link:definitionLink>
        <link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_StatementConsolidatedBalanceSheets">
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesAndStockholdersEquity" xlink:to="us-gaap_Liabilities" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent" xlink:to="us-gaap_ShortTermBorrowings" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity" xlink:to="us-gaap_PreferredStockValue" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_Liabilities" xlink:to="us-gaap_LiabilitiesCurrent" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_AssetsCurrent" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesAndStockholdersEquity" xlink:to="us-gaap_CommitmentsAndContingencies" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent" xlink:to="us-gaap_AccountsPayableCurrent" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity" xlink:to="us-gaap_CommonStockValue" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_Liabilities" xlink:to="us-gaap_LongTermDebt" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_PropertyPlantAndEquipmentNet" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesAndStockholdersEquity" xlink:to="us-gaap_StockholdersEquity" order="2" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity" xlink:to="us-gaap_AdditionalPaidInCapitalCommonStock" order="2" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent" xlink:to="us-gaap_AccountsReceivableNetCurrent" order="2" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_Liabilities" xlink:to="us-gaap_DeferredIncomeTaxLiabilitiesNet" order="2" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset" order="2" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity" xlink:to="us-gaap_RetainedEarningsAccumulatedDeficit" order="3" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent" xlink:to="us-gaap_InventoryNet" order="3" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_Liabilities" xlink:to="us-gaap_EmployeeRelatedLiabilitiesCurrentAndNoncurrent" order="3" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_Goodwill" order="3" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" order="4" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent" xlink:to="us-gaap_OtherAssetsCurrent" order="4" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_Liabilities" xlink:to="mksi_NonCurrentLeaseLiability" order="4" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_FiniteLivedIntangibleAssetsNet" order="4" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_Liabilities" xlink:to="us-gaap_OtherLiabilitiesNoncurrent" order="6" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_OtherAssetsNoncurrent" order="6" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent" xlink:to="us-gaap_OtherLiabilitiesCurrent" order="7" weight="1.00" use="optional"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_Liabilities" xlink:label="us-gaap_Liabilities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LiabilitiesCurrent" xlink:label="us-gaap_LiabilitiesCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermBorrowings" xlink:label="us-gaap_ShortTermBorrowings"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PreferredStockValue" xlink:label="us-gaap_PreferredStockValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AssetsCurrent" xlink:label="us-gaap_AssetsCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_Assets" xlink:label="us-gaap_Assets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommitmentsAndContingencies" xlink:label="us-gaap_CommitmentsAndContingencies"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccountsPayableCurrent" xlink:label="us-gaap_AccountsPayableCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CommonStockValue" xlink:label="us-gaap_CommonStockValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LongTermDebt" xlink:label="us-gaap_LongTermDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AdditionalPaidInCapitalCommonStock" xlink:label="us-gaap_AdditionalPaidInCapitalCommonStock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="us-gaap_AccountsReceivableNetCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredIncomeTaxLiabilitiesNet" xlink:label="us-gaap_DeferredIncomeTaxLiabilitiesNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrentAndNoncurrent" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrentAndNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_Goodwill" xlink:label="us-gaap_Goodwill"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherAssetsCurrent" xlink:label="us-gaap_OtherAssetsCurrent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NonCurrentLeaseLiability" xlink:label="mksi_NonCurrentLeaseLiability"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="us-gaap_FiniteLivedIntangibleAssetsNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherLiabilitiesNoncurrent" xlink:label="us-gaap_OtherLiabilitiesNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="us-gaap_OtherAssetsNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherLiabilitiesCurrent" xlink:label="us-gaap_OtherLiabilitiesCurrent"/>
        </link:calculationLink>
        <link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureLeasesScheduleOfFutureLeasePaymentsDetail3">
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive" order="0" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" order="1" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" order="2" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" order="3" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive" order="4" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" order="5" weight="1" use="optional"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo"/>
        </link:calculationLink>
        <link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/StatementConsolidatedStatementsOfOperationsAndComprehensiveIncomeLoss">
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_GrossProfit" xlink:to="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="us-gaap_NetIncomeLoss" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_OperatingIncomeLoss" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetIncomeLoss" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_GrossProfit" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_GrossProfit" xlink:to="us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization" order="1" weight="-1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_InterestAndOtherIncome" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetIncomeLoss" xlink:to="us-gaap_IncomeTaxExpenseBenefit" order="1" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_ResearchAndDevelopmentExpense" order="1" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" order="2" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_InterestExpense" order="2" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_SellingGeneralAndAdministrativeExpense" order="2" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="mksi_OtherComprehensiveIncomeLossNetInvestmentHedgeGainLossNetOfTax" order="3" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_GainsLossesOnExtinguishmentOfDebt" order="3" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_BusinessCombinationAcquisitionRelatedCosts" order="3" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" order="4" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_OtherNonoperatingIncomeExpense" order="4" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_RestructuringCharges" order="4" weight="-1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent" order="5" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan" order="5" weight="-1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_GoodwillAndIntangibleAssetImpairment" order="8" weight="-1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_AmortizationOfIntangibleAssets" order="9" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_GainLossOnSaleOfPropertyPlantEquipment" order="13" weight="1.00" use="optional"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GrossProfit" xlink:label="us-gaap_GrossProfit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetIncomeLoss" xlink:label="us-gaap_NetIncomeLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingIncomeLoss" xlink:label="us-gaap_OperatingIncomeLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization" xlink:label="us-gaap_CostOfGoodsAndServiceExcludingDepreciationDepletionAndAmortization"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent" xlink:label="us-gaap_OtherComprehensiveIncomeLossCashFlowHedgeGainLossAfterReclassificationAndTaxParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestAndOtherIncome" xlink:label="us-gaap_InterestAndOtherIncome"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="us-gaap_ResearchAndDevelopmentExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SellingGeneralAndAdministrativeExpense" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpense"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherComprehensiveIncomeLossNetInvestmentHedgeGainLossNetOfTax" xlink:label="mksi_OtherComprehensiveIncomeLossNetInvestmentHedgeGainLossNetOfTax"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_BusinessCombinationAcquisitionRelatedCosts" xlink:label="us-gaap_BusinessCombinationAcquisitionRelatedCosts"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="us-gaap_OtherNonoperatingIncomeExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestructuringCharges" xlink:label="us-gaap_RestructuringCharges"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeAvailableforsaleSecuritiesAdjustmentNetOfTaxPortionAttributableToParent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan" xlink:label="mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetImpairment" xlink:label="us-gaap_GoodwillAndIntangibleAssetImpairment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AmortizationOfIntangibleAssets" xlink:label="us-gaap_AmortizationOfIntangibleAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainLossOnSaleOfPropertyPlantEquipment" xlink:label="us-gaap_GainLossOnSaleOfPropertyPlantEquipment"/>
        </link:calculationLink>
        <link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureLeasesScheduleOfFutureLeasePaymentsDetail4">
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" order="0" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiability" order="1" weight="1" use="optional"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_FinanceLeaseLiability" xlink:label="us-gaap_FinanceLeaseLiability"/>
        </link:calculationLink>
        <link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_StatementConsolidatedStatementsOfCashFlows">
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_ProfitLoss" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivities" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:to="us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired" order="0" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:to="us-gaap_PaymentsForRepurchaseOfCommonStock" order="0" weight="-1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_DepreciationAndAmortization" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivities" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:to="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt" order="1" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:to="us-gaap_ProceedsFromBankDebt" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="mksi_AmortizationOfInventoryStepUpToFairValue" order="2" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivities" order="2" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:to="us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities" order="2" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:to="us-gaap_RepaymentsOfDebt" order="2" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_GoodwillAndIntangibleAssetImpairment" order="3" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" order="3" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:to="us-gaap_RepaymentsOfConvertibleDebt" order="3" weight="-1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_UnrealizedGainLossOnDerivatives" order="4" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:to="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment" order="4" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:to="us-gaap_PaymentsOfFinancingCosts" order="4" weight="-1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:to="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" order="5" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:to="mksi_ProceedsFromPaymentsForEmployeeStockAwards" order="5" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_GainsLossesOnExtinguishmentOfDebt" order="6" weight="-1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_AmortizationOfFinancingCostsAndDiscounts" order="7" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:to="us-gaap_ProceedsFromPaymentsForOtherFinancingActivities" order="7" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_GainLossOnSaleOfPropertyPlantEquipment" order="8" weight="-1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:to="us-gaap_PaymentsOfDividendsCommonStock" order="8" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_ShareBasedCompensation" order="9" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_InventoryWriteDown" order="10" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefit" order="11" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_OtherNoncashIncomeExpense" order="13" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_IncreaseDecreaseInAccountsReceivable" order="14" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_IncreaseDecreaseInInventories" order="15" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable" order="16" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_IncreaseDecreaseInOtherOperatingAssets" order="17" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="mksi_IncreaseDecreaseCurrentAndNonCurrentAccruedCompensation" order="18" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_IncreaseDecreaseInOtherOperatingLiabilities" order="19" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_IncreaseDecreaseInAccountsPayableTrade" order="20" weight="1.00" use="optional"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProfitLoss" xlink:label="us-gaap_ProfitLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired" xlink:label="us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsForRepurchaseOfCommonStock" xlink:label="us-gaap_PaymentsForRepurchaseOfCommonStock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DepreciationAndAmortization" xlink:label="us-gaap_DepreciationAndAmortization"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt" xlink:label="us-gaap_PaymentsToAcquireAvailableForSaleSecuritiesDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProceedsFromBankDebt" xlink:label="us-gaap_ProceedsFromBankDebt"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_AmortizationOfInventoryStepUpToFairValue" xlink:label="mksi_AmortizationOfInventoryStepUpToFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities" xlink:label="us-gaap_ProceedsFromMaturitiesPrepaymentsAndCallsOfAvailableForSaleSecurities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RepaymentsOfDebt" xlink:label="us-gaap_RepaymentsOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GoodwillAndIntangibleAssetImpairment" xlink:label="us-gaap_GoodwillAndIntangibleAssetImpairment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsIncludingDisposalGroupAndDiscontinuedOperations"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RepaymentsOfConvertibleDebt" xlink:label="us-gaap_RepaymentsOfConvertibleDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_UnrealizedGainLossOnDerivatives" xlink:label="us-gaap_UnrealizedGainLossOnDerivatives"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment" xlink:label="us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsOfFinancingCosts" xlink:label="us-gaap_PaymentsOfFinancingCosts"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ProceedsFromPaymentsForEmployeeStockAwards" xlink:label="mksi_ProceedsFromPaymentsForEmployeeStockAwards"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AmortizationOfFinancingCostsAndDiscounts" xlink:label="us-gaap_AmortizationOfFinancingCostsAndDiscounts"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ProceedsFromPaymentsForOtherFinancingActivities" xlink:label="us-gaap_ProceedsFromPaymentsForOtherFinancingActivities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainLossOnSaleOfPropertyPlantEquipment" xlink:label="us-gaap_GainLossOnSaleOfPropertyPlantEquipment"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PaymentsOfDividendsCommonStock" xlink:label="us-gaap_PaymentsOfDividendsCommonStock"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShareBasedCompensation" xlink:label="us-gaap_ShareBasedCompensation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryWriteDown" xlink:label="us-gaap_InventoryWriteDown"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherNoncashIncomeExpense" xlink:label="us-gaap_OtherNoncashIncomeExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:label="us-gaap_IncreaseDecreaseInAccountsReceivable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="us-gaap_IncreaseDecreaseInInventories"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable" xlink:label="us-gaap_IncreaseDecreaseInIncomeTaxesPayableNetOfIncomeTaxesReceivable"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncreaseDecreaseInOtherOperatingAssets" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingAssets"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_IncreaseDecreaseCurrentAndNonCurrentAccruedCompensation" xlink:label="mksi_IncreaseDecreaseCurrentAndNonCurrentAccruedCompensation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncreaseDecreaseInOtherOperatingLiabilities" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingLiabilities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncreaseDecreaseInAccountsPayableTrade" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableTrade"/>
        </link:calculationLink>
        <link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureNetIncomeLossPerShareComputationOfBasicAndDilutedNetIncomeLossPerShareDetail">
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="mksi_WeightedAverageNumberOfDilutedShares" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="mksi_WeightedAverageNumberOfDilutedShares" xlink:to="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" order="1" weight="1.00" use="optional"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_WeightedAverageNumberOfDilutedShares" xlink:label="mksi_WeightedAverageNumberOfDilutedShares"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" xlink:label="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements"/>
        </link:calculationLink>
        <link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureFairValueMeasurementsScheduleOfFairValueOfAssetsAndLiabilitiesMeasuredOnRecurringBasisDetail">
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="mksi_NonCurrentAssetsFairValueDisclosure" xlink:to="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesNoncurrent" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DerivativeLiabilities" xlink:to="us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_AssetsFairValueDisclosure" xlink:to="us-gaap_CashAndCashEquivalentsFairValueDisclosure" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="mksi_CurrentAssetsFairValueDisclosure" xlink:to="us-gaap_CashAndCashEquivalentsFairValueDisclosure" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="mksi_NonCurrentAssetsFairValueDisclosure" xlink:to="mksi_OtherNonCurrentAssetsFairValueDisclosure" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DerivativeLiabilities" xlink:to="mksi_NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_AssetsFairValueDisclosure" xlink:to="us-gaap_DebtSecuritiesAvailableForSaleAndHeldToMaturityAmortizedCostAfterAllowanceForCreditLoss" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="mksi_CurrentAssetsFairValueDisclosure" xlink:to="us-gaap_ShortTermInvestments" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_AssetsFairValueDisclosure" xlink:to="us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue" order="2" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="mksi_CurrentAssetsFairValueDisclosure" xlink:to="mksi_OtherCurrentAssetsFairValueDisclosure" order="2" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_AssetsFairValueDisclosure" xlink:to="us-gaap_ForeignCurrencyContractAssetFairValueDisclosure" order="3" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_AssetsFairValueDisclosure" xlink:to="mksi_NonCurrentInterestRateFairValueHedgeAssetAtFairValue" order="4" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_AssetsFairValueDisclosure" xlink:to="us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent" order="5" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_AssetsFairValueDisclosure" xlink:to="mksi_DeferredCompensationPlanAssetsFairValueDisclosure" order="6" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_AssetsFairValueDisclosure" xlink:to="mksi_CurrentInterestRateFairValueHedgeAssetAtFairValue" order="7" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_AssetsFairValueDisclosure" xlink:to="mksi_PensionAndDeferredCompensationPlanAssets" order="8" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_AssetsFairValueDisclosure" xlink:to="us-gaap_EquitySecuritiesFvNiCurrentAndNoncurrent" order="9" weight="1" use="optional"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NonCurrentAssetsFairValueDisclosure" xlink:label="mksi_NonCurrentAssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AvailableForSaleSecuritiesDebtSecuritiesNoncurrent" xlink:label="us-gaap_AvailableForSaleSecuritiesDebtSecuritiesNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DerivativeLiabilities" xlink:label="us-gaap_DerivativeLiabilities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue" xlink:label="us-gaap_ForeignCurrencyCashFlowHedgeLiabilityAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AssetsFairValueDisclosure" xlink:label="us-gaap_AssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashAndCashEquivalentsFairValueDisclosure" xlink:label="us-gaap_CashAndCashEquivalentsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CurrentAssetsFairValueDisclosure" xlink:label="mksi_CurrentAssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherNonCurrentAssetsFairValueDisclosure" xlink:label="mksi_OtherNonCurrentAssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" xlink:label="mksi_NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DebtSecuritiesAvailableForSaleAndHeldToMaturityAmortizedCostAfterAllowanceForCreditLoss" xlink:label="us-gaap_DebtSecuritiesAvailableForSaleAndHeldToMaturityAmortizedCostAfterAllowanceForCreditLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermInvestments" xlink:label="us-gaap_ShortTermInvestments"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue" xlink:label="us-gaap_ForeignCurrencyCashFlowHedgeAssetAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_OtherCurrentAssetsFairValueDisclosure" xlink:label="mksi_OtherCurrentAssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ForeignCurrencyContractAssetFairValueDisclosure" xlink:label="us-gaap_ForeignCurrencyContractAssetFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_NonCurrentInterestRateFairValueHedgeAssetAtFairValue" xlink:label="mksi_NonCurrentInterestRateFairValueHedgeAssetAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent" xlink:label="us-gaap_DefinedBenefitPlanAssetsForPlanBenefitsNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredCompensationPlanAssetsFairValueDisclosure" xlink:label="mksi_DeferredCompensationPlanAssetsFairValueDisclosure"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_CurrentInterestRateFairValueHedgeAssetAtFairValue" xlink:label="mksi_CurrentInterestRateFairValueHedgeAssetAtFairValue"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_PensionAndDeferredCompensationPlanAssets" xlink:label="mksi_PensionAndDeferredCompensationPlanAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EquitySecuritiesFvNiCurrentAndNoncurrent" xlink:label="us-gaap_EquitySecuritiesFvNiCurrentAndNoncurrent"/>
        </link:calculationLink>
        <link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureInventoriesSummaryOfInventoriesDetail">
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_InventoryNet" xlink:to="us-gaap_InventoryRawMaterialsNetOfReserves" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_InventoryNet" xlink:to="us-gaap_InventoryWorkInProcessNetOfReserves" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_InventoryNet" xlink:to="us-gaap_InventoryFinishedGoodsNetOfReserves" order="2" weight="1.00" use="optional"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryRawMaterialsNetOfReserves" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves"/>
        </link:calculationLink>
        <link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosurePropertyPlantAndEquipmentSummaryOfPropertyPlantAndEquipmentDetail">
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_PropertyPlantAndEquipmentNet" xlink:to="us-gaap_PropertyPlantAndEquipmentGross" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_PropertyPlantAndEquipmentNet" xlink:to="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" order="1" weight="-1.00" use="optional"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="us-gaap_PropertyPlantAndEquipmentGross"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment"/>
        </link:calculationLink>
        <link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureLeasesScheduleOfLeasesDetail">
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_LeaseCost" xlink:to="us-gaap_OperatingLeaseCost" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_LeaseCost" xlink:to="us-gaap_ShortTermLeaseCost" order="2" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_LeaseCost" xlink:to="mksi_FinanceLeaseCosts" order="3" weight="1" use="optional"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LeaseCost" xlink:label="us-gaap_LeaseCost"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseCost" xlink:label="us-gaap_OperatingLeaseCost"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ShortTermLeaseCost" xlink:label="us-gaap_ShortTermLeaseCost"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FinanceLeaseCosts" xlink:label="mksi_FinanceLeaseCosts"/>
        </link:calculationLink>
        <link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureLeasesScheduleOfFutureLeasePaymentsDetail">
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" order="2" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" order="3" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" order="4" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" order="5" weight="1.00" use="optional"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive"/>
        </link:calculationLink>
        <link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureLeasesScheduleOfFutureLeasePaymentsDetail2">
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_OperatingLeaseLiability" order="1" weight="1.00" use="optional"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseLiability" xlink:label="us-gaap_OperatingLeaseLiability"/>
        </link:calculationLink>
        <link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureOtherCurrentLiabilitiesSummaryOfOtherCurrentLiabilitiesDetail">
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OtherLiabilitiesCurrent" xlink:to="us-gaap_EmployeeRelatedLiabilitiesCurrent" order="0" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OtherLiabilitiesCurrent" xlink:to="us-gaap_ContractWithCustomerLiabilityCurrent" order="1" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OtherLiabilitiesCurrent" xlink:to="us-gaap_TaxesPayableCurrent" order="2" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OtherLiabilitiesCurrent" xlink:to="us-gaap_AccruedLiabilitiesCurrent" order="3" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OtherLiabilitiesCurrent" xlink:to="us-gaap_OtherSundryLiabilitiesCurrent" order="5" weight="1" use="optional"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherLiabilitiesCurrent" xlink:label="us-gaap_OtherLiabilitiesCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ContractWithCustomerLiabilityCurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_TaxesPayableCurrent" xlink:label="us-gaap_TaxesPayableCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccruedLiabilitiesCurrent" xlink:label="us-gaap_AccruedLiabilitiesCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherSundryLiabilitiesCurrent" xlink:label="us-gaap_OtherSundryLiabilitiesCurrent"/>
        </link:calculationLink>
        <link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureIncomeTaxesComponentsOfIncomeLossBeforeIncomeTaxesAndRelatedProvisionBenefitForIncomeTaxesDetail">
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefit" xlink:to="us-gaap_CurrentFederalTaxExpenseBenefit" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit" xlink:to="us-gaap_CurrentIncomeTaxExpenseBenefit" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:to="us-gaap_DeferredFederalIncomeTaxExpenseBenefit" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefit" xlink:to="us-gaap_CurrentStateAndLocalTaxExpenseBenefit" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_IncomeTaxExpenseBenefit" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefit" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:to="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit" order="1" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_CurrentIncomeTaxExpenseBenefit" xlink:to="us-gaap_CurrentForeignTaxExpenseBenefit" order="2" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:to="us-gaap_DeferredForeignIncomeTaxExpenseBenefit" order="2" weight="1" use="optional"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesDomestic"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CurrentIncomeTaxExpenseBenefit" xlink:label="us-gaap_CurrentIncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CurrentFederalTaxExpenseBenefit" xlink:label="us-gaap_CurrentFederalTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredFederalIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredFederalIncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesForeign"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CurrentStateAndLocalTaxExpenseBenefit" xlink:label="us-gaap_CurrentStateAndLocalTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredStateAndLocalIncomeTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CurrentForeignTaxExpenseBenefit" xlink:label="us-gaap_CurrentForeignTaxExpenseBenefit"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredForeignIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredForeignIncomeTaxExpenseBenefit"/>
        </link:calculationLink>
        <link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureIncomeTaxesReconciliationOfCompanySEffectiveTaxRateToUSFederalStatutoryRateDetail">
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationAuditSettlementRelatedToIntercompanyTransactions" order="2" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInEnactedTaxRate" order="3" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationIntercompanyRoyalty" order="7" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationSubpartFNetOfForeignTaxCredits" order="8" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxCreditRelatedToWithholdingTaxes" order="9" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseImpairmentLosses" order="10" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCredits" order="11" weight="-1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationBaseErosionWaiverOfDeductions" order="13" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:to="mksi_ForeignSubpartFIncomeTaxedInUSNetOfForeignTaxCredits" order="14" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesNetOfForeignTaxCredits" order="15" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationStateAndLocalIncomeTaxes" order="17" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationForeignIncomeTaxRateDifferential" order="18" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationExecutiveCompensation" order="19" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationGiltiPercent" order="21" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:to="mksi_EffectiveIncomeTaxRateReconciliationChangeInIncomeTaxReserves" order="28" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInDeferredTaxAssetsValuationAllowance" order="31" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationOtherAdjustments" order="34" weight="1.00" use="optional"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateContinuingOperations" xlink:label="us-gaap_EffectiveIncomeTaxRateContinuingOperations"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationAuditSettlementRelatedToIntercompanyTransactions" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationAuditSettlementRelatedToIntercompanyTransactions"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationChangeInEnactedTaxRate" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInEnactedTaxRate"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationIntercompanyRoyalty" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationIntercompanyRoyalty"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationSubpartFNetOfForeignTaxCredits" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationSubpartFNetOfForeignTaxCredits"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationForeignTaxCreditRelatedToWithholdingTaxes" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxCreditRelatedToWithholdingTaxes"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseImpairmentLosses" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationNondeductibleExpenseImpairmentLosses"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationTaxCredits" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationTaxCredits"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationBaseErosionWaiverOfDeductions" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationBaseErosionWaiverOfDeductions"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_ForeignSubpartFIncomeTaxedInUSNetOfForeignTaxCredits" xlink:label="mksi_ForeignSubpartFIncomeTaxedInUSNetOfForeignTaxCredits"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesNetOfForeignTaxCredits" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesNetOfForeignTaxCredits"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationStateAndLocalIncomeTaxes" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationStateAndLocalIncomeTaxes"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationForeignIncomeTaxRateDifferential" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationForeignIncomeTaxRateDifferential"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationExecutiveCompensation" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationExecutiveCompensation"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationGiltiPercent" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationGiltiPercent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_EffectiveIncomeTaxRateReconciliationChangeInIncomeTaxReserves" xlink:label="mksi_EffectiveIncomeTaxRateReconciliationChangeInIncomeTaxReserves"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationChangeInDeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationChangeInDeferredTaxAssetsValuationAllowance"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationOtherAdjustments" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationOtherAdjustments"/>
        </link:calculationLink>
        <link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureIncomeTaxesSignificantComponentsOfDeferredTaxAssetsAndDeferredTaxLiabilitiesDetail">
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsNet" xlink:to="us-gaap_DeferredTaxAssetsGross" order="0" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DeferredIncomeTaxLiabilities" xlink:to="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxLiabilities" xlink:to="us-gaap_DeferredTaxAssetsNet" order="0" weight="-1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsNet" xlink:to="us-gaap_DeferredTaxAssetsValuationAllowance" order="1" weight="-1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DeferredIncomeTaxLiabilities" xlink:to="mksi_DeferredTaxLiabilitiesDepreciationAndAmortization" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsGross" xlink:to="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards" order="1" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxLiabilities" xlink:to="us-gaap_DeferredIncomeTaxLiabilities" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DeferredIncomeTaxLiabilities" xlink:to="mksi_DeferredTaxLiabilitiesLoanCosts" order="2" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DeferredIncomeTaxLiabilities" xlink:to="mksi_DeferredTaxLiabilityRightOfUseAsset" order="3" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsGross" xlink:to="us-gaap_DeferredTaxAssetsTaxCreditCarryforwards" order="3" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DeferredIncomeTaxLiabilities" xlink:to="us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings" order="4" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsGross" xlink:to="us-gaap_DeferredTaxAssetInterestCarryforward" order="4" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsGross" xlink:to="mksi_DeferredTaxAssetsInventoryAndWarrantyReserves" order="5" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsGross" xlink:to="mksi_DeferredTaxAssetsAccruedExpensesAndOtherReserves" order="6" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsGross" xlink:to="mksi_DeferredTaxAssetsDepreciationAndAmortization" order="7" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsGross" xlink:to="mksi_DeferredTaxAssetsCapitalizedResearchExpenditures" order="8" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsGross" xlink:to="mksi_DeferredTaxAssetsLeaseLiability" order="12" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DeferredTaxAssetsGross" xlink:to="us-gaap_DeferredTaxAssetsOther" order="14" weight="1.00" use="optional"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxAssetsNet" xlink:label="us-gaap_DeferredTaxAssetsNet"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxAssetsGross" xlink:label="us-gaap_DeferredTaxAssetsGross"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredIncomeTaxLiabilities" xlink:label="us-gaap_DeferredIncomeTaxLiabilities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets" xlink:label="us-gaap_DeferredTaxLiabilitiesGoodwillAndIntangibleAssetsIntangibleAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxLiabilities" xlink:label="us-gaap_DeferredTaxLiabilities"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxLiabilitiesDepreciationAndAmortization" xlink:label="mksi_DeferredTaxLiabilitiesDepreciationAndAmortization"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxAssetsOperatingLossCarryforwards" xlink:label="us-gaap_DeferredTaxAssetsOperatingLossCarryforwards"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxLiabilitiesLoanCosts" xlink:label="mksi_DeferredTaxLiabilitiesLoanCosts"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxLiabilityRightOfUseAsset" xlink:label="mksi_DeferredTaxLiabilityRightOfUseAsset"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxAssetsTaxCreditCarryforwards" xlink:label="us-gaap_DeferredTaxAssetsTaxCreditCarryforwards"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings" xlink:label="us-gaap_DeferredTaxLiabilitiesUndistributedForeignEarnings"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxAssetInterestCarryforward" xlink:label="us-gaap_DeferredTaxAssetInterestCarryforward"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxAssetsInventoryAndWarrantyReserves" xlink:label="mksi_DeferredTaxAssetsInventoryAndWarrantyReserves"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxAssetsAccruedExpensesAndOtherReserves" xlink:label="mksi_DeferredTaxAssetsAccruedExpensesAndOtherReserves"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxAssetsDepreciationAndAmortization" xlink:label="mksi_DeferredTaxAssetsDepreciationAndAmortization"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxAssetsCapitalizedResearchExpenditures" xlink:label="mksi_DeferredTaxAssetsCapitalizedResearchExpenditures"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DeferredTaxAssetsLeaseLiability" xlink:label="mksi_DeferredTaxAssetsLeaseLiability"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DeferredTaxAssetsOther" xlink:label="us-gaap_DeferredTaxAssetsOther"/>
        </link:calculationLink>
        <link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansSummaryOfNetPeriodicBenefitCostsDetail">
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCost" xlink:to="us-gaap_DefinedBenefitPlanServiceCost" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCost" xlink:to="us-gaap_DefinedBenefitPlanInterestCost" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCost" xlink:to="us-gaap_DefinedBenefitPlanExpectedReturnOnPlanAssets" order="2" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCost" xlink:to="mksi_DefinedBenefitPlanAmortizationOfActuarialGainLoss" order="3" weight="1.00" use="optional"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanNetPeriodicBenefitCost" xlink:label="us-gaap_DefinedBenefitPlanNetPeriodicBenefitCost"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanServiceCost" xlink:label="us-gaap_DefinedBenefitPlanServiceCost"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanInterestCost" xlink:label="us-gaap_DefinedBenefitPlanInterestCost"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanExpectedReturnOnPlanAssets" xlink:label="us-gaap_DefinedBenefitPlanExpectedReturnOnPlanAssets"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanAmortizationOfActuarialGainLoss" xlink:label="mksi_DefinedBenefitPlanAmortizationOfActuarialGainLoss"/>
        </link:calculationLink>
        <link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/Role_DisclosureEmployeeBenefitPlansSummaryOfEstimatedBenefitPaymentsForDefinedBenefitPlansForNext10YearsDetail">
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears" xlink:to="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsNextTwelveMonths" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears" xlink:to="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearTwo" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears" xlink:to="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearThree" order="2" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears" xlink:to="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFour" order="3" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears" xlink:to="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFive" order="4" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears" xlink:to="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearSixToTen" order="5" weight="1.00" use="optional"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears" xlink:label="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsNextTwelveMonths" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsNextTwelveMonths"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearTwo" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearTwo"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearThree" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearThree"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFour" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFour"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFive" xlink:label="us-gaap_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearFive"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearSixToTen" xlink:label="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearSixToTen"/>
        </link:calculationLink>
        <link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationScheduleOfReconcilesGrossProfitByReportableSegment">
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_OperatingIncomeLoss" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_InterestAndOtherIncome" order="1" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_ResearchAndDevelopmentExpense" order="1" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_InterestExpense" order="2" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_SellingGeneralAndAdministrativeExpense" order="2" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_GainsLossesOnExtinguishmentOfDebt" order="3" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="mksi_BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts" order="3" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_NonoperatingIncomeExpense" order="4" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan" order="5" weight="-1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_RestructuringCharges" order="6" weight="-1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="mksi_FeesAndExpensesRelatedToRepricingOfTermLoanFacility" order="8" weight="-1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_AmortizationOfIntangibleAssets" order="9" weight="-1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="mksi_UnallocatedCorporateExpenses" order="13" weight="-1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_GainLossOnSaleOfPropertyPlantEquipment" order="16" weight="1.00" use="optional"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingIncomeLoss" xlink:label="us-gaap_OperatingIncomeLoss"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestAndOtherIncome" xlink:label="us-gaap_InterestAndOtherIncome"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="us-gaap_ResearchAndDevelopmentExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_SellingGeneralAndAdministrativeExpense" xlink:label="us-gaap_SellingGeneralAndAdministrativeExpense"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainsLossesOnExtinguishmentOfDebt" xlink:label="us-gaap_GainsLossesOnExtinguishmentOfDebt"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts" xlink:label="mksi_BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_NonoperatingIncomeExpense" xlink:label="us-gaap_NonoperatingIncomeExpense"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan" xlink:label="mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_RestructuringCharges" xlink:label="us-gaap_RestructuringCharges"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_FeesAndExpensesRelatedToRepricingOfTermLoanFacility" xlink:label="mksi_FeesAndExpensesRelatedToRepricingOfTermLoanFacility"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AmortizationOfIntangibleAssets" xlink:label="us-gaap_AmortizationOfIntangibleAssets"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_UnallocatedCorporateExpenses" xlink:label="mksi_UnallocatedCorporateExpenses"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_GainLossOnSaleOfPropertyPlantEquipment" xlink:label="us-gaap_GainLossOnSaleOfPropertyPlantEquipment"/>
        </link:calculationLink>
        <link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationSegmentAssetsByReportableSegmentDetail">
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="mksi_SegmentAssets" xlink:to="us-gaap_AccountsReceivableNetCurrent" order="0" weight="1.00" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="mksi_SegmentAssets" xlink:to="us-gaap_InventoryNet" order="1" weight="1.00" use="optional"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SegmentAssets" xlink:label="mksi_SegmentAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="us-gaap_AccountsReceivableNetCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet"/>
        </link:calculationLink>
        <link:calculationLink xlink:type="extended" xlink:role="http://www.mksinst.com/20251231/taxonomy/role/DisclosureBusinessSegmentGeographicAreaProductInformationAndSignificantCustomerInformationReconcilesTotalSegmentAssetsToTotalAssetsDetail">
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_OtherAssetsNoncurrent" order="0" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="mksi_SegmentAssets" order="1" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_IntangibleAssetsNetIncludingGoodwill" order="2" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" order="3" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_OtherAssetsCurrent" order="4" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset" order="5" weight="1" use="optional"/>
          <link:calculationArc xlink:type="arc" xlink:arcrole="https://xbrl.org/2023/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_PropertyPlantAndEquipmentNet" order="6" weight="1" use="optional"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_Assets" xlink:label="us-gaap_Assets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="us-gaap_OtherAssetsNoncurrent"/>
          <link:loc xlink:type="locator" xlink:href="mksi-20251231.xsd#mksi_SegmentAssets" xlink:label="mksi_SegmentAssets"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_IntangibleAssetsNetIncludingGoodwill" xlink:label="us-gaap_IntangibleAssetsNetIncludingGoodwill"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OtherAssetsCurrent" xlink:label="us-gaap_OtherAssetsCurrent"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset"/>
          <link:loc xlink:type="locator" xlink:href="https://xbrl.fasb.org/us-gaap/2025/elts/us-gaap-2025.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet"/>
        </link:calculationLink>
      </link:linkbase>
    </xsd:appinfo>
  </xsd:annotation>
  <xsd:element id="mksi_ScheduleOfFutureLeasePaymentsUnderNonCancelableLeasesTableTextBlock" name="ScheduleOfFutureLeasePaymentsUnderNonCancelableLeasesTableTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_ReductionToInterestExpense" name="ReductionToInterestExpense" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_InsuranceReimbursementReceived" name="InsuranceReimbursementReceived" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_DebtInstrumentConvertibleConversionPricePercentage" name="DebtInstrumentConvertibleConversionPricePercentage" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" name="NonCurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsSharesFromAcquisition" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsSharesFromAcquisition" type="xbrli:sharesItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_AtotechLimitedMember" name="AtotechLimitedMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_OtherInterestIncomeExpenseNet" name="OtherInterestIncomeExpenseNet" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_IncomeTaxDisclosureTable" name="IncomeTaxDisclosureTable" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_OtherCurrentLiabilitiesTextBlock" name="OtherCurrentLiabilitiesTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_EstimatedAggregatePrincipalAmountPercentage" name="EstimatedAggregatePrincipalAmountPercentage" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_CashPaidDuringPeriodForInterestAndIncomeTaxAbstract" name="CashPaidDuringPeriodForInterestAndIncomeTaxAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_IncrementalTrancheBLoansSecondAmendmentMember" name="IncrementalTrancheBLoansSecondAmendmentMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_EuriborRateFloorMember" name="EuriborRateFloorMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_NumberOfCustomersAccountedForGreaterThanOrEqualToTenPercentOfRevenue" name="NumberOfCustomersAccountedForGreaterThanOrEqualToTenPercentOfRevenue" type="xbrli:integerItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_ChangeInContractWithCustomerLiabilityTable" name="ChangeInContractWithCustomerLiabilityTable" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoInterestExpense" name="DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoInterestExpense" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_BalanceSheetHedgesMember" name="BalanceSheetHedgesMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_LevelOfPerformanceTargetAchievedPercentage" name="LevelOfPerformanceTargetAchievedPercentage" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_DebtInstrumentConversionRateShares" name="DebtInstrumentConversionRateShares" type="xbrli:sharesItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_UnrecognizedTaxBenefitsIncreaseDecreaseResultingFromPriorPeriodTaxPositions" name="UnrecognizedTaxBenefitsIncreaseDecreaseResultingFromPriorPeriodTaxPositions" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_CommonStockExercisePrice" name="CommonStockExercisePrice" type="dtr-types:perShareItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_OriginalIssueDiscountMember" name="OriginalIssueDiscountMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_PhotonicsSolutionsDivisionMember" name="PhotonicsSolutionsDivisionMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_StateMember" name="StateMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_NumberOfCustomersAccountedForThirtyPercentFortyTwoPercentAndFourtySixPercentOfRevenue" name="NumberOfCustomersAccountedForThirtyPercentFortyTwoPercentAndFourtySixPercentOfRevenue" type="xbrli:integerItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_WeightedAverageRevenueGrowthRateFutureUndiscountedCashFlows" name="WeightedAverageRevenueGrowthRateFutureUndiscountedCashFlows" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_OfferTerminateMember" name="OfferTerminateMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_NumberOfCustomersAccountedForTenPercentOrMoreOfNetRevenue" name="NumberOfCustomersAccountedForTenPercentOrMoreOfNetRevenue" type="xbrli:integerItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsYearSixToTen" name="DefinedBenefitPlanExpectedFutureBenefitPaymentsYearSixToTen" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxCreditRelatedToWithholdingTaxes" name="EffectiveIncomeTaxRateReconciliationForeignTaxCreditRelatedToWithholdingTaxes" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_SemiconductorProductsMember" name="SemiconductorProductsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_IncomeTaxesDisclosureAbstract" name="IncomeTaxesDisclosureAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_DefinedBenefitPlanAmortizationOfActuarialGainLoss" name="DefinedBenefitPlanAmortizationOfActuarialGainLoss" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_FederalStateAndForeignMember" name="FederalStateAndForeignMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_ComponentsOfCashPaidNetOfRefundsReceivedForIncomeTaxesTableTextBlock" name="ComponentsOfCashPaidNetOfRefundsReceivedForIncomeTaxesTableTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_NewTermLoanFacilityMember" name="NewTermLoanFacilityMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_PrepaymentPremiumPercentageOfAggregatePrincipalAmount" name="PrepaymentPremiumPercentageOfAggregatePrincipalAmount" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_UsdTrancheBFirstAmmendmentMember" name="UsdTrancheBFirstAmmendmentMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_FederalInterestCarryForwards" name="FederalInterestCarryForwards" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_CorporateReconcilingItemsAndEliminationsMember" name="CorporateReconcilingItemsAndEliminationsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_TotalIncomeTaxPaymentsNetOfRefunds" name="TotalIncomeTaxPaymentsNetOfRefunds" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false"/>
  <xsd:element id="mksi_OtherCurrentLiabilitiesFairValueDisclosure" name="OtherCurrentLiabilitiesFairValueDisclosure" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_DebtIssuanceCostsAmortizationPeriod" name="DebtIssuanceCostsAmortizationPeriod" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_SixthAmendmentMember" name="SixthAmendmentMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardVestingPeriodDescription" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardVestingPeriodDescription" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_DeferredTaxLiabilityRightOfUseAsset" name="DeferredTaxLiabilityRightOfUseAsset" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_DeferredTaxAssetsDepreciationAndAmortization" name="DeferredTaxAssetsDepreciationAndAmortization" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_TermLoansUnderTermLoanFacilityMember" name="TermLoansUnderTermLoanFacilityMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_OtherCurrentAssetsFairValueDisclosure" name="OtherCurrentAssetsFairValueDisclosure" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_InProcessResearchAndDevelopmentReclassifiedIntoCompletedTechnology" name="InProcessResearchAndDevelopmentReclassifiedIntoCompletedTechnology" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_IncrementalUsdTrancheBMember" name="IncrementalUsdTrancheBMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_ForeignMember" name="ForeignMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_TaxCreditCarryForwardExpirationYearEnd" name="TaxCreditCarryForwardExpirationYearEnd" type="xbrli:gYearItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_IncrementalTrancheBLoansFourthAmendmentMember" name="IncrementalTrancheBLoansFourthAmendmentMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_LineOfCreditFacilityMinimumAdditionalBorrowingCapacity" name="LineOfCreditFacilityMinimumAdditionalBorrowingCapacity" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_SummaryOfWeightedAverageRemainingTermsForAllLeasesTableTextBlock" name="SummaryOfWeightedAverageRemainingTermsForAllLeasesTableTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_IncreaseDecreaseCurrentAndNonCurrentAccruedCompensation" name="IncreaseDecreaseCurrentAndNonCurrentAccruedCompensation" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_SupplementalRetirementBenefitsCost" name="SupplementalRetirementBenefitsCost" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_EquipmentSolutionsBusinessMember" name="EquipmentSolutionsBusinessMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_CurrentInterestRateFairValueHedgeAssetAtFairValue" name="CurrentInterestRateFairValueHedgeAssetAtFairValue" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_NumberOfFacilitiesYetToClose" name="NumberOfFacilitiesYetToClose" type="xbrli:integerItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_EmployeePerformanceAwardBonusExpense" name="EmployeePerformanceAwardBonusExpense" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_AmortizationPeriodOfLeaseholdImprovements" name="AmortizationPeriodOfLeaseholdImprovements" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_UnallocatedCorporateExpenses" name="UnallocatedCorporateExpenses" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_LoanVoluntaryPrepaymentAmount" name="LoanVoluntaryPrepaymentAmount" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_IncomeTaxReconciliationRealizedForeignExchangeGainLoss" name="IncomeTaxReconciliationRealizedForeignExchangeGainLoss" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_IntangibleAssetsUsefulLifeFutureUndiscountedCashFlows" name="IntangibleAssetsUsefulLifeFutureUndiscountedCashFlows" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_RestructuringExpense" name="RestructuringExpense" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_ScheduleOfSignificantAccountingPoliciesLineItems" name="ScheduleOfSignificantAccountingPoliciesLineItems" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_PaymentsAndAdjustmentForRestructuring" name="PaymentsAndAdjustmentForRestructuring" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_EffectiveIncomeTaxRateReconciliationBaseErosionWaiverOfDeductions" name="EffectiveIncomeTaxRateReconciliationBaseErosionWaiverOfDeductions" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_LineOfCreditFacilityRenewalPeriod" name="LineOfCreditFacilityRenewalPeriod" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_ContractWithCustomerLiabilityAdditions" name="ContractWithCustomerLiabilityAdditions" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_NumberOfCustomersAccountedForElevenPercentOfNetRevenue" name="NumberOfCustomersAccountedForElevenPercentOfNetRevenue" type="xbrli:integerItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_DeferredFinancingCostsInLongTermDebt" name="DeferredFinancingCostsInLongTermDebt" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeitedWeightedAverageGrantDateFairValue" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeitedWeightedAverageGrantDateFairValue" type="dtr-types:perShareItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_NumberOfCustomersAccountedForFortySevenPercentFortyFourPercentAndThirtyThreePercentOfRevenue" name="NumberOfCustomersAccountedForFortySevenPercentFortyFourPercentAndThirtyThreePercentOfRevenue" type="xbrli:integerItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_EffectiveIncomeTaxRateReconciliationExecutiveCompensation" name="EffectiveIncomeTaxRateReconciliationExecutiveCompensation" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_PaymentsForCostOfCappedCallTransactions" name="PaymentsForCostOfCappedCallTransactions" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_TimeDepositsAndCertificatesOfDepositMember" name="TimeDepositsAndCertificatesOfDepositMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_IncrementalBorrowings" name="IncrementalBorrowings" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_NumberOfCustomersAccountedForNinetyPercentOfRevenue" name="NumberOfCustomersAccountedForNinetyPercentOfRevenue" type="xbrli:integerItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_ContractWithCustomerAssumedDeferredRevenueAndCustomerAdvances" name="ContractWithCustomerAssumedDeferredRevenueAndCustomerAdvances" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodPercentageExercisePrice" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodPercentageExercisePrice" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_DiscountRateFutureUndiscountedCashFlows" name="DiscountRateFutureUndiscountedCashFlows" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_FeesAndExpensesRelatedToRepricingOfTermLoanFacility" name="FeesAndExpensesRelatedToRepricingOfTermLoanFacility" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_CompletedTechnologyMember" name="CompletedTechnologyMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsShareFromAcquisitionWeightedAverageGrantDateFairValue" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsShareFromAcquisitionWeightedAverageGrantDateFairValue" type="dtr-types:perShareItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_EffectiveIncomeTaxRateReconciliationChangeInIncomeTaxReserves" name="EffectiveIncomeTaxRateReconciliationChangeInIncomeTaxReserves" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_NumberOfCustomersAccountedForFifteenPercentOfRevenue" name="NumberOfCustomersAccountedForFifteenPercentOfRevenue" type="xbrli:integerItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_NumberOfCustomersAccountedForThirtyTwoPercentThirtyPercentAndFortyTwoPercentOfRevenue" name="NumberOfCustomersAccountedForThirtyTwoPercentThirtyPercentAndFortyTwoPercentOfRevenue" type="xbrli:integerItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_ComponentsOfCashPaidForTaxesTableTextBlock" name="ComponentsOfCashPaidForTaxesTableTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_MinimumPercentageOfRecognizedTaxBenefitsFromUncertainTaxPosition" name="MinimumPercentageOfRecognizedTaxBenefitsFromUncertainTaxPosition" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_ScheduledQuarterlyPaymentsPercentageOfOriginalPrincipalAmount" name="ScheduledQuarterlyPaymentsPercentageOfOriginalPrincipalAmount" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_OperatingLossCarryforwardsExpiringTwoThousandThirtyNineMember" name="OperatingLossCarryforwardsExpiringTwoThousandThirtyNineMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_OtherComprehensiveIncomeLossNetInvestmentHedgeGainLossNetOfTax" name="OtherComprehensiveIncomeLossNetInvestmentHedgeGainLossNetOfTax" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_EarningsPerShareLineItems" name="EarningsPerShareLineItems" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_VacuumSolutionsDivisionMember" name="VacuumSolutionsDivisionMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_UnrecognizedTaxBenefitsOffsetAgainstRestructuringReserves" name="UnrecognizedTaxBenefitsOffsetAgainstRestructuringReserves" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_OperatingLossCarryforwardsExpiringTwoThousandSeventeenMember" name="OperatingLossCarryforwardsExpiringTwoThousandSeventeenMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_EffectiveIncomeTaxRateReconciliationSubpartFNetOfForeignTaxCredits" name="EffectiveIncomeTaxRateReconciliationSubpartFNetOfForeignTaxCredits" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_AtotechMember" name="AtotechMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_IsraeliPensionAssetsMember" name="IsraeliPensionAssetsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_ScheduleOfSignificantAccountingPoliciesTable" name="ScheduleOfSignificantAccountingPoliciesTable" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_GeneralMetalFinishingMember" name="GeneralMetalFinishingMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_WeightedAverageNumberOfDilutedShares" name="WeightedAverageNumberOfDilutedShares" type="xbrli:sharesItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_NumberOfConsecutiveTradingDays" name="NumberOfConsecutiveTradingDays" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_MaterialsSolutionsDivisionMember" name="MaterialsSolutionsDivisionMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_IndefiniteMember" name="IndefiniteMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_PensionAndDeferredCompensationPlanAssets" name="PensionAndDeferredCompensationPlanAssets" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" name="DebtInstrumentPrincipalAmountDenominationForConversionIntoCommonStock" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_OtherNonCurrentAssetsFairValueDisclosure" name="OtherNonCurrentAssetsFairValueDisclosure" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_IndentureAndTheNotesMember" name="IndentureAndTheNotesMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_NumberOfSharesReturnedForEachShareOfCommonStock" name="NumberOfSharesReturnedForEachShareOfCommonStock" type="xbrli:sharesItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_ConvertibleSeniorNotesDue2030Member" name="ConvertibleSeniorNotesDue2030Member" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfAccountsReceivable" name="NumberOfCustomersAccountedForTenOrMorePercentOfAccountsReceivable" type="xbrli:integerItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_EffectiveIncomeTaxRateReconciliationIntercompanyRoyalty" name="EffectiveIncomeTaxRateReconciliationIntercompanyRoyalty" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_IncomeTaxDisclosureLineItems" name="IncomeTaxDisclosureLineItems" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_TermLoanMember" name="TermLoanMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_EffectiveIncomeTaxRateReconciliationRealizedForeignExchangeGainLoss" name="EffectiveIncomeTaxRateReconciliationRealizedForeignExchangeGainLoss" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_IncomeTaxesLineItems" name="IncomeTaxesLineItems" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_O2025Q1DividendsMember" name="O2025Q1DividendsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_BorrowingsUnderNewRevolvingFacilityMember" name="BorrowingsUnderNewRevolvingFacilityMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_ProceedsFromPaymentsForEmployeeStockAwards" name="ProceedsFromPaymentsForEmployeeStockAwards" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_AnnualStepDownMember" name="AnnualStepDownMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_DefinedBenefitPlanAssetCategoriesOtherAssetsMember" name="DefinedBenefitPlanAssetCategoriesOtherAssetsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_BorrowingsUnderRevolvingFacilityMember" name="BorrowingsUnderRevolvingFacilityMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_EmployeeStockPurchasePlanMember" name="EmployeeStockPurchasePlanMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_RevenueRecognitionPaymentTerms" name="RevenueRecognitionPaymentTerms" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_NewportCorporationMember" name="NewportCorporationMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_ExpenseOfRestructuringActivitiesAndOtherTextBlock" name="ExpenseOfRestructuringActivitiesAndOtherTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_CostToPurchaseCappedCallTransactions" name="CostToPurchaseCappedCallTransactions" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_DerivativeAndHedgingTable" name="DerivativeAndHedgingTable" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_ReductionInInterestExpense" name="ReductionInInterestExpense" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_DeferredRevenueMember" name="DeferredRevenueMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_ScheduleOfGoodwillAssociatedWithReportableSegmentsTableTextBlock" name="ScheduleOfGoodwillAssociatedWithReportableSegmentsTableTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_TopTenCustomersMember" name="TopTenCustomersMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_PhotonControlMember" name="PhotonControlMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_CashAndCashEquivalentsAndInvestmentsPolicyTextBlock" name="CashAndCashEquivalentsAndInvestmentsPolicyTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoCostOfRevenues" name="DerivativeInstrumentsGainLossReclassifiedFromAccumulatedOciIntoCostOfRevenues" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_RestrictedStockUnitsGrantedToEmployeesMember" name="RestrictedStockUnitsGrantedToEmployeesMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_PercentageOfAggregateAmountOfAllCommitments" name="PercentageOfAggregateAmountOfAllCommitments" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_IncrementalRevolvingCommitmentsMember" name="IncrementalRevolvingCommitmentsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_ForeignSubpartFIncomeTaxedInUSNetOfForeignTaxCredits" name="ForeignSubpartFIncomeTaxedInUSNetOfForeignTaxCredits" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_InitialCommitmentFeePercentage" name="InitialCommitmentFeePercentage" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_TermLoanFacilityMember" name="TermLoanFacilityMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_EffectiveIncomeTaxRateReconciliationAuditSettlementRelatedToIntercompanyTransactions" name="EffectiveIncomeTaxRateReconciliationAuditSettlementRelatedToIntercompanyTransactions" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_StockExercisePriceAsPercentageOfClosingMarketPrice" name="StockExercisePriceAsPercentageOfClosingMarketPrice" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendPerShare" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendPerShare" type="dtr-types:perShareItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_FurnitureAndFixturesOfficeEquipmentAndSoftwareMember" name="FurnitureAndFixturesOfficeEquipmentAndSoftwareMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_OtherCountriesMember" name="OtherCountriesMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_IncomeTaxReconciliationAuditSettlementRelatedToIntercompanyTransactions" name="IncomeTaxReconciliationAuditSettlementRelatedToIntercompanyTransactions" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdiction" name="IncomeTaxReconciliationForeignTaxEffectsOtherJurisdiction" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_UsdTrancheAMember" name="UsdTrancheAMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_CustomerAdvancesMember" name="CustomerAdvancesMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_RestrictedStockUnitsGrantedToDirectorsMember" name="RestrictedStockUnitsGrantedToDirectorsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_ExpenseOfRestructuringActivitiesAndOtherAbstract" name="ExpenseOfRestructuringActivitiesAndOtherAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_AmortizationOfInventoryStepUpToFairValue" name="AmortizationOfInventoryStepUpToFairValue" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_DebtInstrumentIssuedPrincipalOptionToPurchase" name="DebtInstrumentIssuedPrincipalOptionToPurchase" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_MaximumPeriodOfCompanysResearchAndDevelopmentProjects" name="MaximumPeriodOfCompanysResearchAndDevelopmentProjects" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_BorrowingsUnderEuroTrancheBMember" name="BorrowingsUnderEuroTrancheBMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_NonCurrentAssetsFairValueDisclosure" name="NonCurrentAssetsFairValueDisclosure" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_ChangeInContractWithCustomerLiabilityLineItems" name="ChangeInContractWithCustomerLiabilityLineItems" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_DefinedContributionPlanMinimumAnnualContributionsPerEmployeePercent" name="DefinedContributionPlanMinimumAnnualContributionsPerEmployeePercent" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_UsdTrancheBMember" name="UsdTrancheBMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesAmount" name="EffectiveIncomeTaxRateReconciliationWithholdingTaxesAmount" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareDiluted" name="AllocatedShareBasedCompensationEffectOnEarningPerShareDiluted" type="dtr-types:perShareItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_GoodwillAndIntangibleAssetsLineItems" name="GoodwillAndIntangibleAssetsLineItems" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_CumulativeInflationRates" name="CumulativeInflationRates" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_FederalFundsRateMember" name="FederalFundsRateMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_DefinedBenefitPlanAssetsForPlanBenefitsGuaranteedRateOfReturn" name="DefinedBenefitPlanAssetsForPlanBenefitsGuaranteedRateOfReturn" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false"/>
  <xsd:element id="mksi_NonCurrentInterestRateFairValueHedgeAssetAtFairValue" name="NonCurrentInterestRateFairValueHedgeAssetAtFairValue" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_CompletedTechnologyRightsMember" name="CompletedTechnologyRightsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_AccountingStandardsUpdated201409Member" name="AccountingStandardsUpdated201409Member" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_OneCustomerMember" name="OneCustomerMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeited" name="ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedAndForfeited" type="xbrli:sharesItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_StockIncentivePlanTwoThousandTwentyTwoMember" name="StockIncentivePlanTwoThousandTwentyTwoMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_TermSofrBorrowingsMember" name="TermSofrBorrowingsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_EuroTrancheBMember" name="EuroTrancheBMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_MinimumPercentageOfEarningsBeforeInterestTaxesDepreciationAndAmortization" name="MinimumPercentageOfEarningsBeforeInterestTaxesDepreciationAndAmortization" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_Year5Member" name="Year5Member" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_NewRevolvingFacilityMember" name="NewRevolvingFacilityMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_TermLoansUnderNewTermLoanFacilityMember" name="TermLoansUnderNewTermLoanFacilityMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_FeesAndExpensesRelatedToAmendmentsToTermLoan" name="FeesAndExpensesRelatedToAmendmentsToTermLoan" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_StepUpMember" name="StepUpMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_SegmentGrossProfitPercentage" name="SegmentGrossProfitPercentage" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_SegmentAssets" name="SegmentAssets" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_O2026Q1DividendsMember" name="O2026Q1DividendsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts" name="BusinessCombinationIntegrationReversalOfAcquisitionAndIntegrationCosts" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_RepurchaseOfDebtPercentage" name="RepurchaseOfDebtPercentage" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_TermSofrRatePlusApplicableCreditSpreadAdjustmentMember" name="TermSofrRatePlusApplicableCreditSpreadAdjustmentMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_AccountsReceivableAllowancesPolicyTextBlock" name="AccountsReceivableAllowancesPolicyTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_IntangibleAssetsFairValue" name="IntangibleAssetsFairValue" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears" name="DefinedBenefitPlanExpectedFutureBenefitPaymentsForNextTenYears" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_DeferredTaxLiabilitiesDepreciationAndAmortization" name="DeferredTaxLiabilitiesDepreciationAndAmortization" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_SupplementalRetirementBenefitsAccumulatedBenefitObligationNoncurrent" name="SupplementalRetirementBenefitsAccumulatedBenefitObligationNoncurrent" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_DeferredTaxAssetsInventoryAndWarrantyReserves" name="DeferredTaxAssetsInventoryAndWarrantyReserves" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_IncomeTaxReconciliationSubpartFNetOfForeignTaxCredits" name="IncomeTaxReconciliationSubpartFNetOfForeignTaxCredits" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_FirstLienNetLeverageRatioMember" name="FirstLienNetLeverageRatioMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_OtherReportingUnitsMember" name="OtherReportingUnitsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_DefinedBenefitPlanPensionPlanChangeInBenefitObligationAbstract" name="DefinedBenefitPlanPensionPlanChangeInBenefitObligationAbstract" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_WarrantyPeriod" name="WarrantyPeriod" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_DeferredTaxAssetsAccruedExpensesAndOtherReserves" name="DeferredTaxAssetsAccruedExpensesAndOtherReserves" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_ZeroCustomerMember" name="ZeroCustomerMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_DeferredCompensationPlanAssetsFairValueDisclosure" name="DeferredCompensationPlanAssetsFairValueDisclosure" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_OtherNonCurrentLiabilitiesFairValueDisclosure" name="OtherNonCurrentLiabilitiesFairValueDisclosure" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_CurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" name="CurrentInterestRateFairValueHedgeLiabilitiesAtFairValue" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_ScheduleOfEarningsPerShareTable" name="ScheduleOfEarningsPerShareTable" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_Time-BasedRSUMember" name="Time-BasedRSUMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_SemiconductorMember" name="SemiconductorMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_NumberOfCustomersAccountedForTenPercentOfNetRevenue" name="NumberOfCustomersAccountedForTenPercentOfNetRevenue" type="xbrli:integerItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_MeasurementPeriodMember" name="MeasurementPeriodMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_SegmentGrossProfitLoss" name="SegmentGrossProfitLoss" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_SignificantSupplyCommitmentTimePeriod" name="SignificantSupplyCommitmentTimePeriod" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_PriorTermLoanFacilityMember" name="PriorTermLoanFacilityMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_GoodwillAndIntangibleAssetsTable" name="GoodwillAndIntangibleAssetsTable" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_AMICIncreases" name="AMICIncreases" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_MaximumPercentageOfPayrollForPurchaseOfStock" name="MaximumPercentageOfPayrollForPurchaseOfStock" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_InterestRateHegesMember" name="InterestRateHegesMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_DebtInstrumentPremiumPercentage" name="DebtInstrumentPremiumPercentage" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_EffectiveIncomeTaxRateReconciliationForeignTaxEffectsOtherJurisdictions" name="EffectiveIncomeTaxRateReconciliationForeignTaxEffectsOtherJurisdictions" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_EffectiveIncomeTaxRateReconciliationWithholdingTaxesNetOfForeignTaxCredits" name="EffectiveIncomeTaxRateReconciliationWithholdingTaxesNetOfForeignTaxCredits" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_IncomeTaxReconciliationForeignTaxEffectsOtherJurisdictions" name="IncomeTaxReconciliationForeignTaxEffectsOtherJurisdictions" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_DeferredTaxLiabilitiesLoanCosts" name="DeferredTaxLiabilitiesLoanCosts" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_ScheduleOfRestructuringAndOtherCostTable" name="ScheduleOfRestructuringAndOtherCostTable" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_DeferredTaxAssetsCapitalizedResearchExpenditures" name="DeferredTaxAssetsCapitalizedResearchExpenditures" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_DefinedBenefitPlanAssetsForPlanBenefitsPercentage" name="DefinedBenefitPlanAssetsForPlanBenefitsPercentage" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false"/>
  <xsd:element id="mksi_DebtInstrumentConvertibleApplicableConversionPrice" name="DebtInstrumentConvertibleApplicableConversionPrice" type="dtr-types:perShareItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false"/>
  <xsd:element id="mksi_NumberOfCustomersAccountedForTenOrMorePercentOfRevenue" name="NumberOfCustomersAccountedForTenOrMorePercentOfRevenue" type="xbrli:integerItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_SeniorNotesDue2034Member" name="SeniorNotesDue2034Member" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_FinanceLeaseCosts" name="FinanceLeaseCosts" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_SeparatelyPricedContractsTerm" name="SeparatelyPricedContractsTerm" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_MinimumPercentageOfIncomeTaxPaymentNetOfRefundsReceived" name="MinimumPercentageOfIncomeTaxPaymentNetOfRefundsReceived" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_GroupInsuranceContractsMember" name="GroupInsuranceContractsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_EuroTrancheMember" name="EuroTrancheMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_ElectronicsMember" name="ElectronicsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_DefinedBenefitPlanVestedBenefitObligation" name="DefinedBenefitPlanVestedBenefitObligation" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_USFederalMember" name="USFederalMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_IncomeTaxesTableTable" name="IncomeTaxesTableTable" type="xbrli:stringItemType" substitutionGroup="xbrldt:hypercubeItem" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_ContractWithCustomerAmountOfDeferredRevenueAndCustomerAdvancesRecognized" name="ContractWithCustomerAmountOfDeferredRevenueAndCustomerAdvancesRecognized" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_AccumulatedOtherComprehensiveIncomeLossChangeInNetInvestmentHedgeMember" name="AccumulatedOtherComprehensiveIncomeLossChangeInNetInvestmentHedgeMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_BaseRateBorrowingsMember" name="BaseRateBorrowingsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_MutualFundsAndExchangeTradedFundsMember" name="MutualFundsAndExchangeTradedFundsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_NumberOfCustomersAccountedForFourteenPercentOfRevenue" name="NumberOfCustomersAccountedForFourteenPercentOfRevenue" type="xbrli:integerItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_ScheduleOfCapitalExpenditureDepreciationAndAmortizationAndAssetsReportableSegmentsTableTextBlock" name="ScheduleOfCapitalExpenditureDepreciationAndAmortizationAndAssetsReportableSegmentsTableTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_TwoThousandFourteenEmployeeStockPurchasePlanMember" name="TwoThousandFourteenEmployeeStockPurchasePlanMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_MinimumAgeLimitForSpecifiedAdditionalAmount" name="MinimumAgeLimitForSpecifiedAdditionalAmount" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_OriginalIssueDiscountPercentageOfPrincipalAmount" name="OriginalIssueDiscountPercentageOfPrincipalAmount" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_TaxBenefitRelatedToHistoricalOutsideBasisDifferences" name="TaxBenefitRelatedToHistoricalOutsideBasisDifferences" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_Years3And4Member" name="Years3And4Member" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_IncrementalTrancheBLoansMember" name="IncrementalTrancheBLoansMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_CurrentAssetsFairValueDisclosure" name="CurrentAssetsFairValueDisclosure" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_IncomeTaxReconciliationIntercompanyRoyalty" name="IncomeTaxReconciliationIntercompanyRoyalty" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_AMIC" name="AMIC" type="dtr-types:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_ChangesInValueOfFinancialInstrumentsDesignatedAsCashFlowHedgesMember" name="ChangesInValueOfFinancialInstrumentsDesignatedAsCashFlowHedgesMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_CappedCallTransactionReductionOrOffsetPerShare" name="CappedCallTransactionReductionOrOffsetPerShare" type="dtr-types:perShareItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_RestructuringCostAndOtherCostLineItems" name="RestructuringCostAndOtherCostLineItems" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_SpecialtyIndustrialMember" name="SpecialtyIndustrialMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_TermLoanFacilityNetMember" name="TermLoanFacilityNetMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_NumberOfTradingDays" name="NumberOfTradingDays" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_MinimumPeriodOfCompanysResearchAndDevelopmentProjects" name="MinimumPeriodOfCompanysResearchAndDevelopmentProjects" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_NonCurrentLeaseLiability" name="NonCurrentLeaseLiability" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_AdjustedEBITDAMember" name="AdjustedEBITDAMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_IncomeTaxReconciliationForeignTaxCreditRelatedToWithholdingTaxes" name="IncomeTaxReconciliationForeignTaxCreditRelatedToWithholdingTaxes" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false" xbrli:balance="credit"/>
  <xsd:element id="mksi_DerivativeInstrumentsGainLossNotDesignatedAsHedgingInstrumentsLineItems" name="DerivativeInstrumentsGainLossNotDesignatedAsHedgingInstrumentsLineItems" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_PatentsTrademarksTradeNamesAndOtherMember" name="PatentsTrademarksTradeNamesAndOtherMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_AllocatedShareBasedCompensationEffectOnEarningPerShareBasic" name="AllocatedShareBasedCompensationEffectOnEarningPerShareBasic" type="dtr-types:perShareItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_PercentageOfPayrollDeductionToCompensation" name="PercentageOfPayrollDeductionToCompensation" type="xbrli:stringItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
  <xsd:element id="mksi_ElectronicsAndPackagingMember" name="ElectronicsAndPackagingMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_StockIncentivePlanTwoThousandFourteenMember" name="StockIncentivePlanTwoThousandFourteenMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_CappedCallTransactionsMember" name="CappedCallTransactionsMember" type="dtr-types:domainItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="true"/>
  <xsd:element id="mksi_ForeignInterestCarryforwards" name="ForeignInterestCarryforwards" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_DeferredTaxAssetsLeaseLiability" name="DeferredTaxAssetsLeaseLiability" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" nillable="true" abstract="false" xbrli:balance="debit"/>
  <xsd:element id="mksi_GovernmentIncentivesPolicyTextBlock" name="GovernmentIncentivesPolicyTextBlock" type="dtr-types:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" nillable="true" abstract="false"/>
</xsd:schema>
